{"id":"https://openalex.org/W46615798","doi":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","title":"Integration of Spatial ALD Aluminum Oxide for Rear Side Passivation of p-Type PERC/PERL Solar Cells","display_name":"Integration of Spatial ALD Aluminum Oxide for Rear Side Passivation of p-Type PERC/PERL Solar Cells","publication_year":2013,"publication_date":"2013-01-01","ids":{"openalex":"https://openalex.org/W46615798","doi":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","mag":"46615798"},"language":"en","primary_location":{"id":"pmh:oai:dea.lib.unideb.hu:2437/278162","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/2437/278162","pdf_url":null,"source":{"id":"https://openalex.org/S4306402089","display_name":"University of Debrecen Electronic Archive (University of Debrecen)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I132735039","host_organization_name":"University of Debrecen","host_organization_lineage":["https://openalex.org/I132735039"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null},"volume":null,"type":"article","is_traditional":true,"indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023724247","display_name":"Emanuele Cornagliotti","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Cornagliotti, E.","raw_affiliation_strings":["IMEC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5061919408","display_name":"Lo\u00efc Tous","orcid":"https://orcid.org/0000-0001-9928-7774","observed_orcids":["https://orcid.org/0000-0001-9928-7774"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Tous, L.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076396823","display_name":"A. Urue\u00f1a","orcid":"https://orcid.org/0000-0001-8559-5063","observed_orcids":["https://orcid.org/0000-0001-8559-5063"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Uruena, A.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079574775","display_name":"Aude Rothschild","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Rothschild, A.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108202737","display_name":"Richard Russell","orcid":"https://orcid.org/0009-0008-8051-2247","observed_orcids":["https://orcid.org/0009-0008-8051-2247"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Russell, R.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Lu, V.","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Lu, V.","raw_affiliation_strings":["KU Leuven, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024116643","display_name":"S. Radosavjlevic","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Radosavjlevic, S.","raw_affiliation_strings":["Imec the Netherlands, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec the Netherlands, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5015287783","display_name":"J. John","orcid":"https://orcid.org/0009-0009-1109-3314","observed_orcids":["https://orcid.org/0009-0009-1109-3314"]},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"John, J.","raw_affiliation_strings":["KU Leuven, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076718369","display_name":"J\u00e1nos J. Tom\u00e1n","orcid":"https://orcid.org/0000-0003-3374-0147","observed_orcids":["https://orcid.org/0000-0003-3374-0147"]},"institutions":[{"id":"https://openalex.org/I132735039","display_name":"University of Debrecen","ror":"https://ror.org/02xf66n48","country_code":"HU","type":"education","lineage":["https://openalex.org/I132735039"]}],"countries":["HU"],"is_corresponding":false,"raw_author_name":"Toman, J.","raw_affiliation_strings":["University of Debrecen, Debrecen, Hungary"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Debrecen, Debrecen, Hungary","institution_ids":["https://openalex.org/I132735039"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005151442","display_name":"Monica Alem\u00e1n","orcid":"https://orcid.org/0000-0002-7388-4789","observed_orcids":["https://orcid.org/0000-0002-7388-4789"]},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Aleman, M.","raw_affiliation_strings":["KU Leuven, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017893634","display_name":"Filip Duerinckx","orcid":"https://orcid.org/0000-0003-2570-7371","observed_orcids":["https://orcid.org/0000-0003-2570-7371"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Duerinckx, F.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110290918","display_name":"Jozef Poortmans","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Poortmans, J.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020421305","display_name":"Jozef Szlufcik","orcid":"https://orcid.org/0000-0002-3314-126X","observed_orcids":["https://orcid.org/0000-0002-3314-126X"]},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Szlufcik, J.","raw_affiliation_strings":["KU Leuven, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029051748","display_name":"Bas Dielissen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Dielissen, B.","raw_affiliation_strings":["Imec the Netherlands, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec the Netherlands, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021441553","display_name":"F.M.M. Souren","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I196972281","display_name":"Imec the Netherlands","ror":"https://ror.org/01ezq2j76","country_code":"NL","type":"facility","lineage":["https://openalex.org/I196972281"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Souren, F.M.M.","raw_affiliation_strings":["Imec the Netherlands, Eindhoven, Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Imec the Netherlands, Eindhoven, Netherlands","institution_ids":["https://openalex.org/I196972281"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Gay, X.","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I99464096","display_name":"KU Leuven","ror":"https://ror.org/05f950310","country_code":"BE","type":"education","lineage":["https://openalex.org/I99464096"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Gay, X.","raw_affiliation_strings":["KU Leuven, Leuven, Belgium"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"KU Leuven, Leuven, Belgium","institution_ids":["https://openalex.org/I99464096"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007913446","display_name":"Roger Gortzen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"G\u00f6rtzen, R.","raw_affiliation_strings":["IMEC"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"IMEC","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058802383","display_name":"Brett Jason Hallam","orcid":"https://orcid.org/0000-0002-4811-5240","observed_orcids":["https://orcid.org/0000-0002-4811-5240"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hallam, B.","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.9822,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.77282383,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"976","last_page":"981"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.0005000000237487257,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/spatial-atomic-layer-deposition","display_name":"spatial atomic layer deposition","score":0.8500000238418579},{"id":"https://openalex.org/keywords/amorphous-aluminum-oxide","display_name":"amorphous aluminum oxide","score":0.9449999928474426},{"id":"https://openalex.org/keywords/rear-surface-passivation","display_name":"rear surface passivation","score":0.9549999833106995},{"id":"https://openalex.org/keywords/aluminum-back-surface-field","display_name":"aluminum back surface field","score":0.5519999861717224},{"id":"https://openalex.org/keywords/laser-doping","display_name":"laser doping","score":0.6420000195503235},{"id":"https://openalex.org/keywords/process-integration","display_name":"process integration","score":0.36899998784065247},{"id":"https://openalex.org/keywords/surface-passivation","display_name":"surface passivation","score":0.47600001096725464}],"concepts":[{"id":"https://openalex.org/C33574316","wikidata":"https://www.wikidata.org/wiki/Q917260","display_name":"Passivation","level":3,"score":0.9523080587387085},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7453661561012268},{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.6796393990516663},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.516867458820343},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5122948884963989},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.5000677108764648},{"id":"https://openalex.org/C2780824857","wikidata":"https://www.wikidata.org/wiki/Q58803","display_name":"Solar cell","level":2,"score":0.4930846393108368},{"id":"https://openalex.org/C513153333","wikidata":"https://www.wikidata.org/wiki/Q663","display_name":"Aluminium","level":2,"score":0.458588570356369},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.37688758969306946},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3766222298145294},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.3477960228919983}],"mesh":[],"locations_count":3,"locations":[{"id":"pmh:oai:dea.lib.unideb.hu:2437/278162","doi":null,"is_oa":false,"landing_page_url":"http://hdl.handle.net/2437/278162","pdf_url":null,"source":{"id":"https://openalex.org/S4306402089","display_name":"University of Debrecen Electronic Archive (University of Debrecen)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I132735039","host_organization_name":"University of Debrecen","host_organization_lineage":["https://openalex.org/I132735039"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":null},{"id":"doi:10.4229/28theupvsec2013-2co.4.2","doi":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","is_oa":true,"landing_page_url":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},{"id":"mag:46615798","doi":null,"is_oa":false,"landing_page_url":"https://www.eupvsec-proceedings.com/proceedings?paper=25728","pdf_url":null,"source":{"id":"https://openalex.org/S4306421319","display_name":"World Conference on Photovoltaic Energy Conversion","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":"World Conference on Photovoltaic Energy Conversion","raw_type":null}],"best_oa_location":{"id":"doi:10.4229/28theupvsec2013-2co.4.2","doi":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","is_oa":true,"landing_page_url":"https://doi.org/10.4229/28theupvsec2013-2co.4.2","pdf_url":null,"source":{"id":"https://openalex.org/S7407053010","display_name":"EU PVSEC","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.878000020980835,"display_name":"Affordable and clean energy"}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":22,"referenced_works":["https://openalex.org/W200364798","https://openalex.org/W1548184108","https://openalex.org/W1653224167","https://openalex.org/W1886464426","https://openalex.org/W1977053792","https://openalex.org/W1980428547","https://openalex.org/W1992063385","https://openalex.org/W1998371109","https://openalex.org/W2013200839","https://openalex.org/W2018152850","https://openalex.org/W2049579945","https://openalex.org/W2078955342","https://openalex.org/W2117358658","https://openalex.org/W2135796605","https://openalex.org/W2146943137","https://openalex.org/W2152152824","https://openalex.org/W2160563816","https://openalex.org/W2201719243","https://openalex.org/W2288549561","https://openalex.org/W2310104960","https://openalex.org/W2363270461","https://openalex.org/W2526874354"],"related_works":["https://openalex.org/W2023178397","https://openalex.org/W2294185196","https://openalex.org/W2772769577","https://openalex.org/W624558298","https://openalex.org/W6979834637","https://openalex.org/W2108389527","https://openalex.org/W94374032","https://openalex.org/W190082428","https://openalex.org/W2118161878","https://openalex.org/W2551439336"],"abstract_inverted_index":{"In":[0,92,190],"this":[1,191],"paper":[2],"we":[3,65],"present":[4],"an":[5,74],"overview":[6],"of":[7,10,34,88,109,115,123,170,187,212,224],"the":[8,32,35,50,61,107,110,116,182,257],"integration":[9,148],"amorphous":[11],"aluminum":[12,171],"oxide":[13],"(Al2O3)":[14],"as":[15,167],"rear":[16,142,183,236],"side":[17],"passivation":[18,63,143],"layer":[19],"for":[20,31,44,102],"large":[21],"area":[22],"industrial":[23,46],"PERC":[24],"solar":[25,89,233],"cells":[26,234],"(i-PERC).":[27],"The":[28],"technique":[29],"used":[30,166],"deposition":[33,52],"Al2O3":[36,69,141,162,213,241],"layers":[37,242],"is":[38,97,203,220],"spatial":[39,117,139],"Atomic":[40],"Layer":[41],"Deposition":[42],"(ALD),":[43],"its":[45],"relevance":[47],"due":[48],"to":[49,144,172,209],"high":[51,86],"speed":[53],"and":[54,81,105,126,195,200,215,255],"low":[55],"Trimethyl-Aluminum":[56],"(TMA)":[57],"consumption.":[58],"After":[59],"analyzing":[60],"surface":[62,177],"properties,":[64],"will":[66],"describe":[67],"how":[68],"can":[70,163],"be":[71,165],"integrated":[72],"in":[73,78,99,106],"i-PERC":[75,147],"process":[76,103,119,219],"flow":[77,149],"a":[79,94,138,145,210,221,265],"simple":[80],"cost-effective":[82],"way,":[83,192],"while":[84],"maintaining":[85],"levels":[87],"cell":[90],"efficiency.":[91],"particular,":[93],"special":[95],"effort":[96],"devoted":[98],"finding":[100],"solutions":[101],"simplification":[104],"reduction":[108],"cost":[111],"per":[112],"wafer":[113],"(\u20ac/W)":[114],"ALD":[118,140,161,240],"step.":[120,267],"Top":[121],"efficiencies":[122,247],"20.1":[124],"%":[125,128,250],"20.6":[127],"have":[129,243],"been":[130,244],"reached":[131],"(Cz-Si,":[132],"6":[133],"inch":[134],"cells)":[135],"when":[136],"coupling":[137],"standard":[146],"with":[150,235,246],"front":[151,225],"Ag-screen":[152],"printed":[153],"or":[154],"Ni/Cu/Ag":[155],"plated":[156],"contacts,":[157],"respectively.":[158],"Besides":[159],"passivation,":[160],"also":[164],"doping":[168,238],"source":[169],"form":[173],"localized":[174],"p+":[175],"back":[176],"field":[178],"(BSF)":[179],"regions":[180],"at":[181],"contact":[184,226],"by":[185],"means":[186],"laser":[188,237],"processing.":[189],"dielectric":[193],"opening":[194],"BSF":[196,262],"are":[197],"formed":[198,263],"simultaneously":[199],"firing":[201,266],"step":[202],"not":[204],"needed":[205],"anymore,":[206],"leading":[207],"both":[208],"suppression":[211],"blistering":[214],"optical":[216],"enhancement.":[217],"This":[218],"suitable":[222],"complement":[223],"formation":[227],"based":[228],"on":[229],"plating":[230],"schemes.":[231],"Ni/Cu/Ag-plated":[232],"from":[239],"fabricated":[245],"topping":[248],"20.4":[249],"(FF":[251],"=":[252],"79.7":[253],"%)":[254],"outperforming":[256],"control":[258],"group":[259],"featuring":[260],"local":[261],"via":[264]},"counts_by_year":[{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":1}],"updated_date":"2026-09-29T14:09:16.559479","created_date":"2016-06-24T00:00:00"}