{"id":"https://openalex.org/W7154917954","doi":"https://doi.org/10.1016/j.surfcoat.2026.133510","title":"On the radiation damage tolerance of multilayer and single-layer coatings within the ZrN/SiNx system subjected to helium ion implantation","display_name":"On the radiation damage tolerance of multilayer and single-layer coatings within the ZrN/SiNx system subjected to helium ion implantation","publication_year":2026,"publication_date":"2026-04-19","ids":{"openalex":"https://openalex.org/W7154917954","doi":"https://doi.org/10.1016/j.surfcoat.2026.133510"},"language":"en","primary_location":{"id":"doi:10.1016/j.surfcoat.2026.133510","doi":"https://doi.org/10.1016/j.surfcoat.2026.133510","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.surfcoat.2026.133510","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.1016/j.surfcoat.2026.133510","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5125314996","display_name":"Nicolas S\u00e9nicourt","orcid":"https://orcid.org/0009-0005-8688-5675","observed_orcids":["https://orcid.org/0009-0005-8688-5675"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171246369","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et d'A\u00e9rotechnique","ror":"https://ror.org/04jx68594","country_code":"FR","type":"facility","lineage":["https://openalex.org/I171246369"]},{"id":"https://openalex.org/I2802931824","display_name":"Institut Pprime","ror":"https://ror.org/05vjdsn22","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790","https://openalex.org/I4210095849"]},{"id":"https://openalex.org/I32881790","display_name":"Universit\u00e9 de Poitiers","ror":"https://ror.org/04xhy8q59","country_code":"FR","type":"education","lineage":["https://openalex.org/I32881790"]},{"id":"https://openalex.org/I4210130800","display_name":"Groupe de Physique des Mat\u00e9riaux","ror":"https://ror.org/03c2k2909","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4210098836","https://openalex.org/I4210105918","https://openalex.org/I4210130800","https://openalex.org/I4210143116","https://openalex.org/I62396329","https://openalex.org/I88814501"]},{"id":"https://openalex.org/I62396329","display_name":"Universit\u00e9 de Rouen Normandie","ror":"https://ror.org/03nhjew95","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210105918","https://openalex.org/I62396329"]},{"id":"https://openalex.org/I88814501","display_name":"Institut National des Sciences Appliqu\u00e9es Rouen Normandie","ror":"https://ror.org/020ws7586","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210105918","https://openalex.org/I88814501"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"N. S\u00e9nicourt","raw_affiliation_strings":["Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France","Univ Rouen Normandie, INSA Rouen Normandie, CNRS, Normandie Univ, GPM UMR 6634, F-76000, Rouen, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790"]},{"raw_affiliation_string":"Univ Rouen Normandie, INSA Rouen Normandie, CNRS, Normandie Univ, GPM UMR 6634, F-76000, Rouen, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210130800","https://openalex.org/I62396329","https://openalex.org/I88814501"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066153531","display_name":"Marie\u2010Laure David","orcid":"https://orcid.org/0000-0003-3207-068X","observed_orcids":["https://orcid.org/0000-0003-3207-068X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171246369","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et d'A\u00e9rotechnique","ror":"https://ror.org/04jx68594","country_code":"FR","type":"facility","lineage":["https://openalex.org/I171246369"]},{"id":"https://openalex.org/I2802931824","display_name":"Institut Pprime","ror":"https://ror.org/05vjdsn22","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790","https://openalex.org/I4210095849"]},{"id":"https://openalex.org/I32881790","display_name":"Universit\u00e9 de Poitiers","ror":"https://ror.org/04xhy8q59","country_code":"FR","type":"education","lineage":["https://openalex.org/I32881790"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"M.-L. David","raw_affiliation_strings":["Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067880144","display_name":"Kenichiro Mizohata","orcid":"https://orcid.org/0000-0003-1703-2247","observed_orcids":["https://orcid.org/0000-0003-1703-2247"]},"institutions":[{"id":"https://openalex.org/I133731052","display_name":"University of Helsinki","ror":"https://ror.org/040af2s02","country_code":"FI","type":"education","lineage":["https://openalex.org/I133731052"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"K. Mizohata","raw_affiliation_strings":["Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland","institution_ids":["https://openalex.org/I133731052"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006675641","display_name":"Frederic Pailloux","orcid":"https://orcid.org/0000-0002-9217-4723","observed_orcids":["https://orcid.org/0000-0002-9217-4723"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171246369","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et d'A\u00e9rotechnique","ror":"https://ror.org/04jx68594","country_code":"FR","type":"facility","lineage":["https://openalex.org/I171246369"]},{"id":"https://openalex.org/I2802931824","display_name":"Institut Pprime","ror":"https://ror.org/05vjdsn22","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790","https://openalex.org/I4210095849"]},{"id":"https://openalex.org/I32881790","display_name":"Universit\u00e9 de Poitiers","ror":"https://ror.org/04xhy8q59","country_code":"FR","type":"education","lineage":["https://openalex.org/I32881790"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"F. Pailloux","raw_affiliation_strings":["Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075325186","display_name":"Kostas Sarakinos","orcid":"https://orcid.org/0000-0003-2864-9509","observed_orcids":["https://orcid.org/0000-0003-2864-9509"]},"institutions":[{"id":"https://openalex.org/I133731052","display_name":"University of Helsinki","ror":"https://ror.org/040af2s02","country_code":"FI","type":"education","lineage":["https://openalex.org/I133731052"]},{"id":"https://openalex.org/I86987016","display_name":"KTH Royal Institute of Technology","ror":"https://ror.org/026vcq606","country_code":"SE","type":"education","lineage":["https://openalex.org/I86987016"]}],"countries":["FI","SE"],"is_corresponding":false,"raw_author_name":"K. Sarakinos","raw_affiliation_strings":["Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland","KTH Royal Institute of Technology, Department of Physics, Roslagstullsbacken 21, 114 21, Stockholm, Sweden"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Physics, University of Helsinki, P.O. Box 43, FI-00014, Helsinki, Finland","institution_ids":["https://openalex.org/I133731052"]},{"raw_affiliation_string":"KTH Royal Institute of Technology, Department of Physics, Roslagstullsbacken 21, 114 21, Stockholm, Sweden","institution_ids":["https://openalex.org/I86987016"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5073206499","display_name":"Christophe Tromas","orcid":"https://orcid.org/0000-0002-4654-026X","observed_orcids":["https://orcid.org/0000-0002-4654-026X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171246369","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et d'A\u00e9rotechnique","ror":"https://ror.org/04jx68594","country_code":"FR","type":"facility","lineage":["https://openalex.org/I171246369"]},{"id":"https://openalex.org/I2802931824","display_name":"Institut Pprime","ror":"https://ror.org/05vjdsn22","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790","https://openalex.org/I4210095849"]},{"id":"https://openalex.org/I32881790","display_name":"Universit\u00e9 de Poitiers","ror":"https://ror.org/04xhy8q59","country_code":"FR","type":"education","lineage":["https://openalex.org/I32881790"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"C. Tromas","raw_affiliation_strings":["Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017815987","display_name":"Philippe Dj\u00e9mia","orcid":"https://orcid.org/0000-0003-4313-8731","observed_orcids":["https://orcid.org/0000-0003-4313-8731"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I4210091279","display_name":"Universit\u00e9 Sorbonne Paris Nord","ror":"https://ror.org/0199hds37","country_code":"FR","type":"education","lineage":["https://openalex.org/I4210091279"]},{"id":"https://openalex.org/I4210115747","display_name":"Laboratoire des Sciences des Proc\u00e9d\u00e9s et des Mat\u00e9riaux","ror":"https://ror.org/01yr0r787","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I4210095849","https://openalex.org/I4210115747"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Ph. Djemia","raw_affiliation_strings":["Laboratoire des Science des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (LSPM), UPR 3407, CNRS \u2013 Universit\u00e9 Sorbonne Paris Nord, 99 Avenue Jean-Baptiste Cl\u00e9ment, 93430, Villetaneuse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire des Science des Proc\u00e9d\u00e9s et des Mat\u00e9riaux (LSPM), UPR 3407, CNRS \u2013 Universit\u00e9 Sorbonne Paris Nord, 99 Avenue Jean-Baptiste Cl\u00e9ment, 93430, Villetaneuse, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I4210091279","https://openalex.org/I4210115747"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014177753","display_name":"G. Abadias","orcid":"https://orcid.org/0000-0001-6801-9937","observed_orcids":["https://orcid.org/0000-0001-6801-9937"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I171246369","display_name":"\u00c9cole Nationale Sup\u00e9rieure de M\u00e9canique et d'A\u00e9rotechnique","ror":"https://ror.org/04jx68594","country_code":"FR","type":"facility","lineage":["https://openalex.org/I171246369"]},{"id":"https://openalex.org/I2802931824","display_name":"Institut Pprime","ror":"https://ror.org/05vjdsn22","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790","https://openalex.org/I4210095849"]},{"id":"https://openalex.org/I32881790","display_name":"Universit\u00e9 de Poitiers","ror":"https://ror.org/04xhy8q59","country_code":"FR","type":"education","lineage":["https://openalex.org/I32881790"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"G. Abadias","raw_affiliation_strings":["Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut Pprime, Universit\u00e9 de Poitiers, CNRS, ISAE-ENSMA, Boulevard Marie et Pierre Curie, 86073, Poitiers, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":11,"corresponding_author_ids":["https://openalex.org/A5125314996"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I171246369","https://openalex.org/I2802931824","https://openalex.org/I32881790","https://openalex.org/I4210130800","https://openalex.org/I62396329","https://openalex.org/I88814501"],"apc_list":{"value":3880,"currency":"USD","value_usd":3880},"apc_paid":{"value":3880,"currency":"USD","value_usd":3880},"fwci":2.2314,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.87266093,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"530","issue":null,"first_page":"133510","last_page":"133510"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10592","display_name":"Fusion materials and technologies","score":0.8999000191688538,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10592","display_name":"Fusion materials and technologies","score":0.8999000191688538,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.054099999368190765,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12506","display_name":"Nuclear materials and radiation effects","score":0.027499999850988388,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/radiation-damage-tolerance","display_name":"radiation damage tolerance","score":0.746999979019165},{"id":"https://openalex.org/keywords/helium-implantation","display_name":"helium implantation","score":0.8899999856948853},{"id":"https://openalex.org/keywords/multilayer-coatings","display_name":"multilayer coatings","score":0.7260000109672546},{"id":"https://openalex.org/keywords/helium-cavities","display_name":"helium cavities","score":0.5389999747276306},{"id":"https://openalex.org/keywords/helium-loss","display_name":"helium loss","score":0.7329999804496765},{"id":"https://openalex.org/keywords/lattice-distortion","display_name":"lattice distortion","score":0.9340000152587891},{"id":"https://openalex.org/keywords/swelling","display_name":"swelling","score":0.4429999887943268},{"id":"https://openalex.org/keywords/interface-effects","display_name":"interface effects","score":0.6159999966621399},{"id":"https://openalex.org/keywords/reactive-magnetron-sputtering","display_name":"reactive magnetron sputtering","score":0.777999997138977}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7576000094413757},{"id":"https://openalex.org/C546029482","wikidata":"https://www.wikidata.org/wiki/Q560","display_name":"Helium","level":2,"score":0.6621999740600586},{"id":"https://openalex.org/C153428861","wikidata":"https://www.wikidata.org/wiki/Q152749","display_name":"Radiation damage","level":3,"score":0.5748000144958496},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.5289000272750854},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4359999895095825},{"id":"https://openalex.org/C111337013","wikidata":"https://www.wikidata.org/wiki/Q2737837","display_name":"Irradiation","level":2,"score":0.42489999532699585},{"id":"https://openalex.org/C2987992536","wikidata":"https://www.wikidata.org/wiki/Q3026015","display_name":"Radiation tolerance","level":3,"score":0.3271999955177307},{"id":"https://openalex.org/C2776656632","wikidata":"https://www.wikidata.org/wiki/Q937837","display_name":"Damage tolerance","level":3,"score":0.2935999929904938},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.29089999198913574},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.28999999165534973},{"id":"https://openalex.org/C153385146","wikidata":"https://www.wikidata.org/wiki/Q18335","display_name":"Radiation","level":2,"score":0.2669999897480011},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.26269999146461487},{"id":"https://openalex.org/C116915560","wikidata":"https://www.wikidata.org/wiki/Q83504","display_name":"Nuclear engineering","level":1,"score":0.26080000400543213}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1016/j.surfcoat.2026.133510","doi":"https://doi.org/10.1016/j.surfcoat.2026.133510","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.surfcoat.2026.133510","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-05766191v1","doi":null,"is_oa":false,"landing_page_url":"https://cnrs.hal.science/hal-05766191","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Surface and Coatings Technology, 2026, 530, pp.133510. &#x27E8;10.1016/j.surfcoat.2026.133510&#x27E9;","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:helda.helsinki.fi:10138/631334","doi":null,"is_oa":true,"landing_page_url":"http://hdl.handle.net/10138/631334","pdf_url":null,"source":{"id":"https://openalex.org/S4210213322","display_name":"Ty\u00f6v\u00e4entutkimus Vuosikirja","issn_l":"0784-1272","issn":["0784-1272","1459-7780"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":["ddh","jufo-1"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"}],"best_oa_location":{"id":"doi:10.1016/j.surfcoat.2026.133510","doi":"https://doi.org/10.1016/j.surfcoat.2026.133510","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.surfcoat.2026.133510","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320317138","display_name":"Laboratoire d'Excellence SEAM","ror":null},{"id":"https://openalex.org/F4320322282","display_name":"Jane ja Aatos Erkon S\u00e4\u00e4ti\u00f6","ror":"https://ror.org/03vxy9y38"},{"id":"https://openalex.org/F4320325966","display_name":"\u00c5Forsk","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":83,"referenced_works":["https://openalex.org/W1963820681","https://openalex.org/W1979616777","https://openalex.org/W1980663136","https://openalex.org/W1981966175","https://openalex.org/W1985473839","https://openalex.org/W1986223716","https://openalex.org/W1988913982","https://openalex.org/W1990740452","https://openalex.org/W1993329261","https://openalex.org/W1993788576","https://openalex.org/W1998492034","https://openalex.org/W2015884246","https://openalex.org/W2020038130","https://openalex.org/W2020040591","https://openalex.org/W2021927974","https://openalex.org/W2029513068","https://openalex.org/W2034284324","https://openalex.org/W2035949822","https://openalex.org/W2037521233","https://openalex.org/W2038958116","https://openalex.org/W2039328728","https://openalex.org/W2039810344","https://openalex.org/W2043533920","https://openalex.org/W2047112437","https://openalex.org/W2047441089","https://openalex.org/W2051261279","https://openalex.org/W2051295325","https://openalex.org/W2051551635","https://openalex.org/W2063509223","https://openalex.org/W2065809215","https://openalex.org/W2067617701","https://openalex.org/W2067916206","https://openalex.org/W2070360259","https://openalex.org/W2071184334","https://openalex.org/W2075406992","https://openalex.org/W2075693498","https://openalex.org/W2076507979","https://openalex.org/W2077928020","https://openalex.org/W2083082818","https://openalex.org/W2083663250","https://openalex.org/W2086529087","https://openalex.org/W2089215005","https://openalex.org/W2096103399","https://openalex.org/W2096661779","https://openalex.org/W2146133080","https://openalex.org/W2171611687","https://openalex.org/W2277339543","https://openalex.org/W2396133849","https://openalex.org/W2509487349","https://openalex.org/W2518459282","https://openalex.org/W2548329234","https://openalex.org/W2569704125","https://openalex.org/W2594414205","https://openalex.org/W2601430972","https://openalex.org/W2754358470","https://openalex.org/W2790706089","https://openalex.org/W2792059030","https://openalex.org/W2792398621","https://openalex.org/W2793095448","https://openalex.org/W2806954344","https://openalex.org/W2885668294","https://openalex.org/W2898791341","https://openalex.org/W2924952537","https://openalex.org/W2955878247","https://openalex.org/W2967257461","https://openalex.org/W2976927927","https://openalex.org/W2979774340","https://openalex.org/W3012387221","https://openalex.org/W3021629510","https://openalex.org/W3038992150","https://openalex.org/W3096796021","https://openalex.org/W3161621769","https://openalex.org/W3164951584","https://openalex.org/W3206913284","https://openalex.org/W4220936063","https://openalex.org/W4280640243","https://openalex.org/W4295135709","https://openalex.org/W4310027143","https://openalex.org/W4362635781","https://openalex.org/W4366246430","https://openalex.org/W4388907813","https://openalex.org/W4406572981","https://openalex.org/W4408134509"],"related_works":["https://openalex.org/W2951231943","https://openalex.org/W2793095448","https://openalex.org/W4280615786","https://openalex.org/W2594414205","https://openalex.org/W4311076442","https://openalex.org/W4323313979","https://openalex.org/W3027614280","https://openalex.org/W7127904259","https://openalex.org/W3038992150","https://openalex.org/W4408072678"],"abstract_inverted_index":{"We":[0],"report":[1],"on":[2,189],"the":[3,102,131,157,190,208,236],"microstructural":[4,94],"evolution":[5],"of":[6,32,65,107,126,151,173,201,232],"ZrN/SiN":[7,76],"x":[8,24,77,88,119,219],"bilayers":[9],"and":[10,22,41,51,61,89,181,214,230],"multilayers":[11],"after":[12,96],"He":[13,97,133,209],"ions":[14],"implantation,":[15],"comparatively":[16],"to":[17,164],"their":[18,59],"monolithic":[19,129,165,222],"(i.e.,":[20],"ZrN":[21,91,213,221],"SiN":[23,87,118,218],")":[25],"counterparts.":[26],"Films":[27],"with":[28,109,193],"a":[29,169,226],"total":[30],"thickness":[31,204],"300":[33],"nm":[34,114,197],"are":[35,79,99],"synthesized":[36],"by":[37,43,81,122,225],"reactive":[38],"magnetron":[39],"sputtering,":[40],"characterized":[42,80,224],"X-ray":[44],"diffraction":[45],"(XRD),":[46],"transmission":[47],"electron":[48],"microscopy":[49],"(TEM)":[50],"time-of-flight":[52],"elastic":[53],"recoil":[54],"detection":[55],"analysis":[56],"(ToF-ERDA)":[57],"in":[58,117,146,168],"as-deposited":[60,74],"implanted":[62,132,191],"states":[63],"(fluence":[64],"7":[66],"\u00d7":[67],"10":[68,113],"16":[69],"ions/cm":[70],"2":[71],").":[72],"The":[73,105,149],"multilayer":[75,192],"films":[78],"sharp":[82],"interfaces":[83,152],"that":[84],"delineate":[85],"amorphous":[86],"polycrystalline":[90],"layers.":[92],"Distinct":[93],"evolutions":[95],"implantation":[98],"revealed":[100],"for":[101,175,212,217],"constitutive":[103],"single-layers.":[104],"formation":[106],"cavities":[108],"typical":[110],"size":[111],"around":[112],"is":[115],"observed":[116],",":[120],"accompanied":[121],"an":[123],"extensive":[124],"loss":[125],"He.":[127],"For":[128],"ZrN,":[130],"does":[134,153],"not":[135,154],"induce":[136],"any":[137],"visible":[138],"extended":[139],"defects,":[140],"but":[141],"causes":[142],"lattice":[143],"distortion,":[144],"especially":[145],"<111>-oriented":[147],"grains.":[148],"presence":[150],"significantly":[155],"alter":[156],"overall":[158],"radiation":[159,238],"damage":[160,215],"response":[161],"(in":[162],"relation":[163],"films),":[166],"resulting":[167],"relative":[170],"macroscopic":[171],"swelling":[172],"10\u201315%":[174],"bilayer":[176],"periods":[177],"\u039b":[178,194],"between":[179],"8":[180],"42":[182],"nm.":[183],"A":[184],"detailed":[185],"TEM":[186],"investigation":[187],"performed":[188],"=":[195],"20":[196],"reveals":[198],"different":[199],"depth-profiles":[200],"individual":[202],"layer":[203],"expansion,":[205],"originating":[206],"from":[207],"concentration":[210],"profile":[211,216],".":[220],"films,":[223],"columnar":[227],"growth":[228],"morphology":[229],"exempt":[231],"He-induced":[233],"cavities,":[234],"show":[235],"best":[237],"resistance.":[239]},"counts_by_year":[{"year":2026,"cited_by_count":2}],"updated_date":"2026-10-31T12:09:11.096373","created_date":"2026-04-20T00:00:00"}
