{"id":"https://openalex.org/W7204544111","doi":"https://doi.org/10.1109/icops53334.2026.11660043","title":"Material and Intensity Dependence of EUV Conversion Efficiency in Laser-Driven High-Z Slabs","display_name":"Material and Intensity Dependence of EUV Conversion Efficiency in Laser-Driven High-Z Slabs","publication_year":2026,"publication_date":"2026-06-01","ids":{"openalex":"https://openalex.org/W7204544111","doi":"https://doi.org/10.1109/icops53334.2026.11660043"},"language":"en","primary_location":{"id":"doi:10.1109/icops53334.2026.11660043","doi":"https://doi.org/10.1109/icops53334.2026.11660043","is_oa":true,"landing_page_url":"https://doi.org/10.1109/icops53334.2026.11660043","pdf_url":null,"source":{"id":"https://openalex.org/S4363607929","display_name":"IEEE International Conference on Plasma Science (ICOPS)","issn_l":"0730-9244","issn":["0730-9244","2576-7208"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 IEEE International Conference on Plasma Science (ICOPS)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.1109/icops53334.2026.11660043","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5148572935","display_name":"Tirtha R. Joshi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I36258959","display_name":"University of California San Diego","ror":"https://ror.org/0168r3w48","country_code":"US","type":"education","lineage":["https://openalex.org/I36258959"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tirtha R. Joshi","raw_affiliation_strings":["Center for Energy Research, University of California San Diego"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Energy Research, University of California San Diego","institution_ids":["https://openalex.org/I36258959"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5148512818","display_name":"Owen Bardeen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I36258959","display_name":"University of California San Diego","ror":"https://ror.org/0168r3w48","country_code":"US","type":"education","lineage":["https://openalex.org/I36258959"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Owen Bardeen","raw_affiliation_strings":["Center for Energy Research, University of California San Diego"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Energy Research, University of California San Diego","institution_ids":["https://openalex.org/I36258959"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007917227","display_name":"Alamgir Mondal","orcid":"https://orcid.org/0000-0001-9908-1354","observed_orcids":["https://orcid.org/0000-0001-9908-1354"]},"institutions":[{"id":"https://openalex.org/I36258959","display_name":"University of California San Diego","ror":"https://ror.org/0168r3w48","country_code":"US","type":"education","lineage":["https://openalex.org/I36258959"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Alamgir Mondal","raw_affiliation_strings":["Center for Energy Research, University of California San Diego"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Energy Research, University of California San Diego","institution_ids":["https://openalex.org/I36258959"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5139759633","display_name":"Igor Golovkin","orcid":"https://orcid.org/0000-0002-4985-0386","observed_orcids":["https://orcid.org/0000-0002-4985-0386"]},"institutions":[{"id":"https://openalex.org/I4210109612","display_name":"Prism Computational Sciences (United States)","ror":"https://ror.org/024eb7n23","country_code":"US","type":"company","lineage":["https://openalex.org/I4210109612"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Igor Golovkin","raw_affiliation_strings":["Prism Computational Sciences, Inc"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Prism Computational Sciences, Inc","institution_ids":["https://openalex.org/I4210109612"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5148484312","display_name":"Towfiq Ahmed","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I142606810","display_name":"Pacific Northwest National Laboratory","ror":"https://ror.org/05h992307","country_code":"US","type":"facility","lineage":["https://openalex.org/I1325736334","https://openalex.org/I1330989302","https://openalex.org/I142606810","https://openalex.org/I39565521"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Towfiq Ahmed","raw_affiliation_strings":["Pacific Northwest National Laboratory, Richland, WA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Pacific Northwest National Laboratory, Richland, WA, USA","institution_ids":["https://openalex.org/I142606810"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086105335","display_name":"S. S. Harilal","orcid":"https://orcid.org/0000-0003-2266-7976","observed_orcids":["https://orcid.org/0000-0003-2266-7976"]},"institutions":[{"id":"https://openalex.org/I142606810","display_name":"Pacific Northwest National Laboratory","ror":"https://ror.org/05h992307","country_code":"US","type":"facility","lineage":["https://openalex.org/I1325736334","https://openalex.org/I1330989302","https://openalex.org/I142606810","https://openalex.org/I39565521"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Sivanandan S. Harilal","raw_affiliation_strings":["Pacific Northwest National Laboratory, Richland, WA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Pacific Northwest National Laboratory, Richland, WA, USA","institution_ids":["https://openalex.org/I142606810"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5083481557","display_name":"F. N. Beg","orcid":"https://orcid.org/0000-0003-0391-8944","observed_orcids":["https://orcid.org/0000-0003-0391-8944"]},"institutions":[{"id":"https://openalex.org/I36258959","display_name":"University of California San Diego","ror":"https://ror.org/0168r3w48","country_code":"US","type":"education","lineage":["https://openalex.org/I36258959"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Farhat Beg","raw_affiliation_strings":["Center for Energy Research, University of California San Diego"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for Energy Research, University of California San Diego","institution_ids":["https://openalex.org/I36258959"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"28","last_page":"28"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10384","display_name":"Laser-Plasma Interactions and Diagnostics","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10384","display_name":"Laser-Plasma Interactions and Diagnostics","score":0.9887999892234802,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11854","display_name":"Laser-induced spectroscopy and plasma","score":0.0034000000450760126,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11920","display_name":"Pulsed Power Technology Applications","score":0.0015999999595806003,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/laser-produced-plasma","display_name":"laser-produced plasma","score":0.8259999752044678},{"id":"https://openalex.org/keywords/tin-plasma","display_name":"tin plasma","score":0.9779999852180481},{"id":"https://openalex.org/keywords/13-5-nm-emission","display_name":"13.5 nm emission","score":0.8199999928474426},{"id":"https://openalex.org/keywords/laser-intensity-dependence","display_name":"laser intensity dependence","score":0.6589999794960022},{"id":"https://openalex.org/keywords/detector-geometry","display_name":"detector geometry","score":0.5260000228881836},{"id":"https://openalex.org/keywords/ionization-equilibrium","display_name":"ionization equilibrium","score":0.6650000214576721},{"id":"https://openalex.org/keywords/electron-temperature","display_name":"electron temperature","score":0.5680000185966492},{"id":"https://openalex.org/keywords/radiation-hydrodynamic-simulations","display_name":"radiation-hydrodynamic simulations","score":0.5979999899864197}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5954999923706055},{"id":"https://openalex.org/C93038891","wikidata":"https://www.wikidata.org/wiki/Q1061524","display_name":"Intensity (physics)","level":2,"score":0.5921000242233276},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5162000060081482},{"id":"https://openalex.org/C162996421","wikidata":"https://www.wikidata.org/wiki/Q371965","display_name":"Extreme ultraviolet lithography","level":2,"score":0.42100000381469727},{"id":"https://openalex.org/C206991015","wikidata":"https://www.wikidata.org/wiki/Q192704","display_name":"Energy conversion efficiency","level":2,"score":0.32269999384880066},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.27970001101493835},{"id":"https://openalex.org/C2779530757","wikidata":"https://www.wikidata.org/wiki/Q1207505","display_name":"Quality (philosophy)","level":2,"score":0.260699987411499},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.2522999942302704},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.25040000677108765},{"id":"https://openalex.org/C125287762","wikidata":"https://www.wikidata.org/wiki/Q1758948","display_name":"Absorption (acoustics)","level":2,"score":0.2215999960899353}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icops53334.2026.11660043","doi":"https://doi.org/10.1109/icops53334.2026.11660043","is_oa":true,"landing_page_url":"https://doi.org/10.1109/icops53334.2026.11660043","pdf_url":null,"source":{"id":"https://openalex.org/S4363607929","display_name":"IEEE International Conference on Plasma Science (ICOPS)","issn_l":"0730-9244","issn":["0730-9244","2576-7208"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 IEEE International Conference on Plasma Science (ICOPS)","raw_type":"proceedings-article"}],"best_oa_location":{"id":"doi:10.1109/icops53334.2026.11660043","doi":"https://doi.org/10.1109/icops53334.2026.11660043","is_oa":true,"landing_page_url":"https://doi.org/10.1109/icops53334.2026.11660043","pdf_url":null,"source":{"id":"https://openalex.org/S4363607929","display_name":"IEEE International Conference on Plasma Science (ICOPS)","issn_l":"0730-9244","issn":["0730-9244","2576-7208"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 IEEE International Conference on Plasma Science (ICOPS)","raw_type":"proceedings-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":2,"referenced_works":["https://openalex.org/W2007132067","https://openalex.org/W2095580762"],"related_works":["https://openalex.org/W7204557838","https://openalex.org/W1990458655","https://openalex.org/W1536413616","https://openalex.org/W2605983130","https://openalex.org/W7009687227","https://openalex.org/W2167335927","https://openalex.org/W2042373406","https://openalex.org/W2329778424","https://openalex.org/W7204569031","https://openalex.org/W1901958823"],"abstract_inverted_index":{"There":[0],"is":[1],"significant":[2],"effort":[3],"to":[4,78,97,167,214,231],"find":[5],"a":[6,10,74,110,187,242,281],"plasma":[7,38,80],"source":[8,77,326],"with":[9,95,117,186,284],"wavelength":[11],"shorter":[12],"than":[13],"13.5":[14,69,139],"nm":[15,70,140,174,207],"for":[16,40,101,132,246,323],"nextgeneration":[17],"semiconductor":[18],"lithography${":[19],"}^{1,2}$.":[20],"Gadolinium":[21],"(Gd)":[22],"and":[23,46,48,55,61,82,93,124,154,163,300],"bismuth":[24],"(Bi)":[25],"laser-produced":[26],"plasmas":[27,66,129],"are":[28,71],"promising":[29],"beyond-extreme-ultraviolet":[30],"(BEUV)":[31],"light":[32],"sources.":[33],"This":[34],"study":[35],"identifies":[36],"optimal":[37],"conditions":[39],"efficient":[41,247],"BEUV":[42,234,325],"generation":[43],"from":[44],"Gd":[45,170],"Bi,":[47],"investigates":[49],"the":[50,90,128,165,238,253,317],"influence":[51],"of":[52,127,237,319],"laser":[53,102,285],"intensity":[54],"detector":[56],"geometry":[57],"on":[58],"spectral":[59,304],"output":[60],"conversion":[62],"efficiency.":[63],"Tin":[64],"(Sn)":[65],"emitting":[67],"at":[68,176,190,290],"included":[72,293],"as":[73],"reference":[75],"EUV":[76],"benchmark":[79],"dynamics":[81],"radiation":[83],"characteristics.":[84],"Radiation-hydrodynamic":[85],"simulations":[86,240],"were":[87],"performed":[88],"using":[89],"FLASH":[91],"code":[92],"post-processed":[94],"SPECT3D":[96],"compute":[98],"emission":[99,141,162,175,208,249,310],"spectra":[100],"intensities":[103,159,227,292],"of$\\sim":[104],"10^{11}-10^{12}":[105],"~\\mathrm{W}":[106,145,201,259],"/":[107,146,180,202,260],"\\text{cm}^{2}$,":[108,261],"employing":[109],"1064":[111],"nm,":[112],"10":[113],"ns":[114],"Gaussian":[115],"pulse":[116],"a$100":[118],"\\mu":[119,266,270,275],"m$focal":[120],"spot.":[121],"The":[122,217],"temporal":[123],"spatial":[125,243],"evolution":[126],"was":[130],"analyzed":[131],"all":[133],"targets.":[134],"Sn":[135],"produced":[136],"strong":[137,205],"in-band":[138,161],"at$2.4":[142],"\\times":[143,197,199,257],"10^{11}":[144,178,258],"\\text{cm}^{2}$from":[147],"charge":[148],"states$\\text{Sn}^{8+}-\\text{Sn}^{14+}$at":[149],"electron":[150,211],"temperatures":[151,212],"between":[152,298],"20":[153],"40":[155],"eV,":[156],"while":[157,311],"lower":[158],"suppressed":[160],"shifted":[164],"peak":[166],"longer":[168],"wavelengths.":[169],"generated":[171],"intense":[172],"6.7":[173],"(3-9)$\\times":[177],"\\mathrm{W}":[179],"\\text{cm}^{2}$from$\\text{Gd}^{12+}-\\text{Gd}^{25+}(\\mathrm{T}_{\\mathrm{e}}":[181],"\\text{up":[182],"to}":[183],"\\sim{}100":[184],"\\text{eV})$,":[185],"slight":[188],"blueshift":[189],"higher":[191,195,226,291],"intensities.":[192],"Bismuth":[193],"required":[194,230],"intensities$\\left(6":[196],"10^{11}-1.2":[198],"10^{12}":[200],"\\text{cm}^{2}\\right)$to":[203],"produce":[204],"3.5-5":[206],"from$\\text{Bi}^{25+}-\\text{Bi}^{46+}$,":[209],"reaching":[210],"up":[213],"\\~{}120":[215],"eV.":[216],"maximum":[218],"ionization":[219],"balance":[220],"achieved":[221],"was$\\text{Bi}^{3+}$,":[222],"indicating":[223],"that":[224,307],"even":[225],"would":[228],"be":[229],"further":[232],"enhance":[233],"output.":[235],"Post-processing":[236],"hydrodynamic":[239],"revealed":[241],"\u201csweet":[244],"spot\u201d":[245],"EUV/BEUV":[248],"located":[250],"just":[251],"beyond":[252],"critical":[254],"surface.":[255],"At$6.0":[256],"its":[262],"extent":[263],"was$\\sim":[264],"500":[265],"~\\mathrm{m}$for$\\text{Sn},":[267],"\\sim":[268],"225":[269],"~\\mathrm{m}$for":[271,276],"Gd,":[272],"and$\\sim":[273],"125":[274],"Bi.":[277],"Conversion":[278],"efficiency":[279],"exhibited":[280],"nonlinear":[282],"increase":[283],"intensity,":[286],"rising":[287],"more":[288],"rapidly":[289],"in":[294],"this":[295],"work.":[296],"Comparisons":[297],"LTE":[299,308],"optically":[301],"thin":[302],"NLTE":[303,313],"modeling":[305,322],"showed":[306],"overestimates":[309],"simplified":[312],"underestimates":[314],"it,":[315],"underscoring":[316],"importance":[318],"accurate":[320],"collisional-radiative":[321],"reliable":[324],"optimization.":[327]},"counts_by_year":[],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2026-08-29T00:00:00"}