{"id":"https://openalex.org/W7214946489","doi":"https://doi.org/10.31399/asm.cp.istfa2026p0175","title":"Investigation of LVI Application for Nanosheet Devices","display_name":"Investigation of LVI Application for Nanosheet Devices","publication_year":2026,"publication_date":"2026-09-30","ids":{"openalex":"https://openalex.org/W7214946489","doi":"https://doi.org/10.31399/asm.cp.istfa2026p0175"},"language":"en","primary_location":{"id":"doi:10.31399/asm.cp.istfa2026p0175","doi":"https://doi.org/10.31399/asm.cp.istfa2026p0175","is_oa":false,"landing_page_url":"https://doi.org/10.31399/asm.cp.istfa2026p0175","pdf_url":null,"source":{"id":"https://openalex.org/S4220651897","display_name":"Proceedings - International Symposium for Testing and Failure Analysis","issn_l":"0890-1740","issn":["0890-1740"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Symposium for Testing and Failure Analysis","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5101017996","display_name":"Song Zhigang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Zhigang Song","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012736438","display_name":"Alberto Cestero","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Alberto Cestero","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5136662090","display_name":"Mike Iwatake","orcid":"https://orcid.org/0009-0000-6850-9282","observed_orcids":["https://orcid.org/0009-0000-6850-9282"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mike Iwatake","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5153630042","display_name":"Yandong Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yandong Liu","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020025778","display_name":"Jochonia Nxumalo","orcid":"https://orcid.org/0000-0003-4942-4181","observed_orcids":["https://orcid.org/0000-0003-4942-4181"]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Jochonia Nxumalo","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060672482","display_name":"\u675c\u4e7e\u8861","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Qianheng Du","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5153645888","display_name":"Yu Zhu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405285764","display_name":"IBM Research - Albany","ror":"https://ror.org/006s9v394","country_code":"US","type":"facility","lineage":["https://openalex.org/I1341412227","https://openalex.org/I4210114115","https://openalex.org/I4405285764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yu Zhu","raw_affiliation_strings":["Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Physical Characterization and Failure Analysis, IBM Research , Albany, NY, USA","institution_ids":["https://openalex.org/I4405285764"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4405285764"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.76787532,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"85458","issue":null,"first_page":"175","last_page":"180"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11032","display_name":"VLSI and Analog Circuit Testing","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11429","display_name":"Semiconductor Lasers and Optical Devices","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanosheet-transistors","display_name":"nanosheet transistors","score":0.9390000104904175},{"id":"https://openalex.org/keywords/high-k-metal-gate","display_name":"high-k/metal gate","score":0.9110000133514404},{"id":"https://openalex.org/keywords/scan-chain","display_name":"scan chain","score":0.5669999718666077},{"id":"https://openalex.org/keywords/fault-isolation","display_name":"fault isolation","score":0.7229999899864197},{"id":"https://openalex.org/keywords/signal-to-noise-ratio","display_name":"signal-to-noise ratio","score":0.8790000081062317},{"id":"https://openalex.org/keywords/electro-optic-modulation","display_name":"electro-optic modulation","score":0.7170000076293945},{"id":"https://openalex.org/keywords/space-charge-region","display_name":"depletion region","score":0.6470000147819519}],"concepts":[{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.6930999755859375},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5529000163078308},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.544700026512146},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5267000198364258},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.4846000075340271},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.47620001435279846},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.4526999890804291},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.4377000033855438},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.42910000681877136},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.4138000011444092},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.38260000944137573},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3815000057220459},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.3549000024795532},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.34709998965263367},{"id":"https://openalex.org/C32802771","wikidata":"https://www.wikidata.org/wiki/Q2443617","display_name":"Port (circuit theory)","level":2,"score":0.33959999680519104},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.32659998536109924},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.32269999384880066},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.31619998812675476},{"id":"https://openalex.org/C175551986","wikidata":"https://www.wikidata.org/wiki/Q47089","display_name":"Fault (geology)","level":2,"score":0.3111000061035156},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.30379998683929443},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.27880001068115234},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.2766999900341034},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.2757999897003174},{"id":"https://openalex.org/C141400236","wikidata":"https://www.wikidata.org/wiki/Q1479544","display_name":"Nanoelectronics","level":2,"score":0.266400009393692}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.31399/asm.cp.istfa2026p0175","doi":"https://doi.org/10.31399/asm.cp.istfa2026p0175","is_oa":false,"landing_page_url":"https://doi.org/10.31399/asm.cp.istfa2026p0175","pdf_url":null,"source":{"id":"https://openalex.org/S4220651897","display_name":"Proceedings - International Symposium for Testing and Failure Analysis","issn_l":"0890-1740","issn":["0890-1740"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"International Symposium for Testing and Failure Analysis","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4403023969","https://openalex.org/W3117346279","https://openalex.org/W2553636037","https://openalex.org/W4307306881","https://openalex.org/W2099220178","https://openalex.org/W2516338799","https://openalex.org/W3113127598","https://openalex.org/W2536095564","https://openalex.org/W2565697679","https://openalex.org/W4392219203"],"abstract_inverted_index":{"Abstract":[0],"Laser":[1],"Voltage":[2],"Imaging":[3],"(LVI),":[4],"also":[5,162],"known":[6],"as":[7,36],"Electro":[8],"Optic":[9],"Frequency":[10],"Mapping":[11],"(EOFM),":[12],"maps":[13],"transistor":[14],"switching":[15],"activity":[16],"at":[17,117],"a":[18,22,47,54,86],"selected":[19],"frequency":[20],"within":[21],"device":[23],"under":[24],"test":[25],"(DUT).":[26],"It":[27],"can":[28,43],"trace":[29],"periodic":[30],"signal":[31,157],"propagation":[32],"through":[33],"circuits":[34],"such":[35],"scan":[37],"chains":[38],"or":[39],"any":[40],"logic":[41],"that":[42,141],"be":[44],"driven":[45],"with":[46],"toggled":[48],"input.":[49],"LVI":[50,83,128,142,156],"works":[51],"by":[52,69],"scanning":[53],"laser":[55],"across":[56,135],"the":[57,65,100,111,155],"DUT":[58],"and":[59,93,113,139],"detecting":[60],"electro":[61],"optic":[62],"modulation":[63],"of":[64],"reflected":[66],"beam":[67],"caused":[68],"space":[70],"charge":[71],"region":[72],"changes":[73],"near":[74],"drains":[75],"and/or":[76],"free":[77],"carrier":[78],"density":[79],"variations":[80],"in":[81,91],"channels.":[82],"has":[84,126],"become":[85],"workhorse":[87],"for":[88],"fault":[89],"isolation":[90],"planar":[92],"FinFET":[94],"technologies.":[95],"For":[96],"Nanosheet":[97,133],"devices,":[98],"however,":[99],"gate":[101,108],"all":[102],"around":[103],"(GAA)":[104],"architecture\u2014with":[105],"high":[106],"k/metal":[107],"(HKMG)":[109],"wrapping":[110],"channel":[112],"vertically":[114],"stacked":[115],"sheets":[116],"different":[118],"focal":[119],"planes,":[120],"poses":[121],"new":[122],"challenges.":[123],"This":[124],"work":[125],"investigated":[127],"applicability":[129],"on":[130],"2":[131],"nm":[132],"devices":[134],"several":[136],"circuit":[137],"types":[138],"demonstrates":[140],"remains":[143],"viable,":[144],"provided":[145],"experimental":[146],"parameters":[147,153],"are":[148],"carefully":[149],"optimized.":[150],"The":[151],"dominant":[152],"affecting":[154],"to":[158],"noise":[159],"ratio":[160],"have":[161],"been":[163],"discussed.":[164]},"counts_by_year":[],"updated_date":"2026-10-28T10:33:24.094632","created_date":"2026-10-01T00:00:00"}