{"id":"https://openalex.org/W48128959","doi":"https://doi.org/10.1007/978-81-322-1913-2_10","title":"Development of Piezoelectric and Electrostatic RF MEMS Devices","display_name":"Development of Piezoelectric and Electrostatic RF MEMS Devices","publication_year":2014,"publication_date":"2014-01-01","ids":{"openalex":"https://openalex.org/W48128959","doi":"https://doi.org/10.1007/978-81-322-1913-2_10","mag":"48128959"},"language":"en","primary_location":{"id":"doi:10.1007/978-81-322-1913-2_10","doi":"https://doi.org/10.1007/978-81-322-1913-2_10","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-81-322-1913-2_10","pdf_url":null,"source":{"id":"https://openalex.org/S4210168381","display_name":"Springer tracts in mechanical engineering","issn_l":"2195-9862","issn":["2195-9862","2195-9870"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Springer Tracts in Mechanical Engineering","raw_type":"book-chapter"},"volume":{"id":"https://openalex.org/W2480390762","display_name":"Micro and Smart Devices and Systems"},"type":"book-chapter","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5111566080","display_name":"Abhay B. Joshi","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I878213199","display_name":"Savitribai Phule Pune University","ror":"https://ror.org/044g6d731","country_code":"IN","type":"education","lineage":["https://openalex.org/I878213199"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Abhay Joshi","raw_affiliation_strings":["Department of Electronic Science, University of Pune, Ganeshkhind road, Pune, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic Science, University of Pune, Ganeshkhind road, Pune, India","institution_ids":["https://openalex.org/I878213199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109966791","display_name":"Abhijeet Kshirsagar","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I878213199","display_name":"Savitribai Phule Pune University","ror":"https://ror.org/044g6d731","country_code":"IN","type":"education","lineage":["https://openalex.org/I878213199"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Abhijeet Kshirsagar","raw_affiliation_strings":["Department of Electronic Science, University of Pune, Ganeshkhind road, Pune, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic Science, University of Pune, Ganeshkhind road, Pune, India","institution_ids":["https://openalex.org/I878213199"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061454449","display_name":"S. DattaGupta","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I162827531","display_name":"Indian Institute of Technology Bombay","ror":"https://ror.org/02qyf5152","country_code":"IN","type":"education","lineage":["https://openalex.org/I162827531"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"S. DattaGupta","raw_affiliation_strings":["Department of Electrical Engineering, Indian Institute of Technology, Mumbai, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Indian Institute of Technology, Mumbai, India","institution_ids":["https://openalex.org/I162827531"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111260434","display_name":"K. Natarajan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4405255153","display_name":"Ramaiah Institute of Technology","ror":"https://ror.org/02nyr4y94","country_code":"IN","type":"education","lineage":["https://openalex.org/I4405255153"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"K. Natarajan","raw_affiliation_strings":["Department of Telecommunication Engineering, MS Ramaiah Institute of Technology, Bangalore, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Telecommunication Engineering, MS Ramaiah Institute of Technology, Bangalore, India","institution_ids":["https://openalex.org/I4405255153"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029597432","display_name":"Shashi A. Gangal","orcid":"https://orcid.org/0000-0001-5180-9377","observed_orcids":["https://orcid.org/0000-0001-5180-9377"]},"institutions":[{"id":"https://openalex.org/I878213199","display_name":"Savitribai Phule Pune University","ror":"https://ror.org/044g6d731","country_code":"IN","type":"education","lineage":["https://openalex.org/I878213199"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"S. A. Gangal","raw_affiliation_strings":["Department of Electronic Science, University of Pune, Ganeshkhind road, Pune, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electronic Science, University of Pune, Ganeshkhind road, Pune, India","institution_ids":["https://openalex.org/I878213199"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5029597432"],"corresponding_institution_ids":["https://openalex.org/I878213199"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.01952937,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"155","last_page":"177"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/rf-mems-switches","display_name":"RF MEMS switches","score":0.9229999780654907},{"id":"https://openalex.org/keywords/piezoelectric-actuation","display_name":"piezoelectric actuation","score":0.890999972820282},{"id":"https://openalex.org/keywords/electrostatic-actuation","display_name":"electrostatic actuation","score":1.0},{"id":"https://openalex.org/keywords/mems-fabrication","display_name":"MEMS fabrication","score":0.7739999890327454},{"id":"https://openalex.org/keywords/wireless-communication","display_name":"wireless communication","score":0.722000002861023}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8450301885604858},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.7156370878219604},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5325943827629089},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3552098870277405},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.33404505252838135},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3165435791015625}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-81-322-1913-2_10","doi":"https://doi.org/10.1007/978-81-322-1913-2_10","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-81-322-1913-2_10","pdf_url":null,"source":{"id":"https://openalex.org/S4210168381","display_name":"Springer tracts in mechanical engineering","issn_l":"2195-9862","issn":["2195-9862","2195-9870"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":"https://openalex.org/P4310319965","host_organization_name":"Springer Nature","host_organization_lineage":["https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Springer Tracts in Mechanical Engineering","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1920431341","https://openalex.org/W1993719918","https://openalex.org/W2003503719","https://openalex.org/W2031308919","https://openalex.org/W2042580735","https://openalex.org/W2083698558","https://openalex.org/W2117867096","https://openalex.org/W2128775672","https://openalex.org/W2135281827","https://openalex.org/W2155070065","https://openalex.org/W2168115677","https://openalex.org/W2184649993","https://openalex.org/W2545760307","https://openalex.org/W2884318930","https://openalex.org/W4230282064"],"related_works":["https://openalex.org/W2114689113","https://openalex.org/W2521267440","https://openalex.org/W4245945255","https://openalex.org/W3084807596","https://openalex.org/W2070567023","https://openalex.org/W4231324960","https://openalex.org/W2167090232","https://openalex.org/W1982384971","https://openalex.org/W2026004457","https://openalex.org/W1981835243"],"abstract_inverted_index":null,"counts_by_year":[],"updated_date":"2026-11-04T10:54:05.112534","created_date":"2016-06-24T00:00:00"}