{"id":"https://openalex.org/W7207985516","doi":null,"title":"\u30de\u30eb\u30c1\u30d5\u30a3\u30b8\u30af\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u7528\u3044\u305f\u96c6\u7a4d\u5316CMOS-MEMS\u6280\u8853\u306e\u305f\u3081\u306e\u30bb\u30f3\u30b5\u56de\u8def\u306e\u691c\u8a0e","display_name":"\u30de\u30eb\u30c1\u30d5\u30a3\u30b8\u30af\u30b9\u30b7\u30df\u30e5\u30ec\u30fc\u30b7\u30e7\u30f3\u3092\u7528\u3044\u305f\u96c6\u7a4d\u5316CMOS-MEMS\u6280\u8853\u306e\u305f\u3081\u306e\u30bb\u30f3\u30b5\u56de\u8def\u306e\u691c\u8a0e","publication_year":2013,"publication_date":"2013-11-01","ids":{"openalex":"https://openalex.org/W7207985516"},"language":"ja","primary_location":{"id":"pmh:oai:irdb.nii.ac.jp:00897:0004071019","doi":null,"is_oa":false,"landing_page_url":"http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100663429","pdf_url":null,"source":{"id":"https://openalex.org/S7407056385","display_name":"Institutional Repositories DataBase (IRDB)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I184597095","host_organization_name":"National Institute of Informatics","host_organization_lineage":["https://openalex.org/I184597095"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5149558259","display_name":"Toshifumi Konishi","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u5c0f\u897f, \u654f\u6587","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075309178","display_name":"Daisuke Yamane","orcid":"https://orcid.org/0000-0002-9262-4704","observed_orcids":["https://orcid.org/0000-0002-9262-4704"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u5c71\u6839, \u5927\u8f14","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009580611","display_name":"Takaaki Matsushima","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u677e\u5cf6, \u9686\u660e","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048835107","display_name":"\u667a\u53f2 \u4e38\u5c71","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u4e38\u5c71, \u667a\u53f2","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5131631657","display_name":"Satoshi Maruyama","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Maruyama, Satoshi","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5131750932","display_name":"\u8ce2 \u52a0\u8cc0\u8c37","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u52a0\u8cc0\u8c37, \u8ce2","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5048827624","display_name":"Ken Kagaya","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Kagaya, Ken","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5149956965","display_name":"Hiroyuki Ito","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u4f0a\u85e4, \u6d69\u4e4b","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049015548","display_name":"Kazuya Masu","orcid":"https://orcid.org/0000-0002-7121-8440","observed_orcids":["https://orcid.org/0000-0002-7121-8440"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u77f3\u539f, \u6607","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5149902589","display_name":"Noboru Ishihara","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ishihara, Noboru","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004166791","display_name":"Hiroshi Toshiyoshi","orcid":"https://orcid.org/0000-0003-3678-7741","observed_orcids":["https://orcid.org/0000-0003-3678-7741"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u5e74\u5409, \u6d0b","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5080095206","display_name":"Katsuyuki Machida","orcid":"https://orcid.org/0000-0002-9706-3475","observed_orcids":["https://orcid.org/0000-0002-9706-3475"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u753a\u7530, \u514b\u4e4b","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5049015548","display_name":"Kazuya Masu","orcid":"https://orcid.org/0000-0002-7121-8440","observed_orcids":["https://orcid.org/0000-0002-7121-8440"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"\u76ca, \u4e00\u54c9","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"No.","issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9477999806404114,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9477999806404114,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.039799999445676804,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10187","display_name":"Radio Frequency Integrated Circuit Design","score":0.0027000000700354576,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cmos-mems-integration","display_name":"CMOS-MEMS integration","score":0.8830000162124634},{"id":"https://openalex.org/keywords/sensor-circuits","display_name":"sensor circuits","score":0.7760000228881836},{"id":"https://openalex.org/keywords/multiphysics-simulation","display_name":"multiphysics simulation","score":0.8820000290870667},{"id":"https://openalex.org/keywords/mems-sensors","display_name":"MEMS sensors","score":0.7799999713897705},{"id":"https://openalex.org/keywords/cmos-integration","display_name":"CMOS integration","score":0.5059999823570251}],"concepts":[],"mesh":[],"locations_count":1,"locations":[{"id":"pmh:oai:irdb.nii.ac.jp:00897:0004071019","doi":null,"is_oa":false,"landing_page_url":"http://t2r2.star.titech.ac.jp/cgi-bin/publicationinfo.cgi?q_publication_content_number=CTT100663429","pdf_url":null,"source":{"id":"https://openalex.org/S7407056385","display_name":"Institutional Repositories DataBase (IRDB)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I184597095","host_organization_name":"National Institute of Informatics","host_organization_lineage":["https://openalex.org/I184597095"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"conference paper"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W593582083","https://openalex.org/W7145006733","https://openalex.org/W7144917257","https://openalex.org/W7146034228","https://openalex.org/W7145302630","https://openalex.org/W7208278185","https://openalex.org/W7145525783","https://openalex.org/W7145377041","https://openalex.org/W7145539201","https://openalex.org/W7146071692"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-11-12T12:28:57.059296","created_date":"2026-09-04T00:00:00"}