{"id":"https://openalex.org/W7225396296","doi":"https://doi.org/10.26434/chemrxiv.15011760/v1","title":"A reactor concept for more sustainable chemical vapor deposition of hard coatings","display_name":"A reactor concept for more sustainable chemical vapor deposition of hard coatings","publication_year":2026,"publication_date":"2026-11-05","ids":{"openalex":"https://openalex.org/W7225396296","doi":"https://doi.org/10.26434/chemrxiv.15011760/v1"},"language":"en","primary_location":{"id":"doi:10.26434/chemrxiv.15011760/v1","doi":"https://doi.org/10.26434/chemrxiv.15011760/v1","is_oa":true,"landing_page_url":"https://doi.org/10.26434/chemrxiv.15011760/v1","pdf_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15011760/v1","source":{"id":"https://openalex.org/S4393918830","display_name":"ChemRxiv","issn_l":"2573-2293","issn":["2573-2293"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"},"volume":null,"type":"preprint","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15011760/v1","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037435079","display_name":"Henrik Pedersen","orcid":"https://orcid.org/0000-0002-7171-5383","observed_orcids":["https://orcid.org/0000-0002-7171-5383"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Henrik Pedersen","raw_affiliation_strings":["Department of Physics, Chemistry, and Biology","Link\u00f6ping University"],"raw_orcid":"https://orcid.org/0000-0002-7171-5383","affiliations":[{"raw_affiliation_string":"Department of Physics, Chemistry, and Biology","institution_ids":[]},{"raw_affiliation_string":"Link\u00f6ping University","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050033821","display_name":"Annelie Carlson","orcid":"https://orcid.org/0000-0002-8957-8727","observed_orcids":["https://orcid.org/0000-0002-8957-8727"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Annelie Carlson","raw_affiliation_strings":["Department of Management and Engineering","Link\u00f6ping Univeristy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Management and Engineering","institution_ids":[]},{"raw_affiliation_string":"Link\u00f6ping Univeristy","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5161044773","display_name":"Francis Chlavet","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Francis Chlavet","raw_affiliation_strings":["Lerkrogsv\u00e4gen 19, H\u00e4gersten, Sweden, SE-126 79"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Lerkrogsv\u00e4gen 19, H\u00e4gersten, Sweden, SE-126 79","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000509239","display_name":"Linus von Fieandt","orcid":"https://orcid.org/0000-0002-2361-959X","observed_orcids":["https://orcid.org/0000-0002-2361-959X"]},"institutions":[{"id":"https://openalex.org/I123387679","display_name":"Uppsala University","ror":"https://ror.org/048a87296","country_code":"SE","type":"education","lineage":["https://openalex.org/I123387679"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Linus von Fieandt","raw_affiliation_strings":["Department of Chemistry \u2013 \u00c5ngstr\u00f6m, Inorganic Chemistry","Lerkrogsv\u00e4gen 19, H\u00e4gersten, Sweden, SE-126 79","Uppsala University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Chemistry \u2013 \u00c5ngstr\u00f6m, Inorganic Chemistry","institution_ids":[]},{"raw_affiliation_string":"Lerkrogsv\u00e4gen 19, H\u00e4gersten, Sweden, SE-126 79","institution_ids":[]},{"raw_affiliation_string":"Uppsala University","institution_ids":["https://openalex.org/I123387679"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004045730","display_name":"T. Larsson","orcid":"https://orcid.org/0000-0003-3367-0441","observed_orcids":["https://orcid.org/0000-0003-3367-0441"]},"institutions":[{"id":"https://openalex.org/I4405270919","display_name":"Seco Tools (Sweden)","ror":"https://ror.org/01ht95816","country_code":"SE","type":"company","lineage":["https://openalex.org/I4405270919"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Tommy Larsson","raw_affiliation_strings":["Seco Tools AB"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seco Tools AB","institution_ids":["https://openalex.org/I4405270919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070014818","display_name":"Oscar Alm","orcid":"https://orcid.org/0009-0004-1070-536X","observed_orcids":["https://orcid.org/0009-0004-1070-536X"]},"institutions":[{"id":"https://openalex.org/I4405270919","display_name":"Seco Tools (Sweden)","ror":"https://ror.org/01ht95816","country_code":"SE","type":"company","lineage":["https://openalex.org/I4405270919"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Oscar Alm","raw_affiliation_strings":["Seco Tools AB"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seco Tools AB","institution_ids":["https://openalex.org/I4405270919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082603877","display_name":"Jonas Lauridsen","orcid":"https://orcid.org/0009-0002-3103-8426","observed_orcids":["https://orcid.org/0009-0002-3103-8426"]},"institutions":[{"id":"https://openalex.org/I4405270919","display_name":"Seco Tools (Sweden)","ror":"https://ror.org/01ht95816","country_code":"SE","type":"company","lineage":["https://openalex.org/I4405270919"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Jonas Lauridsen","raw_affiliation_strings":["Seco Tools AB"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Seco Tools AB","institution_ids":["https://openalex.org/I4405270919"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5136240013","display_name":"Roger Nilsson","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Roger Nilsson","raw_affiliation_strings":["Veeco SiC CVD Systems AB, Ideongatan 3A, Lund, Sweden, SE-223 70"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Veeco SiC CVD Systems AB, Ideongatan 3A, Lund, Sweden, SE-223 70","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5059794998","display_name":"Matts O. Karlsson","orcid":"https://orcid.org/0000-0001-5526-2399","observed_orcids":["https://orcid.org/0000-0001-5526-2399"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"Matts Karlsson","raw_affiliation_strings":["Department of Management and Engineering","Link\u00f6ping Univeristy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Management and Engineering","institution_ids":[]},{"raw_affiliation_string":"Link\u00f6ping Univeristy","institution_ids":["https://openalex.org/I102134673"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5076608514","display_name":"\u00d6rjan Danielsson","orcid":"https://orcid.org/0000-0001-8116-9980","observed_orcids":["https://orcid.org/0000-0001-8116-9980"]},"institutions":[{"id":"https://openalex.org/I102134673","display_name":"Link\u00f6ping University","ror":"https://ror.org/05ynxx418","country_code":"SE","type":"education","lineage":["https://openalex.org/I102134673"]}],"countries":["SE"],"is_corresponding":false,"raw_author_name":"\u00d6rjan Danielsson","raw_affiliation_strings":["Department of Physics, Chemistry, and Biology","Link\u00f6ping University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, Chemistry, and Biology","institution_ids":[]},{"raw_affiliation_string":"Link\u00f6ping University","institution_ids":["https://openalex.org/I102134673"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.2094999998807907,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.2094999998807907,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13470","display_name":"Surface Treatment and Coatings","score":0.11479999870061874,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13180","display_name":"Chemistry and Chemical Engineering","score":0.10719999670982361,"subfield":{"id":"https://openalex.org/subfields/2304","display_name":"Environmental Chemistry"},"field":{"id":"https://openalex.org/fields/23","display_name":"Environmental Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chemical-vapor-deposition-reactor","display_name":"chemical vapor deposition reactor","score":0.8180000185966492},{"id":"https://openalex.org/keywords/hard-coatings","display_name":"hard coatings","score":0.9330000281333923},{"id":"https://openalex.org/keywords/cutting-tools","display_name":"cutting tools","score":0.7350000143051147},{"id":"https://openalex.org/keywords/titanium-nitride","display_name":"titanium nitride","score":0.6660000085830688},{"id":"https://openalex.org/keywords/spatial-atomic-layer-deposition","display_name":"spatial atomic layer deposition","score":0.7900000214576721},{"id":"https://openalex.org/keywords/ticl4","display_name":"titanium tetrachloride","score":0.7670000195503235},{"id":"https://openalex.org/keywords/ammonia","display_name":"ammonia","score":0.7549999952316284},{"id":"https://openalex.org/keywords/gas-flow-optimization","display_name":"gas flow optimization","score":0.7020000219345093},{"id":"https://openalex.org/keywords/life-cycle-assessment","display_name":"life cycle assessment","score":0.7390000224113464},{"id":"https://openalex.org/keywords/global-warming-potential","display_name":"global warming potential","score":0.949999988079071},{"id":"https://openalex.org/keywords/fossil-resource-scarcity","display_name":"fossil resource scarcity","score":0.9700000286102295},{"id":"https://openalex.org/keywords/energy-consumption","display_name":"energy consumption","score":0.6570000052452087},{"id":"https://openalex.org/keywords/sustainable-manufacturing","display_name":"sustainable manufacturing","score":0.3610000014305115}],"concepts":[{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.5967000126838684},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.5605000257492065},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.5509999990463257},{"id":"https://openalex.org/C68189081","wikidata":"https://www.wikidata.org/wiki/Q12748","display_name":"Fossil fuel","level":2,"score":0.5192999839782715},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5145999789237976},{"id":"https://openalex.org/C21880701","wikidata":"https://www.wikidata.org/wiki/Q2144042","display_name":"Process engineering","level":1,"score":0.45739999413490295},{"id":"https://openalex.org/C2778706760","wikidata":"https://www.wikidata.org/wiki/Q581950","display_name":"Life-cycle assessment","level":3,"score":0.444599986076355},{"id":"https://openalex.org/C101468663","wikidata":"https://www.wikidata.org/wiki/Q1620158","display_name":"Modular design","level":2,"score":0.4004000127315521},{"id":"https://openalex.org/C66204764","wikidata":"https://www.wikidata.org/wiki/Q219416","display_name":"Sustainability","level":2,"score":0.39879998564720154},{"id":"https://openalex.org/C206345919","wikidata":"https://www.wikidata.org/wiki/Q20380951","display_name":"Resource (disambiguation)","level":2,"score":0.36570000648498535},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.35899999737739563},{"id":"https://openalex.org/C115343472","wikidata":"https://www.wikidata.org/wiki/Q7942","display_name":"Global warming","level":3,"score":0.3571000099182129},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.35249999165534973},{"id":"https://openalex.org/C2989175659","wikidata":"https://www.wikidata.org/wiki/Q80877","display_name":"Reactor design","level":2,"score":0.3321000039577484},{"id":"https://openalex.org/C548081761","wikidata":"https://www.wikidata.org/wiki/Q180388","display_name":"Waste management","level":1,"score":0.326200008392334},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.32089999318122864},{"id":"https://openalex.org/C2742236","wikidata":"https://www.wikidata.org/wiki/Q924713","display_name":"Efficient energy use","level":2,"score":0.3188000023365021},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.3125999867916107},{"id":"https://openalex.org/C108213311","wikidata":"https://www.wikidata.org/wiki/Q557573","display_name":"Chemical reactor","level":2,"score":0.3124000132083893},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.28040000796318054},{"id":"https://openalex.org/C147534773","wikidata":"https://www.wikidata.org/wiki/Q190120","display_name":"Water vapor","level":2,"score":0.2750999927520752},{"id":"https://openalex.org/C47737302","wikidata":"https://www.wikidata.org/wiki/Q167336","display_name":"Greenhouse gas","level":2,"score":0.27160000801086426},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.26930001378059387},{"id":"https://openalex.org/C107861326","wikidata":"https://www.wikidata.org/wiki/Q209233","display_name":"Thermal energy","level":2,"score":0.26409998536109924},{"id":"https://openalex.org/C2780165032","wikidata":"https://www.wikidata.org/wiki/Q16869822","display_name":"Energy consumption","level":2,"score":0.2587999999523163},{"id":"https://openalex.org/C2982926626","wikidata":"https://www.wikidata.org/wiki/Q1962383","display_name":"Sustainable energy","level":3,"score":0.25369998812675476},{"id":"https://openalex.org/C59427239","wikidata":"https://www.wikidata.org/wiki/Q40858","display_name":"Natural gas","level":2,"score":0.25049999356269836}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.26434/chemrxiv.15011760/v1","doi":"https://doi.org/10.26434/chemrxiv.15011760/v1","is_oa":true,"landing_page_url":"https://doi.org/10.26434/chemrxiv.15011760/v1","pdf_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15011760/v1","source":{"id":"https://openalex.org/S4393918830","display_name":"ChemRxiv","issn_l":"2573-2293","issn":["2573-2293"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"}],"best_oa_location":{"id":"doi:10.26434/chemrxiv.15011760/v1","doi":"https://doi.org/10.26434/chemrxiv.15011760/v1","is_oa":true,"landing_page_url":"https://doi.org/10.26434/chemrxiv.15011760/v1","pdf_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15011760/v1","source":{"id":"https://openalex.org/S4393918830","display_name":"ChemRxiv","issn_l":"2573-2293","issn":["2573-2293"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/12","score":1.0,"display_name":"Responsible consumption and production"},{"id":"https://metadata.un.org/sdg/13","score":0.5351999998092651,"display_name":"Climate action"},{"id":"https://metadata.un.org/sdg/7","score":0.5325000286102295,"display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7225396296.pdf","grobid_xml":"https://content.openalex.org/works/W7225396296.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W7161282571","https://openalex.org/W7114919050","https://openalex.org/W3186935103","https://openalex.org/W2054810514","https://openalex.org/W6960157635","https://openalex.org/W2258495597","https://openalex.org/W2005118080","https://openalex.org/W3100981476","https://openalex.org/W4409404126","https://openalex.org/W6980518511"],"abstract_inverted_index":{"Chemical":[0],"vapor":[1],"deposition":[2],"(CVD)":[3],"is":[4,18,64],"a":[5,30,67,81,128,182],"key":[6],"technology":[7],"for":[8,34,59,134,185],"producing":[9],"hard":[10,35],"coatings":[11],"on":[12,66],"cutting":[13,136],"tools,":[14],"but":[15],"its":[16],"sustainability":[17],"challenged":[19],"by":[20,39,84],"high":[21],"energy":[22],"consumption":[23],"and":[24,56,90,115,149,164,177,188],"low":[25],"precursor":[26,60,156],"utilization.":[27],"We":[28],"present":[29],"novel":[31],"reactor":[32,51,71,133],"concept":[33,63],"coating":[36],"CVD":[37,132],"inspired":[38],"spatial":[40],"atomic":[41],"layer":[42],"deposition,":[43],"aiming":[44],"to":[45,110,122,174],"reduce":[46],"environmental":[47,169],"impacts":[48,170],"through":[49],"minimized":[50],"volume,":[52],"reduced":[53,173],"thermal":[54],"mass,":[55],"the":[57,74,96,99,124,168],"possibility":[58],"recirculation.":[61],"The":[62,138],"based":[65],"small":[68],"modular":[69],"inline":[70],"in":[72,98,145,151],"where":[73],"substrates":[75],"are":[76],"coated":[77],"with":[78,88,127],"TiN,":[79],"as":[80],"model":[82],"system,":[83],"rotating":[85],"between":[86],"areas":[87],"TiCl4":[89,163],"NH3":[91],"exposure,":[92],"allowing":[93],"separation":[94],"of":[95,142,160,162,166,179,181],"precursors":[97],"different":[100],"gas":[101,112],"outlets.":[102],"Computational":[103],"fluid":[104],"dynamics":[105],"(CFD)":[106],"simulations":[107],"were":[108,171],"used":[109,121],"optimize":[111],"flow":[113],"management":[114],"life":[116],"cycle":[117],"assessment":[118],"(LCA)":[119],"was":[120],"compare":[123],"proposed":[125],"design":[126],"conventional":[129,183],"industrial":[130],"batch":[131],"TiN-coated":[135],"inserts.":[137],"analysis":[139],"indicates":[140],"reductions":[141],"approximately":[143,175],"40%":[144],"global":[146,186],"warming":[147,187],"potential":[148],"50%":[150,161],"fossil":[152,189],"resource":[153,190],"scarcity":[154],"without":[155],"recycling.":[157],"Assuming":[158],"recovery":[159],"80%":[165],"NH3,":[167],"further":[172],"36%":[176],"23%":[178],"those":[180],"process":[184],"scarcity,":[191],"respectively.":[192]},"counts_by_year":[],"updated_date":"2026-11-09T13:22:03.289127","created_date":"2026-11-07T00:00:00"}