{"id":"https://openalex.org/W7204933162","doi":"https://doi.org/10.26434/chemrxiv.15008158/v1","title":"An experiment-calibrated in-silico AI co-scientist discovers chemoselective silicon-nitride passivation for area-selective SiO2 atomic layer deposition","display_name":"An experiment-calibrated in-silico AI co-scientist discovers chemoselective silicon-nitride passivation for area-selective SiO2 atomic layer deposition","publication_year":2026,"publication_date":"2026-09-01","ids":{"openalex":"https://openalex.org/W7204933162","doi":"https://doi.org/10.26434/chemrxiv.15008158/v1"},"language":"en","primary_location":{"id":"doi:10.26434/chemrxiv.15008158/v1","doi":"https://doi.org/10.26434/chemrxiv.15008158/v1","is_oa":true,"landing_page_url":"https://doi.org/10.26434/chemrxiv.15008158/v1","pdf_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15008158/v1","source":{"id":"https://openalex.org/S4393918830","display_name":"ChemRxiv","issn_l":"2573-2293","issn":["2573-2293"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"},"volume":null,"type":"preprint","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15008158/v1","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5014120373","display_name":"Anand Sahu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I111088046","display_name":"Boston University","ror":"https://ror.org/05qwgg493","country_code":"US","type":"education","lineage":["https://openalex.org/I111088046"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Anand Sahu","raw_affiliation_strings":["Boston University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Boston University","institution_ids":["https://openalex.org/I111088046"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5014120373"],"corresponding_institution_ids":["https://openalex.org/I111088046"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9800000190734863,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11948","display_name":"Machine Learning in Materials Science","score":0.006500000134110451,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11661","display_name":"Copper Interconnects and Reliability","score":0.002300000051036477,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/area-selective-atomic-layer-deposition","display_name":"area-selective atomic layer deposition","score":0.9580000042915344},{"id":"https://openalex.org/keywords/silicon-nitride-passivation","display_name":"silicon nitride passivation","score":0.8799999952316284},{"id":"https://openalex.org/keywords/chemoselectivity","display_name":"chemoselectivity","score":0.7509999871253967},{"id":"https://openalex.org/keywords/machine-learning-for-materials-discovery","display_name":"machine learning for materials discovery","score":0.42800000309944153},{"id":"https://openalex.org/keywords/reaction-kinetics","display_name":"reaction kinetics","score":0.38600000739097595},{"id":"https://openalex.org/keywords/open-source-software-pipeline","display_name":"open-source software pipeline","score":0.3440000116825104}],"concepts":[{"id":"https://openalex.org/C2777581007","wikidata":"https://www.wikidata.org/wiki/Q420482","display_name":"Silanol","level":3,"score":0.7470999956130981},{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.7265999913215637},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.6938999891281128},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.47859999537467957},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.4641999900341034},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4487999975681305},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.42410001158714294},{"id":"https://openalex.org/C118792377","wikidata":"https://www.wikidata.org/wiki/Q108584245","display_name":"Selectivity","level":3,"score":0.41190001368522644},{"id":"https://openalex.org/C190667039","wikidata":"https://www.wikidata.org/wiki/Q3738104","display_name":"Chemoselectivity","level":3,"score":0.4068000018596649},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.40610000491142273},{"id":"https://openalex.org/C152365726","wikidata":"https://www.wikidata.org/wiki/Q1048589","display_name":"Density functional theory","level":2,"score":0.3714999854564667},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.365200012922287},{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.364300012588501},{"id":"https://openalex.org/C90104038","wikidata":"https://www.wikidata.org/wiki/Q419631","display_name":"Diamondoid","level":3,"score":0.36149999499320984},{"id":"https://openalex.org/C2778602974","wikidata":"https://www.wikidata.org/wiki/Q4419229","display_name":"Silicene","level":3,"score":0.3571999967098236},{"id":"https://openalex.org/C50027330","wikidata":"https://www.wikidata.org/wiki/Q908086","display_name":"Electrophile","level":3,"score":0.34599998593330383},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.34310001134872437},{"id":"https://openalex.org/C43521106","wikidata":"https://www.wikidata.org/wiki/Q2165493","display_name":"Pipeline (software)","level":2,"score":0.3427000045776367},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3400999903678894},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.33480000495910645},{"id":"https://openalex.org/C131779359","wikidata":"https://www.wikidata.org/wiki/Q471875","display_name":"Amine gas treating","level":2,"score":0.3149000108242035},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.3147999942302704},{"id":"https://openalex.org/C197129107","wikidata":"https://www.wikidata.org/wiki/Q1921621","display_name":"Merge (version control)","level":2,"score":0.31290000677108765},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.31279999017715454},{"id":"https://openalex.org/C180577832","wikidata":"https://www.wikidata.org/wiki/Q127920","display_name":"Covalent bond","level":2,"score":0.31200000643730164},{"id":"https://openalex.org/C2779205973","wikidata":"https://www.wikidata.org/wiki/Q18043425","display_name":"Germanene","level":4,"score":0.27390000224113464},{"id":"https://openalex.org/C147597530","wikidata":"https://www.wikidata.org/wiki/Q369472","display_name":"Computational chemistry","level":1,"score":0.26930001378059387},{"id":"https://openalex.org/C6518042","wikidata":"https://www.wikidata.org/wiki/Q175646","display_name":"Scanning tunneling microscope","level":2,"score":0.2635999917984009},{"id":"https://openalex.org/C193557335","wikidata":"https://www.wikidata.org/wiki/Q61424","display_name":"Acylation","level":3,"score":0.25519999861717224}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.26434/chemrxiv.15008158/v1","doi":"https://doi.org/10.26434/chemrxiv.15008158/v1","is_oa":true,"landing_page_url":"https://doi.org/10.26434/chemrxiv.15008158/v1","pdf_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15008158/v1","source":{"id":"https://openalex.org/S4393918830","display_name":"ChemRxiv","issn_l":"2573-2293","issn":["2573-2293"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"}],"best_oa_location":{"id":"doi:10.26434/chemrxiv.15008158/v1","doi":"https://doi.org/10.26434/chemrxiv.15008158/v1","is_oa":true,"landing_page_url":"https://doi.org/10.26434/chemrxiv.15008158/v1","pdf_url":"https://chemrxiv.org/doi/pdf/10.26434/chemrxiv.15008158/v1","source":{"id":"https://openalex.org/S4393918830","display_name":"ChemRxiv","issn_l":"2573-2293","issn":["2573-2293"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320311647","display_name":"Merck KGaA","ror":"https://ror.org/04b2dty93"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7204933162.pdf","grobid_xml":"https://content.openalex.org/works/W7204933162.grobid-xml"},"referenced_works_count":3,"referenced_works":["https://openalex.org/W4416191329","https://openalex.org/W7128549898","https://openalex.org/W7162445105"],"related_works":["https://openalex.org/W2752505286","https://openalex.org/W4214828863","https://openalex.org/W3167038013","https://openalex.org/W7132392487","https://openalex.org/W4309813688","https://openalex.org/W7163760344","https://openalex.org/W2897169564","https://openalex.org/W4365138568","https://openalex.org/W4327590133","https://openalex.org/W2950312221"],"abstract_inverted_index":{"Area-selective":[0],"atomic":[1],"layer":[2],"deposition":[3],"(AS-ALD)":[4],"of":[5,191],"SiO":[6,36,104],"2":[7,9,33,37,56,105],"-on-SiO":[8],"requires":[10],"passivating":[11],"adjacent":[12],"SiN":[13,29,41,100],"to":[14,67],"isolate":[15],"charge-trap":[16],"nitride":[17],"in":[18],"3D-NAND.":[19],"We":[20,45],"hypothesize":[21],"that":[22,51,182],"a":[23,82,112,127,139,151,167,179,184],"smallmolecule":[24],"electrophilic":[25],"inhibitor":[26],"chemoselectively":[27],"acylates":[28],"surface":[30],"amines":[31],"(\u2013NH":[32],"/\u2013NH)":[34],"over":[35,102],"silanols":[38],"(\u2013OH),":[39],"capping":[40],"against":[42,60,81],"oxide":[43],"nucleation.":[44],"build":[46],"an":[47],"in-silico":[48],"AI":[49],"co-scientist":[50],"(i)":[52],"constructs":[53],"amorphous":[54],"a-SiO":[55],"/aSiN":[57],"surfaces":[58],"validated":[59],"diffraction":[61],"and":[62,78,116,175],"calibrates":[63],"their":[64],"reactive-site":[65],"density":[66],"experiment,":[68],"(ii)":[69],"benchmarks":[70],"its":[71],"own":[72],"methods,":[73],"(iii)":[74],"agentically":[75],"screens":[76,176],"inhibitors,":[77],"(iv)":[79],"validates":[80],"published":[83,198],"positive":[84],"control.":[85],"The":[86,205],"core":[87],"selectivity":[88],"is":[89,207],"kinetic:":[90],"reaction":[91],"thermodynamics":[92],"are":[93],"near-degenerate,":[94],"but":[95],"acylation":[96],"strongly":[97],"favors":[98],"the":[99,103,120,145,171,197,203],"amine":[101],"silanol":[106],"(gas-phase":[107],"barrier":[108,131],"difference":[109],"\u223c0.9":[110],"eV,":[111],"stepwise":[113],"addition;":[114],"xTB":[115],"DFT":[117],"concur":[118],"on":[119,210],"direction),":[121],"reproducing":[122],"textbook":[123],"amine\u226bsilanol":[124],"chemose-lectivity.":[125],"With":[126],"first-principles":[128],"cap":[129],"oxidative-initiation":[130],"(Ea\u22480.68":[132],"eV":[133,190],"\u21d2":[134],"kdeg\u22482.9\u00d7":[135],"10":[136,163],"\u22122":[137],"/cycle),":[138],"mechanistic":[140],"multi-cycle":[141],"model":[142],"then":[143],"demonstrates":[144],"target":[146],"rather":[147],"than":[148],"assuming":[149],"it:":[150],"re-passivation":[152],"supercycle":[153],"(redose":[154],"every":[155],"3":[156],"cycles)":[157],"reaches":[158],"S":[159],"=":[160],"0.91":[161],"at":[162],"nm.":[164],"Run":[165],"as":[166],"genuine":[168],"closed":[169],"loop,":[170],"agent":[172],"autonomously":[173],"proposes":[174],"candidates,":[177],"inventing":[178],"novel":[180],"lead":[181],"beats":[183],"naive":[185],"electrophilicity-only":[186],"baseline":[187],"by":[188],"2.5":[189],"selectivity.":[192],"Our":[193],"pipeline":[194,206],"independently":[195],"reproduces":[196],"aminosilane":[199],"oxide-preference":[200],"(BDIPADS),":[201],"anchoring":[202],"method.":[204],"built":[208],"entirely":[209],"open-source":[211],"software.":[212]},"counts_by_year":[],"updated_date":"2026-11-09T13:22:03.289127","created_date":"2026-09-02T00:00:00"}