{"id":"https://openalex.org/W7213972729","doi":"https://doi.org/10.1134/s1547477126700664","title":"Investigations of Depth Profile of Native Oxide Layers Covering GaAs Implanted with Noble Gas by Rutherford Backscattering Spectroscopy with Nuclear Reaction","display_name":"Investigations of Depth Profile of Native Oxide Layers Covering GaAs Implanted with Noble Gas by Rutherford Backscattering Spectroscopy with Nuclear Reaction","publication_year":2026,"publication_date":"2026-09-22","ids":{"openalex":"https://openalex.org/W7213972729","doi":"https://doi.org/10.1134/s1547477126700664"},"language":"en","primary_location":{"id":"doi:10.1134/s1547477126700664","doi":"https://doi.org/10.1134/s1547477126700664","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1547477126700664","pdf_url":null,"source":{"id":"https://openalex.org/S97779488","display_name":"Physics of Particles and Nuclei Letters","issn_l":"1531-8567","issn":["1531-8567","1547-4771"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physics of Particles and Nuclei Letters","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5062239399","display_name":"B. T. Hoa","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I177233841","display_name":"Vietnam National University, Hanoi","ror":"https://ror.org/02jmfj006","country_code":"VN","type":"education","lineage":["https://openalex.org/I177233841"]},{"id":"https://openalex.org/I32699454","display_name":"Joint Institute for Nuclear Research","ror":"https://ror.org/044yd9t77","country_code":"RU","type":"facility","lineage":["https://openalex.org/I32699454"]},{"id":"https://openalex.org/I67868205","display_name":"VNU University of Science","ror":"https://ror.org/05w54hk79","country_code":"VN","type":"education","lineage":["https://openalex.org/I177233841","https://openalex.org/I67868205"]}],"countries":["RU","VN"],"is_corresponding":false,"raw_author_name":"B. T. Hoa","raw_affiliation_strings":["Joint Institute of Nuclear Research, Dubna, Russia","University of Science, Vietnam National University, Hanoi, Vietnam"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Joint Institute of Nuclear Research, Dubna, Russia","institution_ids":["https://openalex.org/I32699454"]},{"raw_affiliation_string":"University of Science, Vietnam National University, Hanoi, Vietnam","institution_ids":["https://openalex.org/I177233841","https://openalex.org/I67868205"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109838326","display_name":"M. Kulik","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I174183983","display_name":"Maria Curie-Sk\u0142odowska University","ror":"https://ror.org/015h0qg34","country_code":"PL","type":"education","lineage":["https://openalex.org/I174183983"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"M. Kulik","raw_affiliation_strings":["Institute of Physics, Maria Curie-Sk\u0142odowska University, Lublin, Poland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Physics, Maria Curie-Sk\u0142odowska University, Lublin, Poland","institution_ids":["https://openalex.org/I174183983"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002108301","display_name":"A.S. Doroshkevich","orcid":"https://orcid.org/0000-0002-6510-8683","observed_orcids":["https://orcid.org/0000-0002-6510-8683"]},"institutions":[{"id":"https://openalex.org/I32699454","display_name":"Joint Institute for Nuclear Research","ror":"https://ror.org/044yd9t77","country_code":"RU","type":"facility","lineage":["https://openalex.org/I32699454"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"A. S. Doroshkevich","raw_affiliation_strings":["Joint Institute of Nuclear Research, Dubna, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Joint Institute of Nuclear Research, Dubna, Russia","institution_ids":["https://openalex.org/I32699454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5152412419","display_name":"N. T. Bao My","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32699454","display_name":"Joint Institute for Nuclear Research","ror":"https://ror.org/044yd9t77","country_code":"RU","type":"facility","lineage":["https://openalex.org/I32699454"]},{"id":"https://openalex.org/I4210136301","display_name":"Institute for Nuclear Science and Technology","ror":"https://ror.org/0363pts49","country_code":"VN","type":"government","lineage":["https://openalex.org/I4210136301"]},{"id":"https://openalex.org/I4210157573","display_name":"Vietnam Atomic Energy Instiute","ror":"https://ror.org/04jfns044","country_code":"VN","type":"government","lineage":["https://openalex.org/I4210157573"]}],"countries":["RU","VN"],"is_corresponding":false,"raw_author_name":"N. T. Bao My","raw_affiliation_strings":["Institute for Nuclear Science and Technology, Vietnam Atomic Energy Institute, Hanoi, Vietnam","Joint Institute of Nuclear Research, Dubna, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute for Nuclear Science and Technology, Vietnam Atomic Energy Institute, Hanoi, Vietnam","institution_ids":["https://openalex.org/I4210136301","https://openalex.org/I4210157573"]},{"raw_affiliation_string":"Joint Institute of Nuclear Research, Dubna, Russia","institution_ids":["https://openalex.org/I32699454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076989743","display_name":"T.T. Phuong","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32699454","display_name":"Joint Institute for Nuclear Research","ror":"https://ror.org/044yd9t77","country_code":"RU","type":"facility","lineage":["https://openalex.org/I32699454"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"T. T. Phuong","raw_affiliation_strings":["Joint Institute of Nuclear Research, Dubna, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Joint Institute of Nuclear Research, Dubna, Russia","institution_ids":["https://openalex.org/I32699454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5152442775","display_name":"N. T. T. Trang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I32699454","display_name":"Joint Institute for Nuclear Research","ror":"https://ror.org/044yd9t77","country_code":"RU","type":"facility","lineage":["https://openalex.org/I32699454"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"N. T. T. Trang","raw_affiliation_strings":["Joint Institute of Nuclear Research, Dubna, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Joint Institute of Nuclear Research, Dubna, Russia","institution_ids":["https://openalex.org/I32699454"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5152429057","display_name":"P. M. Duc","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210157573","display_name":"Vietnam Atomic Energy Instiute","ror":"https://ror.org/04jfns044","country_code":"VN","type":"government","lineage":["https://openalex.org/I4210157573"]}],"countries":["VN"],"is_corresponding":false,"raw_author_name":"P. M. Duc","raw_affiliation_strings":["Hanoi Irradiation Center, Vietnam Atomic Energy Institute, Hanoi, Vietnam"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hanoi Irradiation Center, Vietnam Atomic Energy Institute, Hanoi, Vietnam","institution_ids":["https://openalex.org/I4210157573"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5078182086","display_name":"P.L. Tuan","orcid":"https://orcid.org/0009-0008-7054-9601","observed_orcids":["https://orcid.org/0009-0008-7054-9601"]},"institutions":[{"id":"https://openalex.org/I32699454","display_name":"Joint Institute for Nuclear Research","ror":"https://ror.org/044yd9t77","country_code":"RU","type":"facility","lineage":["https://openalex.org/I32699454"]},{"id":"https://openalex.org/I4210157573","display_name":"Vietnam Atomic Energy Instiute","ror":"https://ror.org/04jfns044","country_code":"VN","type":"government","lineage":["https://openalex.org/I4210157573"]}],"countries":["RU","VN"],"is_corresponding":true,"raw_author_name":"P. L. Tuan","raw_affiliation_strings":["Hanoi Irradiation Center, Vietnam Atomic Energy Institute, Hanoi, Vietnam","Joint Institute of Nuclear Research, Dubna, Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hanoi Irradiation Center, Vietnam Atomic Energy Institute, Hanoi, Vietnam","institution_ids":["https://openalex.org/I4210157573"]},{"raw_affiliation_string":"Joint Institute of Nuclear Research, Dubna, Russia","institution_ids":["https://openalex.org/I32699454"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5078182086"],"corresponding_institution_ids":["https://openalex.org/I32699454","https://openalex.org/I4210157573"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.74990979,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"23","issue":"5","first_page":"656","last_page":"659"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11044","display_name":"Particle Detector Development and Performance","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/native-oxide","display_name":"native oxide","score":0.8410000205039978},{"id":"https://openalex.org/keywords/gallium-arsenide","display_name":"GaAs","score":0.8059999942779541},{"id":"https://openalex.org/keywords/surface-oxygen-content","display_name":"surface oxygen content","score":0.48500001430511475},{"id":"https://openalex.org/keywords/oxide-thickness","display_name":"oxide thickness","score":0.6800000071525574}],"concepts":[{"id":"https://openalex.org/C121530826","wikidata":"https://www.wikidata.org/wiki/Q19609","display_name":"Noble gas","level":2,"score":0.65420001745224},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5860000252723694},{"id":"https://openalex.org/C32891209","wikidata":"https://www.wikidata.org/wiki/Q483666","display_name":"Spectroscopy","level":2,"score":0.5795999765396118},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.527400016784668},{"id":"https://openalex.org/C2780839960","wikidata":"https://www.wikidata.org/wiki/Q2004543","display_name":"Nuclear reaction analysis","level":3,"score":0.5189999938011169},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4733000099658966},{"id":"https://openalex.org/C2780547777","wikidata":"https://www.wikidata.org/wiki/Q368967","display_name":"Rutherford backscattering spectrometry","level":3,"score":0.45680001378059387},{"id":"https://openalex.org/C206191943","wikidata":"https://www.wikidata.org/wiki/Q238323","display_name":"Nuclear reaction","level":2,"score":0.41670000553131104},{"id":"https://openalex.org/C143481972","wikidata":"https://www.wikidata.org/wiki/Q901775","display_name":"X-ray spectroscopy","level":3,"score":0.37369999289512634},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3425999879837036},{"id":"https://openalex.org/C2778279818","wikidata":"https://www.wikidata.org/wiki/Q190065","display_name":"Inorganic compound","level":2,"score":0.2847000062465668},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.28360000252723694},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.27869999408721924},{"id":"https://openalex.org/C512735826","wikidata":"https://www.wikidata.org/wiki/Q2025","display_name":"Carbon monoxide","level":3,"score":0.271699994802475},{"id":"https://openalex.org/C206550106","wikidata":"https://www.wikidata.org/wiki/Q906816","display_name":"Gamma spectroscopy","level":3,"score":0.2712000012397766},{"id":"https://openalex.org/C2987918405","wikidata":"https://www.wikidata.org/wiki/Q27165","display_name":"Gas pressure","level":2,"score":0.2565000057220459},{"id":"https://openalex.org/C162356407","wikidata":"https://www.wikidata.org/wiki/Q180809","display_name":"Mass spectrometry","level":2,"score":0.25189998745918274}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1134/s1547477126700664","doi":"https://doi.org/10.1134/s1547477126700664","is_oa":false,"landing_page_url":"https://doi.org/10.1134/s1547477126700664","pdf_url":null,"source":{"id":"https://openalex.org/S97779488","display_name":"Physics of Particles and Nuclei Letters","issn_l":"1531-8567","issn":["1531-8567","1547-4771"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310320267","host_organization_name":"Pleiades Publishing","host_organization_lineage":["https://openalex.org/P4310320267","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Pleiades Publishing","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Physics of Particles and Nuclei Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":7,"referenced_works":["https://openalex.org/W387040231","https://openalex.org/W2027944215","https://openalex.org/W2070982010","https://openalex.org/W2896317716","https://openalex.org/W3023793099","https://openalex.org/W4247539543","https://openalex.org/W4389309628"],"related_works":[],"abstract_inverted_index":{"The":[0,53,85],"samples":[1,95],"employed":[2],"in":[3,50],"the":[4,16,43,51,77,91,106,114],"investigation":[5],"were":[6],"semi-insulating":[7],"GaAs":[8,94],"wafers.":[9],"Noble":[10],"gas":[11],"has":[12,101],"been":[13,103],"implanted":[14],"using":[15],"UNIMAS":[17],"ion":[18],"implanter":[19],"at":[20,60],"energy":[21,62],"100":[22],"keV,":[23],"fluence":[24],"of":[25,48,79,93,108,116],"3":[26],"\u00d7":[27],"1015":[28],"ions/cm2.":[29],"Rutherford":[30],"backscattering":[31],"spectroscopy":[32],"with":[33],"nuclear":[34,54],"reaction":[35,55],"analysis":[36],"(RBS/NR)":[37],"method":[38,70],"was":[39],"used":[40],"to":[41,75],"determine":[42],"thickness":[44,107],"and":[45],"atomic":[46],"composition":[47],"elements":[49],"samples.":[52],"16O(\u03b1,\u03b1)16O":[56],"exhibits":[57],"elastic":[58],"resonance":[59,66],"around":[61],"3.05":[63],"MeV.":[64],"This":[65],"provides":[67],"a":[68],"useful":[69],"for":[71],"expanding":[72],"RBS":[73],"techniques":[74],"investigate":[76],"concentration":[78],"oxygen":[80],"present":[81],"on":[82],"sample":[83],"surfaces.":[84],"RBS/NR":[86],"approach\u2019s":[87],"conclusion":[88],"indicates":[89],"that":[90,105],"surface":[92],"contains":[96],"an":[97],"oxygen-enriched":[98],"layer.":[99],"It":[100],"also":[102],"shown":[104],"native":[109],"oxide":[110],"layer":[111],"influence":[112],"by":[113],"type":[115],"ion.":[117]},"counts_by_year":[],"updated_date":"2026-10-02T10:15:12.560889","created_date":"2026-09-22T00:00:00"}