{"id":"https://openalex.org/W68595939","doi":"https://doi.org/10.1115/imece2014-39752","title":"Removal of Multi-Walled Carbon Nanotubes From Contaminated Surfaces With Microscale Topological Features","display_name":"Removal of Multi-Walled Carbon Nanotubes From Contaminated Surfaces With Microscale Topological Features","publication_year":2014,"publication_date":"2014-11-14","ids":{"openalex":"https://openalex.org/W68595939","doi":"https://doi.org/10.1115/imece2014-39752","mag":"68595939"},"language":"en","primary_location":{"id":"doi:10.1115/imece2014-39752","doi":"https://doi.org/10.1115/imece2014-39752","is_oa":false,"landing_page_url":"https://doi.org/10.1115/imece2014-39752","pdf_url":null,"source":{"id":"https://openalex.org/S4363606942","display_name":"ASME International Mechanical Engineering Congress and Exposition (IMECE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Volume 10: Micro- and Nano-Systems Engineering and Packaging","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102707931","display_name":"Zahra Karimi","orcid":"https://orcid.org/0000-0003-0795-9735","observed_orcids":["https://orcid.org/0000-0003-0795-9735"]},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Zahra Karimi","raw_affiliation_strings":["Northeastern University, Boston, MA","Northeastern University, Boston (MA)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University, Boston, MA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"Northeastern University, Boston (MA)#TAB#","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5054443386","display_name":"Paul Su","orcid":"https://orcid.org/0000-0002-2327-2530","observed_orcids":["https://orcid.org/0000-0002-2327-2530"]},"institutions":[{"id":"https://openalex.org/I4210148433","display_name":"FM Global (United States)","ror":"https://ror.org/053aznw88","country_code":"US","type":"company","lineage":["https://openalex.org/I4210148433"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Paul Su","raw_affiliation_strings":["FM Global, Norwood, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FM Global, Norwood, MA","institution_ids":["https://openalex.org/I4210148433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038618040","display_name":"Babak Haghpanah","orcid":"https://orcid.org/0000-0003-4982-5364","observed_orcids":["https://orcid.org/0000-0003-4982-5364"]},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Babak Haghpanah","raw_affiliation_strings":["Northeastern University, Boston, MA","Northeastern University, Boston (MA)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University, Boston, MA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"Northeastern University, Boston (MA)#TAB#","institution_ids":["https://openalex.org/I12912129"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034830047","display_name":"William W. Doerr","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210148433","display_name":"FM Global (United States)","ror":"https://ror.org/053aznw88","country_code":"US","type":"company","lineage":["https://openalex.org/I4210148433"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"William W. Doerr","raw_affiliation_strings":["FM Global, Norwood, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FM Global, Norwood, MA","institution_ids":["https://openalex.org/I4210148433"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108245327","display_name":"Louis A. Gritzo","orcid":"https://orcid.org/0009-0005-1005-7865","observed_orcids":["https://orcid.org/0009-0005-1005-7865"]},"institutions":[{"id":"https://openalex.org/I4210148433","display_name":"FM Global (United States)","ror":"https://ror.org/053aznw88","country_code":"US","type":"company","lineage":["https://openalex.org/I4210148433"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Louis A. Gritzo","raw_affiliation_strings":["FM Global, Norwood, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"FM Global, Norwood, MA","institution_ids":["https://openalex.org/I4210148433"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Syed Hassan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I133738476","display_name":"University of Massachusetts Lowell","ror":"https://ror.org/03hamhx47","country_code":"US","type":"education","lineage":["https://openalex.org/I133738476"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Syed Hassan","raw_affiliation_strings":["University of Massachusetts, Lowell, Lowell, MA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Massachusetts, Lowell, Lowell, MA","institution_ids":["https://openalex.org/I133738476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112022996","display_name":"Ashkan Vaziri","orcid":"https://orcid.org/0009-0009-2151-8267","observed_orcids":["https://orcid.org/0009-0009-2151-8267"]},"institutions":[{"id":"https://openalex.org/I12912129","display_name":"Northeastern University","ror":"https://ror.org/04t5xt781","country_code":"US","type":"education","lineage":["https://openalex.org/I12912129"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Ashkan Vaziri","raw_affiliation_strings":["Northeastern University, Boston, MA","Northeastern University, Boston (MA)#TAB#"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northeastern University, Boston, MA","institution_ids":["https://openalex.org/I12912129"]},{"raw_affiliation_string":"Northeastern University, Boston (MA)#TAB#","institution_ids":["https://openalex.org/I12912129"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00335149,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.8237000107765198,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.8237000107765198,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10083","display_name":"Graphene research and applications","score":0.055399999022483826,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10721","display_name":"Surfactants and Colloidal Systems","score":0.019500000402331352,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multi-walled-carbon-nanotubes","display_name":"multi-walled carbon nanotubes","score":1.0},{"id":"https://openalex.org/keywords/surfactant-cleaning","display_name":"surfactant cleaning","score":0.6389999985694885},{"id":"https://openalex.org/keywords/decontamination","display_name":"decontamination","score":0.703000009059906},{"id":"https://openalex.org/keywords/silicon-wafers","display_name":"silicon wafers","score":0.8230000138282776},{"id":"https://openalex.org/keywords/plasma-etching","display_name":"plasma etching","score":0.9760000109672546},{"id":"https://openalex.org/keywords/sodium-dodecyl-sulfate","display_name":"sodium dodecyl sulfate","score":0.9300000071525574},{"id":"https://openalex.org/keywords/sodium-dodecylbenzene-sulfonate","display_name":"sodium dodecyl benzene sulfonate","score":0.9950000047683716}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8305087685585022},{"id":"https://openalex.org/C179428855","wikidata":"https://www.wikidata.org/wiki/Q1069216","display_name":"Microscale chemistry","level":2,"score":0.7701109051704407},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.6929963231086731},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6878751516342163},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6655967235565186},{"id":"https://openalex.org/C26771246","wikidata":"https://www.wikidata.org/wiki/Q321095","display_name":"Scanning electron microscope","level":2,"score":0.6141754984855652},{"id":"https://openalex.org/C2778913249","wikidata":"https://www.wikidata.org/wiki/Q422241","display_name":"Sodium dodecyl sulfate","level":2,"score":0.5518159866333008},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.550327479839325},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.5269606709480286},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.44958144426345825},{"id":"https://openalex.org/C140205800","wikidata":"https://www.wikidata.org/wiki/Q5860","display_name":"Carbon fibers","level":3,"score":0.4118478298187256},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2095654010772705},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16173365712165833},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.16150665283203125},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.1452532410621643},{"id":"https://openalex.org/C104779481","wikidata":"https://www.wikidata.org/wiki/Q50707","display_name":"Composite number","level":2,"score":0.1077856719493866},{"id":"https://openalex.org/C145420912","wikidata":"https://www.wikidata.org/wiki/Q853077","display_name":"Mathematics education","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1115/imece2014-39752","doi":"https://doi.org/10.1115/imece2014-39752","is_oa":false,"landing_page_url":"https://doi.org/10.1115/imece2014-39752","pdf_url":null,"source":{"id":"https://openalex.org/S4363606942","display_name":"ASME International Mechanical Engineering Congress and Exposition (IMECE)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Volume 10: Micro- and Nano-Systems Engineering and Packaging","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2154692996","https://openalex.org/W2530342021","https://openalex.org/W1990565317","https://openalex.org/W2584057231","https://openalex.org/W2476857825","https://openalex.org/W3004410708","https://openalex.org/W7221420831","https://openalex.org/W2122602450","https://openalex.org/W2329679839","https://openalex.org/W2310698456"],"abstract_inverted_index":{"Experiments":[0],"were":[1,31,71,89,111],"performed":[2],"to":[3,9,44,127],"examine":[4],"the":[5,51,65,74,80,86,95,122,148,151,155,160],"ability":[6],"of":[7,55,67,76,94,121],"surfactants":[8,149],"remove":[10],"multi-walled":[11],"carbon":[12],"nanotubes":[13],"(MWCNTs)":[14],"from":[15],"silicon":[16,29,77],"wafers":[17,30,78,156],"with":[18,50,92,169],"nano":[19],"and":[20,36,53,59,102,128,137],"micro":[21],"scaled":[22],"features.":[23],"Well-defined":[24],"microscale":[25],"topological":[26,48,152],"features":[27,49,153],"on":[28,73,154],"induced":[32],"using":[33,79,114,132],"photo":[34],"lithography":[35],"plasma":[37],"etching.":[38],"The":[39,118,140],"etching":[40,161],"time":[41],"was":[42,124],"varied":[43],"create":[45],"variation":[46],"in":[47,64],"size":[52],"height":[54],"\u223c":[56],"8\u00b11":[57],"\u03bcm,":[58,61],"\u223c2\u00b11":[60],"respectively.":[62],"MWCNTs":[63,110,123],"form":[66],"pristine":[68],"liquid":[69],"solution":[70],"deposited":[72],"surface":[75],"spin":[81],"coating":[82],"process.":[83],"During":[84],"cleaning,":[85],"contaminated":[87],"surfaces":[88],"first":[90],"sprayed":[91],"one":[93],"two":[96],"surfactants,":[97],"sodium":[98,103],"dodecyl":[99,104],"sulfate":[100],"(SDS)":[101],"benzene":[105],"sulfonate":[106],"(SDBS),":[107],"or":[108],"water.":[109,170],"wiped":[112],"off":[113],"a":[115],"wiping":[116],"mechanism.":[117],"area":[119],"density":[120],"quantified":[125],"prior":[126],"after":[129],"their":[130],"removal":[131,144],"scanning":[133],"electron":[134],"microscopy":[135],"(SEM)":[136],"post-image":[138],"processing.":[139],"results":[141],"show":[142,164],"decreasing":[143],"efficiency":[145,167],"for":[146],"all":[147],"as":[150],"deepen":[157],"through":[158],"increasing":[159],"time.":[162],"Surfactants":[163],"better":[165],"decontamination":[166],"compared":[168]},"counts_by_year":[],"updated_date":"2026-11-01T11:40:01.658920","created_date":"2016-06-24T00:00:00"}