{"id":"https://openalex.org/W7204433403","doi":"https://doi.org/10.21203/rs.3.rs-10538725/v1","title":"Atomistic dynamics of early oxidation of Si upon ultra-short pulsed laser heating","display_name":"Atomistic dynamics of early oxidation of Si upon ultra-short pulsed laser heating","publication_year":2026,"publication_date":"2026-09-02","ids":{"openalex":"https://openalex.org/W7204433403","doi":"https://doi.org/10.21203/rs.3.rs-10538725/v1"},"language":"en","primary_location":{"id":"doi:10.21203/rs.3.rs-10538725/v1","doi":"https://doi.org/10.21203/rs.3.rs-10538725/v1","is_oa":true,"landing_page_url":"https://doi.org/10.21203/rs.3.rs-10538725/v1","pdf_url":null,"source":{"id":"https://openalex.org/S4306525896","display_name":"Research Square","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Research Square","raw_type":"posted-content"},"volume":null,"type":"preprint","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.21203/rs.3.rs-10538725/v1","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065799516","display_name":"Tatiana Itina","orcid":"https://orcid.org/0000-0001-7117-8699","observed_orcids":["https://orcid.org/0000-0001-7117-8699"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210085887","display_name":"Laboratoire Hubert Curien","ror":"https://ror.org/0028p8r67","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I277688954","https://openalex.org/I4210085887","https://openalex.org/I4210091746","https://openalex.org/I4210095849","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I59692284"]},{"id":"https://openalex.org/I4405259976","display_name":"Universit\u00e9 Jean Monnet","ror":"https://ror.org/030bahv93","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I4405259976"]},{"id":"https://openalex.org/I86767153","display_name":"Universit\u00e9 Jean Monnet","ror":"https://ror.org/04yznqr36","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I4405259976","https://openalex.org/I86767153"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Tatiana E. ITINA","raw_affiliation_strings":["Univ Lyon, UJM-Saint-Etienne, CNRS, IOGS, Laboratoire Hubert Curien UMR 5516, F-42023 St-Etienne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ Lyon, UJM-Saint-Etienne, CNRS, IOGS, Laboratoire Hubert Curien UMR 5516, F-42023 St-Etienne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210085887","https://openalex.org/I4405259976","https://openalex.org/I86767153"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054793935","display_name":"Ilemona S. Omeje","orcid":"https://orcid.org/0000-0003-0144-5581","observed_orcids":["https://orcid.org/0000-0003-0144-5581"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210085887","display_name":"Laboratoire Hubert Curien","ror":"https://ror.org/0028p8r67","country_code":"FR","type":"facility","lineage":["https://openalex.org/I100532134","https://openalex.org/I112936343","https://openalex.org/I113428412","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I277688954","https://openalex.org/I4210085887","https://openalex.org/I4210091746","https://openalex.org/I4210095849","https://openalex.org/I4405259976","https://openalex.org/I4405263940","https://openalex.org/I48430043","https://openalex.org/I59692284"]},{"id":"https://openalex.org/I4405259976","display_name":"Universit\u00e9 Jean Monnet","ror":"https://ror.org/030bahv93","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I4405259976"]},{"id":"https://openalex.org/I86767153","display_name":"Universit\u00e9 Jean Monnet","ror":"https://ror.org/04yznqr36","country_code":"FR","type":"education","lineage":["https://openalex.org/I203339264","https://openalex.org/I4405259976","https://openalex.org/I86767153"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ilemona S. OMEJE","raw_affiliation_strings":["Univ Lyon, UJM-Saint-Etienne, CNRS, IOGS, Laboratoire Hubert Curien UMR 5516, F-42023 St-Etienne, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Univ Lyon, UJM-Saint-Etienne, CNRS, IOGS, Laboratoire Hubert Curien UMR 5516, F-42023 St-Etienne, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210085887","https://openalex.org/I4405259976","https://openalex.org/I86767153"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5056861244","display_name":"Magali Gregoire","orcid":"https://orcid.org/0000-0002-8220-794X","observed_orcids":["https://orcid.org/0000-0002-8220-794X"]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Magali Gregoire","raw_affiliation_strings":["STMicroelectronics (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics (France)","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044831789","display_name":"Jean\u2010Gabriel Mattei","orcid":"https://orcid.org/0000-0002-2996-612X","observed_orcids":["https://orcid.org/0000-0002-2996-612X"]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Jean-Gabriel Mattei","raw_affiliation_strings":["STMicroelectronics (France)"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics (France)","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5143480539","display_name":"Wissal Benali","orcid":"https://orcid.org/0009-0008-1430-3324","observed_orcids":["https://orcid.org/0009-0008-1430-3324"]},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Wissal Benali","raw_affiliation_strings":["Aix-Marseille Universit\u00e9"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille Universit\u00e9","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010167688","display_name":"Pol Sope\u00f1a","orcid":"https://orcid.org/0000-0003-4112-3886","observed_orcids":["https://orcid.org/0000-0003-4112-3886"]},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Pol Sopena","raw_affiliation_strings":["Aix-Marseille Universit\u00e9"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille Universit\u00e9","institution_ids":["https://openalex.org/I21491767"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5036412743","display_name":"David Grojo","orcid":"https://orcid.org/0000-0002-8189-3781","observed_orcids":["https://orcid.org/0000-0002-8189-3781"]},"institutions":[{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"David GROJO","raw_affiliation_strings":["Aix-Marseille Universit\u00e9"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille Universit\u00e9","institution_ids":["https://openalex.org/I21491767"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9916999936103821,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9916999936103821,"subfield":{"id":"https://openalex.org/subfields/2209","display_name":"Industrial and Manufacturing Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.003800000064074993,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/silicon-oxidation","display_name":"silicon oxidation","score":0.9909999966621399},{"id":"https://openalex.org/keywords/oxygen-diffusion","display_name":"oxygen diffusion","score":0.7260000109672546},{"id":"https://openalex.org/keywords/oxide-growth","display_name":"oxide growth","score":0.7789999842643738},{"id":"https://openalex.org/keywords/melting-threshold","display_name":"melting threshold","score":0.5479999780654907},{"id":"https://openalex.org/keywords/amorphous-silicon","display_name":"amorphous silicon","score":0.6779999732971191},{"id":"https://openalex.org/keywords/reactive-molecular-dynamics","display_name":"reactive molecular dynamics","score":0.6340000033378601},{"id":"https://openalex.org/keywords/high-temperature-oxidation","display_name":"high-temperature oxidation","score":0.46399998664855957}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6165000200271606},{"id":"https://openalex.org/C2778979257","wikidata":"https://www.wikidata.org/wiki/Q15928349","display_name":"Pulsed laser","level":3,"score":0.5389000177383423},{"id":"https://openalex.org/C145912823","wikidata":"https://www.wikidata.org/wiki/Q113558","display_name":"Dynamics (music)","level":2,"score":0.5231000185012817},{"id":"https://openalex.org/C37982897","wikidata":"https://www.wikidata.org/wiki/Q901321","display_name":"Pulsed laser deposition","level":3,"score":0.3725000023841858},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.37059998512268066},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33959999680519104},{"id":"https://openalex.org/C159467904","wikidata":"https://www.wikidata.org/wiki/Q2001702","display_name":"Chemical physics","level":1,"score":0.28600001335144043},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.2655999958515167},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2443999946117401},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.23970000445842743}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.21203/rs.3.rs-10538725/v1","doi":"https://doi.org/10.21203/rs.3.rs-10538725/v1","is_oa":true,"landing_page_url":"https://doi.org/10.21203/rs.3.rs-10538725/v1","pdf_url":null,"source":{"id":"https://openalex.org/S4306525896","display_name":"Research Square","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Research Square","raw_type":"posted-content"},{"id":"pmh:oai:HAL:ujm-05707681v1","doi":null,"is_oa":true,"landing_page_url":"https://ujm.hal.science/ujm-05707681","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2026","raw_type":"info:eu-repo/semantics/preprint"},{"id":"pmh:oai:HAL:ujm-05751451v1","doi":null,"is_oa":false,"landing_page_url":"https://ujm.hal.science/ujm-05751451","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"2026","raw_type":"info:eu-repo/semantics/preprint"}],"best_oa_location":{"id":"doi:10.21203/rs.3.rs-10538725/v1","doi":"https://doi.org/10.21203/rs.3.rs-10538725/v1","is_oa":true,"landing_page_url":"https://doi.org/10.21203/rs.3.rs-10538725/v1","pdf_url":null,"source":{"id":"https://openalex.org/S4306525896","display_name":"Research Square","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"Research Square","raw_type":"posted-content"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W7211969724","https://openalex.org/W4320486675","https://openalex.org/W2319411248","https://openalex.org/W2142041640","https://openalex.org/W2064596767","https://openalex.org/W2024165975","https://openalex.org/W4296156836","https://openalex.org/W2069785286","https://openalex.org/W2067830515","https://openalex.org/W4307000325"],"abstract_inverted_index":{"Abstract":[0],"Reactive":[1],"molecular":[2],"dynamics":[3],"simulations":[4,40],"are":[5],"used":[6],"to":[7,22,60,109,124,159],"investigate":[8],"the":[9,23,27,47,52,61,69,75,79,101,119,127,138,175,179,193,213,218],"early":[10,139],"stages":[11,140],"of":[12,30,64,71,78,103,118,141,181],"silicon":[13,106,136,190],"oxidation":[14,33,55,114,223],"under":[15],"short-pulsed":[16],"heating.":[17],"Particular":[18],"attention":[19],"is":[20,90,97,122,151,217],"devoted":[21],"temperature":[24],"range":[25],"surrounding":[26],"melting":[28,53,93],"threshold":[29],"silicon,":[31,68],"where":[32],"mechanisms":[34],"undergo":[35],"a":[36,83,86,104,110,145,155,182,199],"profound":[37],"transition.":[38],"The":[39,116],"reveal":[41],"two":[42],"distinct":[43],"regimes":[44],"governed":[45],"by":[46,100],"maximum":[48],"surface":[49],"temperature.":[50],"Below":[51],"point,":[54],"remains":[56],"extremely":[57],"limited":[58],"due":[59],"low":[62],"mobility":[63],"oxygen":[65,95,132,149],"in":[66,113,212],"crystalline":[67],"absence":[70],"liquid-phase":[72],"transport,":[73],"and":[74,167,206],"short":[76],"duration":[77],"thermal":[80],"transient.":[81],"As":[82],"result,":[84],"only":[85],"negligible":[87],"oxide":[88,120,142,185],"layer":[89,121,186],"formed.":[91],"Once":[92],"occurs,":[94],"transport":[96],"dramatically":[98],"enhanced":[99],"emergence":[102],"liquid":[105,135],"layer,":[107],"leading":[108],"rapid":[111],"increase":[112],"rate.":[115],"thickness":[117],"found":[123],"correlate":[125],"with":[126],"molten-layer":[128],"depth,":[129],"indicating":[130],"that":[131,208],"diffusion":[133,211],"within":[134],"controls":[137],"growth.":[143],"Additionally,":[144],"nonlinear":[146],"dependence":[147],"on":[148,192],"concentration":[150],"also":[152],"observed,":[153],"revealing":[154,178],"transition":[156],"from":[157],"oxygen-limited":[158],"diffusion-limited":[160],"oxidation.":[161],"Complementary,":[162],"High-Resolution":[163],"Electron":[164,168],"Microscopy":[165],"(HR-TEM)":[166],"Energy":[169],"Loss":[170],"Spectroscopy":[171],"(STEM-EELS)":[172],"characterizations":[173],"validate":[174],"computational":[176],"insights":[177],"formation":[180],"continuous":[183],"2.3~nm":[184],"atop":[187],"an":[188],"amorphous":[189],"region":[191],"bulk":[194],"substrate.":[195],"These":[196],"findings":[197],"provide":[198],"physical":[200],"explanation":[201],"for":[202],"numerous":[203],"experimental":[204],"observations":[205],"demonstrate":[207],"thermally":[209],"activated":[210],"transient":[214],"molten":[215],"phase":[216],"dominant":[219],"mechanism":[220],"governing":[221],"short-pulse-induced":[222],"at":[224],"temperatures":[225],"below":[226],"3000":[227],"K.":[228]},"counts_by_year":[],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2026-08-27T00:00:00"}