{"id":"https://openalex.org/W7134885710","doi":"https://doi.org/10.1109/elcon-mn69838.2026.11417094","title":"Technology of Vacuum Deposition of Combined Thin-film Precision Strain Gauges with Temperature Self-compensation","display_name":"Technology of Vacuum Deposition of Combined Thin-film Precision Strain Gauges with Temperature Self-compensation","publication_year":2026,"publication_date":"2026-02-03","ids":{"openalex":"https://openalex.org/W7134885710","doi":"https://doi.org/10.1109/elcon-mn69838.2026.11417094"},"language":"en","primary_location":{"id":"doi:10.1109/elcon-mn69838.2026.11417094","doi":"https://doi.org/10.1109/elcon-mn69838.2026.11417094","is_oa":false,"landing_page_url":"https://doi.org/10.1109/elcon-mn69838.2026.11417094","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 ElCon Conference of Young Researchers in Micro and Nanoelectronics, Electrical Engineering Materials, Plasmas and Fields, Photonics and Electro-Optics (ElCon-MN)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5034426024","display_name":"\u0421\u0435\u0440\u0433\u0435\u0439 \u0410\u043b\u0435\u043a\u0441\u0430\u043d\u0434\u0440\u043e\u0432\u0438\u0447 \u0413\u0443\u0440\u0438\u043d","orcid":"https://orcid.org/0000-0001-9602-7221","observed_orcids":["https://orcid.org/0000-0001-9602-7221"]},"institutions":[{"id":"https://openalex.org/I114616248","display_name":"Penza State University","ror":"https://ror.org/056r5vk88","country_code":"RU","type":"education","lineage":["https://openalex.org/I114616248"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Sergey A. Gurin","raw_affiliation_strings":["Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia","institution_ids":["https://openalex.org/I114616248"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044171192","display_name":"Anastasia E. Shepeleva","orcid":"https://orcid.org/0000-0002-8600-084X","observed_orcids":["https://orcid.org/0000-0002-8600-084X"]},"institutions":[{"id":"https://openalex.org/I114616248","display_name":"Penza State University","ror":"https://ror.org/056r5vk88","country_code":"RU","type":"education","lineage":["https://openalex.org/I114616248"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Anastasia E. Shepeleva","raw_affiliation_strings":["Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia","institution_ids":["https://openalex.org/I114616248"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068728889","display_name":"\u041c\u0430\u043a\u0441\u0438\u043c \u0414\u043c\u0438\u0442\u0440\u0438\u0435\u0432\u0438\u0447 \u041d\u043e\u0432\u0438\u0447\u043a\u043e\u0432","orcid":"https://orcid.org/0000-0001-9319-2475","observed_orcids":["https://orcid.org/0000-0001-9319-2475"]},"institutions":[{"id":"https://openalex.org/I114616248","display_name":"Penza State University","ror":"https://ror.org/056r5vk88","country_code":"RU","type":"education","lineage":["https://openalex.org/I114616248"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Maksim D. Novichkov","raw_affiliation_strings":["Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia","institution_ids":["https://openalex.org/I114616248"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065904826","display_name":"Ekaterina A. Pecherskaya","orcid":"https://orcid.org/0000-0001-5657-9128","observed_orcids":["https://orcid.org/0000-0001-5657-9128"]},"institutions":[{"id":"https://openalex.org/I114616248","display_name":"Penza State University","ror":"https://ror.org/056r5vk88","country_code":"RU","type":"education","lineage":["https://openalex.org/I114616248"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Ekaterina A. Pecherskaya","raw_affiliation_strings":["Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Penza State University,Department of Information and Measurement Technology and Metrology,Penza,Russia","institution_ids":["https://openalex.org/I114616248"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037135614","display_name":"\u0414\u043c\u0438\u0442\u0440\u0438\u0439 \u0412\u044f\u0447\u0435\u0441\u043b\u0430\u0432\u043e\u0432\u0438\u0447 \u0410\u0433\u0430\u0444\u043e\u043d\u043e\u0432","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114616248","display_name":"Penza State University","ror":"https://ror.org/056r5vk88","country_code":"RU","type":"education","lineage":["https://openalex.org/I114616248"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Dmitry V. Agafonov","raw_affiliation_strings":["Penza State University,Department of Instrument Engineering,Penza,Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Penza State University,Department of Instrument Engineering,Penza,Russia","institution_ids":["https://openalex.org/I114616248"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5051195139","display_name":"\u0412\u043e\u043b\u043a\u043e\u0432 \u0412\u0430\u0434\u0438\u043c \u0421\u0435\u0440\u0433\u0435\u0435\u0432\u0438\u0447","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I114616248","display_name":"Penza State University","ror":"https://ror.org/056r5vk88","country_code":"RU","type":"education","lineage":["https://openalex.org/I114616248"]}],"countries":["RU"],"is_corresponding":false,"raw_author_name":"Vadim S. Volkov","raw_affiliation_strings":["Penza State University,Department of Instrument Engineering,Penza,Russia"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Penza State University,Department of Instrument Engineering,Penza,Russia","institution_ids":["https://openalex.org/I114616248"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I114616248"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"104","last_page":"109"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9282000064849854,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9282000064849854,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.02280000038444996,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.015799999237060547,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/vacuum-deposition","display_name":"vacuum deposition","score":0.8600000143051147},{"id":"https://openalex.org/keywords/thin-film-strain-gauges","display_name":"thin-film strain gauges","score":0.9760000109672546},{"id":"https://openalex.org/keywords/temperature-self-compensation","display_name":"temperature self-compensation","score":0.8889999985694885}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6151999831199646},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4722999930381775},{"id":"https://openalex.org/C2778022156","wikidata":"https://www.wikidata.org/wiki/Q576145","display_name":"Strain (injury)","level":2,"score":0.4415999948978424},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.42730000615119934},{"id":"https://openalex.org/C72293138","wikidata":"https://www.wikidata.org/wiki/Q909741","display_name":"Temperature measurement","level":2,"score":0.39629998803138733},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.34459999203681946},{"id":"https://openalex.org/C60584519","wikidata":"https://www.wikidata.org/wiki/Q610723","display_name":"Strain gauge","level":2,"score":0.3244999945163727},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.3174000084400177},{"id":"https://openalex.org/C168068576","wikidata":"https://www.wikidata.org/wiki/Q190241","display_name":"Thermocouple","level":2,"score":0.3149000108242035},{"id":"https://openalex.org/C2779222261","wikidata":"https://www.wikidata.org/wiki/Q624587","display_name":"Thermography","level":3,"score":0.28209999203681946},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.2628999948501587}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/elcon-mn69838.2026.11417094","doi":"https://doi.org/10.1109/elcon-mn69838.2026.11417094","is_oa":false,"landing_page_url":"https://doi.org/10.1109/elcon-mn69838.2026.11417094","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 ElCon Conference of Young Researchers in Micro and Nanoelectronics, Electrical Engineering Materials, Plasmas and Fields, Photonics and Electro-Optics (ElCon-MN)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320327494","display_name":"Ministry of Science and Higher Education of the Russian Federation","ror":null}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":23,"referenced_works":["https://openalex.org/W1985561562","https://openalex.org/W2035430549","https://openalex.org/W2036316265","https://openalex.org/W2045548664","https://openalex.org/W2076533332","https://openalex.org/W2344285062","https://openalex.org/W3106491755","https://openalex.org/W3130179793","https://openalex.org/W3160497135","https://openalex.org/W3195080033","https://openalex.org/W3198393790","https://openalex.org/W3216574192","https://openalex.org/W4311176846","https://openalex.org/W4311899369","https://openalex.org/W4318141646","https://openalex.org/W4362504277","https://openalex.org/W4362504289","https://openalex.org/W4386987674","https://openalex.org/W4393219193","https://openalex.org/W4399139670","https://openalex.org/W4400427953","https://openalex.org/W4404048375","https://openalex.org/W4405987913"],"related_works":["https://openalex.org/W4407136166","https://openalex.org/W4239726247","https://openalex.org/W4311413356","https://openalex.org/W2748742499","https://openalex.org/W4400427953","https://openalex.org/W3111360391","https://openalex.org/W2225817214","https://openalex.org/W4239983653","https://openalex.org/W4247675346","https://openalex.org/W3038580463"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-28T10:33:24.094632","created_date":"2026-03-12T00:00:00"}