{"id":"https://openalex.org/W7220981013","doi":"https://doi.org/10.48550/arxiv.2610.07813","title":"Microfabrication of Paul wheel trap chip in fused silica by selective laser etching","display_name":"Microfabrication of Paul wheel trap chip in fused silica by selective laser etching","publication_year":2026,"publication_date":"2026-10-06","ids":{"openalex":"https://openalex.org/W7220981013","doi":"https://doi.org/10.48550/arxiv.2610.07813"},"language":"en","primary_location":{"id":"pmh:oai:arXiv.org:2610.07813","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2610.07813","pdf_url":"https://arxiv.org/pdf/2610.07813","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"volume":null,"type":"preprint","is_traditional":true,"indexed_in":["arxiv","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/2610.07813","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5116296479","display_name":"Jakub Vejrosta","orcid":"https://orcid.org/0009-0002-7595-2922","observed_orcids":["https://orcid.org/0009-0002-7595-2922"]},"institutions":[{"id":"https://openalex.org/I4210124512","display_name":"Czech Academy of Sciences, Institute of Scientific Instruments","ror":"https://ror.org/027taah18","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210124512"]},{"id":"https://openalex.org/I60587646","display_name":"Brno University of Technology","ror":"https://ror.org/03613d656","country_code":"CZ","type":"education","lineage":["https://openalex.org/I60587646"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"Vejrosta, Jakub","raw_affiliation_strings":["Institute of Physical Engineering , Faculty of Mechanical Engineering , Brno University of Technology , Technick\u00e1 2896/2 , Brno , 616 69 , Czech Republic","Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Physical Engineering , Faculty of Mechanical Engineering , Brno University of Technology , Technick\u00e1 2896/2 , Brno , 616 69 , Czech Republic","institution_ids":["https://openalex.org/I60587646"]},{"raw_affiliation_string":"Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic","institution_ids":["https://openalex.org/I4210124512"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5116326036","display_name":"Luk\u00e1\u0161 \u0160ilhan","orcid":"https://orcid.org/0009-0004-1821-9972","observed_orcids":["https://orcid.org/0009-0004-1821-9972"]},"institutions":[{"id":"https://openalex.org/I4210124512","display_name":"Czech Academy of Sciences, Institute of Scientific Instruments","ror":"https://ror.org/027taah18","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210124512"]},{"id":"https://openalex.org/I60587646","display_name":"Brno University of Technology","ror":"https://ror.org/03613d656","country_code":"CZ","type":"education","lineage":["https://openalex.org/I60587646"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"\u0160ilhan, Luk\u00e1\u0161","raw_affiliation_strings":["Institute of Physical Engineering , Faculty of Mechanical Engineering , Brno University of Technology , Technick\u00e1 2896/2 , Brno , 616 69 , Czech Republic","Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Physical Engineering , Faculty of Mechanical Engineering , Brno University of Technology , Technick\u00e1 2896/2 , Brno , 616 69 , Czech Republic","institution_ids":["https://openalex.org/I60587646"]},{"raw_affiliation_string":"Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic","institution_ids":["https://openalex.org/I4210124512"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008728839","display_name":"Mojm\u0131\u0301r \u0160er\u00fd","orcid":"https://orcid.org/0000-0001-5059-3631","observed_orcids":["https://orcid.org/0000-0001-5059-3631"]},"institutions":[{"id":"https://openalex.org/I4210124512","display_name":"Czech Academy of Sciences, Institute of Scientific Instruments","ror":"https://ror.org/027taah18","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210124512"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"\u0160er\u00fd, Mojm\u00edr","raw_affiliation_strings":["Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic","institution_ids":["https://openalex.org/I4210124512"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005316593","display_name":"Tom\u00e1\u0161 Fo\u0159t","orcid":"https://orcid.org/0000-0002-4186-0918","observed_orcids":["https://orcid.org/0000-0002-4186-0918"]},"institutions":[{"id":"https://openalex.org/I4210124512","display_name":"Czech Academy of Sciences, Institute of Scientific Instruments","ror":"https://ror.org/027taah18","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210124512"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"Fo\u0159t, Tom\u00e1\u0161","raw_affiliation_strings":["Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic","institution_ids":["https://openalex.org/I4210124512"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050275544","display_name":"Oto Brzobohat\u00fd","orcid":"https://orcid.org/0000-0003-4779-0364","observed_orcids":["https://orcid.org/0000-0003-4779-0364"]},"institutions":[{"id":"https://openalex.org/I4210124512","display_name":"Czech Academy of Sciences, Institute of Scientific Instruments","ror":"https://ror.org/027taah18","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210124512"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"Brzobohat\u00fd, Oto","raw_affiliation_strings":["Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic","institution_ids":["https://openalex.org/I4210124512"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061192722","display_name":"Pavel Zem\u00e1nek","orcid":"https://orcid.org/0000-0003-2831-8347","observed_orcids":["https://orcid.org/0000-0003-2831-8347"]},"institutions":[{"id":"https://openalex.org/I4210124512","display_name":"Czech Academy of Sciences, Institute of Scientific Instruments","ror":"https://ror.org/027taah18","country_code":"CZ","type":"facility","lineage":["https://openalex.org/I202391551","https://openalex.org/I4210124512"]}],"countries":["CZ"],"is_corresponding":false,"raw_author_name":"Zem\u00e1nek, Pavel","raw_affiliation_strings":["Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Scientific Instruments of the Czech Academy of Sciences , Kr\u00e1lovopolsk\u00e1 147 , Brno , 612 00 , Czech Republic","institution_ids":["https://openalex.org/I4210124512"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.7275000214576721,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.7275000214576721,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.09960000216960907,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10490","display_name":"Orbital Angular Momentum in Optics","score":0.044199999421834946,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fused-silica","display_name":"fused silica","score":0.6890000104904175},{"id":"https://openalex.org/keywords/selective-laser-etching","display_name":"selective laser etching","score":0.9990000128746033},{"id":"https://openalex.org/keywords/mask-free-fabrication","display_name":"mask-free fabrication","score":0.8379999995231628},{"id":"https://openalex.org/keywords/femtosecond-laser-writing","display_name":"femtosecond laser direct writing","score":0.9309999942779541},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.8740000128746033},{"id":"https://openalex.org/keywords/silver-electrodes","display_name":"silver electrodes","score":0.7329999804496765},{"id":"https://openalex.org/keywords/microparticle-trapping","display_name":"microparticle trapping","score":0.8090000152587891},{"id":"https://openalex.org/keywords/levitated-optomechanics","display_name":"levitated optomechanics","score":0.9129999876022339},{"id":"https://openalex.org/keywords/microfabrication","display_name":"microfabrication","score":0.5360000133514404}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7825000286102295},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.7060999870300293},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6966999769210815},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6782000064849854},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6380000114440918},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6373000144958496},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5760999917984009},{"id":"https://openalex.org/C167735695","wikidata":"https://www.wikidata.org/wiki/Q1777507","display_name":"Femtosecond","level":3,"score":0.5697000026702881},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.47540000081062317},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.4697999954223633},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.42309999465942383},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.41940000653266907},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.4099000096321106},{"id":"https://openalex.org/C2776326872","wikidata":"https://www.wikidata.org/wiki/Q1192335","display_name":"Shadow mask","level":2,"score":0.4097999930381775},{"id":"https://openalex.org/C1291036","wikidata":"https://www.wikidata.org/wiki/Q1191918","display_name":"Dry etching","level":4,"score":0.39800000190734863},{"id":"https://openalex.org/C2777521759","wikidata":"https://www.wikidata.org/wiki/Q61186","display_name":"Microparticle","level":2,"score":0.3734000027179718},{"id":"https://openalex.org/C2779426163","wikidata":"https://www.wikidata.org/wiki/Q17123760","display_name":"Microheater","level":4,"score":0.3386000096797943},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3359000086784363},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3337000012397766},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.33329999446868896},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.32519999146461487},{"id":"https://openalex.org/C121099081","wikidata":"https://www.wikidata.org/wiki/Q665580","display_name":"Trap (plumbing)","level":2,"score":0.30570000410079956},{"id":"https://openalex.org/C2778386843","wikidata":"https://www.wikidata.org/wiki/Q6493035","display_name":"Laser beam machining","level":4,"score":0.2890999913215637},{"id":"https://openalex.org/C2777924906","wikidata":"https://www.wikidata.org/wiki/Q34168","display_name":"Trapping","level":2,"score":0.27090001106262207},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.25769999623298645}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:arXiv.org:2610.07813","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2610.07813","pdf_url":"https://arxiv.org/pdf/2610.07813","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"doi:10.48550/arxiv.2610.07813","doi":"https://doi.org/10.48550/arxiv.2610.07813","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2610.07813","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:2610.07813","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2610.07813","pdf_url":"https://arxiv.org/pdf/2610.07813","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G3011267836","display_name":null,"funder_award_id":"CZ.02.01","funder_id":"https://openalex.org/F4320322482","funder_display_name":"Akademie V\u011bd \u010cesk\u00e9 Republiky"},{"id":"https://openalex.org/G7384073382","display_name":null,"funder_award_id":"68081731","funder_id":"https://openalex.org/F4320322482","funder_display_name":"Akademie V\u011bd \u010cesk\u00e9 Republiky"}],"funders":[{"id":"https://openalex.org/F4320322482","display_name":"Akademie V\u011bd \u010cesk\u00e9 Republiky","ror":"https://ror.org/053avzc18"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7220981013.pdf","grobid_xml":"https://content.openalex.org/works/W7220981013.grobid-xml"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W1999312098","https://openalex.org/W2003363231","https://openalex.org/W2035974690","https://openalex.org/W2037347712","https://openalex.org/W2062563238","https://openalex.org/W2080038481","https://openalex.org/W2329851668","https://openalex.org/W2346023401","https://openalex.org/W2738314270","https://openalex.org/W2899002402","https://openalex.org/W2908279806","https://openalex.org/W2945884165","https://openalex.org/W2959312864","https://openalex.org/W2963272297","https://openalex.org/W3023675643","https://openalex.org/W3035248350","https://openalex.org/W3088182662","https://openalex.org/W3129559940","https://openalex.org/W3157757543","https://openalex.org/W3171647381","https://openalex.org/W3175135417","https://openalex.org/W3213383326","https://openalex.org/W4205857234","https://openalex.org/W4282576369","https://openalex.org/W4399887562","https://openalex.org/W4403608563","https://openalex.org/W4404280797","https://openalex.org/W4414867239","https://openalex.org/W7111190346","https://openalex.org/W7135169062","https://openalex.org/W7169228459","https://openalex.org/W7207849118"],"related_works":["https://openalex.org/W4327711797","https://openalex.org/W3000712149","https://openalex.org/W2002623751","https://openalex.org/W2324292365","https://openalex.org/W7034504859","https://openalex.org/W2077275130","https://openalex.org/W2170566894","https://openalex.org/W2973051205","https://openalex.org/W6884522417","https://openalex.org/W2188334512"],"abstract_inverted_index":{"We":[0],"present":[1],"a":[2,40,84,118,125,144],"rapid,":[3,145],"mask-free":[4],"fabrication":[5,90,148],"workflow":[6],"for":[7,59,131,150],"the":[8,36,89,102,110],"Paul":[9,151],"wheel":[10,112],"trap":[11,37,113],"chip":[12,114],"based":[13],"on":[14],"selective":[15],"laser":[16,27,57],"etching":[17,30],"(SLE)":[18],"of":[19,51,98,109,140],"fused":[20,141],"silica.":[21],"The":[22,107],"complete":[23],"process":[24],"-":[25,62],"femtosecond":[26,56],"writing,":[28],"wet-chemical":[29],"in":[31,44,83,123,153],"KOH":[32],"($\\sim$230":[33],"$\u03bc$m/h,":[34],"releasing":[35],"geometry":[38],"from":[39],"500":[41],"$\u03bc$m":[42],"wafer":[43,79],"approximately":[45],"2":[46],"h),":[47],"RF":[48],"magnetron":[49],"sputtering":[50],"silver":[52],"electrodes,":[53],"and":[54,70],"direct":[55],"ablation":[58],"electrode":[60],"patterning":[61],"is":[63,115],"carried":[64],"out":[65],"in-house,":[66],"bypassing":[67],"photolithographic":[68],"processing":[69],"custom":[71],"shadow":[72],"masks":[73],"entirely.":[74],"Nine":[75],"chips":[76],"per":[77],"4-inch":[78],"can":[80],"be":[81],"produced":[82],"single":[85,126],"working":[86],"day,":[87],"reducing":[88],"lead":[91],"time":[92],"by":[93,117],"more":[94],"than":[95],"one":[96],"order":[97],"magnitude":[99],"relative":[100],"to":[101],"outsourced":[103],"CVD":[104],"diamond":[105],"design.":[106],"functionality":[108],"fabricated":[111],"confirmed":[116],"proof-of-concept":[119],"microparticle":[120,127],"trapping":[121],"demonstration,":[122],"which":[124],"was":[128],"confined":[129],"continuously":[130],"72":[132],"h":[133],"at":[134],"atmospheric":[135],"pressure.":[136],"This":[137],"establishes":[138],"SLE":[139],"silica":[142],"as":[143],"economically":[146],"accessible":[147],"platform":[149],"traps":[152],"levitated-optomechanics":[154],"applications.":[155]},"counts_by_year":[],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2026-10-09T00:00:00"}