{"id":"https://openalex.org/W63640085","doi":"https://doi.org/10.3990/1.9789036537308","title":"A large-stroke planar MEMS-based stage with integrated feedback","display_name":"A large-stroke planar MEMS-based stage with integrated feedback","publication_year":2014,"publication_date":"2014-07-24","ids":{"openalex":"https://openalex.org/W63640085","doi":"https://doi.org/10.3990/1.9789036537308","mag":"63640085"},"language":"en","primary_location":{"id":"doi:10.3990/1.9789036537308","doi":"https://doi.org/10.3990/1.9789036537308","is_oa":false,"landing_page_url":"https://doi.org/10.3990/1.9789036537308","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"University of Twente","raw_type":"dissertation"},"volume":null,"type":"dissertation","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://ris.utwente.nl/ws/files/6056325/thesis_B_Krijnen.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5071645554","display_name":"Bram Krijnen","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Bram Krijnen","raw_affiliation_strings":["Bram Krijnen, Enschede, the Netherlands, 2014","CPI-Koninklijke W\u00f6hrmann, Zutphen, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bram Krijnen, Enschede, the Netherlands, 2014","institution_ids":[]},{"raw_affiliation_string":"CPI-Koninklijke W\u00f6hrmann, Zutphen, The Netherlands","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":["https://openalex.org/A5071645554"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":true,"cited_by_count":1,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.0008999999845400453,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrostatic-actuators","display_name":"electrostatic actuators","score":0.8059999942779541},{"id":"https://openalex.org/keywords/flexure-mechanisms","display_name":"flexure mechanisms","score":0.8889999985694885},{"id":"https://openalex.org/keywords/shuttle","display_name":"shuttle","score":0.31700000166893005},{"id":"https://openalex.org/keywords/heat-conduction","display_name":"heat conduction","score":0.6110000014305115},{"id":"https://openalex.org/keywords/closed-loop-position-control","display_name":"closed-loop position control","score":0.9509999752044678},{"id":"https://openalex.org/keywords/in-plane-motion","display_name":"in-plane motion","score":0.6480000019073486},{"id":"https://openalex.org/keywords/single-mask-fabrication","display_name":"single-mask fabrication","score":0.640999972820282},{"id":"https://openalex.org/keywords/soi-wafer","display_name":"SOI wafer","score":0.8899999856948853}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7460911273956299},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5724786520004272},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.5406079292297363},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.509867787361145},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4996681213378906},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.42282065749168396},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.420412540435791},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.41871732473373413},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4145495593547821},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3539189398288727},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.33927521109580994},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3252689242362976},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.21641510725021362},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1256410777568817},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.09858813881874084},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.3990/1.9789036537308","doi":"https://doi.org/10.3990/1.9789036537308","is_oa":false,"landing_page_url":"https://doi.org/10.3990/1.9789036537308","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"University of Twente","raw_type":"dissertation"},{"id":"pmh:oai:ris.utwente.nl:openaire/f587c6e7-786f-416e-b97d-f011a8d93cc5","doi":null,"is_oa":true,"landing_page_url":"https://research.utwente.nl/en/publications/f587c6e7-786f-416e-b97d-f011a8d93cc5","pdf_url":"https://ris.utwente.nl/ws/files/6056325/thesis_B_Krijnen.pdf","source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Krijnen, B 2014, 'A large-stroke planar MEMS-based stage with integrated feedback', Doctor of Philosophy, University of Twente, Enschede. https://doi.org/10.3990/1.9789036537308","raw_type":"info:eu-repo/semantics/other"},{"id":"pmh:ut:oai:ris.utwente.nl:publications/f587c6e7-786f-416e-b97d-f011a8d93cc5","doi":null,"is_oa":true,"landing_page_url":"https://research.utwente.nl/en/publications/f587c6e7-786f-416e-b97d-f011a8d93cc5","pdf_url":null,"source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/doctoralthesis"}],"best_oa_location":{"id":"pmh:oai:ris.utwente.nl:openaire/f587c6e7-786f-416e-b97d-f011a8d93cc5","doi":null,"is_oa":true,"landing_page_url":"https://research.utwente.nl/en/publications/f587c6e7-786f-416e-b97d-f011a8d93cc5","pdf_url":"https://ris.utwente.nl/ws/files/6056325/thesis_B_Krijnen.pdf","source":{"id":"https://openalex.org/S4406922991","display_name":"University of Twente Research Information","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Krijnen, B 2014, 'A large-stroke planar MEMS-based stage with integrated feedback', Doctor of Philosophy, University of Twente, Enschede. https://doi.org/10.3990/1.9789036537308","raw_type":"info:eu-repo/semantics/other"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321015","display_name":"University of Twente","ror":"https://ror.org/006hf6230"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W63640085.pdf","grobid_xml":"https://content.openalex.org/works/W63640085.grobid-xml"},"referenced_works_count":110,"referenced_works":["https://openalex.org/W65153156","https://openalex.org/W97063045","https://openalex.org/W148373458","https://openalex.org/W211821303","https://openalex.org/W403742555","https://openalex.org/W580982675","https://openalex.org/W1453633416","https://openalex.org/W1536103813","https://openalex.org/W1558888328","https://openalex.org/W1571429142","https://openalex.org/W1824802372","https://openalex.org/W1878071571","https://openalex.org/W1964454488","https://openalex.org/W1971182532","https://openalex.org/W1973840112","https://openalex.org/W1974935274","https://openalex.org/W1985257906","https://openalex.org/W1987780641","https://openalex.org/W1989737767","https://openalex.org/W1989824227","https://openalex.org/W1989891345","https://openalex.org/W1994437399","https://openalex.org/W1998406274","https://openalex.org/W1999796998","https://openalex.org/W2002237558","https://openalex.org/W2003113054","https://openalex.org/W2006884215","https://openalex.org/W2009005405","https://openalex.org/W2010925471","https://openalex.org/W2011347624","https://openalex.org/W2014945972","https://openalex.org/W2018779124","https://openalex.org/W2021455359","https://openalex.org/W2021981473","https://openalex.org/W2026257390","https://openalex.org/W2028715899","https://openalex.org/W2034767287","https://openalex.org/W2035394251","https://openalex.org/W2036686424","https://openalex.org/W2040314289","https://openalex.org/W2042899696","https://openalex.org/W2042935620","https://openalex.org/W2043708915","https://openalex.org/W2049361014","https://openalex.org/W2054354410","https://openalex.org/W2054694108","https://openalex.org/W2058541278","https://openalex.org/W2069401367","https://openalex.org/W2070547974","https://openalex.org/W2071478005","https://openalex.org/W2073286140","https://openalex.org/W2074727833","https://openalex.org/W2075369346","https://openalex.org/W2089867942","https://openalex.org/W2090944646","https://openalex.org/W2091474803","https://openalex.org/W2093150652","https://openalex.org/W2093756249","https://openalex.org/W2096139021","https://openalex.org/W2101344313","https://openalex.org/W2102530718","https://openalex.org/W2106184845","https://openalex.org/W2106570328","https://openalex.org/W2107796561","https://openalex.org/W2109012749","https://openalex.org/W2116357047","https://openalex.org/W2120703492","https://openalex.org/W2123546458","https://openalex.org/W2126173165","https://openalex.org/W2126174759","https://openalex.org/W2126858546","https://openalex.org/W2130700751","https://openalex.org/W2132644460","https://openalex.org/W2133959334","https://openalex.org/W2136200897","https://openalex.org/W2136613591","https://openalex.org/W2137819216","https://openalex.org/W2139384789","https://openalex.org/W2141181240","https://openalex.org/W2148232877","https://openalex.org/W2153051497","https://openalex.org/W2153162881","https://openalex.org/W2154412128","https://openalex.org/W2154759250","https://openalex.org/W2155273325","https://openalex.org/W2157763436","https://openalex.org/W2159692221","https://openalex.org/W2162570710","https://openalex.org/W2164499381","https://openalex.org/W2168756522","https://openalex.org/W2177580458","https://openalex.org/W2177757077","https://openalex.org/W2185318602","https://openalex.org/W2490765418","https://openalex.org/W2495195371","https://openalex.org/W2620989046","https://openalex.org/W2738199291","https://openalex.org/W3021432607","https://openalex.org/W3087020325","https://openalex.org/W3141730759","https://openalex.org/W3150248096","https://openalex.org/W4229499112","https://openalex.org/W4236110044","https://openalex.org/W4243222817","https://openalex.org/W4246878719","https://openalex.org/W4255538561","https://openalex.org/W6632811028","https://openalex.org/W6653984753","https://openalex.org/W6658099488","https://openalex.org/W6679388776"],"related_works":["https://openalex.org/W2177757077","https://openalex.org/W117837942","https://openalex.org/W2986239603","https://openalex.org/W3173807110","https://openalex.org/W2123524594","https://openalex.org/W2109012749","https://openalex.org/W2093150652","https://openalex.org/W2057205729","https://openalex.org/W2624740429","https://openalex.org/W2406789475"],"abstract_inverted_index":{"Micro-electromechanical":[0],"systems":[1],"(MEMS)":[2],"are":[3,52,130],"all":[4],"around":[5],"us":[6],"nowadays,":[7],"especially":[8],"in":[9,18,166],"sensor":[10,91,123],"technology.":[11],"MEMS-based":[12],"positioning":[13,45],"stages":[14],"can":[15,182],"become":[16],"favorable":[17],"applications":[19],"where":[20],"the":[21,26,33,40,77,93,106,111,118,121,167,180],"available":[22],"volume":[23],"is":[24,62,79,92,124,164],"small,":[25],"response":[27],"needs":[28],"to":[29,54,58,64,110,132,150,158],"be":[30,183],"fast,":[31],"and":[32,148,179],"fabrication":[34],"costs":[35],"low.":[36],"This":[37],"thesis":[38],"describes":[39],"development":[41],"of":[42,76,89,99,117,155,170],"such":[43],"a":[44,56,59,67,71,100,134,152,171,187],"stage.":[46],"Single":[47],"degree-of-freedom":[48],"(DOF)":[49],"electrostatic":[50],"actuators":[51],"used":[53],"apply":[55],"force":[57],"shuttle":[60,78,108,119],"that":[61],"constrained":[63],"move":[65],"over":[66],"straight":[68],"line":[69],"by":[70,81],"flexure":[72],"mechanism.":[73],"The":[74,86,142,161],"position":[75,115],"measured":[80],"using":[82,120,185],"an":[83],"integrated":[84,122,165],"sensor.":[85],"operating":[87],"principle":[88],"this":[90],"conductive":[94],"heat":[95],"transfer":[96],"through":[97],"air":[98],"resistively":[101],"heated":[102,112],"silicon":[103],"beam":[104],"towards":[105],"actuated":[107],"parallel":[109,135],"beam.":[113],"Closed-loop":[114],"control":[116],"demonstrated.":[125],"Three":[126],"single":[127,188],"DOF":[128],"shuttles":[129],"coupled":[131],"form":[133],"kinematic":[136],"3DOF":[137,143],"stage":[138,144,163,181],"for":[139],"in-plane":[140],"motion.":[141],"was":[145],"designed,":[146],"fabricated,":[147],"validated":[149],"have":[151],"large":[153],"range":[154],"motion":[156],"compared":[157],"existing":[159],"stages.":[160],"complete":[162],"device":[168],"layer":[169],"SOI-wafer,":[172],"which":[173],"means":[174],"no":[175],"assembly":[176],"if":[177],"required":[178],"fabricated":[184],"only":[186],"mask.":[189]},"counts_by_year":[{"year":2015,"cited_by_count":1}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2016-06-24T00:00:00"}