{"id":"https://openalex.org/W584291922","doi":null,"title":"Modeling and design of electroquasistatic microactuators","display_name":"Modeling and design of electroquasistatic microactuators","publication_year":1990,"publication_date":"1990-01-01","ids":{"openalex":"https://openalex.org/W584291922","mag":"584291922"},"language":"en","primary_location":{"id":"mag:584291922","doi":null,"is_oa":false,"landing_page_url":"https://ci.nii.ac.jp/ncid/BB03807739","pdf_url":null,"source":{"id":"https://openalex.org/S4306463602","display_name":"Massachusetts Institute of Technology eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310316440","host_organization_name":"Massachusetts Institute of Technology","host_organization_lineage":["https://openalex.org/P4310316440"],"host_organization_lineage_names":["Massachusetts Institute of Technology"],"type":"ebook platform"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Massachusetts Institute of Technology eBooks","raw_type":null},"volume":null,"type":"book","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032394982","display_name":"Stephen F. Bart","orcid":"https://orcid.org/0000-0003-3871-2575","observed_orcids":["https://orcid.org/0000-0003-3871-2575"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Stephen F. Bart","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0003-3871-2575","affiliations":[]},{"author_position":"last","author":{"id":"https://openalex.org/A5022916324","display_name":"Jeffrey H. Lang","orcid":"https://orcid.org/0000-0002-5765-4369","observed_orcids":["https://orcid.org/0000-0002-5765-4369"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jeffrey H. Lang","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0002-5765-4369","affiliations":[]}],"institutions":[],"countries_distinct_count":0,"institutions_distinct_count":0,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":2.8797,"has_fulltext":false,"cited_by_count":9,"citation_normalized_percentile":{"value":0.90944123,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9458000063896179,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9458000063896179,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10278","display_name":"Electric Motor Design and Analysis","score":0.03460000082850456,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11608","display_name":"Dielectric materials and actuators","score":0.0032999999821186066,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electrohydrodynamic-pump","display_name":"electrohydrodynamic pump","score":0.7580000162124634},{"id":"https://openalex.org/keywords/driving-torque","display_name":"driving torque","score":0.5789999961853027},{"id":"https://openalex.org/keywords/normal-force","display_name":"normal force","score":0.8339999914169312},{"id":"https://openalex.org/keywords/rotor-stator-gap","display_name":"rotor-stator gap","score":0.6499999761581421},{"id":"https://openalex.org/keywords/bearing-friction","display_name":"bearing friction","score":0.597000002861023},{"id":"https://openalex.org/keywords/rotor-dynamics","display_name":"rotor dynamics","score":0.49799999594688416},{"id":"https://openalex.org/keywords/electrohydrodynamic-actuation","display_name":"electrohydrodynamic actuation","score":0.6449999809265137},{"id":"https://openalex.org/keywords/microfabrication","display_name":"microfabrication","score":0.4410000145435333},{"id":"https://openalex.org/keywords/finite-element-analysis","display_name":"finite element analysis","score":0.5139999985694885}],"concepts":[{"id":"https://openalex.org/C144171764","wikidata":"https://www.wikidata.org/wiki/Q48103","display_name":"Torque","level":2,"score":0.6429823637008667},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6151467561721802},{"id":"https://openalex.org/C95238685","wikidata":"https://www.wikidata.org/wiki/Q1326902","display_name":"Electrohydrodynamics","level":3,"score":0.5817679166793823},{"id":"https://openalex.org/C17281054","wikidata":"https://www.wikidata.org/wiki/Q193466","display_name":"Rotor (electric)","level":2,"score":0.5726800560951233},{"id":"https://openalex.org/C50587689","wikidata":"https://www.wikidata.org/wiki/Q4698328","display_name":"Air gap (plumbing)","level":2,"score":0.5682346820831299},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.5575507879257202},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.5152983665466309},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.5112607479095459},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.45923906564712524},{"id":"https://openalex.org/C30293662","wikidata":"https://www.wikidata.org/wiki/Q2262992","display_name":"Bushing","level":2,"score":0.44986462593078613},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.4296499788761139},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.4037824273109436},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.27334779500961304},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.24072319269180298},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.23905256390571594},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.21896982192993164},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"mag:584291922","doi":null,"is_oa":false,"landing_page_url":"https://ci.nii.ac.jp/ncid/BB03807739","pdf_url":null,"source":{"id":"https://openalex.org/S4306463602","display_name":"Massachusetts Institute of Technology eBooks","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4310316440","host_organization_name":"Massachusetts Institute of Technology","host_organization_lineage":["https://openalex.org/P4310316440"],"host_organization_lineage_names":["Massachusetts Institute of Technology"],"type":"ebook platform"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"Massachusetts Institute of Technology eBooks","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W2023720546","https://openalex.org/W2133096871","https://openalex.org/W2073308496","https://openalex.org/W2169707654","https://openalex.org/W2068286028","https://openalex.org/W1966983216","https://openalex.org/W1976322795","https://openalex.org/W1985239410","https://openalex.org/W2993377034","https://openalex.org/W7098906073"],"abstract_inverted_index":{"This":[0,136,201],"thesis":[1],"examines":[2],"a":[3,58,95,100,160,324],"class":[4],"of":[5,14,20,26,37,69,81,103,205,216,256,326,334,378],"electroquasistatic,":[6],"planar,":[7],"micro-scale":[8],"motors":[9],"(micromotors).":[10],"The":[11,76,243],"ultimate":[12],"objective":[13],"this":[15,193],"examination":[16],"is":[17,78,119,124,132,189,231,241],"an":[18,61],"understanding":[19],"micromotor":[21,49,54,126,153,206],"operation,":[22],"and":[23,28,40,51,60,73,105,121,144,210,228,262,267,279,300,332],"the":[24,47,52,82,111,133,165,172,176,203,226,229,253,257,265,275,290,301,330,344],"development":[25],"analyses":[27,266],"design":[29,278,283],"guidelines":[30,284],"for":[31,45,129,152,175,192,285],"future":[32,286],"micromotors.\r\nAnalyses,":[33],"which":[34,213],"provide":[35],"predictions":[36,174],"drive":[38,207,218],"torques":[39,318],"normal":[41],"forces,":[42],"are":[43,66,156,184,195,214,246,271,320],"presented":[44],"both":[46,57,140],"variable-capacitance":[48],"(VCM)":[50],"induction":[53,112],"(IM)":[55],"in":[56,84,164,313],"radial-gap":[59,134,177,276],"axial-gap":[62],"configuration.":[63],"Axial-gap":[64],"architectures":[65],"rejected":[67,79],"because":[68,80],"their":[70],"fabrication":[71],"complexity":[72],"instability":[74],"problems.":[75],"IM":[77],"difficulty":[83],"obtaining":[85],"suitable":[86],"rotor":[87,97,227,258,302,327],"conductivity":[88],"with":[89,376],"standard":[90],"silicon":[91],"micromachining":[92],"materials.":[93],"However,":[94],"fluid":[96,122],"can":[98,107,148,337],"allow":[99],"wider":[101],"range":[102],"conductivities":[104],"thus":[106],"be":[108,149,234,295,311,338,349],"pumped":[109],"by":[110,158,223,239],"interaction.":[113],"A":[114,186],"microfabricated":[115],"electrohydrodynamic":[116],"(EHD)":[117],"pump":[118],"analyzed":[120],"pumping":[123],"demonstrated.\r\nThe":[125],"architecture":[127],"chosen":[128],"further":[130],"study":[131],"VCM.":[135],"investigation":[137],"demonstrates":[138],"that":[139,319],"simple":[141],"parallel-plate":[142],"models":[143],"two-dimensional":[145,161],"finite-element":[146,162],"analysis":[147,163],"significantly":[150],"inaccurate":[151],"systems.":[154],"Corrections":[155],"computed":[157],"using":[159,181,197],"axial-radial":[166],"plane.\r\nIn":[167],"order":[168,314],"to":[169,233,248,273,280,305,315,340,355],"experimentally":[170],"verify":[171],"analytic":[173],"VCM,":[178],"dynamic":[179,187],"measurements":[180],"stroboscopic":[182],"dynamometry":[183],"described.":[185],"model":[188,194],"developed;":[190],"coefficients":[191],"estimated":[196],"non-linear":[198],"least-square-error":[199],"estimation.":[200],"allows":[202],"determination":[204],"torque":[208,219],"amplitudes":[209],"friction":[211,237],"parameters":[212],"independent":[215],"simulated":[217],"amplitudes.":[220],"Friction":[221],"caused":[222,238],"contact":[224,357],"between":[225],"bearing":[230,346],"shown":[232,247],"important,":[235],"whereas":[236],"gravity":[240],"not.":[242],"motor":[244],"dynamics":[245],"have":[249],"little":[250],"dependence":[251],"on":[252],"apparent":[254],"area":[255],"bushing":[259],"contact.\r\nThe":[260],"results":[261],"insights":[263],"from":[264,362],"tests":[268],"described":[269],"above":[270],"used":[272],"optimize":[274],"VCM":[277],"develop":[281],"specific":[282],"micromotors.":[287],"In":[288],"particular,":[289],"rotor-stator":[291],"gap":[292],"spacing":[293,333],"should":[294,310,348],"as":[296,298,323,351,353],"small":[297,352],"possible":[299,354],"pole":[303,307],"number":[304,308],"stator":[306],"ratio":[309],"2:3":[312],"obtain":[316],"large":[317],"reasonably":[321],"uniform":[322],"function":[325],"angle.":[328],"Further,":[329],"size":[331],"these":[335],"poles":[336],"adjusted":[339],"maximize":[341],"torque.":[342],"Finally,":[343],"horizontal":[345],"clearance":[347],"kept":[350],"reduce":[356],"friction.":[358],"(Copies":[359],"available":[360],"exclusively":[361],"MIT":[363],"Libraries,":[364],"Rm.":[365],"14-0551,":[366],"Cambridge,":[367],"MA":[368],"02139-4307.":[369],"Ph.":[370],"617-253-5668;":[371],"Fax":[372],"617-253-1690.)":[373],"(Abstract":[374],"shortened":[375],"permission":[377],"school.)":[379]},"counts_by_year":[],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}