{"id":"https://openalex.org/W68470249","doi":"https://doi.org/10.7275/2194459","title":"Gpu Based Lithography Simulation and Opc","display_name":"Gpu Based Lithography Simulation and Opc","publication_year":2023,"publication_date":"2023-08-15","ids":{"openalex":"https://openalex.org/W68470249","doi":"https://doi.org/10.7275/2194459","mag":"68470249"},"language":"en","primary_location":{"id":"pmh:oai:scholarworks.umass.edu:theses-1804","doi":null,"is_oa":false,"landing_page_url":"https://scholarworks.umass.edu/theses/721","pdf_url":null,"source":{"id":"https://openalex.org/S4306402240","display_name":"ScholarWorks@UMassAmherst (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Masters Theses 1911 - February 2014","raw_type":"text"},"volume":null,"type":"dissertation","indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.7275/2194459","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5003366414","display_name":"Lokesh Subramany","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Subramany, Lokesh","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5003366414"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11522","display_name":"VLSI and FPGA Design Techniques","score":0.0010999999940395355,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10054","display_name":"Parallel Computing and Optimization Techniques","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/1708","display_name":"Hardware and Architecture"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optical-proximity-correction","display_name":"optical proximity correction","score":0.9919999837875366},{"id":"https://openalex.org/keywords/lithography-simulation","display_name":"lithography simulation","score":0.972000002861023},{"id":"https://openalex.org/keywords/gpu-acceleration","display_name":"GPU acceleration","score":0.7820000052452087},{"id":"https://openalex.org/keywords/resolution-enhancement-techniques","display_name":"resolution enhancement techniques","score":0.8629999756813049},{"id":"https://openalex.org/keywords/mask-optimization","display_name":"mask optimization","score":0.5820000171661377},{"id":"https://openalex.org/keywords/edge-placement-error","display_name":"edge placement error","score":0.9670000076293945},{"id":"https://openalex.org/keywords/shot-size","display_name":"shot size","score":0.9700000286102295},{"id":"https://openalex.org/keywords/simulation-time-reduction","display_name":"simulation time reduction","score":0.4620000123977661}],"concepts":[{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.5988415479660034},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5382755398750305},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.4793063700199127},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.16829246282577515},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.15465354919433594}],"mesh":[],"locations_count":4,"locations":[{"id":"pmh:oai:scholarworks.umass.edu:theses-1804","doi":null,"is_oa":false,"landing_page_url":"https://scholarworks.umass.edu/theses/721","pdf_url":null,"source":{"id":"https://openalex.org/S4306402240","display_name":"ScholarWorks@UMassAmherst (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Masters Theses 1911 - February 2014","raw_type":"text"},{"id":"pmh:oai:scholarworks.umass.edu:20.500.14394/47636","doi":null,"is_oa":false,"landing_page_url":"https://hdl.handle.net/20.500.14394/47636","pdf_url":null,"source":{"id":"https://openalex.org/S4306402240","display_name":"ScholarWorks@UMassAmherst (University of Massachusetts Amherst)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I24603500","host_organization_name":"University of Massachusetts Amherst","host_organization_lineage":["https://openalex.org/I24603500"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"published","raw_type":"Thesis (Open Access)"},{"id":"mag:68470249","doi":null,"is_oa":false,"landing_page_url":"https://scholarworks.umass.edu/cgi/viewcontent.cgi?article=1804&context=theses","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},{"id":"doi:10.7275/2194459","doi":"https://doi.org/10.7275/2194459","is_oa":true,"landing_page_url":"https://doi.org/10.7275/2194459","pdf_url":null,"source":{"id":"https://openalex.org/S7407053130","display_name":"University of Massachusetts (UMass) Amherst","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"}],"best_oa_location":{"id":"doi:10.7275/2194459","doi":"https://doi.org/10.7275/2194459","is_oa":true,"landing_page_url":"https://doi.org/10.7275/2194459","pdf_url":null,"source":{"id":"https://openalex.org/S7407053130","display_name":"University of Massachusetts (UMass) Amherst","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2046800778","https://openalex.org/W2067573559","https://openalex.org/W4230999391","https://openalex.org/W2386110724","https://openalex.org/W2598834173","https://openalex.org/W3186713366","https://openalex.org/W3131748118","https://openalex.org/W2374095217","https://openalex.org/W2369446576","https://openalex.org/W2157748877"],"abstract_inverted_index":{"Optical":[0],"Proximity":[1],"Correction":[2],"(OPC)":[3],"is":[4,42,73,77,81,89,106,122,186,211],"a":[5,8,26,86,129,174,182,212],"part":[6,125],"of":[7,10,25,33,39,51,61,113,126],"family":[9],"techniques":[11,18],"called":[12,78],"Resolution":[13],"Enhancement":[14],"Techniques":[15],"(RET).":[16],"These":[17],"are":[19],"employed":[20],"to":[21,45,66,91,109,139,151,170,181,200,219,246],"increase":[22],"the":[23,31,34,40,46,49,58,68,71,93,96,104,111,114,117,136,153,209],"resolution":[24],"lithography":[27,120,131,146,183,191],"system":[28],"and":[29,57,98,128,193,240,243],"improve":[30,67,247],"quality":[32],"printed":[35,62,99],"pattern.":[36],"The":[37,204],"fidelity":[38],"pattern":[41],"degraded":[43],"due":[44],"disparity":[47,94],"between":[48,95],"wavelength":[50],"light":[52],"used":[53,195],"in":[54,116,168,196,208],"optical":[55],"lithography,":[56],"required":[59,97,138],"size":[60,242],"features.":[63],"In":[64,160],"order":[65,169],"aerial":[69,154],"image,":[70],"mask":[72,87],"modified.":[74],"This":[75,179],"process":[76,84],"OPC,":[79],"OPC":[80,127,141,197,214,221],"an":[82,123,143],"iterative":[83],"where":[85],"shape":[88],"modified":[90],"decrease":[92,135],"shapes.":[100],"After":[101],"each":[102],"modification":[103],"chip":[105],"simulated":[107],"again":[108],"quantify":[110],"effect":[112],"change":[115],"mask.":[118],"Thus,":[119],"simulation":[121],"integral":[124],"fast":[130,213],"simulator":[132,147,167,184],"will":[133,198],"definitely":[134],"time":[137],"perform":[140,220],"on":[142,173,222,233],"entire":[144],"chip.\\nA":[145],"which":[148,216],"uses":[149],"wavelets":[150],"compute":[152],"image":[155],"has":[156],"previously":[157],"been":[158],"developed.":[159],"this":[161,166],"thesis":[162],"I":[163],"extensively":[164],"modify":[165],"execute":[171],"it":[172],"Graphics":[175],"Processing":[176],"Unit":[177],"(GPU).":[178],"leads":[180],"that":[185],"considerably":[187],"faster":[188,224],"than":[189,225],"other":[190,205,226],"simulators":[192],"when":[194],"lead":[199],"drastically":[201],"decreased":[202],"runtimes.":[203],"work":[206],"presented":[207],"proposal":[210],"tool":[215],"allows":[217],"us":[218],"circuits":[223],"tools.":[227],"We":[228],"further":[229],"focus":[230],"our":[231],"attention":[232],"metrics":[234],"like":[235],"runtime,":[236],"edge":[237],"placement":[238],"error":[239],"shot":[241],"present":[244],"schemes":[245],"these":[248],"metrics.":[249]},"counts_by_year":[{"year":2018,"cited_by_count":1},{"year":2013,"cited_by_count":1}],"updated_date":"2026-09-04T10:56:28.161419","created_date":"2016-06-24T00:00:00"}