{"id":"https://openalex.org/W7214734166","doi":"https://doi.org/10.1051/epjconf/202638907011","title":"High-density interferometric wide-area measurement of grating pitch and homogeneity","display_name":"High-density interferometric wide-area measurement of grating pitch and homogeneity","publication_year":2026,"publication_date":"2026-01-01","ids":{"openalex":"https://openalex.org/W7214734166","doi":"https://doi.org/10.1051/epjconf/202638907011"},"language":"en","primary_location":{"id":"doi:10.1051/epjconf/202638907011","doi":"https://doi.org/10.1051/epjconf/202638907011","is_oa":true,"landing_page_url":"https://doi.org/10.1051/epjconf/202638907011","pdf_url":null,"source":{"id":"https://openalex.org/S19068271","display_name":"EPJ Web of Conferences","issn_l":"2100-014X","issn":["2100-014X","2101-6275"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","jufo-1","norway-1","oarl"],"host_organization":"https://openalex.org/P4310319748","host_organization_name":"EDP Sciences","host_organization_lineage":["https://openalex.org/P4310319748","https://openalex.org/P4310319982"],"host_organization_lineage_names":["EDP Sciences","Science Press"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"EPJ Web of Conferences","raw_type":"journal-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://doi.org/10.1051/epjconf/202638907011","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102933116","display_name":"Aleksi Mattila","orcid":"https://orcid.org/0009-0008-6047-6189","observed_orcids":["https://orcid.org/0009-0008-6047-6189"]},"institutions":[{"id":"https://openalex.org/I133698016","display_name":"National metrology institute VTT MIKES","ror":"https://ror.org/0398a1r53","country_code":"FI","type":"facility","lineage":["https://openalex.org/I133698016","https://openalex.org/I4210089493","https://openalex.org/I87653560"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Aleksi Mattila","raw_affiliation_strings":["VTT MIKES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"VTT MIKES","institution_ids":["https://openalex.org/I133698016"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5048869198","display_name":"Antti Lassila","orcid":"https://orcid.org/0000-0002-6991-7082","observed_orcids":["https://orcid.org/0000-0002-6991-7082"]},"institutions":[{"id":"https://openalex.org/I133698016","display_name":"National metrology institute VTT MIKES","ror":"https://ror.org/0398a1r53","country_code":"FI","type":"facility","lineage":["https://openalex.org/I133698016","https://openalex.org/I4210089493","https://openalex.org/I87653560"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"Antti Lassila","raw_affiliation_strings":["VTT MIKES"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"VTT MIKES","institution_ids":["https://openalex.org/I133698016"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I133698016"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.76994981,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"389","issue":null,"first_page":"07011","last_page":"07011"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.986299991607666,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":0.005900000222027302,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.0032999999821186066,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/phase-sensitive-interferometry","display_name":"phase-sensitive interferometry","score":0.6850000023841858},{"id":"https://openalex.org/keywords/polarization-camera","display_name":"polarization camera","score":0.9150000214576721},{"id":"https://openalex.org/keywords/diffractive-optical-elements","display_name":"diffractive optical elements","score":0.796999990940094},{"id":"https://openalex.org/keywords/wide-area-measurement","display_name":"wide-area measurement","score":0.6259999871253967},{"id":"https://openalex.org/keywords/littrow-configuration","display_name":"Littrow configuration","score":0.8059999942779541},{"id":"https://openalex.org/keywords/phase-maps","display_name":"phase maps","score":0.5839999914169312}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.8190000057220459},{"id":"https://openalex.org/C121524040","wikidata":"https://www.wikidata.org/wiki/Q11942175","display_name":"Polarizer","level":3,"score":0.7903000116348267},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.6730999946594238},{"id":"https://openalex.org/C205049153","wikidata":"https://www.wikidata.org/wiki/Q2698605","display_name":"Polarization (electrochemistry)","level":2,"score":0.5939000248908997},{"id":"https://openalex.org/C19819980","wikidata":"https://www.wikidata.org/wiki/Q947542","display_name":"Beam splitter","level":3,"score":0.5623000264167786},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.54339998960495},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.5320000052452087},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.5228000283241272},{"id":"https://openalex.org/C142259097","wikidata":"https://www.wikidata.org/wiki/Q5891314","display_name":"Homogeneity (statistics)","level":2,"score":0.48510000109672546},{"id":"https://openalex.org/C126753812","wikidata":"https://www.wikidata.org/wiki/Q653294","display_name":"Diffraction grating","level":3,"score":0.46470001339912415},{"id":"https://openalex.org/C23576306","wikidata":"https://www.wikidata.org/wiki/Q17004698","display_name":"Astronomical interferometer","level":3,"score":0.36309999227523804},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.35910001397132874},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.34060001373291016},{"id":"https://openalex.org/C18355248","wikidata":"https://www.wikidata.org/wiki/Q850922","display_name":"Diffraction efficiency","level":3,"score":0.3165000081062317},{"id":"https://openalex.org/C96834759","wikidata":"https://www.wikidata.org/wiki/Q750463","display_name":"Phase modulation","level":3,"score":0.3154999911785126},{"id":"https://openalex.org/C125743686","wikidata":"https://www.wikidata.org/wiki/Q108779","display_name":"Birefringence","level":2,"score":0.31220000982284546},{"id":"https://openalex.org/C28493345","wikidata":"https://www.wikidata.org/wiki/Q899381","display_name":"Polarimetry","level":3,"score":0.30469998717308044},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.299699991941452},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.29809999465942383},{"id":"https://openalex.org/C34445779","wikidata":"https://www.wikidata.org/wiki/Q1571347","display_name":"Collimated light","level":3,"score":0.2840000092983246},{"id":"https://openalex.org/C150627866","wikidata":"https://www.wikidata.org/wiki/Q1076893","display_name":"Field of view","level":2,"score":0.275299996137619},{"id":"https://openalex.org/C128717455","wikidata":"https://www.wikidata.org/wiki/Q2024185","display_name":"3D optical data storage","level":2,"score":0.27469998598098755},{"id":"https://openalex.org/C100921725","wikidata":"https://www.wikidata.org/wiki/Q1650811","display_name":"Spatial frequency","level":2,"score":0.26570001244544983},{"id":"https://openalex.org/C2779892119","wikidata":"https://www.wikidata.org/wiki/Q7307113","display_name":"Reference beam","level":3,"score":0.25450000166893005}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1051/epjconf/202638907011","doi":"https://doi.org/10.1051/epjconf/202638907011","is_oa":true,"landing_page_url":"https://doi.org/10.1051/epjconf/202638907011","pdf_url":null,"source":{"id":"https://openalex.org/S19068271","display_name":"EPJ Web of Conferences","issn_l":"2100-014X","issn":["2100-014X","2101-6275"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","jufo-1","norway-1","oarl"],"host_organization":"https://openalex.org/P4310319748","host_organization_name":"EDP Sciences","host_organization_lineage":["https://openalex.org/P4310319748","https://openalex.org/P4310319982"],"host_organization_lineage_names":["EDP Sciences","Science Press"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"EPJ Web of Conferences","raw_type":"journal-article"},{"id":"pmh:oai:edpsciences.org:dkey/10.1051/epjconf/202638907011","doi":null,"is_oa":true,"landing_page_url":"https://www.epj-conferences.org/10.1051/epjconf/202638907011/pdf","pdf_url":"https://www.epj-conferences.org/10.1051/epjconf/202638907011/pdf","source":{"id":"https://openalex.org/S4306400744","display_name":"Springer Link (Chiba Institute of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I8488066","host_organization_name":"Chiba Institute of Technology","host_organization_lineage":["https://openalex.org/I8488066"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"https://doi.org/10.1051/epjconf/202638907011","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:91b111eef7334c51866d75e8d177ba5e","doi":null,"is_oa":false,"landing_page_url":"https://doaj.org/article/91b111eef7334c51866d75e8d177ba5e","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"EPJ Web of Conferences, Vol 389, p 07011 (2026)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.1051/epjconf/202638907011","doi":"https://doi.org/10.1051/epjconf/202638907011","is_oa":true,"landing_page_url":"https://doi.org/10.1051/epjconf/202638907011","pdf_url":null,"source":{"id":"https://openalex.org/S19068271","display_name":"EPJ Web of Conferences","issn_l":"2100-014X","issn":["2100-014X","2101-6275"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","ddh","doaj","jufo-1","norway-1","oarl"],"host_organization":"https://openalex.org/P4310319748","host_organization_name":"EDP Sciences","host_organization_lineage":["https://openalex.org/P4310319748","https://openalex.org/P4310319982"],"host_organization_lineage_names":["EDP Sciences","Science Press"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"EPJ Web of Conferences","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7214734166.pdf","grobid_xml":"https://content.openalex.org/works/W7214734166.grobid-xml"},"referenced_works_count":1,"referenced_works":["https://openalex.org/W3085778555"],"related_works":["https://openalex.org/W3046032147","https://openalex.org/W1994423772","https://openalex.org/W4407687798","https://openalex.org/W2081726487","https://openalex.org/W2066821777","https://openalex.org/W4306252545","https://openalex.org/W1993587463","https://openalex.org/W2073237616","https://openalex.org/W2155816512","https://openalex.org/W1994185734"],"abstract_inverted_index":{"High-accuracy":[0],"characterization":[1],"of":[2,13,28,77,96,107,111,149],"optical":[3,15],"grating":[4],"pitch":[5,50,144],"is":[6],"increasingly":[7],"important":[8],"for":[9,58,105,127],"the":[10,19,26,56,75,78,81,108,112,116,133,141,147],"quality":[11],"control":[12,74],"diffractive":[14],"elements,":[16],"particularly":[17],"in":[18,52,80,124],"emerging":[20],"augmented":[21],"reality":[22],"optics.":[23],"To":[24],"address":[25],"limitations":[27],"conventional":[29],"measurement":[30],"methods,":[31],"such":[32],"as":[33],"AFM":[34],"and":[35,67,83],"diffractometry,":[36],"we":[37],"present":[38],"a":[39,65],"snap-shot":[40],"interferometric":[41],"method":[42],"utilizing":[43],"polarization":[44,76,87],"camera,":[45],"that":[46],"provides":[47],"high-density":[48],"wide-area":[49],"data":[51],"rapid":[53],"acquisition,":[54],"eliminating":[55],"need":[57],"sample":[59],"scanning.":[60],"Phase":[61],"sensitive":[62],"interferometer":[63],"utilizes":[64],"polarizer":[66],"wave-plates":[68],"with":[69,92,120],"polarizing":[70],"beam":[71,113],"splitter":[72],"to":[73,139],"beams":[79],"test":[82],"reference":[84],"arms.":[85],"A":[86],"camera":[88],"records":[89],"4":[90],"interferograms":[91,103],"consecutive":[93],"phase":[94,109,134],"shifts":[95],"90\u00b0":[97],"without":[98],"any":[99],"moving":[100],"components.":[101],"The":[102],"allow":[104],"calculation":[106],"map":[110],"diffracted":[114],"from":[115],"sample.":[117],"When":[118],"measured":[119],"calibrated":[121],"rotary":[122],"table":[123],"Littrow":[125],"configuration":[126],"diffraction":[128],"orders":[129],"m":[130],"=":[131],"\u00b11,":[132],"maps":[135],"can":[136],"be":[137],"used":[138],"calculate":[140],"traceable":[142],"accurate":[143],"information":[145],"across":[146],"field":[148],"view.":[150]},"counts_by_year":[],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2026-09-30T00:00:00"}