{"id":"https://openalex.org/W7213328550","doi":"https://doi.org/10.48550/arxiv.2609.13460","title":"Versatile Sleeve-and-Bulk Fabrication of Inversely Designed Nanophotonic Structures with High Pattern Transfer Fidelity","display_name":"Versatile Sleeve-and-Bulk Fabrication of Inversely Designed Nanophotonic Structures with High Pattern Transfer Fidelity","publication_year":2026,"publication_date":"2026-09-11","ids":{"openalex":"https://openalex.org/W7213328550","doi":"https://doi.org/10.48550/arxiv.2609.13460"},"language":"en","primary_location":{"id":"pmh:oai:arXiv.org:2609.13460","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2609.13460","pdf_url":"https://arxiv.org/pdf/2609.13460","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"volume":null,"type":"preprint","indexed_in":["arxiv","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/2609.13460","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5124923204","display_name":"Lan Hoang Mai","orcid":"https://orcid.org/0009-0006-9878-0034","observed_orcids":["https://orcid.org/0009-0006-9878-0034"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mai, Lan Hoang","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5151727589","display_name":"Radheya Sham Sarode","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sarode, Radheya Sham","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028695026","display_name":"William Eshbaugh","orcid":"https://orcid.org/0009-0007-9476-6945","observed_orcids":["https://orcid.org/0009-0007-9476-6945"]},"institutions":[{"id":"https://openalex.org/I86501945","display_name":"University of Delaware","ror":"https://ror.org/01sbq1a82","country_code":"US","type":"education","lineage":["https://openalex.org/I86501945"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Eshbaugh, William G.","raw_affiliation_strings":["Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA","institution_ids":["https://openalex.org/I86501945"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5151807570","display_name":"Sulaiman Al Ghadani","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ghadani, Sulaiman Al","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5144360202","display_name":"Tyler Manfre","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I86501945","display_name":"University of Delaware","ror":"https://ror.org/01sbq1a82","country_code":"US","type":"education","lineage":["https://openalex.org/I86501945"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Manfre, Tyler","raw_affiliation_strings":["Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA","institution_ids":["https://openalex.org/I86501945"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084268756","display_name":"Nazifa Tasnim Arony","orcid":"https://orcid.org/0009-0005-0924-1446","observed_orcids":["https://orcid.org/0009-0005-0924-1446"]},"institutions":[{"id":"https://openalex.org/I86501945","display_name":"University of Delaware","ror":"https://ror.org/01sbq1a82","country_code":"US","type":"education","lineage":["https://openalex.org/I86501945"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Arony, Nazifa Tasnim","raw_affiliation_strings":["Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA","institution_ids":["https://openalex.org/I86501945"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034786439","display_name":"Joshua M. O. Zide","orcid":"https://orcid.org/0000-0002-6378-7221","observed_orcids":["https://orcid.org/0000-0002-6378-7221"]},"institutions":[{"id":"https://openalex.org/I86501945","display_name":"University of Delaware","ror":"https://ror.org/01sbq1a82","country_code":"US","type":"education","lineage":["https://openalex.org/I86501945"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Zide, Joshua M. O.","raw_affiliation_strings":["Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA","institution_ids":["https://openalex.org/I86501945"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079016825","display_name":"Matthew F. Doty","orcid":"https://orcid.org/0000-0001-7999-3567","observed_orcids":["https://orcid.org/0000-0001-7999-3567"]},"institutions":[{"id":"https://openalex.org/I86501945","display_name":"University of Delaware","ror":"https://ror.org/01sbq1a82","country_code":"US","type":"education","lineage":["https://openalex.org/I86501945"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Doty, Matthew F.","raw_affiliation_strings":["Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA","institution_ids":["https://openalex.org/I86501945"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5047047081","display_name":"Edward B. Flagg","orcid":"https://orcid.org/0000-0002-8065-4092","observed_orcids":["https://orcid.org/0000-0002-8065-4092"]},"institutions":[{"id":"https://openalex.org/I86501945","display_name":"University of Delaware","ror":"https://ror.org/01sbq1a82","country_code":"US","type":"education","lineage":["https://openalex.org/I86501945"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Flagg, Edward B.","raw_affiliation_strings":["Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Quantum Science and Engineering Program , University of Delaware , Newark , DE 19716 USA","institution_ids":["https://openalex.org/I86501945"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10245","display_name":"Metamaterials and Metasurfaces Applications","score":0.6029999852180481,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10245","display_name":"Metamaterials and Metasurfaces Applications","score":0.6029999852180481,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.2151000052690506,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.05810000002384186,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/inverse-design","display_name":"inverse design","score":0.9959999918937683},{"id":"https://openalex.org/keywords/photonic-nanostructures","display_name":"photonic nanostructures","score":0.9629999995231628}],"concepts":[{"id":"https://openalex.org/C27289702","wikidata":"https://www.wikidata.org/wiki/Q2475861","display_name":"Nanophotonics","level":2,"score":0.838100016117096},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.6341000199317932},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6047000288963318},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5913000106811523},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.5856000185012817},{"id":"https://openalex.org/C2776459999","wikidata":"https://www.wikidata.org/wiki/Q2119376","display_name":"Fidelity","level":2,"score":0.5199000239372253},{"id":"https://openalex.org/C113364801","wikidata":"https://www.wikidata.org/wiki/Q26674","display_name":"High fidelity","level":2,"score":0.47999998927116394},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.44769999384880066},{"id":"https://openalex.org/C207467116","wikidata":"https://www.wikidata.org/wiki/Q4385666","display_name":"Inverse","level":2,"score":0.4442000091075897},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4034000039100647},{"id":"https://openalex.org/C141400236","wikidata":"https://www.wikidata.org/wiki/Q1479544","display_name":"Nanoelectronics","level":2,"score":0.38019999861717224},{"id":"https://openalex.org/C2776175482","wikidata":"https://www.wikidata.org/wiki/Q1195816","display_name":"Transfer (computing)","level":2,"score":0.3686999976634979},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3391999900341034},{"id":"https://openalex.org/C48262172","wikidata":"https://www.wikidata.org/wiki/Q16908765","display_name":"Design process","level":3,"score":0.3140999972820282},{"id":"https://openalex.org/C55396564","wikidata":"https://www.wikidata.org/wiki/Q3084971","display_name":"Process design","level":3,"score":0.28700000047683716},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28540000319480896},{"id":"https://openalex.org/C182873914","wikidata":"https://www.wikidata.org/wiki/Q5157329","display_name":"Computational lithography","level":5,"score":0.2831000089645386},{"id":"https://openalex.org/C41858301","wikidata":"https://www.wikidata.org/wiki/Q2327870","display_name":"Nanosensor","level":2,"score":0.2802000045776367},{"id":"https://openalex.org/C2776226143","wikidata":"https://www.wikidata.org/wiki/Q954883","display_name":"Transfer printing","level":2,"score":0.2745000123977661},{"id":"https://openalex.org/C34972735","wikidata":"https://www.wikidata.org/wiki/Q2920267","display_name":"Engineering design process","level":2,"score":0.2712000012397766},{"id":"https://openalex.org/C135252773","wikidata":"https://www.wikidata.org/wiki/Q1567213","display_name":"Inverse problem","level":2,"score":0.25459998846054077}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:arXiv.org:2609.13460","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2609.13460","pdf_url":"https://arxiv.org/pdf/2609.13460","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"doi:10.48550/arxiv.2609.13460","doi":"https://doi.org/10.48550/arxiv.2609.13460","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2609.13460","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:2609.13460","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2609.13460","pdf_url":"https://arxiv.org/pdf/2609.13460","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"},{"id":"https://openalex.org/F4320306487","display_name":"Research Corporation for Science Advancement","ror":"https://ror.org/00jp8d455"},{"id":"https://openalex.org/F4320311274","display_name":"West Virginia University","ror":"https://ror.org/011vxgd24"},{"id":"https://openalex.org/F4320337345","display_name":"Office of Naval Research","ror":"https://ror.org/00rk2pe57"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7213328550.pdf","grobid_xml":"https://content.openalex.org/works/W7213328550.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W7139974990","https://openalex.org/W6963635254","https://openalex.org/W4306644865","https://openalex.org/W4281562937","https://openalex.org/W2784648660","https://openalex.org/W7001371088","https://openalex.org/W7066788636","https://openalex.org/W3044860583","https://openalex.org/W4404406852","https://openalex.org/W7127719291"],"abstract_inverted_index":{"Inverse":[0],"design":[1],"is":[2,26],"a":[3,60],"powerful":[4],"computational":[5],"tool":[6],"for":[7,74],"generating":[8],"nanophotonic":[9],"devices":[10,25],"that":[11,34,65],"should":[12],"outperform":[13],"their":[14],"traditionally":[15],"designed":[16,37],"counterparts.":[17],"However,":[18],"translating":[19],"these":[20],"theoretical":[21],"gains":[22],"into":[23],"physical":[24],"challenging":[27],"because":[28],"the":[29],"irregular":[30],"and":[31],"non-intuitive":[32],"features":[33],"make":[35,42],"inversely":[36],"structures":[38],"so":[39],"effective":[40],"also":[41],"them":[43],"exceptionally":[44],"difficult":[45],"to":[46,54],"fabricate,":[47],"typically":[48],"necessitating":[49],"substantial":[50],"process":[51,64,85],"optimization":[52],"unique":[53],"each":[55,75],"device":[56,80],"design.":[57],"We":[58],"describe":[59],"versatile":[61],"two-step":[62],"nanofabrication":[63],"achieves":[66],"pattern":[67],"transfer":[68],"fidelity":[69],"in":[70],"excess":[71],"of":[72,76],"90%":[73],"three":[77],"distinct":[78],"inverse":[79],"designs":[81],"with":[82],"no":[83],"device-specific":[84],"optimization.":[86]},"counts_by_year":[],"updated_date":"2026-10-28T10:33:24.094632","created_date":"2026-09-16T00:00:00"}