{"id":"https://openalex.org/W7204221021","doi":"https://doi.org/10.48550/arxiv.2609.08569","title":"Fabrication And Characterization Of High-Quality Nb/Al-AlO$_x$/Nb Cross-Type Josephson Tunnel Junctions Utilising CMP-based Planarisation Techniques","display_name":"Fabrication And Characterization Of High-Quality Nb/Al-AlO$_x$/Nb Cross-Type Josephson Tunnel Junctions Utilising CMP-based Planarisation Techniques","publication_year":2026,"publication_date":"2026-08-26","ids":{"openalex":"https://openalex.org/W7204221021","doi":"https://doi.org/10.48550/arxiv.2609.08569"},"language":"en","primary_location":{"id":"pmh:oai:arXiv.org:2609.08569","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2609.08569","pdf_url":"https://arxiv.org/pdf/2609.08569","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"volume":null,"type":"preprint","is_traditional":true,"indexed_in":["arxiv","datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://arxiv.org/pdf/2609.08569","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5148406810","display_name":"Alexander Stoll","orcid":"https://orcid.org/0009-0001-5026-6574","observed_orcids":["https://orcid.org/0009-0001-5026-6574"]},"institutions":[{"id":"https://openalex.org/I223822909","display_name":"Heidelberg University","ror":"https://ror.org/038t36y30","country_code":"DE","type":"education","lineage":["https://openalex.org/I223822909"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Stoll, Alexander","raw_affiliation_strings":["Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany","institution_ids":["https://openalex.org/I223822909"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031235338","display_name":"Andreas Reifenberger","orcid":"https://orcid.org/0000-0003-4121-5836","observed_orcids":["https://orcid.org/0000-0003-4121-5836"]},"institutions":[{"id":"https://openalex.org/I223822909","display_name":"Heidelberg University","ror":"https://ror.org/038t36y30","country_code":"DE","type":"education","lineage":["https://openalex.org/I223822909"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Reifenberger, Andreas","raw_affiliation_strings":["Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany","institution_ids":["https://openalex.org/I223822909"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035285816","display_name":"Daniel Hengstler","orcid":"https://orcid.org/0009-0001-0684-8067","observed_orcids":["https://orcid.org/0009-0001-0684-8067"]},"institutions":[{"id":"https://openalex.org/I223822909","display_name":"Heidelberg University","ror":"https://ror.org/038t36y30","country_code":"DE","type":"education","lineage":["https://openalex.org/I223822909"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Hengstler, Daniel","raw_affiliation_strings":["Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany","institution_ids":["https://openalex.org/I223822909"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005614250","display_name":"A. Fleischmann","orcid":"https://orcid.org/0000-0002-0218-5059","observed_orcids":["https://orcid.org/0000-0002-0218-5059"]},"institutions":[{"id":"https://openalex.org/I223822909","display_name":"Heidelberg University","ror":"https://ror.org/038t36y30","country_code":"DE","type":"education","lineage":["https://openalex.org/I223822909"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Fleischmann, Andreas","raw_affiliation_strings":["Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany","institution_ids":["https://openalex.org/I223822909"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075890035","display_name":"C. Enss","orcid":"https://orcid.org/0009-0004-2330-6982","observed_orcids":["https://orcid.org/0009-0004-2330-6982"]},"institutions":[{"id":"https://openalex.org/I223822909","display_name":"Heidelberg University","ror":"https://ror.org/038t36y30","country_code":"DE","type":"education","lineage":["https://openalex.org/I223822909"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Enss, Christian","raw_affiliation_strings":["Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Heidelberg University , Kirchhoff Institute for Physics , Heidelberg , Germany","institution_ids":["https://openalex.org/I223822909"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I223822909"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11803","display_name":"Superconducting and THz Device Technology","score":0.975600004196167,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11803","display_name":"Superconducting and THz Device Technology","score":0.975600004196167,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10020","display_name":"Quantum Information and Cryptography","score":0.011800000444054604,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.005499999970197678,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/josephson-tunnel-junctions","display_name":"Josephson tunnel junctions","score":0.871999979019165},{"id":"https://openalex.org/keywords/chemical-mechanical-polishing","display_name":"chemical mechanical polishing","score":0.8930000066757202},{"id":"https://openalex.org/keywords/planarization","display_name":"planarization","score":0.878000020980835},{"id":"https://openalex.org/keywords/dc-squid","display_name":"dc SQUID","score":0.7670000195503235},{"id":"https://openalex.org/keywords/parasitic-capacitance","display_name":"parasitic capacitance","score":0.7070000171661377},{"id":"https://openalex.org/keywords/wafer-scale-fabrication","display_name":"wafer-scale fabrication","score":0.7429999709129333},{"id":"https://openalex.org/keywords/fraunhofer-pattern","display_name":"Fraunhofer pattern","score":0.7250000238418579},{"id":"https://openalex.org/keywords/current-voltage-characteristics","display_name":"current-voltage characteristics","score":0.7149999737739563},{"id":"https://openalex.org/keywords/superconducting-qubits","display_name":"superconducting qubits","score":0.6949999928474426},{"id":"https://openalex.org/keywords/fabrication-yield","display_name":"fabrication yield","score":0.42899999022483826}],"concepts":[{"id":"https://openalex.org/C12038964","wikidata":"https://www.wikidata.org/wiki/Q764228","display_name":"Josephson effect","level":3,"score":0.7495999932289124},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7027000188827515},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6011000275611877},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5597000122070312},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.557200014591217},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5303000211715698},{"id":"https://openalex.org/C2780992000","wikidata":"https://www.wikidata.org/wiki/Q17016113","display_name":"Generator (circuit theory)","level":3,"score":0.4047999978065491},{"id":"https://openalex.org/C180349316","wikidata":"https://www.wikidata.org/wiki/Q7189956","display_name":"Pi Josephson junction","level":4,"score":0.4027000069618225},{"id":"https://openalex.org/C103778262","wikidata":"https://www.wikidata.org/wiki/Q3769866","display_name":"Superconducting tunnel junction","level":5,"score":0.37689998745918274},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.298799991607666},{"id":"https://openalex.org/C83408046","wikidata":"https://www.wikidata.org/wiki/Q3183536","display_name":"Tunnel junction","level":3,"score":0.28130000829696655},{"id":"https://openalex.org/C2777743550","wikidata":"https://www.wikidata.org/wiki/Q81900","display_name":"Squid","level":2,"score":0.272599995136261},{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.25589999556541443}],"mesh":[],"locations_count":4,"locations":[{"id":"pmh:oai:arXiv.org:2609.08569","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2609.08569","pdf_url":"https://arxiv.org/pdf/2609.08569","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"doi:10.48550/arxiv.2609.08569","doi":"https://doi.org/10.48550/arxiv.2609.08569","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2609.08569","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Preprint"},{"id":"doi:10.5281/zenodo.22113589","doi":"https://doi.org/10.5281/zenodo.22113589","is_oa":true,"landing_page_url":"https://doi.org/10.5281/zenodo.22113589","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Dataset"},{"id":"doi:10.5281/zenodo.22113590","doi":"https://doi.org/10.5281/zenodo.22113590","is_oa":true,"landing_page_url":"https://doi.org/10.5281/zenodo.22113590","pdf_url":null,"source":{"id":"https://openalex.org/S4306400562","display_name":"Zenodo (CERN European Organization for Nuclear Research)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I67311998","host_organization_name":"European Organization for Nuclear Research","host_organization_lineage":["https://openalex.org/I67311998"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Dataset"}],"best_oa_location":{"id":"pmh:oai:arXiv.org:2609.08569","doi":null,"is_oa":true,"landing_page_url":"https://arxiv.org/abs/2609.08569","pdf_url":"https://arxiv.org/pdf/2609.08569","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G4716995563","display_name":null,"funder_award_id":"13N16255","funder_id":"https://openalex.org/F4320321114","funder_display_name":"Bundesministerium f\u00fcr Bildung und Forschung"}],"funders":[{"id":"https://openalex.org/F4320310414","display_name":"Baden-W\u00fcrttemberg Stiftung","ror":"https://ror.org/031h5fa94"},{"id":"https://openalex.org/F4320321114","display_name":"Bundesministerium f\u00fcr Bildung und Forschung","ror":"https://ror.org/04pz7b180"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W7204221021.pdf","grobid_xml":"https://content.openalex.org/works/W7204221021.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2566846504","https://openalex.org/W2013745586","https://openalex.org/W2050082600","https://openalex.org/W2005523465","https://openalex.org/W2037266285","https://openalex.org/W2943246788","https://openalex.org/W2739624619","https://openalex.org/W2127753129","https://openalex.org/W2738275569","https://openalex.org/W2099572314"],"abstract_inverted_index":{"Josephson":[0],"tunnel":[1],"junctions":[2],"(JJs)":[3],"are":[4,58,70],"the":[5,26,35,42,62,88,118,125,137,142,146,149,168,184,206,227,233,252,256],"fundamental":[6],"building":[7],"blocks":[8],"of":[9,31,64,91,120,136,145,148,153,160,170,186,208,218,229,238],"today's":[10],"most":[11],"advanced":[12],"superconducting":[13,20],"electronic":[14],"components,":[15],"such":[16],"as":[17,45,47],"qubits":[18],"and":[19,53,67,72,82,111,139,162,198,235,254,264],"quantum":[21],"interference":[22],"devices":[23,33],"(SQUIDs).":[24],"Given":[25],"ongoing":[27],"demand":[28],"for":[29,107,134,183],"scalability":[30],"these":[32],"on":[34,221,232],"wafer-scale,":[36],"it":[37],"is":[38,127,190],"crucial":[39],"to":[40,49,132,140,246],"control":[41],"fabrication":[43,119,230],"process":[44,212],"precisely":[46],"possible":[48],"ensure":[50,141],"uniform":[51,199],"quality":[52,234,259],"reproducibility.":[54],"Today,":[55],"window-type":[56],"JJs":[57,101,240],"often":[59],"used":[60],"in":[61,129,202,214],"production":[63,211],"DC":[65,92],"SQUIDs":[66],"while":[68],"they":[69,74],"reliable":[71,143],"reproducible,":[73],"suffer":[75],"from":[76,261],"alignment":[77],"inaccuracies":[78],"caused":[79],"by":[80,99],"photolithography":[81],"unavoidable":[83],"parasitic":[84,113],"capacitances,":[85],"thus":[86],"limiting":[87],"energy":[89],"sensitivity":[90],"SQUIDs.":[93],"These":[94],"problems":[95],"can":[96],"be":[97],"circumvented":[98],"producing":[100],"with":[102,241],"cross-type":[103,122],"geometry,":[104],"which":[105,201],"allows":[106],"smaller":[108],"junction":[109,243,257],"areas":[110,244],"eliminates":[112],"capacitances.":[114],"Here":[115],"we":[116,178,225],"discuss":[117,226],"Nb/Al-AlOx/Nb-based":[121],"JJs,":[123],"where":[124],"trilayer":[126],"embedded":[128],"sputter-deposited":[130],"SiO$_2$":[131],"allow":[133],"planarisation":[135],"structures":[138],"insulation":[144],"sidewalls":[147],"bottom":[150],"electrode.":[151],"Instead":[152],"lift-off":[154],"processes":[155],"that":[156,173],"require":[157],"a":[158,215],"lot":[159],"time":[161],"potentially":[163],"leave":[164],"unwanted":[165],"wings":[166],"along":[167],"edges":[169],"microstructures":[171],"behind":[172],"might":[174],"compromise":[175],"subsequent":[176],"layers,":[177],"use":[179],"chemical-mechanical":[180],"polishing":[181],"(CMP)":[182],"removal":[185],"excess":[187],"SiO$_2$.":[188],"This":[189],"not":[191],"only":[192],"much":[193],"faster,":[194],"but":[195],"produces":[196],"smooth":[197],"surfaces,":[200],"turn":[203],"effectively":[204],"improves":[205],"reliability":[207],"our":[209,239],"JJ":[210],"resulting":[213],"high":[216],"yield":[217],"over":[219],"$90\\,\\%$":[220],"wafer-scale.":[222],"In":[223],"addition,":[224],"influence":[228],"details":[231],"electrical":[236],"properties":[237],"different":[242],"down":[245],"$1\\,\\mathrm{\u03bcm}":[247],"\\times":[248],"1\\,\\mathrm{\u03bcm}$":[249],"distributed":[250],"across":[251],"wafer":[253],"extract":[255],"specific":[258],"parameters":[260],"their":[262,265],"IV-characteristics":[263],"Fraunhofer":[266],"patterns.":[267]},"counts_by_year":[],"updated_date":"2026-11-08T12:12:28.789561","created_date":"2026-08-27T00:00:00"}