{"id":"https://openalex.org/W4401002985","doi":"https://doi.org/10.1093/mam/ozae044.909","title":"Visualizing Defects and Amorphous Materials in 3D with Mixed-State Multislice Electron Ptychography","display_name":"Visualizing Defects and Amorphous Materials in 3D with Mixed-State Multislice Electron Ptychography","publication_year":2024,"publication_date":"2024-07-01","ids":{"openalex":"https://openalex.org/W4401002985","doi":"https://doi.org/10.1093/mam/ozae044.909"},"language":"en","primary_location":{"id":"doi:10.1093/mam/ozae044.909","doi":"https://doi.org/10.1093/mam/ozae044.909","is_oa":true,"landing_page_url":"https://doi.org/10.1093/mam/ozae044.909","pdf_url":"https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.909/58670206/ozae044.909.pdf","source":{"id":"https://openalex.org/S98208149","display_name":"Microscopy and Microanalysis","issn_l":"1431-9276","issn":["1431-9276","1435-8115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy and Microanalysis","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.909/58670206/ozae044.909.pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015387884","display_name":"Shake Karapetyan","orcid":"https://orcid.org/0000-0001-6893-5425","observed_orcids":["https://orcid.org/0000-0001-6893-5425"]},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Shake Karapetyan","raw_affiliation_strings":["School of Applied and Engineering Physics, Cornell University , Ithaca, NY , United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Applied and Engineering Physics, Cornell University , Ithaca, NY , United States","institution_ids":["https://openalex.org/I205783295"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046950240","display_name":"Steven E. Zeltmann","orcid":"https://orcid.org/0000-0003-1790-3137","observed_orcids":["https://orcid.org/0000-0003-1790-3137"]},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]},{"id":"https://openalex.org/I4387152773","display_name":"PARADIM","ror":"https://ror.org/04pw1zg89","country_code":"US","type":"facility","lineage":["https://openalex.org/I1311060795","https://openalex.org/I145311948","https://openalex.org/I205783295","https://openalex.org/I4387152773"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Steven Zeltmann","raw_affiliation_strings":["Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM), Cornell University , Ithaca, NY , United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM), Cornell University , Ithaca, NY , United States","institution_ids":["https://openalex.org/I205783295","https://openalex.org/I4387152773"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072468900","display_name":"Ta-Kun Chen","orcid":"https://orcid.org/0000-0002-5811-0822","observed_orcids":["https://orcid.org/0000-0002-5811-0822"]},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ta-Kun Chen","raw_affiliation_strings":["Corporate Analytical Laboratories, Taiwan Semiconductor Manufacturing Company , Hsinchu , Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Corporate Analytical Laboratories, Taiwan Semiconductor Manufacturing Company , Hsinchu , Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112363411","display_name":"Vincent Hou","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210120917","display_name":"Taiwan Semiconductor Manufacturing Company (Taiwan)","ror":"https://ror.org/02wx79d08","country_code":"TW","type":"company","lineage":["https://openalex.org/I4210120917"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Vincent D H Hou","raw_affiliation_strings":["Corporate Analytical Laboratories, Taiwan Semiconductor Manufacturing Company , Hsinchu , Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Corporate Analytical Laboratories, Taiwan Semiconductor Manufacturing Company , Hsinchu , Taiwan","institution_ids":["https://openalex.org/I4210120917"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5042016235","display_name":"David Anthony Muller","orcid":"https://orcid.org/0000-0003-4129-0473","observed_orcids":["https://orcid.org/0000-0003-4129-0473"]},"institutions":[{"id":"https://openalex.org/I205783295","display_name":"Cornell University","ror":"https://ror.org/05bnh6r87","country_code":"US","type":"education","lineage":["https://openalex.org/I205783295"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"David A Muller","raw_affiliation_strings":["School of Applied and Engineering Physics, Cornell University , Ithaca, NY , United States"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Applied and Engineering Physics, Cornell University , Ithaca, NY , United States","institution_ids":["https://openalex.org/I205783295"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5042016235"],"corresponding_institution_ids":["https://openalex.org/I205783295"],"apc_list":{"value":3732,"currency":"USD","value_usd":3732},"apc_paid":null,"fwci":0.9788,"has_fulltext":true,"cited_by_count":6,"citation_normalized_percentile":{"value":0.75327511,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"30","issue":"Supplement_1","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10857","display_name":"Advanced Electron Microscopy Techniques and Applications","score":0.9911999702453613,"subfield":{"id":"https://openalex.org/subfields/1315","display_name":"Structural Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},"topics":[{"id":"https://openalex.org/T10857","display_name":"Advanced Electron Microscopy Techniques and Applications","score":0.9911999702453613,"subfield":{"id":"https://openalex.org/subfields/1315","display_name":"Structural Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T11183","display_name":"Advanced X-ray Imaging Techniques","score":0.006000000052154064,"subfield":{"id":"https://openalex.org/subfields/3108","display_name":"Radiation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12039","display_name":"Electron and X-Ray Spectroscopy Techniques","score":0.0012000000569969416,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multislice-electron-ptychography","display_name":"multislice electron ptychography","score":0.9269999861717224},{"id":"https://openalex.org/keywords/3d-imaging","display_name":"3D imaging","score":0.7419999837875366},{"id":"https://openalex.org/keywords/amorphous-solids","display_name":"amorphous materials","score":0.8569999933242798},{"id":"https://openalex.org/keywords/buried-defects","display_name":"buried defects","score":0.7699999809265137},{"id":"https://openalex.org/keywords/dose-efficiency","display_name":"dose efficiency","score":0.6480000019073486},{"id":"https://openalex.org/keywords/depth-sectioning","display_name":"depth sectioning","score":0.5139999985694885},{"id":"https://openalex.org/keywords/4d-stem","display_name":"4D-STEM","score":0.6110000014305115},{"id":"https://openalex.org/keywords/atomic-resolution-imaging","display_name":"atomic resolution imaging","score":0.4269999861717224},{"id":"https://openalex.org/keywords/multiple-scattering","display_name":"multiple scattering","score":0.4580000042915344}],"concepts":[{"id":"https://openalex.org/C78153596","wikidata":"https://www.wikidata.org/wiki/Q7257147","display_name":"Ptychography","level":3,"score":0.6318039894104004},{"id":"https://openalex.org/C56052488","wikidata":"https://www.wikidata.org/wiki/Q103382","display_name":"Amorphous solid","level":2,"score":0.5759944915771484},{"id":"https://openalex.org/C2779619515","wikidata":"https://www.wikidata.org/wiki/Q6935089","display_name":"Multislice","level":2,"score":0.5392365455627441},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5120492577552795},{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.4739114046096802},{"id":"https://openalex.org/C8010536","wikidata":"https://www.wikidata.org/wiki/Q160398","display_name":"Crystallography","level":1,"score":0.34961146116256714},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26643499732017517},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.25283199548721313},{"id":"https://openalex.org/C46141821","wikidata":"https://www.wikidata.org/wiki/Q209402","display_name":"Nuclear magnetic resonance","level":1,"score":0.23243451118469238},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.1897944211959839},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.06401711702346802},{"id":"https://openalex.org/C185544564","wikidata":"https://www.wikidata.org/wiki/Q81197","display_name":"Nuclear physics","level":1,"score":0.059211790561676025}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1093/mam/ozae044.909","doi":"https://doi.org/10.1093/mam/ozae044.909","is_oa":true,"landing_page_url":"https://doi.org/10.1093/mam/ozae044.909","pdf_url":"https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.909/58670206/ozae044.909.pdf","source":{"id":"https://openalex.org/S98208149","display_name":"Microscopy and Microanalysis","issn_l":"1431-9276","issn":["1431-9276","1435-8115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy and Microanalysis","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1093/mam/ozae044.909","doi":"https://doi.org/10.1093/mam/ozae044.909","is_oa":true,"landing_page_url":"https://doi.org/10.1093/mam/ozae044.909","pdf_url":"https://academic.oup.com/mam/article-pdf/30/Supplement_1/ozae044.909/58670206/ozae044.909.pdf","source":{"id":"https://openalex.org/S98208149","display_name":"Microscopy and Microanalysis","issn_l":"1431-9276","issn":["1431-9276","1435-8115"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","ki-jl-1","medline","norway-1","poland-70","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310311648","host_organization_name":"Oxford University Press","host_organization_lineage":["https://openalex.org/P4310311648","https://openalex.org/P4310311647"],"host_organization_lineage_names":["Oxford University Press","University of Oxford"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Microscopy and Microanalysis","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4401002985.pdf","grobid_xml":"https://content.openalex.org/works/W4401002985.grobid-xml"},"referenced_works_count":5,"referenced_works":["https://openalex.org/W2054188198","https://openalex.org/W2230031442","https://openalex.org/W3119920837","https://openalex.org/W3211512256","https://openalex.org/W4233760620"],"related_works":["https://openalex.org/W4385072045","https://openalex.org/W4385072555","https://openalex.org/W4401005903","https://openalex.org/W4412908551","https://openalex.org/W4405047376","https://openalex.org/W3188182771","https://openalex.org/W7171427618","https://openalex.org/W4399703504","https://openalex.org/W4412911849","https://openalex.org/W4388482391"],"abstract_inverted_index":{"As":[0],"devices":[1,675],"continue":[2],"to":[3,179,254,336,380,452,584,628,665,746],"get":[4],"smaller,":[5],"reliable":[6],"and":[7,27,48,64,75,94,103,121,127,182,188,257,307,313,328,338,347,363,372,375,552,676,695,726,738,741,772,790,806,929,977],"dose-efficient":[8],"3D":[9,137,201,515,540,619,671,919],"visualization":[10],"of":[11,61,73,82,107,123,130,160,190,224,236,241,251,266,299,303,403,415,429,466,499,504,513,531,538,588,607,651,658,670,684,689,700,704,817,826,832,856,875,888,899,917,967,983],"structures":[12,673],"at":[13,57,164,310,963],"the":[14,59,71,80,119,128,161,169,186,249,267,273,278,290,300,319,360,401,404,413,416,423,430,441,446,453,464,467,496,505,514,518,521,539,546,554,559,569,578,585,589,604,668,685,701,705,714,730,747,764,787,818,824,827,833,839,846,853,857,867,873,876,901,906,918,925,930,935,943,949,952,964,968,973,981,984],"atomic":[15,264,702],"scale":[16,795,990,996],"is":[17,334,377,510,594,644,896],"ever":[18],"more":[19,216,750],"critical.":[20],"Here":[21],"we":[22,38,78,232,353,383,625,639,661],"show":[23,39,322,553],"through":[24],"both":[25,43,62,311,326],"simulations":[26,748],"experiments":[28],"how":[29],"mixed-state":[30],"multislice":[31,83,197,252,622,690],"electron":[32,170,623,691],"ptychography":[33,41,84,198,253,324,356,624],"meets":[34],"this":[35,656],"challenge.":[36],"Moreover,":[37,460],"that":[40,323,332,355,593,643,908],"outperforms":[42,325],"annular":[44],"dark":[45],"field":[46],"(ADF)":[47],"integrated":[49],"differential":[50],"phase":[51,615],"contrast":[52,421],"(iDPC)":[53],"through-focal":[54,155,255,305,308,693,696],"imaging":[55,86,146,280,534,735],"modes":[56,147],"recovering":[58,228],"structure":[60,428,606,642,837,855,865],"crystalline":[63,87],"amorphous":[65,89,424,431,442,840,859],"materials":[66,126],"in":[67,70,92,125,132,192,206,214,227,365,440,445,457,473,482,502,520,596,674,718,724,770,777,792,809,838,850,866,881,892,905,946,951,987],"3D,":[68,93],"even":[69],"presence":[72],"aberrations":[74,740],"noise.":[76],"Experimentally,":[77,382],"demonstrate":[79],"use":[81],"for":[85,117,259,276,603,749,912,972],"materials,":[88,90],"interfaces":[91],"buried":[95,923],"defects.":[96,635],"With":[97,655],"a":[98,104,108,114,136,154,200,211,215,221,229,237,297,344,385,500,511,529,611,641,648,773,897],"deep":[99],"sub-\u00c5":[100],"lateral":[101],"resolution":[102,106,205,362,789],"depth":[105,193,447,566,686,882,982],"few":[109],"nanometers,":[110],"these":[111,225,608,634],"results":[112,321,728,801],"enable":[113],"new":[115,630],"perspective":[116],"understanding":[118],"formation":[120],"nature":[122,129],"defects":[124,543,576,808,922,950],"amorphousness":[131],"various":[133,734],"compounds.":[134],"Generating":[135],"image":[138,398,816],"using":[139,244,289,388,488,733],"conventional":[140],"Scanning":[141],"Transmission":[142],"Electron":[143],"Microscopy":[144],"(STEM)":[145],"like":[148],"ADF":[149,256,309,327,376,397,754,815],"or":[150],"iDPC":[151,258,329,368],"requires":[152],"acquiring":[153],"series":[156],"from":[157,209,370,621,802],"multiple":[158,180],"scans":[159],"same":[162,731],"area":[163,503],"different":[165,279],"defocus":[166],"values,":[167],"reducing":[168,185],"dose":[171,217],"budget":[172],"per":[173],"scan.":[174],"These":[175],"methods":[176,226,281],"are":[177,471,626,662,797,915,992,998],"susceptible":[178],"scattering":[181],"tilt":[183,527],"artifacts,":[184],"reliability":[187],"interpretability":[189],"features":[191,439],"[1].":[194],"In":[195,410,636],"contrast,":[196],"enables":[199],"reconstruction":[202,418,498,541,835,887,920],"with":[203,438,618,647,767,779],"better":[204],"all":[207,900],"dimensions":[208],"just":[210],"single":[212,345],"scan":[213],"efficient":[218],"manner.":[219],"For":[220],"quantitative":[222],"comparison":[223,298],"known":[230],"structure,":[231],"simulated":[233,727],"4D-STEM":[234],"datasets":[235],"model":[238,268,706],"rough":[239,708],"interface":[240,269,387,804,819],"c-Si/a-SiO2/a-HfO2":[242,386],"[1]":[243],"abTEM":[245],"[2].":[246],"We":[247,475],"compared":[248],"performance":[250],"realistic":[260,314,751],"experimental":[261],"conditions.":[262],"The":[263,426,507,959],"potential":[265,703],"was":[270],"used":[271],"as":[272,526,861,863],"ground":[274],"truth":[275],"evaluating":[277],"(Fig.":[282,351,449,548,561,573],"1(A,":[283],"B)).":[284],"Ptychographic":[285,886],"reconstructions":[286],"were":[287,744],"done":[288],"fold_slice":[291],"package":[292],"[3].":[293],"Fig.":[294,393,411,458,493,637],"1(B)":[295],"shows":[296,395,852],"depth-sectioning":[301],"capabilities":[302,688],"ptychography,":[304,692],"iDPC,":[306,694],"infinite":[312],"dose.":[315,381],"Not":[316],"only":[317],"do":[318],"simulation":[320],"but":[330],"also":[331,477],"it":[333],"robust":[335],"noise":[337,743,758],"aberrations.":[339],"From":[340],"intensity":[341],"profiles":[342,762],"along":[343,437,568,713,729,763,845,942],"column":[346,765],"their":[348,780],"FWHM":[349,781],"values":[350],"1(C)),":[352],"see":[354,640],"(green":[357,784],"circles)":[358,785],"provides":[359],"best":[361,788],"accuracy":[364,791],"depth,":[366],"while":[367],"suffers":[369],"broadening":[371],"smearing":[373],"artifacts":[374],"very":[378],"sensitive":[379],"imaged":[384,478],"an":[389,396,479,483,489,768,889,956],"EMPAD-G2":[390],"detector":[391,491],"[4].":[392],"2(A)":[394],"focused":[399],"on":[400,463,823,872],"surface":[402,825],"sample,":[405],"revealing":[406,921],"heavy":[407,461,821],"atoms":[408,462,822,871],"there.":[409],"2(B),":[412],"projection":[414],"ptychographic":[417,497,834],"illustrates":[419],"structural":[420],"within":[422,545,577],"regions.":[425,841],"internal":[427,854],"hafnium":[432],"oxide":[433],"can":[434,878,909],"be":[435,524,879,910],"seen":[436,880],"SiO2":[443],"layer":[444],"section":[448,567,712,844,941],"2(C))":[450],"corresponding":[451,985],"dashed":[454,571,715,847],"red":[455,716,775,848],"line":[456,572,717,732,849,945],"2(B).":[459],"surfaces":[465,874],"sample":[468,487,547,877,926],"(red":[469,883],"arrows)":[470],"resolved":[472],"depth.":[474,793],"have":[476,599],"extended":[480,807,890],"defect":[481,672,891],"ion-implanted":[484],"bulk":[485,560,936],"silicon":[486,614,653],"EMPAD":[490],"[5].":[492],"2(D)":[494,549,562,638],"showcases":[495],"zoomed":[501],"defect.":[506],"leftmost":[508],"panel":[509,895],"z-projection":[512,898],"stack":[516],"where":[517],"irregularities":[519,904],"crystal":[522,556,907,932],"might":[523],"misconstrued":[525],"\u2013":[528],"shortcoming":[530],"most":[532],"projective":[533],"methods.":[535],"Depth":[536,711,843,940],"slices":[537,916,986],"reveal":[542],"embedded":[544],"middle,":[550],"blue)":[551,928],"regular":[555],"further":[557,933],"into":[558,667,934],"rightmost,":[563],"green).":[564,938],"A":[565],"yellow":[570,944,960],"2(E))":[574],"exposes":[575],"Si":[579,590,811,953,969],"bulk.":[580],"Yellow":[581],"arrows":[582,961],"point":[583,962],"local":[586,612,649,965],"re-arrangement":[587],"dumbbells,":[591,970],"information":[592,620],"lost":[595],"projection.":[597],"There":[598],"been":[600],"many":[601],"proposals":[602],"possible":[605],"defects,":[609],"including":[610,955],"hexagonal":[613,652,974],"[6].":[616],"Now,":[617],"able":[627],"obtain":[629],"detailed":[631],"knowledge":[632],"about":[633,680],"indeed":[645],"consistent":[646],"region":[650,860],"phase.":[654,975],"level":[657],"depth-resolved":[659],"detail,":[660],"now":[663],"ready":[664],"delve":[666],"realm":[669],"answer":[677],"long-standing":[678],"questions":[679],"them":[681],"[7].":[682],"Comparison":[683],"sectioning":[687],"ADF.":[697],"(A)":[698,719,771,813],"Projection":[699,831],"a-HfO2/a-SiO2/c-Si":[707,803],"interface.":[709],"(B)":[710,778,830,851],"(with":[720],"3.8":[721],"\u00c5":[722],"blurring":[723],"depth)":[725],"modes.":[736],"Spherical":[737],"chromatic":[739],"Poisson":[742,757],"added":[745],"results;":[752],"Inf":[753],"has":[755],"no":[756],"added.":[759],"(C)":[760,842],"Intensity":[761],"marked":[766],"x":[769],"dotted":[774],"box":[776],"values.":[782],"Ptychography":[783],"gives":[786],"Unannotated":[794],"bars":[796,991,997],"10":[798,993],"\u00c5.":[799,1000],"Experimental":[800],"(A-C)":[805,989],"recrystallized":[810],"(D-E).":[812],"Defocused":[814],"showing":[820,836,903],"thin":[828],"lamella.":[829],"a-HfO2":[858],"well":[862],"some":[864],"a-SiO2":[868],"layer.":[869],"Heavy":[870],"arrow).":[884],"(D)":[885,947],"Si.":[893],"Left":[894],"layers":[902],"mistaken":[911],"tilt,":[913],"next":[914],"inside":[924],"(middle,":[927],"intact":[931],"(right,":[937],"(E)":[939],"reveals":[948],"bulk,":[954],"out-of-phase":[957],"boundary.":[958],"misorientation":[966],"expected":[971],"Blue":[976],"green":[978],"lines":[979],"indicate":[980],"(D).":[988],"\u00c5;":[994],"(D-E)":[995],"5":[999]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":1}],"updated_date":"2026-10-29T09:56:32.521200","created_date":"2024-07-26T00:00:00"}