{"id":"https://openalex.org/W6918171","doi":"https://doi.org/10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","title":"Electrical characterization and modeling of low dimensional nanostructure FET","display_name":"Electrical characterization and modeling of low dimensional nanostructure FET","publication_year":2011,"publication_date":"2011-12-05","ids":{"openalex":"https://openalex.org/W6918171","doi":"https://doi.org/10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","mag":"6918171"},"language":"en","primary_location":{"id":"doi:10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","doi":"https://doi.org/10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","is_oa":false,"landing_page_url":"https://doi.org/10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","pdf_url":null,"source":{"id":"https://openalex.org/S4406923047","display_name":"theses.fr (ABES)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Grenoble","raw_type":"dissertation"},"volume":null,"type":"dissertation","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"http://www.theses.fr/2011GRENT070/document","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100415733","display_name":"Jae Woo Lee","orcid":"https://orcid.org/0000-0002-4876-3109","observed_orcids":["https://orcid.org/0000-0002-4876-3109","https://orcid.org/0009-0005-4449-3358"]},"institutions":[{"id":"https://openalex.org/I197347611","display_name":"Korea University","ror":"https://ror.org/047dqcg40","country_code":"KR","type":"education","lineage":["https://openalex.org/I197347611"]},{"id":"https://openalex.org/I4210161052","display_name":"Korea University","ror":"https://ror.org/05m1gnk07","country_code":"JP","type":"education","lineage":["https://openalex.org/I4210161052"]}],"countries":["JP","KR"],"is_corresponding":true,"raw_author_name":"Jae Woo Lee","raw_affiliation_strings":["Grenoble","Nano Device Laboratory, Korea University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Grenoble","institution_ids":[]},{"raw_affiliation_string":"Nano Device Laboratory, Korea University","institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5100415733"],"corresponding_institution_ids":["https://openalex.org/I197347611","https://openalex.org/I4210161052"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11272","display_name":"Nanowire Synthesis and Applications","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/finfet","display_name":"FinFET","score":0.7789999842643738},{"id":"https://openalex.org/keywords/surface-roughness-scattering","display_name":"surface roughness scattering","score":0.9200000166893005},{"id":"https://openalex.org/keywords/effective-mobility","display_name":"effective mobility","score":0.7260000109672546},{"id":"https://openalex.org/keywords/low-temperature-measurement","display_name":"low-temperature measurement","score":0.6010000109672546},{"id":"https://openalex.org/keywords/strain-engineering","display_name":"strain engineering","score":0.984000027179718},{"id":"https://openalex.org/keywords/dopant-diffusion","display_name":"dopant diffusion","score":0.8460000157356262},{"id":"https://openalex.org/keywords/short-channel-effects","display_name":"short-channel effects","score":0.9869999885559082},{"id":"https://openalex.org/keywords/impurity-scattering","display_name":"impurity scattering","score":0.8830000162124634},{"id":"https://openalex.org/keywords/junctionless-fet","display_name":"junctionless FET","score":0.925000011920929},{"id":"https://openalex.org/keywords/nanoscale-device-fabrication","display_name":"nanoscale device fabrication","score":0.6830000281333923},{"id":"https://openalex.org/keywords/lithography","display_name":"lithography","score":0.871999979019165},{"id":"https://openalex.org/keywords/etching","display_name":"etching","score":0.9399999976158142}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.767818033695221},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.7635012865066528},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.7016695737838745},{"id":"https://openalex.org/C2780841128","wikidata":"https://www.wikidata.org/wiki/Q5073781","display_name":"Characterization (materials science)","level":2,"score":0.6326951384544373},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5771635174751282},{"id":"https://openalex.org/C74214498","wikidata":"https://www.wikidata.org/wiki/Q631739","display_name":"Nanowire","level":2,"score":0.5717058777809143},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.5180842876434326},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.48954519629478455},{"id":"https://openalex.org/C106782819","wikidata":"https://www.wikidata.org/wiki/Q6501076","display_name":"Electron mobility","level":2,"score":0.462540864944458},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.41887959837913513},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.34569501876831055},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.10697603225708008},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.10111457109451294},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07413750886917114},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","doi":"https://doi.org/10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","is_oa":false,"landing_page_url":"https://doi.org/10.70675/b92cd2ebzadf6z4e40za514z5da3d54a7737","pdf_url":null,"source":{"id":"https://openalex.org/S4406923047","display_name":"theses.fr (ABES)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Grenoble","raw_type":"dissertation"},{"id":"pmh:2011GRENT070","doi":null,"is_oa":true,"landing_page_url":"http://www.theses.fr/2011GRENT070/document","pdf_url":null,"source":{"id":"https://openalex.org/S4406923047","display_name":"theses.fr (ABES)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Electronic Thesis or Dissertation"},{"id":"pmh:hdl:10068/884085","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/10068/884085","pdf_url":null,"source":{"id":"https://openalex.org/S4377196900","display_name":"OpenGrey (Institut de l'Information Scientifique et Technique)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1295345811","host_organization_name":"Institut de l'Information Scientifique et Technique","host_organization_lineage":["https://openalex.org/I1295345811"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"U - Thesis"},{"id":"pmh:oai:HAL:tel-00666486v1","doi":null,"is_oa":true,"landing_page_url":"https://theses.hal.science/tel-00666486","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micro and nanotechnologies/Microelectronics. Universit\u00e9 de Grenoble; & Korea University, 2011. English. &#x27E8;NNT : &#x27E9;","raw_type":"info:eu-repo/semantics/doctoralThesis"},{"id":"pmh:oai:HAL:tel-00767413v1","doi":null,"is_oa":true,"landing_page_url":"https://theses.hal.science/tel-00767413","pdf_url":null,"source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Autre. Universit\u00e9 de Grenoble; 239 - Korea University, 2011. Fran\u00e7ais. &#x27E8;NNT : 2011GRENT070&#x27E9;","raw_type":"info:eu-repo/semantics/doctoralThesis"}],"best_oa_location":{"id":"pmh:2011GRENT070","doi":null,"is_oa":true,"landing_page_url":"http://www.theses.fr/2011GRENT070/document","pdf_url":null,"source":{"id":"https://openalex.org/S4406923047","display_name":"theses.fr (ABES)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Electronic Thesis or Dissertation"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1534315188","https://openalex.org/W1975240089","https://openalex.org/W1980063496","https://openalex.org/W2024083787","https://openalex.org/W2031993501","https://openalex.org/W2040074812","https://openalex.org/W2041868052","https://openalex.org/W2066896114","https://openalex.org/W2139880268"],"related_works":["https://openalex.org/W2139880268","https://openalex.org/W2024083787","https://openalex.org/W2168170862","https://openalex.org/W2029311794","https://openalex.org/W2165179206","https://openalex.org/W1979273136","https://openalex.org/W2785688289","https://openalex.org/W2124814536","https://openalex.org/W4388230853","https://openalex.org/W2124962831"],"abstract_inverted_index":{"At":[0],"the":[1,24,41,46,63,96,98,104,112,119,150,162,204,229,270,289,296,313,367,400,409,422,439,463],"beginning":[2],"of":[3,40,57,83,109,177,207,222,234,345,366,428,446,465],"this":[4,194],"thesis,":[5],"basic":[6,444],"and":[7,20,129,184,483],"advanced":[8,47],"device":[9,43,48,266,310,447,468],"fabrication":[10],"process":[11,100],"which":[12],"I":[13],"haveexperienced":[14],"during":[15],"study":[16,195],"such":[17,76,476],"as":[18,77,316,386,477],"top-down":[19],"bottom-up":[21],"approach":[22],"for":[23,203,228,295,378,462,474],"nanoscale":[25],"devicefabrication":[26],"technique":[27,50,202,458],"have":[28,73,155,352,449,459,471],"been":[29,52,60,74,226,240,384,450,460,472],"described.":[30],"Especially,":[31,158],"lithography":[32],"technology":[33],"has":[34,51,59,165,219,225,239,319,332,383],"beenfocused":[35],"because":[36,338],"it":[37,284,323],"is":[38,81,92,189,292,306,324,342,361,376,406],"base":[39],"modern":[42],"fabrication.":[44],"For":[45,62,348],"structure,etching":[49],"investigated":[53,385],"in":[54,66,141,159,167,262,277,396,408,442],"detail.The":[55],"characterization":[56,191],"FET":[58,305,318,330,341],"introduced.":[61],"practical":[64],"consideration":[65],"theadvanced":[67],"FET,":[68],"several":[69],"parameter":[70],"extraction":[71],"techniques":[72],"introduced":[75,461],"Yfunction,split":[78],"C-V":[79],"etc.FinFET":[80],"one":[82],"promising":[84],"alternatives":[85],"against":[86],"conventional":[87],"planar":[88],"devices.":[89],"Problem":[90],"ofFinFET":[91],"surface":[93,115,131,154,368,401],"roughness.":[94],"During":[95],"fabrication,":[97],"etching":[99],"induces":[101],"surfaceroughness":[102,178],"on":[103,152,421],"sidewall":[105,128,163,183],"surfaces.":[106],"Surface":[107],"roughness":[108,116,200],"channel":[110,249,264,302,335,346],"decreases":[111],"effectivemobility":[113],"by":[114,237,327,415],"scattering.":[117],"With":[118],"low":[120],"temperature":[121,143],"measurement":[122,201],"andmobility":[123],"analysis,":[124],"drain":[125],"current":[126,252],"through":[127],"top":[130,174,185],"was":[132,179,253,275,394],"separated.":[133],"From":[134],"theseparated":[135],"currents,":[136],"effective":[137,230],"mobilities":[138],"were":[139],"extracted":[140],"each":[142,153],"conditions.":[144],"Astemperature":[145],"lowering,":[146],"mobility":[147,164,231,260,297],"behaviors":[148],"from":[149,269,438],"transport":[151],"differenttemperature":[156],"dependence.":[157],"n-type":[160],"FinFET,":[161],"strongerdegradation":[166],"high":[168],"gate":[169,358],"electric":[170],"field":[171],"compare":[172,311],"to":[173,312,363,370,403],"surface.":[175,186],"Quantification":[176],"also":[180,300,331],"compared":[181],"between":[182],"Low":[187],"temperaturemeasurement":[188],"nondestructive":[190],"method.":[192],"Therefore":[193],"can":[196],"be":[197,286,434],"a":[198,387,425],"propersurface":[199],"performance":[205],"optimization":[206],"FinFET.As":[208],"another":[209],"quasi-1":[210],"D":[211],"nanowire":[212,218,281,359,374,397,410,429],"structure":[213,360,375,382],"device,":[214],"3D":[215],"stacked":[216],"SiGe":[217,244,280],"beenintroduced.":[220],"Important":[221],"strain":[223,238,290],"engineering":[224,291],"known":[227],"booster.The":[232],"limitation":[233,414,441],"dopant":[235],"diffusion":[236],"shown.":[241],"Without":[242],"strain,":[243],"nanowireFET":[245],"showed":[246],"huge":[247],"short":[248,263,278,301,334],"effect.":[250],"Subthreshold":[251],"bigger":[254],"than":[255],"strained":[256],"SiGechannel.":[257],"Temperature":[258],"dependent":[259],"behavior":[261],"unstrained":[265],"wascompletely":[267],"different":[268],"other":[271],"cases.":[272],"Impurity":[273],"scattering":[274],"dominant":[276],"channelunstrained":[279],"FET.":[282],"Thus,":[283,322],"could":[285],"concluded":[287],"that":[288],"notnecessary":[293],"only":[294],"booster":[298],"but":[299],"effect":[303,336],"immunity.Junctionless":[304],"very":[307],"recently":[308],"developed":[309],"others.":[314],"Like":[315],"JFET,junctionless":[317],"volume":[320,371,404],"conduction.":[321],"less":[325],"affected":[326],"interface":[328],"states.Junctionless":[329],"good":[333,377],"immunity":[337],"off-state":[339],"ofjunctionless":[340],"dominated":[343],"pinch-off":[344],"depletion.":[347],"this,":[349],"junctionless":[350],"FETshould":[351],"thin":[353],"body":[354],"thickness.":[355],"Therefore,":[356],"multi":[357],"proper":[362],"makejunctionless":[364],"FET.Because":[365],"area":[369,402],"ratio,":[372],"quasi-1D":[373],"thesensor":[379],"application.":[380],"Nanowire":[381],"sensor.":[388],"Using":[389],"numericalsimulation,":[390],"generation-recombination":[391,418],"noise":[392,419,431,440],"property":[393],"considered":[395],"sensor.Even":[398],"though":[399],"ration":[405],"enhanced":[407],"channel,":[411,481],"devicehas":[412],"sensing":[413],"noise.":[416],"The":[417],"depended":[420],"channelgeometry.":[423],"As":[424],"design":[426],"tool":[427],"sensor,":[430],"simulation":[432,448,457,469],"should":[433],"carried":[435],"out":[436],"toescape":[437],"advance.The":[443],"principles":[445],"discussed.":[451],"Finite":[452],"difference":[453],"method":[454],"andMonte":[455],"Carlo":[456],"comprehension":[464],"devicesimulation.":[466],"Practical":[467],"data":[470],"shown":[473],"examples":[475],"FinFET,strongly":[478],"disordered":[479],"1D":[480],"OLED":[482],"E-paper.":[484]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2016-06-24T00:00:00"}
