{"id":"https://openalex.org/W4401006573","doi":"https://doi.org/10.1093/mam/ozae044.098","title":"Development of Electron-Beam Induced Soft X-ray and Vacuum Ultraviolet Emission Spectrometer","display_name":"Development of Electron-Beam Induced Soft X-ray and Vacuum Ultraviolet Emission Spectrometer","publication_year":2024,"publication_date":"2024-07-01","ids":{"openalex":"https://openalex.org/W4401006573","doi":"https://doi.org/10.1093/mam/ozae044.098"},"language":"en","primary_location":{"id":"doi:10.1093/mam/ozae044.098","doi":"https://doi.org/10.1093/mam/ozae044.098","is_oa":false,"landing_page_url":"https://doi.org/10.1093/mam/ozae044.098","pdf_url":null,"source":{"id":"https://openalex.org/S98208149","display_name":"Microscopy and Microanalysis","issn_l":"1431-9276","issn":["1431-9276","1435-8115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy and Microanalysis","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074635573","display_name":"Shogo Koshiya","orcid":"https://orcid.org/0000-0002-8205-3389","observed_orcids":["https://orcid.org/0000-0002-8205-3389"]},"institutions":[{"id":"https://openalex.org/I129923673","display_name":"JEOL (Japan)","ror":"https://ror.org/02zme4e72","country_code":"JP","type":"company","lineage":["https://openalex.org/I129923673"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Shogo Koshiya","raw_affiliation_strings":["JEOL Ltd. , SA Business Unit, Akishima, Tokyo , Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"JEOL Ltd. , SA Business Unit, Akishima, Tokyo , Japan","institution_ids":["https://openalex.org/I129923673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052548142","display_name":"Takanori Murano","orcid":"https://orcid.org/0009-0006-6185-9785","observed_orcids":["https://orcid.org/0009-0006-6185-9785"]},"institutions":[{"id":"https://openalex.org/I129923673","display_name":"JEOL (Japan)","ror":"https://ror.org/02zme4e72","country_code":"JP","type":"company","lineage":["https://openalex.org/I129923673"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takanori Murano","raw_affiliation_strings":["JEOL Ltd. , SA Business Unit, Akishima, Tokyo , Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"JEOL Ltd. , SA Business Unit, Akishima, Tokyo , Japan","institution_ids":["https://openalex.org/I129923673"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5077637985","display_name":"Peter L. McSwiggen","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210093450","display_name":"JEOL (United States)","ror":"https://ror.org/0057m5255","country_code":"US","type":"company","lineage":["https://openalex.org/I129923673","https://openalex.org/I4210093450"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Peter McSwiggen","raw_affiliation_strings":["JEOL USA Inc. , Peabody, MA , United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"JEOL USA Inc. , Peabody, MA , United States","institution_ids":["https://openalex.org/I4210093450"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5005789496","display_name":"Vern Robertson","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210093450","display_name":"JEOL (United States)","ror":"https://ror.org/0057m5255","country_code":"US","type":"company","lineage":["https://openalex.org/I129923673","https://openalex.org/I4210093450"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Vern Robertson","raw_affiliation_strings":["JEOL USA Inc. , Peabody, MA , United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"JEOL USA Inc. , Peabody, MA , United States","institution_ids":["https://openalex.org/I4210093450"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5074635573"],"corresponding_institution_ids":["https://openalex.org/I129923673"],"apc_list":{"value":3732,"currency":"USD","value_usd":3732},"apc_paid":null,"fwci":0.7945,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.64270216,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"30","issue":"Supplement_1","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11733","display_name":"X-ray Spectroscopy and Fluorescence Analysis","score":0.5273000001907349,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11733","display_name":"X-ray Spectroscopy and Fluorescence Analysis","score":0.5273000001907349,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.4708999991416931,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11183","display_name":"Advanced X-ray Imaging Techniques","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/soft-x-ray-emission-spectroscopy","display_name":"soft X-ray emission spectroscopy","score":0.9419999718666077},{"id":"https://openalex.org/keywords/diffraction-gratings","display_name":"diffraction gratings","score":0.6800000071525574},{"id":"https://openalex.org/keywords/chemical-state-analysis","display_name":"chemical state analysis","score":0.6029999852180481},{"id":"https://openalex.org/keywords/detection-limit","display_name":"detection limit","score":0.40799999237060547},{"id":"https://openalex.org/keywords/transmission-electron-microscope","display_name":"transmission electron microscope","score":0.38100001215934753},{"id":"https://openalex.org/keywords/scanning-electron-microscopy","display_name":"scanning electron microscopy","score":0.7919999957084656},{"id":"https://openalex.org/keywords/electron-probe-microanalyzer","display_name":"electron probe microanalyzer","score":0.890999972820282},{"id":"https://openalex.org/keywords/fes2","display_name":"FeS2","score":0.765999972820282}],"concepts":[{"id":"https://openalex.org/C2992916681","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Vacuum ultraviolet","level":2,"score":0.7965363264083862},{"id":"https://openalex.org/C95312477","wikidata":"https://www.wikidata.org/wiki/Q207340","display_name":"Cathode ray","level":3,"score":0.6856309175491333},{"id":"https://openalex.org/C2776798109","wikidata":"https://www.wikidata.org/wiki/Q11391","display_name":"Ultraviolet","level":2,"score":0.6665964126586914},{"id":"https://openalex.org/C33390570","wikidata":"https://www.wikidata.org/wiki/Q188463","display_name":"Spectrometer","level":2,"score":0.6376806497573853},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5487740635871887},{"id":"https://openalex.org/C2779328170","wikidata":"https://www.wikidata.org/wiki/Q34777","display_name":"X-ray","level":2,"score":0.46981102228164673},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.46907681226730347},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.415659099817276},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.4140978157520294},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3415958285331726},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3313683867454529},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.27643048763275146},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.10929271578788757}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1093/mam/ozae044.098","doi":"https://doi.org/10.1093/mam/ozae044.098","is_oa":false,"landing_page_url":"https://doi.org/10.1093/mam/ozae044.098","pdf_url":null,"source":{"id":"https://openalex.org/S98208149","display_name":"Microscopy and Microanalysis","issn_l":"1431-9276","issn":["1431-9276","1435-8115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy and Microanalysis","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2108141380","https://openalex.org/W2501581505","https://openalex.org/W4390414428"],"related_works":["https://openalex.org/W4401006200","https://openalex.org/W2501581505","https://openalex.org/W3213014255","https://openalex.org/W2330426712","https://openalex.org/W2144066363","https://openalex.org/W2101163005","https://openalex.org/W7208640954","https://openalex.org/W2609085045","https://openalex.org/W7162230257","https://openalex.org/W2919994911"],"abstract_inverted_index":{"A":[0],"wavelength-dispersive":[1],"type":[2],"grating":[3,170,212,237,473],"spectrometer":[4,116,165,192,197,268,434],"for":[5,171,202,311,471],"soft":[6,126],"X-ray":[7,127],"emission":[8,154,259,345,443,490],"spectroscopy":[9],"(SXES),":[10],"which":[11],"can":[12,49,94,451],"be":[13,50,452],"mounted":[14,51,269],"on":[15,52,270],"a":[16,115,163,167,271,446],"transmission":[17],"electron":[18,55,59,302,466],"microscope,":[19],"was":[20,176],"developed":[21,177],"by":[22,266,364],"Terauchi":[23],"et":[24,179],"al.":[25,180],"[1].":[26],"Since":[27],"then,":[28],"Tohoku":[29],"University,":[30],"QST,":[31],"Shimadzu":[32],"Corporation":[33],"and":[34,41,58,70,82,103,128,146,152,204,230,263,277,290,305,328,356,378,390,401,411,458,468,486,498,500],"JEOL":[35,53,92,273,462],"have":[36,71],"been":[37,72],"collaborating":[38],"to":[39,136,284,325,454],"develop":[40],"launch":[42],"commercial":[43,87,220,292,487],"models":[44,88],"of":[45,85,89,118,125,141,187,209,233,261,280,287,347,388,414,421,426,440,461,474,478,503],"the":[46,86,121,138,185,188,214,219,234,251,257,267,281,285,288,291,309,313,329,338,374,422,436,455,475,479,484],"SXES":[47,90,96,158],"that":[48,217],"scanning":[54],"microscope":[56],"(SEM)":[57],"probe":[60],"microanalyzer":[61],"(EPMA).":[62],"These":[63],"spectrometers":[64],"enable":[65],"microscopic":[66],"chemical":[67,139,424],"state":[68,425],"analysis":[69,159],"utilized":[73],"in":[74,98,120,134,160,218,240,337,394,429,505],"various":[75],"fields":[76],"such":[77,298],"as":[78,216,299],"batteries,":[79],"metals,":[80],"minerals,":[81],"polymers.":[83],"One":[84],"(SS-94000SXES,":[91],"Ltd.)":[93],"obtain":[95],"spectra":[97,260,282,346,387,444,482],"50":[99,323],"-":[100,105,173,224,398,405,494,507],"170":[101],"eV":[102,107,175,324,327,509],"70":[104,223],"210":[106,225],"energy":[108,123,131,246,317,442,448],"regions":[109],"using":[110,149,483],"two":[111,199,335],"gratings":[112,201],"[2].":[113],"Recently,":[114],"capable":[117],"detecting":[119],"lower":[122,316],"range":[124],"vacuum":[129],"ultraviolet":[130],"region":[132,211,236],"is":[133,193,213,320],"demand":[135],"analyze":[137],"states":[140],"materials":[142],"containing":[143],"lithium,":[144],"magnesium,":[145],"transition":[147],"metals":[148],"K,":[150],"L":[151],"M":[153],"spectra.":[155,314,491],"To":[156],"achieve":[157],"this":[161,183],"region,":[162],"prototype":[164,191,196,289,339,433,485],"incorporating":[166],"high-efficiency":[168],"diffraction":[169,200],"35":[172,326],"110":[174],"(Murano":[178],"[3]).":[181],"In":[182],"report,":[184],"performance":[186],"newly":[189],"designed":[190],"presented.":[194],"The":[195,207,227,243,275,295,315,358,367,386,408,432],"has":[198],"high-energy":[203,210],"low-energy":[205,235,472,480],"regions.":[206],"specification":[208],"same":[215,310],"model":[221],"SS-94000SXES,":[222],"eV.":[226],"target":[228],"elements":[229],"their":[231],"emissions":[232],"are":[238,308,362,371,392,417],"shown":[239,393],"Fig.":[241,254,341,395,402],"1.":[242],"listed":[244],"photon":[245,469],"values":[247,376],"were":[248,382],"taken":[249],"from":[250,322],"literature":[252,375],"[4].":[253],"2":[255],"shows":[256,343],"L2,3-M":[258],"magnesium":[262],"aluminum":[264],"obtained":[265],"JXA-8230,":[272],"Ltd.":[274],"solid":[276],"dashed":[278],"line":[279],"correspond":[283],"results":[286],"spectrometer,":[293],"respectively.":[294],"experimental":[296],"conditions":[297],"accelerating":[300],"voltage,":[301],"beam":[303],"current":[304],"acquisition":[306],"time":[307],"all":[312],"detection":[318,439],"limits":[319],"decreased":[321],"spectral":[330,409],"intensities":[331],"increase":[332],"more":[333],"than":[334],"times":[336],"spectrometer.":[340,476],"3":[342],"M2,3-M4,5":[344,416,489],"V,":[348],"Cr,":[349],"Mn,":[350],"Fe,":[351],"Co,":[352],"No,":[353],"Cu,":[354],"Zn":[355],"FeS2.":[357],"notable":[359],"peak":[360,369,412],"positions":[361],"marked":[363],"vertical":[365],"lines.":[366],"observed":[368,383],"energies":[370,470],"consistent":[372],"with":[373],"[4]":[377],"some":[379],"additional":[380],"structures":[381],"(Fig.":[384],"3(a)).":[385],"Fe":[389,415,427,497],"FeS2":[391],"3(b)":[396],"(35":[397],"100":[399],"eV)":[400],"3(c)":[403],"(45":[404],"60":[406,508],"eV).":[407],"shape":[410],"position":[413],"different":[418,423],"apparently":[419],"because":[420],"atoms":[428],"those":[430],"materials.":[431],"enables":[435],"high":[437,447],"sensitivity":[438],"low":[441],"keeping":[445],"resolution.":[449],"It":[450],"attached":[453],"recent":[456],"SEM":[457],"EPMA":[459],"products":[460],"[5].":[463],"Target":[464],"elements,":[465],"transitions":[467],"Comparison":[477],"side":[481],"spectrometers.":[488],"(a)":[492],"V":[493],"Zn,":[495],"(b)":[496,504],"FeS2,":[499],"(c)":[501],"enlargement":[502],"45":[506],"region.":[510]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":1}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2024-07-26T00:00:00"}