{"id":"https://openalex.org/W4405492008","doi":"https://doi.org/10.1109/isa62769.2024.10786053","title":"High-Performance Triaxial MEMS Accelerometer for Applications with Harsh Environmental Conditions","display_name":"High-Performance Triaxial MEMS Accelerometer for Applications with Harsh Environmental Conditions","publication_year":2024,"publication_date":"2024-10-22","ids":{"openalex":"https://openalex.org/W4405492008","doi":"https://doi.org/10.1109/isa62769.2024.10786053"},"language":"en","primary_location":{"id":"doi:10.1109/isa62769.2024.10786053","doi":"https://doi.org/10.1109/isa62769.2024.10786053","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isa62769.2024.10786053","pdf_url":null,"source":{"id":"https://openalex.org/S7407087507","display_name":"DGON Inertial Sensors and Systems (ISS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 DGON Inertial Sensors and Applications (ISA)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5115514144","display_name":"S. Nessle","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Nessle","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":null,"display_name":"M. bin Mansoor","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. bin Mansoor","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5115514145","display_name":"R. Grumann","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R. Grumann","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101817229","display_name":"M. Ruf","orcid":"https://orcid.org/0009-0001-4311-0539","observed_orcids":["https://orcid.org/0009-0001-4311-0539"]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Ruf","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108888259","display_name":"A. J\u00e4ckle","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. J\u00e4ckle","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068076837","display_name":"Travis Kirsch","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"T. Kirsch","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072859172","display_name":"Stefan Bange","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Bange","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076609516","display_name":"St. K\u00f6nig","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. K\u00f6nig","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023748424","display_name":"Stefan Rombach","orcid":"https://orcid.org/0000-0001-7627-1008","observed_orcids":["https://orcid.org/0000-0001-7627-1008"]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Rombach","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,GERMANY","institution_ids":["https://openalex.org/I4210138135"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210138135"],"apc_list":null,"apc_paid":null,"fwci":0.7456,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.56345201,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"20"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.649399995803833,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.649399995803833,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.3488999903202057,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.00019999999494757503,"subfield":{"id":"https://openalex.org/subfields/1908","display_name":"Geophysics"},"field":{"id":"https://openalex.org/fields/19","display_name":"Earth and Planetary Sciences"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-accelerometer","display_name":"MEMS accelerometer","score":0.9750000238418579},{"id":"https://openalex.org/keywords/triaxial-accelerometer","display_name":"triaxial accelerometer","score":0.8930000066757202},{"id":"https://openalex.org/keywords/bias-instability","display_name":"bias instability","score":0.6389999985694885},{"id":"https://openalex.org/keywords/scale-factor-error","display_name":"scale factor error","score":0.8679999709129333},{"id":"https://openalex.org/keywords/extreme-environments","display_name":"extreme environments","score":0.49000000953674316},{"id":"https://openalex.org/keywords/temperature-stability","display_name":"temperature stability","score":0.44200000166893005}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8202742338180542},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6841378808021545},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4681192934513092},{"id":"https://openalex.org/C39432304","wikidata":"https://www.wikidata.org/wiki/Q188847","display_name":"Environmental science","level":0,"score":0.40396130084991455},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3377417325973511},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26471537351608276},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.19903695583343506},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.09631901979446411},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/isa62769.2024.10786053","doi":"https://doi.org/10.1109/isa62769.2024.10786053","is_oa":false,"landing_page_url":"https://doi.org/10.1109/isa62769.2024.10786053","pdf_url":null,"source":{"id":"https://openalex.org/S7407087507","display_name":"DGON Inertial Sensors and Systems (ISS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 DGON Inertial Sensors and Applications (ISA)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":12,"referenced_works":["https://openalex.org/W2003469080","https://openalex.org/W2112611349","https://openalex.org/W2172125529","https://openalex.org/W2409656303","https://openalex.org/W2409830216","https://openalex.org/W2555790002","https://openalex.org/W2597322709","https://openalex.org/W4241202399","https://openalex.org/W4244663785","https://openalex.org/W4390097632","https://openalex.org/W4390098014","https://openalex.org/W4390348491"],"related_works":["https://openalex.org/W4395030433","https://openalex.org/W4366978513","https://openalex.org/W2093935439","https://openalex.org/W2938234592","https://openalex.org/W4395054255","https://openalex.org/W4405492255","https://openalex.org/W4390872793","https://openalex.org/W2076592062","https://openalex.org/W4413319090","https://openalex.org/W2409656303"],"abstract_inverted_index":{"This":[0,218],"work":[1],"presents":[2],"the":[3,21,51,73,76,81,89,97,186,198,220],"next":[4],"generation":[5],"of":[6,75,80,104,115,126,135,153,161,167,181,197,203],"NG":[7],"LITEFs":[8],"closed-loop":[9],"microelectromechanical":[10],"(MEMS)":[11],"accelerometer.":[12],"The":[13,60,143,173],"B\u2013500":[14,221],"is":[15,171],"a":[16,38,109,121,132,148,158,165,178],"form-fit-function":[17],"compatible":[18],"accelerometer":[19],"to":[20,63,93,100,137,192],"B\u2013":[22],"295.":[23],"Its":[24],"performance":[25,229],"targets":[26],"demanding":[27],"tactical":[28],"and":[29,58,96,120],"navigation":[30],"grade":[31],"applications.":[32],"For":[33,72],"use":[34],"in":[35,185],"harsh":[36,231],"environments,":[37],"focus":[39],"lies":[40],"on":[41],"an":[42,65],"optimized":[43],"vibration":[44,179,199],"rectification":[45,200],"error":[46,114,125],"(VRE).":[47],"Analytical":[48],"considerations":[49],"show":[50],"trade-off":[52],"between":[53],"velocity":[54],"random":[55],"walk":[56],"(VRW)":[57],"VRE.":[59],"strategies":[61],"used":[62],"achieve":[64],"exceptionally":[66],"low":[67],"VRE":[68,174],"will":[69],"be":[70,94,101,209],"explained.":[71],"analysis":[74],"VRW,":[77],"analytical":[78],"models":[79],"entire":[82],"system":[83,99],"are":[84],"set":[85],"up,":[86],"which":[87],"allow":[88],"different":[90],"noise":[91],"sources":[92],"analyzed":[95],"overall":[98],"optimized.":[102],"As":[103],"today,":[105],"we":[106],"can":[107,208],"report":[108],"root-mean-square":[110],"(rms)":[111],"bias":[112,151],"residual":[113],"less":[116,127,204],"than":[117,128,205],"59":[118],"\u03bcg":[119,156],"rms":[122,184],"scale":[123],"factor":[124],"57":[129],"ppm":[130],"over":[131],"temperature":[133],"range":[134,188],"-40\u00b0C":[136],"85\u00b0C":[138],"after":[139],"accelerated":[140],"lifetime":[141],"tests.":[142],"Allan":[144],"deviation":[145],"plot":[146],"shows":[147],"very":[149],"good":[150],"instability":[152],"about":[154,168],"1":[155],"at":[157],"cluster":[159],"time":[160],"400":[162],"s,":[163],"while":[164],"VRW":[166],"15":[169],"\u03bcg/Hz":[170],"achieved.":[172],"was":[175],"determined":[176],"with":[177],"profile":[180],"10.9":[182],"g":[183],"frequency":[187],"from":[189],"10":[190],"Hz":[191],"2":[193],"kHz.":[194],"Excellent":[195],"values":[196],"coefficient":[201],"(VRC)":[202],"5":[206],"\u03bcg/g^2":[207],"reported":[210],"for":[211,223],"direct":[212],"mounting":[213],"without":[214],"any":[215],"shock":[216],"absorber.":[217],"makes":[219],"ideal":[222],"industrial":[224],"applications":[225],"that":[226],"require":[227],"high":[228],"under":[230],"environmental":[232],"conditions.":[233]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-10-27T15:51:10.671819","created_date":"2024-12-18T00:00:00"}