{"id":"https://openalex.org/W7221662901","doi":"https://doi.org/10.1364/oe.613193","title":"Size-dependent effects of TMAH sidewall treatment for enhanced modulation bandwidth of GaN-based micro-LEDs","display_name":"Size-dependent effects of TMAH sidewall treatment for enhanced modulation bandwidth of GaN-based micro-LEDs","publication_year":2026,"publication_date":"2026-10-13","ids":{"openalex":"https://openalex.org/W7221662901","doi":"https://doi.org/10.1364/oe.613193","pmid":"https://pubmed.ncbi.nlm.nih.gov/42972725"},"language":"en","primary_location":{"id":"doi:10.1364/oe.613193","doi":"https://doi.org/10.1364/oe.613193","is_oa":true,"landing_page_url":"https://doi.org/10.1364/oe.613193","pdf_url":null,"source":{"id":"https://openalex.org/S178776955","display_name":"Optics Express","issn_l":"1094-4087","issn":["1094-4087"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-1","ki-jl-1","medline","norway-2","oarl","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics Express","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1364/oe.613193","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5133192140","display_name":"Sijia Wei","orcid":"https://orcid.org/0009-0002-2708-813X","observed_orcids":["https://orcid.org/0009-0002-2708-813X"]},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sijia Wei","raw_affiliation_strings":["Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, Jiangsu 215123, China","School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui 230026, China"],"raw_orcid":"https://orcid.org/0009-0002-2708-813X","affiliations":[{"raw_affiliation_string":"Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, Jiangsu 215123, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]},{"raw_affiliation_string":"School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui 230026, China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5158565829","display_name":"Ying Gu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ying Gu","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5158650831","display_name":"Haowen Hua","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Haowen Hua","raw_affiliation_strings":["Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, Jiangsu 215123, China","School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui 230026, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, Jiangsu 215123, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]},{"raw_affiliation_string":"School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui 230026, China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5158578568","display_name":"Peng Zhang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Peng Zhang","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5158567393","display_name":"Mengyang Huang","orcid":"https://orcid.org/0009-0008-2166-4769","observed_orcids":["https://orcid.org/0009-0008-2166-4769"]},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mengyang Huang","raw_affiliation_strings":["Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, Jiangsu 215123, China","School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui 230026, China"],"raw_orcid":"https://orcid.org/0009-0008-2166-4769","affiliations":[{"raw_affiliation_string":"Key Lab of Nanodevices and Applications, Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS), Suzhou, Jiangsu 215123, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]},{"raw_affiliation_string":"School of Nano-Tech and Nano-Bionics, University of Science and Technology of China, Hefei, Anhui 230026, China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5158580758","display_name":"Yi Gong","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Gong","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5134064798","display_name":"Dengshan Cai","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dengshan Cai","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100614250","display_name":"Xueyan Feng","orcid":"https://orcid.org/0000-0001-8710-1012","observed_orcids":["https://orcid.org/0000-0001-8710-1012"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xueyan Feng","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114376597","display_name":"Shan Jin","orcid":"https://orcid.org/0000-0002-5076-7803","observed_orcids":["https://orcid.org/0000-0002-5076-7803"]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shan Jin","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5158563129","display_name":"Wenxian Yang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wenxian Yang","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5158655594","display_name":"Shulong Lu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210092495","display_name":"Suzhou Institute of Nano-tech and Nano-bionics","ror":"https://ror.org/0027d9x02","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shulong Lu","raw_affiliation_strings":["Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences (CAS)","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210092495"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2270,"currency":"USD","value_usd":2270},"apc_paid":{"value":2270,"currency":"USD","value_usd":2270},"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.61914156,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"34","issue":"22","first_page":"41283","last_page":"41283"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gan-micro-leds","display_name":"GaN micro-LEDs","score":0.9449999928474426},{"id":"https://openalex.org/keywords/modulation-bandwidth","display_name":"modulation bandwidth","score":0.7680000066757202},{"id":"https://openalex.org/keywords/size-effect","display_name":"size effect","score":0.6620000004768372},{"id":"https://openalex.org/keywords/sidewall-morphology","display_name":"sidewall morphology","score":0.8849999904632568},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"parasitic capacitance","score":0.9399999976158142},{"id":"https://openalex.org/keywords/rc-time-constant","display_name":"RC time constant","score":0.6489999890327454},{"id":"https://openalex.org/keywords/luminous-efficiency","display_name":"luminous efficiency","score":0.7919999957084656},{"id":"https://openalex.org/keywords/dry-etching-damage","display_name":"dry etching damage","score":0.6179999709129333}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7343000173568726},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5321999788284302},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5024999976158142},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.47360000014305115},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.47040000557899475},{"id":"https://openalex.org/C96834759","wikidata":"https://www.wikidata.org/wiki/Q750463","display_name":"Phase modulation","level":3,"score":0.4510999917984009},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.3905999958515167},{"id":"https://openalex.org/C42067758","wikidata":"https://www.wikidata.org/wiki/Q174102","display_name":"Refractive index","level":2,"score":0.3199999928474426},{"id":"https://openalex.org/C108597893","wikidata":"https://www.wikidata.org/wiki/Q663650","display_name":"Reflectivity","level":2,"score":0.31139999628067017},{"id":"https://openalex.org/C2984025587","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser beams","level":3,"score":0.3075999915599823},{"id":"https://openalex.org/C201905106","wikidata":"https://www.wikidata.org/wiki/Q183755","display_name":"Amplitude modulation","level":4,"score":0.29919999837875366},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.295199990272522},{"id":"https://openalex.org/C2779202686","wikidata":"https://www.wikidata.org/wiki/Q183467","display_name":"Self-phase modulation","level":4,"score":0.2948000133037567},{"id":"https://openalex.org/C145995521","wikidata":"https://www.wikidata.org/wiki/Q639897","display_name":"Pulse compression","level":3,"score":0.2793999910354614},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.2782000005245209},{"id":"https://openalex.org/C169573571","wikidata":"https://www.wikidata.org/wiki/Q466824","display_name":"Raman scattering","level":3,"score":0.27390000224113464},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.27059999108314514},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.26489999890327454},{"id":"https://openalex.org/C104267543","wikidata":"https://www.wikidata.org/wiki/Q208163","display_name":"Signal processing","level":3,"score":0.26159998774528503},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.260699987411499},{"id":"https://openalex.org/C129404179","wikidata":"https://www.wikidata.org/wiki/Q1469765","display_name":"Optical communication","level":2,"score":0.2547999918460846},{"id":"https://openalex.org/C2984692560","wikidata":"https://www.wikidata.org/wiki/Q523846","display_name":"Integrated optics","level":2,"score":0.2524000108242035},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.25110000371932983}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1364/oe.613193","doi":"https://doi.org/10.1364/oe.613193","is_oa":true,"landing_page_url":"https://doi.org/10.1364/oe.613193","pdf_url":null,"source":{"id":"https://openalex.org/S178776955","display_name":"Optics Express","issn_l":"1094-4087","issn":["1094-4087"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-1","ki-jl-1","medline","norway-2","oarl","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics Express","raw_type":"journal-article"},{"id":"pmid:42972725","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/42972725","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics express","raw_type":"Journal Article"}],"best_oa_location":{"id":"doi:10.1364/oe.613193","doi":"https://doi.org/10.1364/oe.613193","is_oa":true,"landing_page_url":"https://doi.org/10.1364/oe.613193","pdf_url":null,"source":{"id":"https://openalex.org/S178776955","display_name":"Optics Express","issn_l":"1094-4087","issn":["1094-4087"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-1","ki-jl-1","medline","norway-2","oarl","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310315679","host_organization_name":"Optica Publishing Group","host_organization_lineage":["https://openalex.org/P4310315679"],"host_organization_lineage_names":["Optica Publishing Group"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Optics Express","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321543","display_name":"China Postdoctoral Science Foundation","ror":"https://ror.org/0426zh255"},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W2891454949","https://openalex.org/W3094365221","https://openalex.org/W3126978947","https://openalex.org/W4224237726","https://openalex.org/W4225687334","https://openalex.org/W4226133199","https://openalex.org/W4283268804","https://openalex.org/W4311745903","https://openalex.org/W4313290996","https://openalex.org/W4367678684","https://openalex.org/W4386200850","https://openalex.org/W4391566018","https://openalex.org/W4401456144","https://openalex.org/W4401669239","https://openalex.org/W4404078097","https://openalex.org/W4404238610","https://openalex.org/W4406817248","https://openalex.org/W4410106088","https://openalex.org/W4412873487","https://openalex.org/W4413254265","https://openalex.org/W4413759088","https://openalex.org/W4416795328","https://openalex.org/W7151778190"],"related_works":["https://openalex.org/W4391464548","https://openalex.org/W4413759088","https://openalex.org/W7161110809","https://openalex.org/W7212260232","https://openalex.org/W4401456144","https://openalex.org/W4403312693","https://openalex.org/W2750700580","https://openalex.org/W4401669239","https://openalex.org/W3206006401","https://openalex.org/W4399477740"],"abstract_inverted_index":{"This":[0],"work":[1],"investigates":[2],"the":[3,13,48,71,84,89,105,111,120,132,151,157],"size-dependent":[4,145],"effects":[5],"of":[6,21,28,66,82,95],"tetramethylammonium":[7],"hydroxide":[8],"(TMAH)":[9],"sidewall":[10,50,160],"treatment":[11,45,68,126,136,149],"on":[12,70,135],"static":[14],"optoelectronic":[15],"properties":[16],"and":[17,31,40,55,117,131,166],"high-speed":[18,175],"modulation":[19,72],"characteristics":[20],"GaN-based":[22],"micro-LEDs.":[23],"Devices":[24],"with":[25,104],"side":[26],"lengths":[27],"10,":[29],"20,":[30],"30":[32,118],"\u03bcm":[33,86],"were":[34],"treated":[35],"for":[36,174],"0,":[37],"30,":[38],"60,":[39],"120":[41],"min.":[42],"Appropriate":[43],"TMAH":[44,67,125,148],"effectively":[46],"modified":[47],"dry-etching-induced":[49],"morphology,":[51],"improved":[52],"luminous":[53],"efficiency,":[54],"reduced":[56],"sidewall-related":[57],"parasitic":[58],"capacitance,":[59],"thereby":[60,169],"alleviating":[61],"RC-related":[62],"limitations.":[63],"The":[64],"influence":[65],"duration":[69,137],"performance":[73],"exhibited":[74],"a":[75,100,144,171],"pronounced":[76],"size":[77,113],"dependence.":[78],"After":[79],"60":[80],"min":[81],"treatment,":[83],"10":[85],"devices":[87],"achieved":[88],"highest":[90],"average":[91],"-3":[92],"dB":[93],"bandwidth":[94,121],"approximately":[96],"1.57":[97],"GHz,":[98],"representing":[99],"45%":[101],"improvement":[102],"compared":[103],"untreated":[106],"devices.":[107],"In":[108],"contrast,":[109],"as":[110],"device":[112],"increased":[114],"to":[115,147],"20":[116],"\u03bcm,":[119],"differences":[122],"among":[123,159],"different":[124],"durations":[127],"became":[128],"progressively":[129],"smaller,":[130],"overall":[133],"dependence":[134],"was":[138],"less":[139],"pronounced.":[140],"These":[141],"results":[142],"demonstrate":[143],"response":[146],"under":[150],"investigated":[152],"process":[153],"conditions,":[154],"arising":[155],"from":[156],"interplay":[158],"modification,":[161],"mesa-geometry":[162],"preservation,":[163],"carrier":[164],"dynamics,":[165],"electrical":[167],"parasitics,":[168],"providing":[170],"practical":[172],"strategy":[173],"visible":[176],"light":[177],"communication.":[178]},"counts_by_year":[],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2026-10-14T00:00:00"}