{"id":"https://openalex.org/W4401017404","doi":"https://doi.org/10.1109/icpst61417.2024.10602073","title":"A Novel Si/SiC Heterojunction Trench MOSFET with Electron Tunneling Enhanced and P+ Shielding Region for Improved On-State Resistance","display_name":"A Novel Si/SiC Heterojunction Trench MOSFET with Electron Tunneling Enhanced and P+ Shielding Region for Improved On-State Resistance","publication_year":2024,"publication_date":"2024-05-09","ids":{"openalex":"https://openalex.org/W4401017404","doi":"https://doi.org/10.1109/icpst61417.2024.10602073"},"language":"en","primary_location":{"id":"doi:10.1109/icpst61417.2024.10602073","doi":"https://doi.org/10.1109/icpst61417.2024.10602073","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icpst61417.2024.10602073","pdf_url":null,"source":{"id":"https://openalex.org/S7407087866","display_name":"IEEE International Conference on Power Science and Technology (ICPST)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE 2nd International Conference on Power Science and Technology (ICPST)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5019971196","display_name":"Wei Chen","orcid":"https://orcid.org/0000-0003-3816-7941","observed_orcids":["https://orcid.org/0000-0003-3816-7941"]},"institutions":[{"id":"https://openalex.org/I4405276935","display_name":"Hubei Jiufengshan Laboratory","ror":"https://ror.org/00wffxm77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405276935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Chen","raw_affiliation_strings":["Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China","institution_ids":["https://openalex.org/I4405276935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102646235","display_name":"Jun Yuan","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jun Yuan","raw_affiliation_strings":["Huazhong University of Science and Technology,School of Electrical and Electronic Engineering,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Electrical and Electronic Engineering,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101490478","display_name":"Fei Guo","orcid":"https://orcid.org/0000-0003-3266-5034","observed_orcids":["https://orcid.org/0000-0003-3266-5034"]},"institutions":[{"id":"https://openalex.org/I4405276935","display_name":"Hubei Jiufengshan Laboratory","ror":"https://ror.org/00wffxm77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405276935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fei Guo","raw_affiliation_strings":["Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China","institution_ids":["https://openalex.org/I4405276935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020305107","display_name":"Zhijie Cheng","orcid":"https://orcid.org/0000-0003-2925-2212","observed_orcids":["https://orcid.org/0000-0003-2925-2212"]},"institutions":[{"id":"https://openalex.org/I4405276935","display_name":"Hubei Jiufengshan Laboratory","ror":"https://ror.org/00wffxm77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405276935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhijie Cheng","raw_affiliation_strings":["Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China","institution_ids":["https://openalex.org/I4405276935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027945273","display_name":"Yangyang Wu","orcid":"https://orcid.org/0000-0002-8378-4263","observed_orcids":["https://orcid.org/0000-0002-8378-4263"]},"institutions":[{"id":"https://openalex.org/I4405276935","display_name":"Hubei Jiufengshan Laboratory","ror":"https://ror.org/00wffxm77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405276935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yangyang Wu","raw_affiliation_strings":["Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China","institution_ids":["https://openalex.org/I4405276935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100707346","display_name":"Kuan Wang","orcid":"https://orcid.org/0000-0002-7406-2867","observed_orcids":["https://orcid.org/0000-0002-7406-2867"]},"institutions":[{"id":"https://openalex.org/I4405276935","display_name":"Hubei Jiufengshan Laboratory","ror":"https://ror.org/00wffxm77","country_code":"CN","type":"facility","lineage":["https://openalex.org/I4405276935"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Kuan Wang","raw_affiliation_strings":["Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Hubei Jiufengshan Laboratory,Systems and Device Technology,Dept of Integrated Power,Wuhan,China","institution_ids":["https://openalex.org/I4405276935"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090841182","display_name":"Guoqing Xin","orcid":"https://orcid.org/0000-0002-2536-6346","observed_orcids":["https://orcid.org/0000-0002-2536-6346"]},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guoqing Xin","raw_affiliation_strings":["Huazhong University of Science and Technology,School of Electrical and Electronic Engineering,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Electrical and Electronic Engineering,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5039618601","display_name":"Zhiqiang Wang","orcid":"https://orcid.org/0000-0001-5946-8407","observed_orcids":["https://orcid.org/0000-0001-5946-8407"]},"institutions":[{"id":"https://openalex.org/I47720641","display_name":"Huazhong University of Science and Technology","ror":"https://ror.org/00p991c53","country_code":"CN","type":"education","lineage":["https://openalex.org/I47720641"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiqiang Wang","raw_affiliation_strings":["Huazhong University of Science and Technology,School of Electrical and Electronic Engineering,Wuhan,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Huazhong University of Science and Technology,School of Electrical and Electronic Engineering,Wuhan,China","institution_ids":["https://openalex.org/I47720641"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.6682,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.50161262,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":93},"biblio":{"volume":null,"issue":null,"first_page":"99","last_page":"103"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/trench-mosfet","display_name":"trench MOSFET","score":0.9980000257492065},{"id":"https://openalex.org/keywords/on-resistance","display_name":"on-resistance","score":0.9710000157356262},{"id":"https://openalex.org/keywords/breakdown-voltage","display_name":"breakdown voltage","score":0.8500000238418579},{"id":"https://openalex.org/keywords/channel-mobility","display_name":"channel mobility","score":0.7070000171661377},{"id":"https://openalex.org/keywords/gate-oxide-electric-field","display_name":"gate oxide electric field","score":0.8019999861717224},{"id":"https://openalex.org/keywords/power-semiconductor-devices","display_name":"power semiconductor devices","score":0.6539999842643738}],"concepts":[{"id":"https://openalex.org/C120398109","wikidata":"https://www.wikidata.org/wiki/Q175751","display_name":"Quantum tunnelling","level":2,"score":0.8025975227355957},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7166574001312256},{"id":"https://openalex.org/C155310634","wikidata":"https://www.wikidata.org/wiki/Q1852785","display_name":"Trench","level":3,"score":0.6896377801895142},{"id":"https://openalex.org/C2778413303","wikidata":"https://www.wikidata.org/wiki/Q210793","display_name":"MOSFET","level":4,"score":0.6519004106521606},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6460621356964111},{"id":"https://openalex.org/C79794668","wikidata":"https://www.wikidata.org/wiki/Q1616270","display_name":"Heterojunction","level":2,"score":0.6419764757156372},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.47456127405166626},{"id":"https://openalex.org/C2265751","wikidata":"https://www.wikidata.org/wiki/Q332007","display_name":"Electromagnetic shielding","level":2,"score":0.4394386410713196},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.27898961305618286},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2668111324310303},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.26049840450286865},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1266111433506012},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.10377517342567444},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.09334462881088257},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.052616655826568604},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/icpst61417.2024.10602073","doi":"https://doi.org/10.1109/icpst61417.2024.10602073","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/icpst61417.2024.10602073","pdf_url":null,"source":{"id":"https://openalex.org/S7407087866","display_name":"IEEE International Conference on Power Science and Technology (ICPST)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 IEEE 2nd International Conference on Power Science and Technology (ICPST)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure","score":0.4943999946117401}],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1564645243","https://openalex.org/W2036557001","https://openalex.org/W2040575767","https://openalex.org/W2073867530","https://openalex.org/W2092874501","https://openalex.org/W2139513424","https://openalex.org/W2141935843","https://openalex.org/W2150140983","https://openalex.org/W2401997492","https://openalex.org/W2748960499","https://openalex.org/W2787227784","https://openalex.org/W2902059687","https://openalex.org/W4375861922"],"related_works":["https://openalex.org/W4375861922","https://openalex.org/W7140308005","https://openalex.org/W4387910493","https://openalex.org/W7202282536","https://openalex.org/W4413647897","https://openalex.org/W2765694951","https://openalex.org/W4416736274","https://openalex.org/W7117673418","https://openalex.org/W3160785280","https://openalex.org/W2919594045"],"abstract_inverted_index":{"A":[0],"silicon":[1],"(Si)/silicon":[2],"carbide":[3],"(SiC)":[4],"heterojunction":[5,69,79],"trench":[6,137,145],"MOSFET":[7,138],"with":[8,121,134,139],"an":[9],"electron":[10,74],"tunneling":[11,75],"enhanced":[12],"(ETER)":[13],"and":[14,128,151,160,166],"P+":[15],"shielding":[16],"region":[17],"(P+SLD)":[18],"(HJ-TMOS)":[19],"is":[20,31,39,51,97,116,183],"proposed":[21],"to":[22,53,85,164,187],"overcome":[23],"the":[24,27,42,47,62,78,94,101,108,113,129,135,143,147,162,168,172,177],"issue":[25],"that":[26,132],"inversion":[28],"channel":[29,37],"mobility":[30,38],"poor":[32],"in":[33,41,176],"SiC.":[34],"An":[35],"improved":[36,157],"obtained":[40],"upper":[43],"Si":[44],"layer":[45,50],"while":[46],"SiC":[48],"drift":[49],"capable":[52],"provide":[54],"high":[55],"breakdown":[56,148],"voltage":[57,149],"simultaneously.":[58],"The":[59],"introduction":[60],"of":[61],"ETER":[63],"brings":[64],"about":[65],"a":[66,86,104,140],"significantly":[67,117],"decreased":[68],"barrier":[70],"width,":[71],"thus":[72],"enhancing":[73],"effect.":[76],"Therefore,":[77],"resistance":[80,90,154],"(Rhj)":[81],"does":[82],"not":[83,106],"lead":[84],"prominently":[87],"degraded":[88],"on-state":[89],"(Ron).":[91],"In":[92],"addition,":[93],"gate":[95,144,178],"oxide":[96,179],"well":[98],"shielded":[99],"by":[100],"P+SLD.":[102],"As":[103],"result,":[105],"only":[107],"conduction":[109],"characteristic,":[110],"but":[111],"also":[112],"blocking":[114],"characteristic":[115],"improved.":[118],"Numerical":[119],"analysis":[120],"Silvaco":[122],"TCAD":[123],"has":[124],"been":[125],"carried":[126],"out":[127],"results":[130],"show":[131],"compared":[133],"conventional":[136],"P+SLD":[141],"under":[142],"(P-TMOS),":[146],"(BV)":[150],"specific":[152],"on-":[153],"(Ron,sp)":[155],"are":[156],"from":[158,185],"1449V":[159],"4.55m\u03a9\u2022cm2for":[161],"P-TMOS":[163],"1710V":[165],"2.07m\u03a9\u2022cm2for":[167],"HJ-TMOS,":[169],"respectively.":[170],"Meanwhile,":[171],"peak":[173],"electric":[174],"field":[175],"(Eox,peak)":[180],"at":[181],"VDS=1200V":[182],"relieved":[184],"3.57MV/cm":[186],"2.45MV/cm.":[188]},"counts_by_year":[{"year":2025,"cited_by_count":1}],"updated_date":"2026-10-05T09:50:58.205359","created_date":"2024-07-27T00:00:00"}
