{"id":"https://openalex.org/W64671990","doi":"https://doi.org/10.1007/bf02111958","title":"Mathematical model for controlling nonuniformity in reactive ion etching","display_name":"Mathematical model for controlling nonuniformity in reactive ion etching","publication_year":1994,"publication_date":"1994-09-01","ids":{"openalex":"https://openalex.org/W64671990","doi":"https://doi.org/10.1007/bf02111958","mag":"64671990"},"language":"en","primary_location":{"id":"doi:10.1007/bf02111958","doi":"https://doi.org/10.1007/bf02111958","is_oa":false,"landing_page_url":"https://doi.org/10.1007/bf02111958","pdf_url":null,"source":{"id":"https://openalex.org/S83211391","display_name":"Journal of Mathematical Sciences","issn_l":"1072-3374","issn":["1072-3374","1072-1964","1573-8795"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Mathematical Sciences","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024396784","display_name":"Georgiy A. Chechko","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210156878","display_name":"V.M. Glushkov Institute of Cybernetics","ror":"https://ror.org/05xmg2z40","country_code":"UA","type":"facility","lineage":["https://openalex.org/I149851306","https://openalex.org/I4210156878"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"G. A. Chechko","raw_affiliation_strings":["Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","Kiev University, USSR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","institution_ids":["https://openalex.org/I4210156878"]},{"raw_affiliation_string":"Kiev University, USSR","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026383327","display_name":"I. V. Medvedev","orcid":"https://orcid.org/0009-0006-6150-7819","observed_orcids":["https://orcid.org/0009-0006-6150-7819"]},"institutions":[{"id":"https://openalex.org/I4210156878","display_name":"V.M. Glushkov Institute of Cybernetics","ror":"https://ror.org/05xmg2z40","country_code":"UA","type":"facility","lineage":["https://openalex.org/I149851306","https://openalex.org/I4210156878"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"I. V. Medvedev","raw_affiliation_strings":["Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","Kiev University, USSR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","institution_ids":["https://openalex.org/I4210156878"]},{"raw_affiliation_string":"Kiev University, USSR","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052152542","display_name":"N. I. Khodakovskii","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210156878","display_name":"V.M. Glushkov Institute of Cybernetics","ror":"https://ror.org/05xmg2z40","country_code":"UA","type":"facility","lineage":["https://openalex.org/I149851306","https://openalex.org/I4210156878"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"N. I. Khodakovskii","raw_affiliation_strings":["Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","Kiev University, USSR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","institution_ids":["https://openalex.org/I4210156878"]},{"raw_affiliation_string":"Kiev University, USSR","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5035976696","display_name":"V. N. Sklepovoi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210156878","display_name":"V.M. Glushkov Institute of Cybernetics","ror":"https://ror.org/05xmg2z40","country_code":"UA","type":"facility","lineage":["https://openalex.org/I149851306","https://openalex.org/I4210156878"]}],"countries":["UA"],"is_corresponding":false,"raw_author_name":"V. N. Sklepovoi","raw_affiliation_strings":["Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","Kiev University, USSR"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Cybernetics of the Ukrainian Academy of Sciences, Ukraine","institution_ids":["https://openalex.org/I4210156878"]},{"raw_affiliation_string":"Kiev University, USSR","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210156878"],"apc_list":{"value":3490,"currency":"USD","value_usd":3490},"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.00665892,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"71","issue":"4","first_page":"2573","last_page":"2576"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.0017000000225380063,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10642","display_name":"Plasma Applications and Diagnostics","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"reactive ion etching","score":0.9959999918937683},{"id":"https://openalex.org/keywords/plasma-chemical-etching","display_name":"plasma-chemical etching","score":0.9440000057220459},{"id":"https://openalex.org/keywords/circular-plates","display_name":"circular plates","score":0.5580000281333923},{"id":"https://openalex.org/keywords/particle-concentration-distribution","display_name":"particle concentration distribution","score":0.6520000100135803},{"id":"https://openalex.org/keywords/radial-concentration-gradient","display_name":"radial concentration gradient","score":0.5379999876022339}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7949970960617065},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.7224992513656616},{"id":"https://openalex.org/C107187091","wikidata":"https://www.wikidata.org/wiki/Q2392011","display_name":"Plasma etching","level":4,"score":0.6167600154876709},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.5845023393630981},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.5435273051261902},{"id":"https://openalex.org/C111335779","wikidata":"https://www.wikidata.org/wiki/Q3454686","display_name":"Reduction (mathematics)","level":2,"score":0.5374880433082581},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.5201318860054016},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.48132550716400146},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.3826051950454712},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.36816608905792236},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.34081828594207764},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.33178648352622986},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.32661890983581543},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2740725874900818},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.24500951170921326},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.1688518524169922},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.1651940643787384},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.12386253476142883},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.1031884253025055},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/bf02111958","doi":"https://doi.org/10.1007/bf02111958","is_oa":false,"landing_page_url":"https://doi.org/10.1007/bf02111958","pdf_url":null,"source":{"id":"https://openalex.org/S83211391","display_name":"Journal of Mathematical Sciences","issn_l":"1072-3374","issn":["1072-3374","1072-1964","1573-8795"],"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":["jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310319900","host_organization_name":"Springer Science+Business Media","host_organization_lineage":["https://openalex.org/P4310319900","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Science+Business Media","Springer Nature"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Mathematical Sciences","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W2012951582"],"related_works":["https://openalex.org/W4388376001","https://openalex.org/W2009420109","https://openalex.org/W2035159056","https://openalex.org/W2466887265","https://openalex.org/W2093286625","https://openalex.org/W2765886561","https://openalex.org/W2023718213","https://openalex.org/W2082133582","https://openalex.org/W2051018996","https://openalex.org/W1598917330"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2025-10-10T00:00:00"}