{"id":"https://openalex.org/W4390098014","doi":"https://doi.org/10.1109/iss58390.2023.10361920","title":"Development of a MEMS IMU with optimized SWaP-C","display_name":"Development of a MEMS IMU with optimized SWaP-C","publication_year":2023,"publication_date":"2023-10-24","ids":{"openalex":"https://openalex.org/W4390098014","doi":"https://doi.org/10.1109/iss58390.2023.10361920"},"language":"en","primary_location":{"id":"doi:10.1109/iss58390.2023.10361920","doi":"https://doi.org/10.1109/iss58390.2023.10361920","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/iss58390.2023.10361920","pdf_url":null,"source":{"id":"https://openalex.org/S7407087507","display_name":"DGON Inertial Sensors and Systems (ISS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 DGON Inertial Sensors and Systems (ISS)","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023748424","display_name":"Stefan Rombach","orcid":"https://orcid.org/0000-0001-7627-1008","observed_orcids":["https://orcid.org/0000-0001-7627-1008"]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Rombach","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103173206","display_name":"Michael Maurer","orcid":"https://orcid.org/0000-0002-7857-8721","observed_orcids":["https://orcid.org/0000-0002-7857-8721"]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Maurer","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066094592","display_name":"Sebastian Nessler","orcid":"https://orcid.org/0000-0002-5747-2936","observed_orcids":["https://orcid.org/0000-0002-5747-2936"]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. Nessler","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076609516","display_name":"St. K\u00f6nig","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"S. K\u00f6nig","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":null,"display_name":"M. Heck","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Heck","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":null,"display_name":"C. Weber","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C. Weber","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101817229","display_name":"M. Ruf","orcid":"https://orcid.org/0009-0001-4311-0539","observed_orcids":["https://orcid.org/0009-0001-4311-0539"]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Ruf","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"middle","author":{"id":null,"display_name":"M. Bin Mansoor","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M. Bin Mansoor","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108888259","display_name":"A. J\u00e4ckle","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210138135","display_name":"Northrop Grumman (Germany)","ror":"https://ror.org/043wc6127","country_code":"DE","type":"company","lineage":["https://openalex.org/I2948394018","https://openalex.org/I4210138135"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"A. J\u00e4ckle","raw_affiliation_strings":["Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Northrop Grumman LITEF GmbH,L\u00f6rracherstrasse,Freiburg,Germany,18 79155","institution_ids":["https://openalex.org/I4210138135"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210138135"],"apc_list":null,"apc_paid":null,"fwci":0.4824,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.4564479,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":93},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"15"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.8217999935150146,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":0.8217999935150146,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.17350000143051147,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13436","display_name":"Space Technology and Applications","score":0.0003000000142492354,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-accelerometer","display_name":"MEMS accelerometer","score":0.8769999742507935},{"id":"https://openalex.org/keywords/deep-reactive-ion-etching","display_name":"deep reactive ion etching","score":0.8939999938011169},{"id":"https://openalex.org/keywords/readout-electronics","display_name":"readout electronics","score":0.5440000295639038},{"id":"https://openalex.org/keywords/application-specific-integrated-circuits","display_name":"application-specific integrated circuits","score":0.9800000190734863},{"id":"https://openalex.org/keywords/bias-instability","display_name":"bias instability","score":0.5619999766349792},{"id":"https://openalex.org/keywords/angular-random-walk","display_name":"angular random walk","score":0.9670000076293945},{"id":"https://openalex.org/keywords/digital-signal-processing","display_name":"digital signal processing","score":0.6019999980926514}],"concepts":[{"id":"https://openalex.org/C79061980","wikidata":"https://www.wikidata.org/wiki/Q941680","display_name":"Inertial measurement unit","level":2,"score":0.8130830526351929},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8025442361831665},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7387101054191589},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5960637331008911},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.5743359923362732},{"id":"https://openalex.org/C77390884","wikidata":"https://www.wikidata.org/wiki/Q217302","display_name":"Application-specific integrated circuit","level":2,"score":0.5535465478897095},{"id":"https://openalex.org/C104267543","wikidata":"https://www.wikidata.org/wiki/Q208163","display_name":"Signal processing","level":3,"score":0.48818784952163696},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4836820065975189},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.43936887383461},{"id":"https://openalex.org/C138331895","wikidata":"https://www.wikidata.org/wiki/Q11650","display_name":"Electronics","level":2,"score":0.42392680048942566},{"id":"https://openalex.org/C84462506","wikidata":"https://www.wikidata.org/wiki/Q173142","display_name":"Digital signal processing","level":2,"score":0.4169888496398926},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4084654748439789},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.34123578667640686},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2597552537918091},{"id":"https://openalex.org/C9390403","wikidata":"https://www.wikidata.org/wiki/Q3966","display_name":"Computer hardware","level":1,"score":0.2500304579734802},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.16966810822486877},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.12834858894348145},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.11093765497207642},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.0738251805305481},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1109/iss58390.2023.10361920","doi":"https://doi.org/10.1109/iss58390.2023.10361920","is_oa":false,"landing_page_url":"http://dx.doi.org/10.1109/iss58390.2023.10361920","pdf_url":null,"source":{"id":"https://openalex.org/S7407087507","display_name":"DGON Inertial Sensors and Systems (ISS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 DGON Inertial Sensors and Systems (ISS)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":9,"referenced_works":["https://openalex.org/W1564768010","https://openalex.org/W1907305970","https://openalex.org/W2009797501","https://openalex.org/W2295392748","https://openalex.org/W2417291942","https://openalex.org/W2443919716","https://openalex.org/W2578965497","https://openalex.org/W2597322709","https://openalex.org/W2998252737"],"related_works":["https://openalex.org/W2998252737","https://openalex.org/W2098939290","https://openalex.org/W2017002205","https://openalex.org/W1991304570","https://openalex.org/W1983109163","https://openalex.org/W3215872713","https://openalex.org/W2619501577","https://openalex.org/W2153143154","https://openalex.org/W4411484869","https://openalex.org/W2158068214"],"abstract_inverted_index":{"Northrop":[0],"Grumman":[1],"LITEF":[2,185,287,365],"GmbH":[3],"(NG":[4],"LITEF)":[5],"started":[6],"the":[7,102,108,114,117,136,140,144,164,181,189,203,208,215,224,235,238,251,260,263,284,291,295,322,325,328,335,338,350,367],"development":[8,190,323,360],"of":[9,30,40,71,80,87,104,113,129,135,177,191,232,237,262,293,312,324,337],"microelectromechanical":[10],"systems":[11],"(MEMS)":[12],"gyroscope":[13,43,94,122,301],"chips":[14],"with":[15,66,125,139,154,193,327],"Deep":[16],"Reactive":[17],"Ion":[18],"Etching":[19],"(DRIE)":[20],"in":[21,149,279],"2003.":[22],"Based":[23,266],"on":[24,91,143,163,188,267],"this":[25,299],"technology,":[26],"a":[27,67,120,126,150,174,230,280],"six":[28],"degree":[29],"freedom":[31],"MEMS":[32,35,52,121,288,296,352,357],"IMU":[33,53,145,204,353],"(LITEF":[34],"IMU1)":[36],"was":[37,131,227],"developed,":[38],"consisting":[39],"three":[41,92],"separate":[42],"and":[44,74,95,167,171,199,212,257,275,308,334,355],"accelerometer":[45,96,309],"chips.":[46,297],"After":[47],"successful":[48],"transfer":[49],"from":[50,107,243],"early":[51],"prototypes":[54],"to":[55,100,116,246,259,283,349],"series":[56],"production,":[57],"NG":[58,184,286,364],"LITEFs":[59],"IMU1":[60,88,115,289],"is":[61,89,240],"available":[62],"since":[63],"many":[64],"years":[65],"specified":[68],"bias":[69,276,306,310],"error":[70,277],"4":[72],"$^{\\circ}/\\mathrm{h}$":[73,305],"an":[75,219,342,347],"angular":[76],"random":[77,272],"walk":[78,273],"(ARW)":[79],"0.15":[81],"$^{\\circ}/{\\mathrm{h}}$":[82],"over":[83,366],"temperature.":[84],"The":[85,133,319],"concept":[86,124,256,333],"based":[90],"single":[93,118],"modules.":[97],"In":[98,180,298],"order":[99],"reduce":[101],"number":[103],"signal":[105,110,169,210],"lines":[106],"central":[109],"processing":[111,211],"board":[112],"modules,":[119],"chip":[123],"minimized":[127],"set":[128],"electrodes":[130,137],"selected.":[132],"multiplexing":[134],"combined":[138],"high":[141,161,175],"requirements":[142],"regarding":[146],"performance":[147,302],"results":[148],"complex":[151],"operating":[152],"scheme":[153],"several":[155],"auxiliary":[156],"control":[157],"loops.":[158],"This":[159],"places":[160],"demands":[162],"front-end":[165,216],"electronics":[166,217,340],"digital":[168,209],"processing,":[170],"therefore":[172],"requires":[173],"level":[176],"computing":[178],"power.":[179],"recent":[182],"years,":[183],"has":[186],"focused":[187],"IMU-NG":[192,239,326],"optimized":[194],"SWaP-C":[195],"(Size,":[196],"Weight,":[197],"Power,":[198],"Cost),":[200],"while":[201],"preserving":[202],"performance.":[205],"By":[206],"optimizing":[207,250],"by":[213,229,249],"integrating":[214],"into":[218,341],"application-specific":[220],"integrated":[221],"circuit":[222],"(ASIC),":[223],"power":[225],"consumption":[226],"reduced":[228],"factor":[231],"three.":[233],"Additionally,":[234],"volume":[236],"scaled":[241],"down":[242],"340":[244],"$\\mathrm{cm}^{3}$":[245,248],"113":[247],"existing":[252],"assembly":[253,330],"&":[254,331],"packaging":[255,332],"due":[258],"miniaturization":[261],"readout":[264,339],"electronics.":[265],"these":[268],"activities,":[269],"ARW,":[270],"velocity":[271],"(VRW)":[274],"are":[278],"comparable":[281],"range":[282],"actual":[285],"without":[290],"need":[292],"redesigning":[294],"work,":[300],"below":[303],"0.1":[304],"instability":[307,311],"3":[313],"$\\mu":[314],"\\mathrm{g}$":[315],"can":[316],"be":[317],"presented.":[318],"paper":[320],"covers":[321],"improved":[329],"integration":[336],"ASIC.":[343],"Furthermore,":[344],"it":[345],"provides":[346],"outlook":[348],"next":[351,368],"improvements":[354],"further":[356],"inertial":[358],"sensor":[359],"activities":[361],"planned":[362],"at":[363],"four":[369],"years.":[370]},"counts_by_year":[{"year":2024,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2023-12-23T00:00:00"}