{"id":"https://openalex.org/W7219659716","doi":"https://doi.org/10.51699/cajmtcs.v4i2.376","title":"\u041e\u0421\u041e\u0411\u0415\u041d\u041d\u041e\u0421\u0422\u0418 \u0424\u041e\u0420\u041c\u0418\u0420\u041e\u0412\u0410\u041d\u0418\u042f \u041d\u0410\u041d\u041e\u041f\u041b\u0415\u041d\u041a\u0418 SiO2 \u041d\u0410 \u041f\u041e\u0412\u0415\u0420\u0425\u041d\u041e\u0421\u0422\u0418 Si \u041f\u0420\u0418 \u0418\u041e\u041d\u041d\u041e\u0419 \u0418\u041c\u041f\u041b\u0410\u041d\u0422\u0410\u0426\u0418\u0418","display_name":"\u041e\u0421\u041e\u0411\u0415\u041d\u041d\u041e\u0421\u0422\u0418 \u0424\u041e\u0420\u041c\u0418\u0420\u041e\u0412\u0410\u041d\u0418\u042f \u041d\u0410\u041d\u041e\u041f\u041b\u0415\u041d\u041a\u0418 SiO2 \u041d\u0410 \u041f\u041e\u0412\u0415\u0420\u0425\u041d\u041e\u0421\u0422\u0418 Si \u041f\u0420\u0418 \u0418\u041e\u041d\u041d\u041e\u0419 \u0418\u041c\u041f\u041b\u0410\u041d\u0422\u0410\u0426\u0418\u0418","publication_year":2023,"publication_date":"2023-02-10","ids":{"openalex":"https://openalex.org/W7219659716","doi":"https://doi.org/10.51699/cajmtcs.v4i2.376"},"language":"en","primary_location":{"id":"pmh:oai:cajmtcs.casjournal.org:article/376","doi":"https://doi.org/10.51699/cajmtcs.v4i2.376","is_oa":true,"landing_page_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/view/376","pdf_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/download/376/413","source":{"id":"https://openalex.org/S7407064474","display_name":"CENTRAL ASIAN JOURNAL OF MATHEMATICAL THEORY AND COMPUTER SCIENCES","issn_l":"2660-5309","issn":["2660-5309"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2660-5309","raw_type":"info:eu-repo/semantics/article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/download/376/413","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5157072733","display_name":"\u0411. \u0417. \u041d\u0443\u0440\u0438\u0434\u0434\u0438\u043d\u043e\u0432","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128068","display_name":"Karshi State University","ror":"https://ror.org/0350qvj56","country_code":"UZ","type":"education","lineage":["https://openalex.org/I4210128068"]}],"countries":["UZ"],"is_corresponding":false,"raw_author_name":"\u041d\u0443\u0440\u0438\u0434\u0434\u0438\u043d\u043e\u0432, \u0411. \u0417.","raw_affiliation_strings":["\u041a\u0430\u0440\u0448\u0438\u043d\u0441\u043a\u0438\u0439 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, 180003 \u041a\u0430\u0440\u0448\u0438, \u0423\u0437\u0431\u0435\u043a\u0438\u0441\u0442\u0430\u043d"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u041a\u0430\u0440\u0448\u0438\u043d\u0441\u043a\u0438\u0439 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, 180003 \u041a\u0430\u0440\u0448\u0438, \u0423\u0437\u0431\u0435\u043a\u0438\u0441\u0442\u0430\u043d","institution_ids":["https://openalex.org/I4210128068"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019649648","display_name":"K.T. Dovranov","orcid":"https://orcid.org/0000-0003-1476-6552","observed_orcids":["https://orcid.org/0000-0003-1476-6552"]},"institutions":[{"id":"https://openalex.org/I4210128068","display_name":"Karshi State University","ror":"https://ror.org/0350qvj56","country_code":"UZ","type":"education","lineage":["https://openalex.org/I4210128068"]}],"countries":["UZ"],"is_corresponding":false,"raw_author_name":"\u0414\u043e\u0432\u0440\u0430\u043d\u043e\u0432, \u041a. \u0422.","raw_affiliation_strings":["\u041a\u0430\u0440\u0448\u0438\u043d\u0441\u043a\u0438\u0439 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, 180003 \u041a\u0430\u0440\u0448\u0438, \u0423\u0437\u0431\u0435\u043a\u0438\u0441\u0442\u0430\u043d"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u041a\u0430\u0440\u0448\u0438\u043d\u0441\u043a\u0438\u0439 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, 180003 \u041a\u0430\u0440\u0448\u0438, \u0423\u0437\u0431\u0435\u043a\u0438\u0441\u0442\u0430\u043d","institution_ids":["https://openalex.org/I4210128068"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5088180068","display_name":"A. K. Tashatov","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210128068","display_name":"Karshi State University","ror":"https://ror.org/0350qvj56","country_code":"UZ","type":"education","lineage":["https://openalex.org/I4210128068"]}],"countries":["UZ"],"is_corresponding":false,"raw_author_name":"\u0422\u0430\u0448\u0430\u0442\u043e\u0432, \u0410. \u041a.","raw_affiliation_strings":["\u041a\u0430\u0440\u0448\u0438\u043d\u0441\u043a\u0438\u0439 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, 180003 \u041a\u0430\u0440\u0448\u0438, \u0423\u0437\u0431\u0435\u043a\u0438\u0441\u0442\u0430\u043d"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"\u041a\u0430\u0440\u0448\u0438\u043d\u0441\u043a\u0438\u0439 \u0433\u043e\u0441\u0443\u0434\u0430\u0440\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u0443\u043d\u0438\u0432\u0435\u0440\u0441\u0438\u0442\u0435\u0442, 180003 \u041a\u0430\u0440\u0448\u0438, \u0423\u0437\u0431\u0435\u043a\u0438\u0441\u0442\u0430\u043d","institution_ids":["https://openalex.org/I4210128068"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210128068"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.3127000033855438,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.3127000033855438,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.2741999924182892,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11169","display_name":"Silicon Nanostructures and Photoluminescence","score":0.19789999723434448,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-dioxide-thin-films","display_name":"SiO2 thin films","score":0.7910000085830688},{"id":"https://openalex.org/keywords/ion-implantation","display_name":"ion implantation","score":0.7590000033378601},{"id":"https://openalex.org/keywords/silicon-surface","display_name":"silicon surface","score":0.5730000138282776},{"id":"https://openalex.org/keywords/low-energy-ion-implantation","display_name":"low-energy ion implantation","score":0.7680000066757202},{"id":"https://openalex.org/keywords/annealing","display_name":"annealing","score":0.9269999861717224},{"id":"https://openalex.org/keywords/nanocrystalline-silicon","display_name":"nanocrystalline silicon","score":0.9160000085830688},{"id":"https://openalex.org/keywords/phase-separation","display_name":"phase separation","score":0.4880000054836273},{"id":"https://openalex.org/keywords/transition-layer","display_name":"transition layer","score":0.7739999890327454},{"id":"https://openalex.org/keywords/oxygen-concentration-profile","display_name":"oxygen concentration profile","score":0.4059999883174896}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4255000054836273},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.26510000228881836},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.24560000002384186},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.22169999778270721},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.21209999918937683},{"id":"https://openalex.org/C18762648","wikidata":"https://www.wikidata.org/wiki/Q42213","display_name":"Work (physics)","level":2,"score":0.20260000228881836},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.20010000467300415},{"id":"https://openalex.org/C134121241","wikidata":"https://www.wikidata.org/wiki/Q899301","display_name":"Yield (engineering)","level":2,"score":0.19910000264644623},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1987999975681305},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.19189999997615814}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:cajmtcs.casjournal.org:article/376","doi":"https://doi.org/10.51699/cajmtcs.v4i2.376","is_oa":true,"landing_page_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/view/376","pdf_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/download/376/413","source":{"id":"https://openalex.org/S7407064474","display_name":"CENTRAL ASIAN JOURNAL OF MATHEMATICAL THEORY AND COMPUTER SCIENCES","issn_l":"2660-5309","issn":["2660-5309"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2660-5309","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:share.osf.io:E00CC-FD8-ADB","doi":null,"is_oa":false,"landing_page_url":"http://osf.io/rcx4y/","pdf_url":null,"source":{"id":"https://openalex.org/S4306401127","display_name":"OSF Preprints (OSF Preprints)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I2799848540","host_organization_name":"Center for Open Science","host_organization_lineage":["https://openalex.org/I2799848540"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"project"}],"best_oa_location":{"id":"pmh:oai:cajmtcs.casjournal.org:article/376","doi":"https://doi.org/10.51699/cajmtcs.v4i2.376","is_oa":true,"landing_page_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/view/376","pdf_url":"https://cajmtcs.casjournal.org/index.php/CAJMTCS/article/download/376/413","source":{"id":"https://openalex.org/S7407064474","display_name":"CENTRAL ASIAN JOURNAL OF MATHEMATICAL THEORY AND COMPUTER SCIENCES","issn_l":"2660-5309","issn":["2660-5309"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2660-5309","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7219659716.pdf","grobid_xml":"https://content.openalex.org/works/W7219659716.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W6912241654","https://openalex.org/W2318555795","https://openalex.org/W4409200042","https://openalex.org/W4311230726","https://openalex.org/W3205084136","https://openalex.org/W2021408270","https://openalex.org/W4245891553","https://openalex.org/W7166303248","https://openalex.org/W2072643673","https://openalex.org/W3194141570"],"abstract_inverted_index":{"\u0418\u043c\u043f\u043b\u0430\u043d\u0442\u0430\u0446\u0438\u044f":[0],"\u043d\u0438\u0437\u043a\u043e\u044d\u043d\u0435\u0440\u0433\u0435\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u043c\u0438":[1],"\u0438\u043e\u043d\u0430\u043c\u0438":[2],"\u0432":[3,40],"\u0441\u043e\u0447\u0435\u0442\u0430\u043d\u0438\u0438":[4],"\u0441":[5,19,45],"\u043e\u0442\u0436\u0438\u0433\u043e\u043c":[6],"\u043f\u043e\u0437\u0432\u043e\u043b\u044f\u0435\u0442":[7],"\u043f\u043e\u043b\u0443\u0447\u0430\u0442\u044c":[8],"\u043d\u0435":[9],"\u0442\u043e\u043b\u044c\u043a\u043e":[10],"\u043e\u0434\u043d\u043e\u0440\u043e\u0434\u043d\u044b\u0435":[11],"\u0441\u043f\u043b\u043e\u0448\u043d\u044b\u0435":[12],"\u043d\u0430\u043d\u043e\u043f\u043b\u0435\u043d\u043a\u0438":[13],"SiO2,":[14],"\u043d\u043e":[15],"\u0438":[16,33],"\u043f\u043b\u0435\u043d\u043a\u0438":[17],"SiO2":[18,32],"\u0440\u0435\u0433\u0443\u043b\u044f\u0440\u043d\u043e":[20],"\u0440\u0430\u0441\u043f\u043e\u043b\u043e\u0436\u0435\u043d\u043d\u044b\u043c\u0438":[21],"\u0444\u0430\u0437\u0430\u043c\u0438":[22],"\u043d\u0430\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e":[23],"\u043a\u0440\u0435\u043c\u043d\u0438\u044f.":[24],"\u041d\u0435\u0437\u0430\u0432\u0438\u0441\u0438\u043c\u043e":[25],"\u043e\u0442":[26,49],"\u0442\u0438\u043f\u0430":[27],"\u043e\u043a\u0438\u0441\u043b\u0435\u043d\u0438\u044f":[28],"\u043c\u0435\u0436\u0434\u0443":[29],"\u043e\u0434\u043d\u043e\u0440\u043e\u0434\u043d\u043e\u0439":[30],"\u043f\u043b\u0435\u043d\u043a\u043e\u0439":[31],"Si":[34],"\u043e\u0431\u0440\u0430\u0437\u0443\u0435\u0442\u0441\u044f":[35],"\u043f\u0435\u0440\u0435\u0445\u043e\u0434\u043d\u044b\u0439":[36],"\u0441\u043b\u043e\u0439":[37],"\u0442\u043e\u043b\u0449\u0438\u043d\u043e\u0439":[38],"d,":[39],"\u043a\u043e\u0442\u043e\u0440\u043e\u043c":[41],"\u043a\u043e\u043d\u0446\u0435\u043d\u0442\u0440\u0430\u0446\u0438\u044f":[42],"O":[43],"\u0443\u043c\u0435\u043d\u044c\u0448\u0430\u0435\u0442\u0441\u044f":[44],"\u0443\u0432\u0435\u043b\u0438\u0447\u0435\u043d\u0438\u0435\u043c":[46],"\u0433\u043b\u0443\u0431\u0438\u043d\u044b":[47],"d":[48],"~":[50],"65":[51],"\u00b8":[52],"70":[53],"\u0430\u0442.%":[54],"\u0434\u043e":[55],"0..":[56]},"counts_by_year":[],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2026-10-05T00:00:00"}