{"id":"https://openalex.org/W7204949428","doi":"https://doi.org/10.48550/arxiv.2608.28959","title":"Surface-mediated frequency aging beyond quality-factor saturation in an AlScN-on-silicon resonator","display_name":"Surface-mediated frequency aging beyond quality-factor saturation in an AlScN-on-silicon resonator","publication_year":2026,"publication_date":"2026-08-29","ids":{"openalex":"https://openalex.org/W7204949428","doi":"https://doi.org/10.48550/arxiv.2608.28959"},"language":"en","primary_location":{"id":"pmh:oai:arXiv.org:2608.28959","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2608.28959","pdf_url":"https://arxiv.org/pdf/2608.28959","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"volume":null,"type":"preprint","is_traditional":true,"indexed_in":["arxiv","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/2608.28959","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003075779","display_name":"S M Enamul Hoque Yousuf","orcid":"https://orcid.org/0000-0003-4307-3544","observed_orcids":["https://orcid.org/0000-0003-4307-3544"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yousuf, S M Enamul Hoque","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5125139558","display_name":"MD Mahmudul Hasan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Hasan, Mahmudul","raw_affiliation_strings":["Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012464342","display_name":"Shruti Mishra","orcid":"https://orcid.org/0000-0003-1851-7633","observed_orcids":["https://orcid.org/0000-0003-1851-7633"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mishra, Shruti","raw_affiliation_strings":["Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5123436431","display_name":"Sourav Mukherjee","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mukherjee, Sourav","raw_affiliation_strings":["Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037903981","display_name":"Jinghan Gao","orcid":"https://orcid.org/0000-0002-0260-5412","observed_orcids":["https://orcid.org/0000-0002-0260-5412","https://orcid.org/0000-0003-1142-3220"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gao, Jinghan","raw_affiliation_strings":["Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5036428386","display_name":"Roozbeh Tabrizian","orcid":"https://orcid.org/0000-0003-1245-8564","observed_orcids":["https://orcid.org/0000-0003-1245-8564"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tabrizian, Roozbeh","raw_affiliation_strings":["Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical Engineering and Computer Science , University of Michigan , Ann Arbor , MI 48109 , USA","institution_ids":["https://openalex.org/I27837315"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.8852999806404114,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.8852999806404114,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.08669999986886978,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.01979999989271164,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gas-damping","display_name":"gas damping","score":0.7559999823570251},{"id":"https://openalex.org/keywords/vacuum-packaging","display_name":"vacuum packaging","score":0.746999979019165},{"id":"https://openalex.org/keywords/stretched-exponential-kinetics","display_name":"stretched exponential kinetics","score":0.7429999709129333},{"id":"https://openalex.org/keywords/frequency-stability","display_name":"frequency stability","score":0.40299999713897705},{"id":"https://openalex.org/keywords/mems-resonators","display_name":"MEMS resonators","score":0.6480000019073486}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6916999816894531},{"id":"https://openalex.org/C9930424","wikidata":"https://www.wikidata.org/wiki/Q7426587","display_name":"Saturation (graph theory)","level":2,"score":0.5519999861717224},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5099999904632568},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.47209998965263367},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.4440999925136566},{"id":"https://openalex.org/C3018695096","wikidata":"https://www.wikidata.org/wiki/Q11652","display_name":"Frequency dependence","level":2,"score":0.4440000057220459},{"id":"https://openalex.org/C8590192","wikidata":"https://www.wikidata.org/wiki/Q1054694","display_name":"Frequency response","level":2,"score":0.4390000104904175},{"id":"https://openalex.org/C155512373","wikidata":"https://www.wikidata.org/wiki/Q287450","display_name":"Residual","level":2,"score":0.43869999051094055},{"id":"https://openalex.org/C104892082","wikidata":"https://www.wikidata.org/wiki/Q17156810","display_name":"Low frequency","level":2,"score":0.42410001158714294},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.40459999442100525},{"id":"https://openalex.org/C135854075","wikidata":"https://www.wikidata.org/wiki/Q1421688","display_name":"Relaxation oscillator","level":4,"score":0.3693999946117401},{"id":"https://openalex.org/C78736273","wikidata":"https://www.wikidata.org/wiki/Q946764","display_name":"Natural frequency","level":3,"score":0.36469998955726624},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.3601999878883362},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.3474999964237213},{"id":"https://openalex.org/C122348159","wikidata":"https://www.wikidata.org/wiki/Q5502869","display_name":"Frequency drift","level":4,"score":0.3425999879837036},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.3375000059604645},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.33640000224113464},{"id":"https://openalex.org/C2776029896","wikidata":"https://www.wikidata.org/wiki/Q3935810","display_name":"Relaxation (psychology)","level":2,"score":0.3321000039577484},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.31369999051094055},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.2996000051498413},{"id":"https://openalex.org/C8171440","wikidata":"https://www.wikidata.org/wiki/Q903414","display_name":"Steady state (chemistry)","level":2,"score":0.29280000925064087},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.29089999198913574},{"id":"https://openalex.org/C29310469","wikidata":"https://www.wikidata.org/wiki/Q3175122","display_name":"Thermal equilibrium","level":2,"score":0.2906999886035919},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.2888000011444092},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27880001068115234},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.2773999869823456},{"id":"https://openalex.org/C2984878632","wikidata":"https://www.wikidata.org/wiki/Q5502879","display_name":"Frequency shift","level":2,"score":0.2761000096797943},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.2685000002384186},{"id":"https://openalex.org/C37580369","wikidata":"https://www.wikidata.org/wiki/Q7655123","display_name":"Sweep frequency response analysis","level":2,"score":0.26750001311302185},{"id":"https://openalex.org/C104308156","wikidata":"https://www.wikidata.org/wiki/Q2389519","display_name":"Cabin pressurization","level":2,"score":0.262800008058548},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.26010000705718994},{"id":"https://openalex.org/C5722023","wikidata":"https://www.wikidata.org/wiki/Q1440227","display_name":"Allan variance","level":3,"score":0.25369998812675476},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2529999911785126}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:arXiv.org:2608.28959","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2608.28959","pdf_url":"https://arxiv.org/pdf/2608.28959","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"doi:10.48550/arxiv.2608.28959","doi":"https://doi.org/10.48550/arxiv.2608.28959","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2608.28959","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:2608.28959","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2608.28959","pdf_url":"https://arxiv.org/pdf/2608.28959","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G4327617936","display_name":null,"funder_award_id":"HR00112390018","funder_id":"https://openalex.org/F4320332180","funder_display_name":"Defense Advanced Research Projects Agency"},{"id":"https://openalex.org/G7532552386","display_name":null,"funder_award_id":"HR00112590104","funder_id":"https://openalex.org/F4320332180","funder_display_name":"Defense Advanced Research Projects Agency"}],"funders":[{"id":"https://openalex.org/F4320332180","display_name":"Defense Advanced Research Projects Agency","ror":"https://ror.org/02caytj08"},{"id":"https://openalex.org/F4320332815","display_name":"Advanced Research Projects Agency","ror":"https://ror.org/02caytj08"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7204949428.pdf","grobid_xml":"https://content.openalex.org/works/W7204949428.grobid-xml"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W1546382336","https://openalex.org/W1968856920","https://openalex.org/W1979563351","https://openalex.org/W1991737947","https://openalex.org/W1996638985","https://openalex.org/W2001814711","https://openalex.org/W2016188245","https://openalex.org/W2090384543","https://openalex.org/W2092445640","https://openalex.org/W2105093937","https://openalex.org/W2123499220","https://openalex.org/W2149961875","https://openalex.org/W2168772655","https://openalex.org/W2564831704","https://openalex.org/W2618376619","https://openalex.org/W3104313155","https://openalex.org/W3119009879","https://openalex.org/W4289516894","https://openalex.org/W4316466690","https://openalex.org/W4322732112","https://openalex.org/W4380576572","https://openalex.org/W4385366109","https://openalex.org/W4390906681","https://openalex.org/W4392026747","https://openalex.org/W4392468799","https://openalex.org/W4402935739","https://openalex.org/W4409987203","https://openalex.org/W4412865132","https://openalex.org/W4416401392","https://openalex.org/W7105594205","https://openalex.org/W7126224564","https://openalex.org/W7160907843"],"related_works":["https://openalex.org/W4409985083","https://openalex.org/W2808736690","https://openalex.org/W6906986799","https://openalex.org/W2991727623","https://openalex.org/W3137702850","https://openalex.org/W2108697653","https://openalex.org/W2997468266","https://openalex.org/W1600641077","https://openalex.org/W2095130973","https://openalex.org/W2058420233"],"abstract_inverted_index":{"Vacuum":[0],"package":[1,214],"integrity":[2],"in":[3,44],"micro-":[4],"and":[5,39,61,93,114,137,193],"nanoelectromechanical":[6],"resonators":[7],"is":[8,71,202],"commonly":[9],"assessed":[10],"through":[11,184],"the":[12,23,34,40,63,90,185],"quality":[13],"factor":[14],"Q,":[15],"although":[16],"Q":[17,38,82],"probes":[18],"residual-gas":[19],"damping":[20,180],"rather":[21],"than":[22],"surface-state":[24],"evolution":[25],"that":[26],"can":[27],"govern":[28],"frequency":[29,42,65,143,194,212,220],"aging.":[30,221],"Here,":[31],"we":[32],"disentangle":[33],"pressure":[35,80,139],"responses":[36],"of":[37,99,133],"resonance":[41],"f0":[43,107],"a":[45,84,95,130,154],"64.21":[46],"MHz":[47],"Al0.7Sc0.3N-on-silicon":[48],"cross-sectional":[49],"Lam\u00e9-mode":[50],"resonator":[51],"between":[52],"0.01":[53,163],"to":[54,111,164,205],"760":[55,177],"Torr.":[56,104],"Measurements":[57],"at":[58,62,120,172,176],"25":[59],"\u00b0C":[60],"68.8\u00b0C":[64],"turnover,":[66],"where":[67],"first-order":[68],"thermal":[69],"sensitivity":[70],"suppressed,":[72],"reveal":[73],"widely":[74],"separated":[75],"equilibration":[76],"timescales.":[77],"Following":[78],"each":[79],"step,":[81],"reaches":[83],"reversible,":[85],"history-independent":[86],"steady":[87],"value":[88],"on":[89],"pressure-control":[91],"timescale":[92],"approaches":[94],"fitted":[96],"pressure-independent":[97],"ceiling":[98],"8.5e4":[100],"below":[101],"approximately":[102],"1":[103],"By":[105],"contrast,":[106],"responds":[108],"measurably":[109],"down":[110],"1e-5":[112],"Torr":[113],"remains":[115],"history-dependent,":[116],"relaxing":[117],"for":[118,209],"hours":[119],"fixed":[121],"pressure.":[122],"The":[123],"transients":[124],"follow":[125],"stretched-exponential":[126],"kinetics,":[127],"consistent":[128],"with":[129],"broad":[131],"distribution":[132],"surface":[134],"relaxation":[135,170],"rates,":[136],"individual":[138],"steps":[140],"produce":[141],"fractional":[142],"shifts":[144],"as":[145,147,196],"large":[146],"1.9":[148],"ppm.":[149],"Ten-hour":[150],"phase-locked":[151],"measurements":[152],"show":[153],"common":[155],"short-term":[156,182],"time-deviation":[157],"floor":[158],"near":[159],"1e-10":[160],"s":[161],"from":[162],"100":[165],"Torr,":[166,178],"whereas":[167],"residual":[168],"deterministic":[169],"dominates":[171],"long":[173],"averaging":[174],"times;":[175],"gas":[179],"degrades":[181],"tracking":[183],"reduced":[186],"Q.":[187],"These":[188],"results":[189],"establish":[190],"gas-damping":[191],"equilibrium":[192,195],"distinct":[197],"states.":[198],"Quality-factor":[199],"saturation":[200],"alone":[201],"therefore":[203],"insufficient":[204],"qualify":[206],"vacuum":[207],"packaging":[208],"precision":[210],"mechanical":[211],"references;":[213],"specifications":[215],"must":[216],"also":[217],"constrain":[218],"surface-mediated":[219]},"counts_by_year":[],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2026-09-02T00:00:00"}