{"id":"https://openalex.org/W6823614","doi":"https://doi.org/10.1109/isscc.2004.1332720","title":"A 2.5V 14-bit \u03a3\u0394 CMOS-SOI capacitive accelerometer","display_name":"A 2.5V 14-bit \u03a3\u0394 CMOS-SOI capacitive accelerometer","publication_year":2004,"publication_date":"2004-09-28","ids":{"openalex":"https://openalex.org/W6823614","doi":"https://doi.org/10.1109/isscc.2004.1332720","mag":"6823614"},"language":"en","primary_location":{"id":"doi:10.1109/isscc.2004.1332720","doi":"https://doi.org/10.1109/isscc.2004.1332720","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2004.1332720","pdf_url":null,"source":{"id":"https://openalex.org/S4210210374","display_name":"Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference","issn_l":"0193-6530","issn":["0193-6530","2376-8606"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5037320630","display_name":"B.V. Amini","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B.V. Amini","raw_affiliation_strings":["Georgia Institute of Technology, Atlanta, GA","[Georgia Institute of Technology.]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[Georgia Institute of Technology.]","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022358493","display_name":"Siavash Pourkamali","orcid":"https://orcid.org/0009-0006-2184-5581","observed_orcids":["https://orcid.org/0009-0006-2184-5581"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. Pourkamali","raw_affiliation_strings":["Georgia Institute of Technology, Atlanta, GA","[Georgia Institute of Technology.]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[Georgia Institute of Technology.]","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081523432","display_name":"Farrokh Ayazi","orcid":"https://orcid.org/0000-0002-4539-7393","observed_orcids":["https://orcid.org/0000-0002-4539-7393"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"F. Ayazi","raw_affiliation_strings":["Georgia Institute of Technology, Atlanta, GA","[Georgia Institute of Technology.]"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, Atlanta, GA","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"[Georgia Institute of Technology.]","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I130701444"],"apc_list":null,"apc_paid":null,"fwci":2.9651,"has_fulltext":false,"cited_by_count":18,"citation_normalized_percentile":{"value":0.89340043,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"314","last_page":"530"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9814000129699707,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10323","display_name":"Analog and Mixed-Signal Circuit Design","score":0.9814000129699707,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.01600000075995922,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.0007999999797903001,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/capacitive-accelerometer","display_name":"capacitive accelerometer","score":0.906000018119812},{"id":"https://openalex.org/keywords/sigma-delta-modulator","display_name":"sigma-delta modulator","score":0.6880000233650208},{"id":"https://openalex.org/keywords/soi-cmos","display_name":"SOI CMOS","score":0.7599999904632568},{"id":"https://openalex.org/keywords/low-voltage-analog-front-end","display_name":"low-voltage analog front-end","score":0.7110000252723694},{"id":"https://openalex.org/keywords/low-power-sensor-interface","display_name":"low-power sensor interface","score":0.453000009059906}],"concepts":[{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.8453902006149292},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.7468336820602417},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6676411628723145},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.658612847328186},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5337240695953369},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.48562517762184143},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4592646360397339},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.39486366510391235},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.357413113117218},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3438396453857422},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.30049192905426025},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2392163872718811},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.11899492144584656},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isscc.2004.1332720","doi":"https://doi.org/10.1109/isscc.2004.1332720","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isscc.2004.1332720","pdf_url":null,"source":{"id":"https://openalex.org/S4210210374","display_name":"Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference","issn_l":"0193-6530","issn":["0193-6530","2376-8606"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","norway-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2004 IEEE International Solid-State Circuits Conference (IEEE Cat. No.04CH37519)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":4,"referenced_works":["https://openalex.org/W1497725353","https://openalex.org/W1601751208","https://openalex.org/W2149128480","https://openalex.org/W2482696239"],"related_works":["https://openalex.org/W1507052825","https://openalex.org/W2034481124","https://openalex.org/W2187735163","https://openalex.org/W1986018212","https://openalex.org/W2027808471","https://openalex.org/W1580954366","https://openalex.org/W2007604274","https://openalex.org/W7099737061","https://openalex.org/W2150584881","https://openalex.org/W1853430445"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,18,23,43],"2.5V":[4],"14b":[5],"fully-differential":[6],"/spl":[7],"Sigma//spl":[8],"Delta/":[9],"interface":[10],"IC":[11],"in":[12],"0.25/spl":[13],"mu/m":[14],"CMOS":[15],"based":[16],"on":[17],"programmable":[19],"front-backend":[20],"architecture":[21],"for":[22],"high-resolution":[24],"SOI":[25],"capacitive":[26],"accelerometer.":[27],"Capacitive":[28],"resolution":[29],"is":[30],"22aF":[31],"at":[32],"75Hz":[33],"(RBW":[34],"=":[35],"1":[36],"Hz),":[37],"equivalent":[38],"to":[39],"110/spl":[40],"mu/g":[41],"with":[42],"dynamic":[44],"range":[45],"of":[46,50],"85dB":[47],"and":[48,57],"sensitivity":[49],"0.5V/g.":[51],"The":[52],"chip":[53],"occupies":[54],"2mm/sup":[55],"2/":[56],"consumes":[58],"6mW.":[59]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":2}],"updated_date":"2026-10-06T10:28:23.643775","created_date":"2016-06-24T00:00:00"}
