{"id":"https://openalex.org/W7166146740","doi":"https://doi.org/10.1002/aelm.202500887","title":"Nonmonotonic Enhancement of Electro\u2010Optic Properties of Wurtzite AlN Thin Films by Sc Doping","display_name":"Nonmonotonic Enhancement of Electro\u2010Optic Properties of Wurtzite AlN Thin Films by Sc Doping","publication_year":2026,"publication_date":"2026-06-26","ids":{"openalex":"https://openalex.org/W7166146740","doi":"https://doi.org/10.1002/aelm.202500887"},"language":"en","primary_location":{"id":"doi:10.1002/aelm.202500887","doi":"https://doi.org/10.1002/aelm.202500887","is_oa":true,"landing_page_url":"https://doi.org/10.1002/aelm.202500887","pdf_url":null,"source":{"id":"https://openalex.org/S2765003236","display_name":"Advanced Electronic Materials","issn_l":"2199-160X","issn":["2199-160X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Electronic Materials","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","datacite","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.1002/aelm.202500887","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"K. Abe","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Abe","raw_affiliation_strings":["Department of Energy Engineering Nagoya University  Nagoya Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Energy Engineering Nagoya University  Nagoya Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5139462241","display_name":"X. Yuan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"X. Yuan","raw_affiliation_strings":["Department of Energy Engineering Nagoya University  Nagoya Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Energy Engineering Nagoya University  Nagoya Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5124819003","display_name":"K. Okamoto","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4400009020","display_name":"Institute of Science Tokyo","ror":"https://ror.org/05dqf9946","country_code":"JP","type":"education","lineage":["https://openalex.org/I4400009020"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"K. Okamoto","raw_affiliation_strings":["School of Materials and Chemical Technology Institute of Science Tokyo  Yokohama Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Materials and Chemical Technology Institute of Science Tokyo  Yokohama Japan","institution_ids":["https://openalex.org/I4400009020"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5139446574","display_name":"X. Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"X. Liu","raw_affiliation_strings":["Department of Energy Engineering Nagoya University  Nagoya Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Energy Engineering Nagoya University  Nagoya Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5139403755","display_name":"C. Wang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"C. Wang","raw_affiliation_strings":["School of Microelectronics University of Science and Technology of China  Hefei China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Microelectronics University of Science and Technology of China  Hefei China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5139408551","display_name":"T. Wu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"T. Wu","raw_affiliation_strings":["School of Microelectronics University of Science and Technology of China  Hefei China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Microelectronics University of Science and Technology of China  Hefei China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5145348439","display_name":"H. Funakubo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4400009020","display_name":"Institute of Science Tokyo","ror":"https://ror.org/05dqf9946","country_code":"JP","type":"education","lineage":["https://openalex.org/I4400009020"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"H. Funakubo","raw_affiliation_strings":["School of Materials and Chemical Technology Institute of Science Tokyo  Yokohama Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Materials and Chemical Technology Institute of Science Tokyo  Yokohama Japan","institution_ids":["https://openalex.org/I4400009020"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5139407895","display_name":"S. Kondo","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"S. Kondo","raw_affiliation_strings":["Department of Energy Engineering Nagoya University  Nagoya Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Energy Engineering Nagoya University  Nagoya Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037573261","display_name":"T NAGASAKI","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"T. Nagasaki","raw_affiliation_strings":["Department of Energy Engineering Nagoya University  Nagoya Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Energy Engineering Nagoya University  Nagoya Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042465121","display_name":"Ping Ma","orcid":"https://orcid.org/0000-0003-0674-8530","observed_orcids":["https://orcid.org/0000-0003-0674-8530"]},"institutions":[{"id":"https://openalex.org/I126520041","display_name":"University of Science and Technology of China","ror":"https://ror.org/04c4dkn09","country_code":"CN","type":"education","lineage":["https://openalex.org/I126520041","https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"P. Ma","raw_affiliation_strings":["School of Microelectronics University of Science and Technology of China  Hefei China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Microelectronics University of Science and Technology of China  Hefei China","institution_ids":["https://openalex.org/I126520041"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076297403","display_name":"Alexandros Emboras","orcid":"https://orcid.org/0000-0002-8843-5118","observed_orcids":["https://orcid.org/0000-0002-8843-5118"]},"institutions":[{"id":"https://openalex.org/I35440088","display_name":"ETH Zurich","ror":"https://ror.org/05a28rw58","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088"]},{"id":"https://openalex.org/I4405253860","display_name":"Integrated Systems Laboratory","ror":"https://ror.org/015f9wa43","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I35440088","https://openalex.org/I4405253860"]}],"countries":["CH"],"is_corresponding":true,"raw_author_name":"A. Emboras","raw_affiliation_strings":["Integrated Systems Laboratory (IIS) ETH Zurich  Zurich Switzerland"],"raw_orcid":"https://orcid.org/0000-0002-8843-5118","affiliations":[{"raw_affiliation_string":"Integrated Systems Laboratory (IIS) ETH Zurich  Zurich Switzerland","institution_ids":["https://openalex.org/I35440088","https://openalex.org/I4405253860"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5077056890","display_name":"Tomoaki Yamada","orcid":"https://orcid.org/0000-0001-5790-9029","observed_orcids":["https://orcid.org/0000-0001-5790-9029"]},"institutions":[{"id":"https://openalex.org/I4400009020","display_name":"Institute of Science Tokyo","ror":"https://ror.org/05dqf9946","country_code":"JP","type":"education","lineage":["https://openalex.org/I4400009020"]},{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"T. Yamada","raw_affiliation_strings":["Department of Energy Engineering Nagoya University  Nagoya Japan","MDX Research Center for Element Strategy International Research Frontiers Initiative Institute of Science Tokyo  Yokohama Japan"],"raw_orcid":"https://orcid.org/0000-0001-5790-9029","affiliations":[{"raw_affiliation_string":"Department of Energy Engineering Nagoya University  Nagoya Japan","institution_ids":["https://openalex.org/I60134161"]},{"raw_affiliation_string":"MDX Research Center for Element Strategy International Research Frontiers Initiative Institute of Science Tokyo  Yokohama Japan","institution_ids":["https://openalex.org/I4400009020"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5076297403","https://openalex.org/A5077056890","https://openalex.org/A5139462241"],"corresponding_institution_ids":["https://openalex.org/I35440088","https://openalex.org/I4400009020","https://openalex.org/I4405253860","https://openalex.org/I60134161"],"apc_list":{"value":3560,"currency":"USD","value_usd":3560},"apc_paid":{"value":3560,"currency":"USD","value_usd":3560},"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.45745675,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.7167999744415283,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.7167999744415283,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":0.09910000115633011,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.05689999833703041,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wurtzite-ferroelectrics","display_name":"wurtzite ferroelectrics","score":0.9710000157356262},{"id":"https://openalex.org/keywords/electro-optic-effect","display_name":"electro-optic effect","score":0.9100000262260437},{"id":"https://openalex.org/keywords/electro-optic-coefficient","display_name":"electro-optic coefficient","score":0.871999979019165},{"id":"https://openalex.org/keywords/scandium-doping","display_name":"scandium doping","score":0.6340000033378601},{"id":"https://openalex.org/keywords/thin-films","display_name":"thin films","score":0.5379999876022339},{"id":"https://openalex.org/keywords/yttria-stabilized-zirconia-substrate","display_name":"yttria-stabilized zirconia substrate","score":0.8169999718666077},{"id":"https://openalex.org/keywords/rf-magnetron-sputtering","display_name":"RF magnetron sputtering","score":0.7820000052452087},{"id":"https://openalex.org/keywords/remanent-polarization","display_name":"remanent polarization","score":0.7390000224113464},{"id":"https://openalex.org/keywords/photonic-integrated-circuits","display_name":"photonic integrated circuits","score":0.8029999732971191}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.9253000020980835},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.7576000094413757},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6148999929428101},{"id":"https://openalex.org/C3045981","wikidata":"https://www.wikidata.org/wiki/Q8039317","display_name":"Wurtzite crystal structure","level":3,"score":0.5620999932289124},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.43389999866485596},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.4180000126361847},{"id":"https://openalex.org/C32737372","wikidata":"https://www.wikidata.org/wiki/Q417718","display_name":"Indium tin oxide","level":3,"score":0.40380001068115234},{"id":"https://openalex.org/C205049153","wikidata":"https://www.wikidata.org/wiki/Q2698605","display_name":"Polarization (electrochemistry)","level":2,"score":0.3635999858379364},{"id":"https://openalex.org/C110738630","wikidata":"https://www.wikidata.org/wiki/Q1135540","display_name":"Epitaxy","level":3,"score":0.34290000796318054},{"id":"https://openalex.org/C543292547","wikidata":"https://www.wikidata.org/wiki/Q1094","display_name":"Indium","level":2,"score":0.3395000100135803},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.3325999975204468},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.3319999873638153},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.29670000076293945},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.2799000144004822},{"id":"https://openalex.org/C82776694","wikidata":"https://www.wikidata.org/wiki/Q380049","display_name":"Mesoporous material","level":3,"score":0.2671000063419342},{"id":"https://openalex.org/C2778177714","wikidata":"https://www.wikidata.org/wiki/Q898920","display_name":"Chalcogenide","level":2,"score":0.2655999958515167},{"id":"https://openalex.org/C85725439","wikidata":"https://www.wikidata.org/wiki/Q466686","display_name":"Anisotropy","level":2,"score":0.26350000500679016},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.26330000162124634},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.2628999948501587},{"id":"https://openalex.org/C189278905","wikidata":"https://www.wikidata.org/wiki/Q2157708","display_name":"Wide-bandgap semiconductor","level":2,"score":0.25049999356269836}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1002/aelm.202500887","doi":"https://doi.org/10.1002/aelm.202500887","is_oa":true,"landing_page_url":"https://doi.org/10.1002/aelm.202500887","pdf_url":null,"source":{"id":"https://openalex.org/S2765003236","display_name":"Advanced Electronic Materials","issn_l":"2199-160X","issn":["2199-160X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Electronic Materials","raw_type":"journal-article"},{"id":"pmh:oai:www.research-collection.ethz.ch:20.500.11850/802587","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/20.500.11850/802587","pdf_url":null,"source":{"id":"https://openalex.org/S4306402302","display_name":"Repository for Publications and Research Data (ETH Zurich)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I35440088","host_organization_name":"ETH Zurich","host_organization_lineage":["https://openalex.org/I35440088"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Electronic Materials","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:doi:10.3929/ethz-c-000802587","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/20.500.11850/802587","pdf_url":null,"source":null,"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Journal Article"},{"id":"doi:10.3929/ethz-c-000802587","doi":"https://doi.org/10.3929/ethz-c-000802587","is_oa":true,"landing_page_url":"https://doi.org/10.3929/ethz-c-000802587","pdf_url":null,"source":{"id":"https://openalex.org/S7407051236","display_name":"ETH Z\u00fcrich Research Collection","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"Other"}],"best_oa_location":{"id":"doi:10.1002/aelm.202500887","doi":"https://doi.org/10.1002/aelm.202500887","is_oa":true,"landing_page_url":"https://doi.org/10.1002/aelm.202500887","pdf_url":null,"source":{"id":"https://openalex.org/S2765003236","display_name":"Advanced Electronic Materials","issn_l":"2199-160X","issn":["2199-160X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-b","jufo-2","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Advanced Electronic Materials","raw_type":"journal-article"},"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G471578566","display_name":null,"funder_award_id":"JPJSJRP20221504","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G5397364314","display_name":null,"funder_award_id":"22H01523","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G935572523","display_name":null,"funder_award_id":"JPMJCR24R3","funder_id":"https://openalex.org/F4320338075","funder_display_name":"Core Research for Evolutional Science and Technology"},{"id":"https://openalex.org/G98474452","display_name":"\u5206\u6975\u30b9\u30ad\u30eb\u30df\u30aa\u30f3\u306e\u5275\u88fd\u3068\u99c6\u52d5\u5236\u5fa1","funder_award_id":"22K18295","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"},{"id":"https://openalex.org/F4320338075","display_name":"Core Research for Evolutional Science and Technology","ror":"https://ror.org/00097mb19"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":38,"referenced_works":["https://openalex.org/W1625170149","https://openalex.org/W2004170154","https://openalex.org/W2010232780","https://openalex.org/W2012541030","https://openalex.org/W2028056984","https://openalex.org/W2037530588","https://openalex.org/W2045080937","https://openalex.org/W2110561266","https://openalex.org/W2149961875","https://openalex.org/W2181354104","https://openalex.org/W2207758226","https://openalex.org/W2896704624","https://openalex.org/W2913891200","https://openalex.org/W2947731346","https://openalex.org/W2970511493","https://openalex.org/W3019888068","https://openalex.org/W3087452423","https://openalex.org/W3135538360","https://openalex.org/W3187006492","https://openalex.org/W3198199377","https://openalex.org/W4221011894","https://openalex.org/W4280639529","https://openalex.org/W4286776322","https://openalex.org/W4292814084","https://openalex.org/W4304890351","https://openalex.org/W4318309725","https://openalex.org/W4318705092","https://openalex.org/W4384915914","https://openalex.org/W4385635816","https://openalex.org/W4386483241","https://openalex.org/W4389095710","https://openalex.org/W4392761477","https://openalex.org/W4393119460","https://openalex.org/W4400654825","https://openalex.org/W4404924638","https://openalex.org/W4406866344","https://openalex.org/W4407087761","https://openalex.org/W4411375023"],"related_works":[],"abstract_inverted_index":{"ABSTRACT":[0],"Wurtzite":[1],"ferroelectrics,":[2],"such":[3],"as":[4,84],"Sc\u2010doped":[5,42,121,160],"AlN,":[6],"have":[7],"recently":[8],"attracted":[9],"considerable":[10],"attention":[11],"for":[12],"their":[13],"potential":[14,156],"in":[15,117,131],"realizing":[16],"compact":[17],"and":[18,29,71,81],"scalable":[19],"photonic":[20,157],"integrated":[21],"circuits":[22],"due":[23],"to":[24,114,139,143],"the":[25,37,72,85,95,99,108,115,120,155],"remarkable":[26],"remanent":[27],"polarization":[28],"compatibility":[30],"with":[31,54,94],"mainstream":[32],"semiconductor":[33],"processes.":[34],"To":[35],"unveil":[36],"electro\u2010optic":[38],"(EO)":[39],"response,":[40,70],"epitaxial":[41],"AlN":[43,122,161],"thin":[44,63,123,162],"films":[45,64],"were":[46],"grown":[47],"on":[48],"yttria\u2010stabilized":[49],"zirconia":[50],"(111)":[51],"substrates":[52],"covered":[53],"indium":[55],"tin":[56],"oxide":[57],"by":[58],"radio\u2010frequency":[59],"magnetron":[60],"sputtering.":[61],"All":[62],"exhibit":[65],"an":[66],"evident":[67],"linear":[68],"EO":[69,74,136,152],"estimated":[73],"coefficient,":[75],"r":[76],"c":[77],",":[78,148],"initially":[79],"falls":[80],"then":[82],"rises":[83],"Sc":[86,100,132],"content":[87,101,133],"increases,":[88],"a":[89,104,149],"trend":[90],"of":[91,107,119,145,159],"which":[92,111],"agreed":[93],"theoretical":[96],"prediction.":[97],"When":[98],"exceeds":[102],"21%,":[103],"sign":[105],"reversal":[106],"phase":[109],"occurs,":[110],"is":[112],"attributed":[113],"change":[116],"polarity":[118],"films.":[124,163],"These":[125],"results":[126],"suggest":[127],"that":[128,144],"further":[129],"increases":[130],"may":[134],"yield":[135],"response":[137],"comparable":[138],"or":[140],"even":[141],"superior":[142],"LiNbO":[146],"3":[147],"present":[150],"representative":[151],"material,":[153],"expanding":[154],"applications":[158]},"counts_by_year":[],"updated_date":"2026-10-14T16:39:01.820549","created_date":"2026-06-27T00:00:00"}