{"id":"https://openalex.org/W7129325587","doi":"https://doi.org/10.1016/j.mssp.2026.110542","title":"N-doped Ge-rich GST film crystallization via C-AFM-generated electrical pulses","display_name":"N-doped Ge-rich GST film crystallization via C-AFM-generated electrical pulses","publication_year":2026,"publication_date":"2026-02-17","ids":{"openalex":"https://openalex.org/W7129325587","doi":"https://doi.org/10.1016/j.mssp.2026.110542"},"language":"en","primary_location":{"id":"doi:10.1016/j.mssp.2026.110542","doi":"https://doi.org/10.1016/j.mssp.2026.110542","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mssp.2026.110542","pdf_url":null,"source":{"id":"https://openalex.org/S82126420","display_name":"Materials Science in Semiconductor Processing","issn_l":"1369-8001","issn":["1369-8001","1873-4081"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science in Semiconductor Processing","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hal.science/hal-05786461","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5033918210","display_name":"Chaymaa Boujrouf","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210112016","display_name":"Institut des Mat\u00e9riaux, de Micro\u00e9lectronique et des Nanosciences de Provence","ror":"https://ror.org/0238zyh04","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I143002897","https://openalex.org/I21491767","https://openalex.org/I4210098836","https://openalex.org/I4210112016","https://openalex.org/I4387153205"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Chaymaa Boujrouf","raw_affiliation_strings":["Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027738561","display_name":"M. Bocquet","orcid":"https://orcid.org/0000-0003-3777-5793","observed_orcids":["https://orcid.org/0000-0003-3777-5793"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210112016","display_name":"Institut des Mat\u00e9riaux, de Micro\u00e9lectronique et des Nanosciences de Provence","ror":"https://ror.org/0238zyh04","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I143002897","https://openalex.org/I21491767","https://openalex.org/I4210098836","https://openalex.org/I4210112016","https://openalex.org/I4387153205"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Marc Bocquet","raw_affiliation_strings":["Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092993331","display_name":"Siham Hassak","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210112016","display_name":"Institut des Mat\u00e9riaux, de Micro\u00e9lectronique et des Nanosciences de Provence","ror":"https://ror.org/0238zyh04","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I143002897","https://openalex.org/I21491767","https://openalex.org/I4210098836","https://openalex.org/I4210112016","https://openalex.org/I4387153205"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Siham Hassak","raw_affiliation_strings":["Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5047413496","display_name":"M. Bertoglio","orcid":"https://orcid.org/0000-0003-1128-2683","observed_orcids":["https://orcid.org/0000-0003-1128-2683"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210112016","display_name":"Institut des Mat\u00e9riaux, de Micro\u00e9lectronique et des Nanosciences de Provence","ror":"https://ror.org/0238zyh04","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I143002897","https://openalex.org/I21491767","https://openalex.org/I4210098836","https://openalex.org/I4210112016","https://openalex.org/I4387153205"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Maxime Bertoglio","raw_affiliation_strings":["Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110702430","display_name":"Lo\u00efc Patout","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210112016","display_name":"Institut des Mat\u00e9riaux, de Micro\u00e9lectronique et des Nanosciences de Provence","ror":"https://ror.org/0238zyh04","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I143002897","https://openalex.org/I21491767","https://openalex.org/I4210098836","https://openalex.org/I4210112016","https://openalex.org/I4387153205"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Lo\u00efc Patout","raw_affiliation_strings":["Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5126246129","display_name":"Yannick Le Friec","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210104693","display_name":"STMicroelectronics (France)","ror":"https://ror.org/01c74sd89","country_code":"FR","type":"company","lineage":["https://openalex.org/I131827901","https://openalex.org/I4210104693"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"Yannick Le Friec","raw_affiliation_strings":["STMicroelectronics, 850 rue Jean Monnet, 38920, Crolles, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"STMicroelectronics, 850 rue Jean Monnet, 38920, Crolles, France","institution_ids":["https://openalex.org/I4210104693"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029586322","display_name":"A. Portavoce","orcid":"https://orcid.org/0000-0002-6390-1637","observed_orcids":["https://orcid.org/0000-0002-6390-1637"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I21491767","display_name":"Aix-Marseille Universit\u00e9","ror":"https://ror.org/035xkbk20","country_code":"FR","type":"education","lineage":["https://openalex.org/I21491767"]},{"id":"https://openalex.org/I4210112016","display_name":"Institut des Mat\u00e9riaux, de Micro\u00e9lectronique et des Nanosciences de Provence","ror":"https://ror.org/0238zyh04","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I143002897","https://openalex.org/I21491767","https://openalex.org/I4210098836","https://openalex.org/I4210112016","https://openalex.org/I4387153205"]}],"countries":["FR"],"is_corresponding":true,"raw_author_name":"Alain Portavoce","raw_affiliation_strings":["Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France"],"raw_orcid":"https://orcid.org/0000-0002-6390-1637","affiliations":[{"raw_affiliation_string":"Aix-Marseille University, CNRS, IM2NP, Facult\u00e9 des Sciences de St. J\u00e9r\u00f4me, case 142, 13397, Marseille, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5029586322"],"corresponding_institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I21491767","https://openalex.org/I4210112016"],"apc_list":{"value":3540,"currency":"USD","value_usd":3540},"apc_paid":null,"fwci":2.2314,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.85067156,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"208","issue":null,"first_page":"110542","last_page":"110542"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11315","display_name":"Phase-change materials and chalcogenides","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11128","display_name":"Transition Metal Oxide Nanomaterials","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ge-sb-te-alloys","display_name":"Ge-Sb-Te alloys","score":0.8140000104904175},{"id":"https://openalex.org/keywords/phase-change-memory","display_name":"phase-change memory","score":0.8629999756813049},{"id":"https://openalex.org/keywords/amorphous-to-crystalline-transition","display_name":"amorphous-to-crystalline transition","score":0.925000011920929},{"id":"https://openalex.org/keywords/conductive-atomic-force-microscopy","display_name":"conductive atomic force microscopy","score":0.8939999938011169},{"id":"https://openalex.org/keywords/electrical-pulses","display_name":"electric pulses","score":0.7020000219345093},{"id":"https://openalex.org/keywords/nitrogen-doping","display_name":"nitrogen doping","score":0.6919999718666077},{"id":"https://openalex.org/keywords/ge-segregation","display_name":"Ge segregation","score":0.7440000176429749},{"id":"https://openalex.org/keywords/phase-separation","display_name":"phase separation","score":0.8690000176429749},{"id":"https://openalex.org/keywords/element-diffusion","display_name":"element diffusion","score":0.7239999771118164},{"id":"https://openalex.org/keywords/electrical-stress","display_name":"electrical stress","score":0.5450000166893005},{"id":"https://openalex.org/keywords/void-formation","display_name":"void formation","score":0.5809999704360962},{"id":"https://openalex.org/keywords/resistivity-reduction","display_name":"resistivity reduction","score":0.5889999866485596},{"id":"https://openalex.org/keywords/nanocrystals","display_name":"nanocrystals","score":0.734000027179718}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8812999725341797},{"id":"https://openalex.org/C61048295","wikidata":"https://www.wikidata.org/wiki/Q909022","display_name":"Nucleation","level":2,"score":0.7685999870300293},{"id":"https://openalex.org/C203036418","wikidata":"https://www.wikidata.org/wiki/Q284256","display_name":"Crystallization","level":2,"score":0.7268000245094299},{"id":"https://openalex.org/C69990965","wikidata":"https://www.wikidata.org/wiki/Q65402698","display_name":"Electrical resistivity and conductivity","level":2,"score":0.5224999785423279},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.5116999745368958},{"id":"https://openalex.org/C146088050","wikidata":"https://www.wikidata.org/wiki/Q744818","display_name":"Transmission electron microscopy","level":2,"score":0.4796999990940094},{"id":"https://openalex.org/C159467904","wikidata":"https://www.wikidata.org/wiki/Q2001702","display_name":"Chemical physics","level":1,"score":0.42809998989105225},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.41290000081062317},{"id":"https://openalex.org/C132235601","wikidata":"https://www.wikidata.org/wiki/Q394001","display_name":"Electrical contacts","level":2,"score":0.39750000834465027},{"id":"https://openalex.org/C2776921476","wikidata":"https://www.wikidata.org/wiki/Q5283","display_name":"Diamond","level":2,"score":0.3837999999523163},{"id":"https://openalex.org/C200902554","wikidata":"https://www.wikidata.org/wiki/Q4817332","display_name":"Atomic diffusion","level":2,"score":0.34790000319480896},{"id":"https://openalex.org/C49110097","wikidata":"https://www.wikidata.org/wiki/Q175233","display_name":"Cathode","level":2,"score":0.34709998965263367},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3357999920845032},{"id":"https://openalex.org/C74080474","wikidata":"https://www.wikidata.org/wiki/Q7305975","display_name":"Redistribution (election)","level":3,"score":0.3352000117301941},{"id":"https://openalex.org/C175854130","wikidata":"https://www.wikidata.org/wiki/Q98276914","display_name":"Nanocrystal","level":2,"score":0.32850000262260437},{"id":"https://openalex.org/C149288129","wikidata":"https://www.wikidata.org/wiki/Q185357","display_name":"Phase transition","level":2,"score":0.3269999921321869},{"id":"https://openalex.org/C206008964","wikidata":"https://www.wikidata.org/wiki/Q5159384","display_name":"Conductive atomic force microscopy","level":3,"score":0.3172999918460846},{"id":"https://openalex.org/C205049153","wikidata":"https://www.wikidata.org/wiki/Q2698605","display_name":"Polarization (electrochemistry)","level":2,"score":0.31189998984336853},{"id":"https://openalex.org/C69357855","wikidata":"https://www.wikidata.org/wiki/Q163214","display_name":"Diffusion","level":2,"score":0.3098999857902527},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.30300000309944153},{"id":"https://openalex.org/C202374169","wikidata":"https://www.wikidata.org/wiki/Q124291","display_name":"Electrical conductor","level":2,"score":0.30140000581741333},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.29409998655319214},{"id":"https://openalex.org/C104232198","wikidata":"https://www.wikidata.org/wiki/Q865807","display_name":"Charge carrier","level":2,"score":0.28949999809265137},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.2881999909877777},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2718000113964081},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.26269999146461487},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.2567000091075897},{"id":"https://openalex.org/C138999460","wikidata":"https://www.wikidata.org/wiki/Q787619","display_name":"Solid solution","level":2,"score":0.2565000057220459},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.25529998540878296},{"id":"https://openalex.org/C57410435","wikidata":"https://www.wikidata.org/wiki/Q505668","display_name":"Chemical vapor deposition","level":2,"score":0.2524000108242035}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1016/j.mssp.2026.110542","doi":"https://doi.org/10.1016/j.mssp.2026.110542","is_oa":false,"landing_page_url":"https://doi.org/10.1016/j.mssp.2026.110542","pdf_url":null,"source":{"id":"https://openalex.org/S82126420","display_name":"Materials Science in Semiconductor Processing","issn_l":"1369-8001","issn":["1369-8001","1873-4081"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-1"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Science in Semiconductor Processing","raw_type":"journal-article"},{"id":"pmh:oai:HAL:hal-05786461v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/hal-05786461","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Materials Science in Semiconductor Processing, 2026, 208, pp.110542. ⟨10.1016/j.mssp.2026.110542⟩","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:HAL:hal-05786461v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/hal-05786461","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Materials Science in Semiconductor Processing, 2026, 208, pp.110542. ⟨10.1016/j.mssp.2026.110542⟩","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":43,"referenced_works":["https://openalex.org/W144946662","https://openalex.org/W1554445477","https://openalex.org/W1632540443","https://openalex.org/W1636718822","https://openalex.org/W1970354021","https://openalex.org/W1974721853","https://openalex.org/W1976198489","https://openalex.org/W1992476313","https://openalex.org/W2001874434","https://openalex.org/W2020562415","https://openalex.org/W2026711225","https://openalex.org/W2027628493","https://openalex.org/W2040045500","https://openalex.org/W2040661674","https://openalex.org/W2047220345","https://openalex.org/W2047320055","https://openalex.org/W2052033120","https://openalex.org/W2057437921","https://openalex.org/W2057505827","https://openalex.org/W2066737802","https://openalex.org/W2070645969","https://openalex.org/W2076576793","https://openalex.org/W2078839410","https://openalex.org/W2130322959","https://openalex.org/W2303043972","https://openalex.org/W2322347583","https://openalex.org/W2331099973","https://openalex.org/W2334703353","https://openalex.org/W2335983334","https://openalex.org/W2461668363","https://openalex.org/W2770092588","https://openalex.org/W2775673596","https://openalex.org/W3005981473","https://openalex.org/W3024729689","https://openalex.org/W3135130820","https://openalex.org/W3174914786","https://openalex.org/W4224280091","https://openalex.org/W4224862006","https://openalex.org/W4365137998","https://openalex.org/W4400768583","https://openalex.org/W4403216149","https://openalex.org/W4403981586","https://openalex.org/W4409148108"],"related_works":["https://openalex.org/W7045701318","https://openalex.org/W2586837629","https://openalex.org/W3107965522","https://openalex.org/W2332903064","https://openalex.org/W4316661309","https://openalex.org/W4400768583","https://openalex.org/W4386559207","https://openalex.org/W4403496048","https://openalex.org/W7164420754","https://openalex.org/W3160832946"],"abstract_inverted_index":null,"counts_by_year":[{"year":2026,"cited_by_count":2}],"updated_date":"2026-10-29T09:56:32.521200","created_date":"2026-02-18T00:00:00"}