{"id":"https://openalex.org/W4390948792","doi":"https://doi.org/10.1063/5.0174499","title":"Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma","display_name":"Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma","publication_year":2024,"publication_date":"2024-01-15","ids":{"openalex":"https://openalex.org/W4390948792","doi":"https://doi.org/10.1063/5.0174499"},"language":"en","primary_location":{"id":"doi:10.1063/5.0174499","doi":"https://doi.org/10.1063/5.0174499","is_oa":false,"landing_page_url":"https://doi.org/10.1063/5.0174499","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"F. Sato","orcid":"https://orcid.org/0009-0008-1353-5123","observed_orcids":["https://orcid.org/0009-0008-1353-5123"]},"institutions":[{"id":"https://openalex.org/I4210151346","display_name":"Ushio (Japan)","ror":"https://ror.org/03y8p5m75","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210151346"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"F. Sato","raw_affiliation_strings":["Ushio Inc 1 ., 1-90 Komakado, Gotemba, Shizuoka 412-0038, Japan"],"raw_orcid":"https://orcid.org/0009-0008-1353-5123","affiliations":[{"raw_affiliation_string":"Ushio Inc 1 ., 1-90 Komakado, Gotemba, Shizuoka 412-0038, Japan","institution_ids":["https://openalex.org/I4210151346"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088737014","display_name":"Akihisa Nagano","orcid":"https://orcid.org/0009-0002-8711-4336","observed_orcids":["https://orcid.org/0009-0002-8711-4336"]},"institutions":[{"id":"https://openalex.org/I4210151346","display_name":"Ushio (Japan)","ror":"https://ror.org/03y8p5m75","country_code":"JP","type":"company","lineage":["https://openalex.org/I4210151346"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"A. Nagano","raw_affiliation_strings":["Ushio Inc 1 ., 1-90 Komakado, Gotemba, Shizuoka 412-0038, Japan"],"raw_orcid":"https://orcid.org/0009-0002-8711-4336","affiliations":[{"raw_affiliation_string":"Ushio Inc 1 ., 1-90 Komakado, Gotemba, Shizuoka 412-0038, Japan","institution_ids":["https://openalex.org/I4210151346"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5105927066","display_name":"Yusuke Teramoto","orcid":"https://orcid.org/0009-0009-1705-4455","observed_orcids":["https://orcid.org/0009-0009-1705-4455"]},"institutions":[{"id":"https://openalex.org/I4210134416","display_name":"Ushio (Germany)","ror":"https://ror.org/02z8nwe60","country_code":"DE","type":"company","lineage":["https://openalex.org/I4210134416","https://openalex.org/I4210151346"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Y. Teramoto","raw_affiliation_strings":["Ushio Germany GmbH 2 , Steinbachstrasse 15, 52074 Aachen, Germany"],"raw_orcid":"https://orcid.org/0009-0009-1705-4455","affiliations":[{"raw_affiliation_string":"Ushio Germany GmbH 2 , Steinbachstrasse 15, 52074 Aachen, Germany","institution_ids":["https://openalex.org/I4210134416"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210151346"],"apc_list":null,"apc_paid":null,"fwci":0.5711,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.55322495,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":97},"biblio":{"volume":"124","issue":"3","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11920","display_name":"Pulsed Power Technology Applications","score":0.5181000232696533,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11920","display_name":"Pulsed Power Technology Applications","score":0.5181000232696533,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10384","display_name":"Laser-Plasma Interactions and Diagnostics","score":0.16189999878406525,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.14970000088214874,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/extreme-ultraviolet-sources","display_name":"extreme ultraviolet sources","score":0.859000027179718},{"id":"https://openalex.org/keywords/tin-plasma","display_name":"tin plasma","score":0.7350000143051147},{"id":"https://openalex.org/keywords/laser-intensity","display_name":"laser intensity","score":0.7639999985694885},{"id":"https://openalex.org/keywords/plasma-implosion","display_name":"plasma implosion","score":0.5429999828338623},{"id":"https://openalex.org/keywords/rotating-disk-electrode","display_name":"rotating disk electrode","score":0.7429999709129333},{"id":"https://openalex.org/keywords/mirror-lifetime","display_name":"mirror lifetime","score":0.5210000276565552},{"id":"https://openalex.org/keywords/semiconductor-manufacturing","display_name":"semiconductor manufacturing","score":0.5979999899864197}],"concepts":[{"id":"https://openalex.org/C162996421","wikidata":"https://www.wikidata.org/wiki/Q371965","display_name":"Extreme ultraviolet lithography","level":2,"score":0.8922679424285889},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6949216723442078},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5970637798309326},{"id":"https://openalex.org/C146024833","wikidata":"https://www.wikidata.org/wiki/Q1385457","display_name":"Extreme ultraviolet","level":3,"score":0.5480981469154358},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.5050118565559387},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.48222267627716064},{"id":"https://openalex.org/C89395315","wikidata":"https://www.wikidata.org/wiki/Q181232","display_name":"Anode","level":3,"score":0.481991708278656},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36078503727912903},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.34146714210510254},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.3368244767189026},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.3295339345932007},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.25898340344429016},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1470196545124054},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1063/5.0174499","doi":"https://doi.org/10.1063/5.0174499","is_oa":false,"landing_page_url":"https://doi.org/10.1063/5.0174499","pdf_url":null,"source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":17,"referenced_works":["https://openalex.org/W563776228","https://openalex.org/W1981437114","https://openalex.org/W1985076037","https://openalex.org/W1999915677","https://openalex.org/W2060674105","https://openalex.org/W2074185271","https://openalex.org/W2089378220","https://openalex.org/W2094249583","https://openalex.org/W2142202916","https://openalex.org/W2417854232","https://openalex.org/W2479979050","https://openalex.org/W2491694678","https://openalex.org/W2902015427","https://openalex.org/W3133347803","https://openalex.org/W4235740695","https://openalex.org/W4245983678","https://openalex.org/W4367308323"],"related_works":["https://openalex.org/W4388856705","https://openalex.org/W3169883705","https://openalex.org/W3016675496","https://openalex.org/W4387464813","https://openalex.org/W2087913082","https://openalex.org/W2045533815","https://openalex.org/W3023054096","https://openalex.org/W4414433871","https://openalex.org/W4297828414","https://openalex.org/W3203106866"],"abstract_inverted_index":{"Laser-assisted":[0],"discharge-produced":[1],"plasma":[2,67,107,134],"(LDP)":[3],"is":[4,57,118,165],"one":[5,70],"of":[6,43,48,95,139,162,196],"the":[7,17,60,74,83,90,103,121,133,137,140,145,152,157,163,168,176,182,197],"ways":[8],"to":[9,34,62,73,89,102,110,143,150,174,180],"generate":[10],"extreme":[11],"ultraviolet":[12],"(EUV)":[13],"light":[14,22,153],"used":[15,142],"in":[16,167],"semiconductor":[18],"manufacturing":[19],"processes.":[20],"This":[21],"source":[23,171],"uses":[24],"a":[25,29,36,93],"pulsed":[26,31],"laser":[27,61,164,203],"and":[28,38,77,99,115,124,135,155,191,213],"high-current":[30],"electrical":[32,80],"discharge":[33,177],"make":[35],"high-temperature":[37],"high-density":[39],"tin":[40,55,64,104],"plasma.":[41,65,105,126,184,198],"One":[42],"two":[44],"rotating":[45],"disk":[46],"electrodes,":[47],"which":[49],"surfaces":[50],"are":[51,129],"coated":[52],"by":[53,59],"liquid":[54],"(Sn),":[56],"irradiated":[58],"produce":[63],"The":[66,85,106,160,199],"propagates":[68],"from":[69,120,132],"electrode":[71],"(cathode)":[72],"other":[75],"(anode)":[76],"ignites":[78],"an":[79],"breakdown":[81],"between":[82],"electrodes.":[84],"low-inductance":[86],"circuit":[87],"connected":[88],"electrodes":[91],"provides":[92],"current":[94],"approximately":[96],"15":[97],"kA":[98],"150":[100],"ns":[101],"implodes":[108],"due":[109],"its":[111],"own":[112],"magnetic":[113],"pressure,":[114],"EUV":[116,146,170,187,189,211],"radiation":[117],"emitted":[119,131,192,215],"resultant":[122],"hot":[123],"dense":[125],"High-speed":[127],"ions":[128],"also":[130,179],"limit":[136],"lifetime":[138],"mirror":[141],"collect":[144],"light.":[147],"We":[148],"need":[149],"maximize":[151],"emission":[154],"minimize":[156],"ion":[158,193,216],"emission.":[159],"role":[161],"essential":[166],"LDP":[169],"not":[172],"only":[173],"ignite":[175],"but":[178],"condition":[181],"initial":[183],"It":[185],"influences":[186],"energy,":[188],"brightness,":[190],"speed":[194],"distribution":[195],"experiment":[200],"suggested":[201],"that":[202],"intensity":[204],"higher":[205],"than":[206],"25":[207],"GW/cm2":[208],"produced":[209],"high":[210],"brightness":[212],"low":[214],"speed.":[217]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2024-01-18T00:00:00"}