{"id":"https://openalex.org/W625273121","doi":null,"title":"3rd international Rapid thermal processing Conference (RTP'95), held at Amsterdam, The Netherlands, August 30- September 1, 1995","display_name":"3rd international Rapid thermal processing Conference (RTP'95), held at Amsterdam, The Netherlands, August 30- September 1, 1995","publication_year":1995,"publication_date":"1995-01-01","ids":{"openalex":"https://openalex.org/W625273121","mag":"625273121"},"language":"en","primary_location":{"id":"mag:625273121","doi":null,"is_oa":false,"landing_page_url":"http://ci.nii.ac.jp/ncid/BB06481773","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null},"volume":null,"type":"book","indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5006448685","display_name":"Richard B. Fair","orcid":"https://orcid.org/0000-0002-6728-1199","observed_orcids":["https://orcid.org/0000-0002-6728-1199"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Richard B. Fair","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-6728-1199","affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5073081324","display_name":"Bohumil Lojek","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Lojek","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.16319444,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.5903000235557556,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.5903000235557556,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13889","display_name":"Advanced Materials and Semiconductor Technologies","score":0.09560000151395798,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11853","display_name":"Semiconductor materials and interfaces","score":0.021299999207258224,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/rapid-thermal-processing","display_name":"rapid thermal processing","score":0.9440000057220459},{"id":"https://openalex.org/keywords/rapid-thermal-annealing","display_name":"rapid thermal annealing","score":0.7599999904632568},{"id":"https://openalex.org/keywords/semiconductor-processing","display_name":"semiconductor processing","score":0.5550000071525574},{"id":"https://openalex.org/keywords/thin-film-deposition","display_name":"thin film deposition","score":0.7559999823570251}],"concepts":[{"id":"https://openalex.org/C161191863","wikidata":"https://www.wikidata.org/wiki/Q199655","display_name":"Library science","level":1,"score":0.4334375858306885},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.3954232335090637},{"id":"https://openalex.org/C61696701","wikidata":"https://www.wikidata.org/wiki/Q770766","display_name":"Engineering physics","level":1,"score":0.35397714376449585},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2662195563316345},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2388472557067871}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:625273121","doi":null,"is_oa":false,"landing_page_url":"http://ci.nii.ac.jp/ncid/BB06481773","pdf_url":null,"source":null,"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"sustainable_development_goals_aurora":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4229715453","https://openalex.org/W567376207","https://openalex.org/W7052151995","https://openalex.org/W4255127510","https://openalex.org/W4239344145","https://openalex.org/W4251439500","https://openalex.org/W4232465582","https://openalex.org/W7053125910","https://openalex.org/W4256526625","https://openalex.org/W2737857437"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-10-25T09:29:13.331239","created_date":"2016-06-24T00:00:00"}