{"id":"https://openalex.org/W4394862978","doi":"https://doi.org/10.1109/tcst.2024.3385632","title":"Position-Dependent Motion Feedforward via Gaussian Processes: Applied to Snap and Force Ripple in Semiconductor Equipment","display_name":"Position-Dependent Motion Feedforward via Gaussian Processes: Applied to Snap and Force Ripple in Semiconductor Equipment","publication_year":2024,"publication_date":"2024-04-16","ids":{"openalex":"https://openalex.org/W4394862978","doi":"https://doi.org/10.1109/tcst.2024.3385632"},"language":"en","primary_location":{"id":"doi:10.1109/tcst.2024.3385632","doi":"https://doi.org/10.1109/tcst.2024.3385632","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2024.3385632","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-2","poland-140","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://research.tue.nl/en/publications/d7c1e956-2f39-418b-a45b-4b482989821c","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036182436","display_name":"Maurice Poot","orcid":"https://orcid.org/0000-0001-5225-4123","observed_orcids":["https://orcid.org/0000-0001-5225-4123"]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Maurice Poot","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0001-5225-4123","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057114116","display_name":"Max van Haren","orcid":"https://orcid.org/0000-0003-1243-1871","observed_orcids":["https://orcid.org/0000-0003-1243-1871"]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Max van Haren","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0003-1243-1871","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069518390","display_name":"Dragan Kosti\u0107","orcid":"https://orcid.org/0000-0001-9286-7389","observed_orcids":["https://orcid.org/0000-0001-9286-7389","https://orcid.org/0000-0001-6927-4155"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Dragan Kosti\u0107","raw_affiliation_strings":["ASMPT, Center of Competency, Beuningen, TL, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0001-9286-7389","affiliations":[{"raw_affiliation_string":"ASMPT, Center of Competency, Beuningen, TL, The Netherlands","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079577202","display_name":"Jim Portegies","orcid":"https://orcid.org/0000-0002-2103-7334","observed_orcids":["https://orcid.org/0000-0002-2103-7334"]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Jim Portegies","raw_affiliation_strings":["Department of Mathematics and Computer Science, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mathematics and Computer Science, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5050892930","display_name":"Tom Oomen","orcid":"https://orcid.org/0000-0001-7721-4566","observed_orcids":["https://orcid.org/0000-0001-7721-4566"]},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]},{"id":"https://openalex.org/I98358874","display_name":"Delft University of Technology","ror":"https://ror.org/02e2c7k09","country_code":"NL","type":"education","lineage":["https://openalex.org/I98358874"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"Tom Oomen","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands","Delft Center for Systems and Control, Delft University of Technology, Delft, The Netherlands"],"raw_orcid":"https://orcid.org/0000-0001-7721-4566","affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, Eindhoven, AZ, The Netherlands","institution_ids":["https://openalex.org/I83019370"]},{"raw_affiliation_string":"Delft Center for Systems and Control, Delft University of Technology, Delft, The Netherlands","institution_ids":["https://openalex.org/I98358874"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":{"value":2495,"currency":"USD","value_usd":2495},"apc_paid":null,"fwci":1.4569,"has_fulltext":true,"cited_by_count":12,"citation_normalized_percentile":{"value":0.790486,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":"32","issue":"6","first_page":"1968","last_page":"1982"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9779999852180481,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.9779999852180481,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.016599999740719795,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13644","display_name":"Control Systems in Engineering","score":0.0013000000035390258,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gaussian-process-regression","display_name":"Gaussian process regression","score":0.9129999876022339},{"id":"https://openalex.org/keywords/iterative-learning-control","display_name":"iterative learning control","score":0.8100000023841858},{"id":"https://openalex.org/keywords/uncertainty-estimation","display_name":"uncertainty estimation","score":0.6570000052452087},{"id":"https://openalex.org/keywords/wafer-stage","display_name":"wafer stage","score":0.7509999871253967},{"id":"https://openalex.org/keywords/wire-bonder","display_name":"wire bonder","score":0.8619999885559082},{"id":"https://openalex.org/keywords/semiconductor-manufacturing-equipment","display_name":"semiconductor manufacturing equipment","score":0.7020000219345093},{"id":"https://openalex.org/keywords/motion-control","display_name":"motion control","score":0.4569999873638153}],"concepts":[{"id":"https://openalex.org/C2779599953","wikidata":"https://www.wikidata.org/wiki/Q1776117","display_name":"Ripple","level":3,"score":0.7511245608329773},{"id":"https://openalex.org/C38858127","wikidata":"https://www.wikidata.org/wiki/Q5441228","display_name":"Feed forward","level":2,"score":0.7043309211730957},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.5455647110939026},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.5047770738601685},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.47691938281059265},{"id":"https://openalex.org/C104114177","wikidata":"https://www.wikidata.org/wiki/Q79782","display_name":"Motion (physics)","level":2,"score":0.47378942370414734},{"id":"https://openalex.org/C163716315","wikidata":"https://www.wikidata.org/wiki/Q901177","display_name":"Gaussian","level":2,"score":0.4705035388469696},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.44253721833229065},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.35123610496520996},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.29383528232574463},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.29008781909942627},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19490715861320496},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.18037578463554382},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.12630710005760193},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.09872257709503174},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.08625233173370361},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.0},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1109/tcst.2024.3385632","doi":"https://doi.org/10.1109/tcst.2024.3385632","is_oa":false,"landing_page_url":"https://doi.org/10.1109/tcst.2024.3385632","pdf_url":null,"source":{"id":"https://openalex.org/S133363738","display_name":"IEEE Transactions on Control Systems Technology","issn_l":"1063-6536","issn":["1063-6536","1558-0865","2374-0159"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-b","jufo-2","norway-2","poland-140","russia-white-list-1"],"host_organization":"https://openalex.org/P4310319808","host_organization_name":"Institute of Electrical and Electronics Engineers","host_organization_lineage":["https://openalex.org/P4310319808"],"host_organization_lineage_names":["Institute of Electrical and Electronics Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEEE Transactions on Control Systems Technology","raw_type":"journal-article"},{"id":"pmh:oai:pure.tue.nl:openaire/d7c1e956-2f39-418b-a45b-4b482989821c","doi":null,"is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/d7c1e956-2f39-418b-a45b-4b482989821c","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Poot, M M, van Haren, M, Kostic, D, Portegies, J W & Oomen, T A E 2024, 'Position-Dependent Motion Feedforward via Gaussian Processes : Applied to Snap and Force Ripple in Semiconductor Equipment', IEEE Transactions on Control Systems Technology, vol. 32, no. 6, pp. 1968-1982. https://doi.org/10.1109/TCST.2024.3385632","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"pmh:oai:pure.tue.nl:openaire/d7c1e956-2f39-418b-a45b-4b482989821c","doi":null,"is_oa":true,"landing_page_url":"https://research.tue.nl/en/publications/d7c1e956-2f39-418b-a45b-4b482989821c","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Poot, M M, van Haren, M, Kostic, D, Portegies, J W & Oomen, T A E 2024, 'Position-Dependent Motion Feedforward via Gaussian Processes : Applied to Snap and Force Ripple in Semiconductor Equipment', IEEE Transactions on Control Systems Technology, vol. 32, no. 6, pp. 1968-1982. https://doi.org/10.1109/TCST.2024.3385632","raw_type":"info:eu-repo/semantics/article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":43,"referenced_works":["https://openalex.org/W1481925446","https://openalex.org/W1502922572","https://openalex.org/W1593028398","https://openalex.org/W1974984002","https://openalex.org/W1977428887","https://openalex.org/W2001575886","https://openalex.org/W2004207982","https://openalex.org/W2021774297","https://openalex.org/W2031396287","https://openalex.org/W2041242313","https://openalex.org/W2096825228","https://openalex.org/W2104730143","https://openalex.org/W2116154037","https://openalex.org/W2118301267","https://openalex.org/W2122051127","https://openalex.org/W2131824593","https://openalex.org/W2133929282","https://openalex.org/W2149974031","https://openalex.org/W2167073752","https://openalex.org/W2417211050","https://openalex.org/W2524212813","https://openalex.org/W2525120870","https://openalex.org/W2548481047","https://openalex.org/W2559816148","https://openalex.org/W2753476128","https://openalex.org/W2755858105","https://openalex.org/W2791892332","https://openalex.org/W2809985181","https://openalex.org/W2943864366","https://openalex.org/W2999151440","https://openalex.org/W3184017451","https://openalex.org/W4211049957","https://openalex.org/W4220817609","https://openalex.org/W4226057842","https://openalex.org/W4237558136","https://openalex.org/W4285063216","https://openalex.org/W4289538373","https://openalex.org/W4294691960","https://openalex.org/W4301410675","https://openalex.org/W4312389702","https://openalex.org/W4312703770","https://openalex.org/W4390752998","https://openalex.org/W7057880371"],"related_works":["https://openalex.org/W4220817609","https://openalex.org/W7036898745","https://openalex.org/W4294691960","https://openalex.org/W4226057842","https://openalex.org/W7127931062","https://openalex.org/W7165117939","https://openalex.org/W3159491683","https://openalex.org/W6913036751","https://openalex.org/W7066005846","https://openalex.org/W4308244715"],"abstract_inverted_index":{"The":[0,65],"requirements":[1],"for":[2,27,82,123,127],"high":[3],"accuracy":[4],"and":[5,29,42,70,104,116,134],"throughput":[6],"in":[7,85,143],"next-generation":[8],"data-intensive":[9],"motion":[10],"systems":[11],"lead":[12],"to":[13,23,137],"situations":[14],"where":[15],"position-dependent":[16,31,124,138],"feedforward":[17,32,57,126],"is":[18,45,67,94],"essential.":[19],"This":[20],"article":[21],"aims":[22],"develop":[24],"a":[25,60,80,128],"framework":[26,44,81],"interpretable":[28,43],"task-flexible":[30],"through":[33,72],"systematic":[34],"learning":[35,75],"with":[36],"automated":[37],"experimental":[38,83,135],"design.":[39],"A":[40],"data-driven":[41],"developed":[46],"by":[47,96],"employing":[48],"Gaussian":[49],"process":[50],"(GP)":[51],"regression,":[52],"enabling":[53],"accurate":[54],"modeling":[55],"of":[56,63,88,101,120],"parameters":[58],"as":[59],"continuous":[61],"function":[62],"position.":[64],"data":[66],"efficiently":[68],"collected":[69],"illustrated":[71],"an":[73,144],"iterative":[74],"control":[76],"(ILC)":[77],"algorithm.":[78],"Moreover,":[79],"design":[84],"the":[86,91,98,102,105,114,121],"sense":[87],"automatically":[89],"determining":[90],"training":[92],"positions":[93],"presented":[95],"exploiting":[97],"uncertainty":[99],"estimates":[100],"GP":[103],"specified":[106],"first-principles":[107],"knowledge.":[108],"Two":[109],"relevant":[110],"case":[111],"studies":[112],"show":[113],"importance":[115],"significant":[117],"performance":[118],"improvement":[119],"approach":[122],"snap":[125],"simplified":[129],"1-D":[130],"wafer":[131],"stage":[132],"simulation":[133],"application":[136],"motor":[139],"force":[140],"constant":[141],"compensation":[142],"industrial":[145],"wirebonder.":[146]},"counts_by_year":[{"year":2026,"cited_by_count":7},{"year":2025,"cited_by_count":5}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2024-04-17T00:00:00"}