{"id":"https://openalex.org/W4388978769","doi":"https://doi.org/10.35848/1347-4065/ad0fa0","title":"Theoretical study of the gas-phase reaction of hexachlorodisilane by thermodynamic analysis and kinetics calculation","display_name":"Theoretical study of the gas-phase reaction of hexachlorodisilane by thermodynamic analysis and kinetics calculation","publication_year":2023,"publication_date":"2023-11-24","ids":{"openalex":"https://openalex.org/W4388978769","doi":"https://doi.org/10.35848/1347-4065/ad0fa0"},"language":"en","primary_location":{"id":"doi:10.35848/1347-4065/ad0fa0","doi":"https://doi.org/10.35848/1347-4065/ad0fa0","is_oa":true,"landing_page_url":"https://doi.org/10.35848/1347-4065/ad0fa0","pdf_url":"https://iopscience.iop.org/article/10.35848/1347-4065/ad0fa0/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://iopscience.iop.org/article/10.35848/1347-4065/ad0fa0/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5022902671","display_name":"Tomoya Nagahashi","orcid":"https://orcid.org/0009-0009-5939-9937","observed_orcids":["https://orcid.org/0009-0009-5939-9937"]},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Tomoya Nagahashi","raw_affiliation_strings":["Materials Physics, Nagoya University Graduate School of Engineering School of Engineering, Nagoya, Aichi, JAPAN"],"raw_orcid":"https://orcid.org/0009-0009-5939-9937","affiliations":[{"raw_affiliation_string":"Materials Physics, Nagoya University Graduate School of Engineering School of Engineering, Nagoya, Aichi, JAPAN","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055524100","display_name":"Hajime Karasawa","orcid":"https://orcid.org/0009-0003-3664-6014","observed_orcids":["https://orcid.org/0009-0003-3664-6014"]},"institutions":[{"id":"https://openalex.org/I4405274054","display_name":"KOKUSAI ELECTRIC Corporation (Japan)","ror":"https://ror.org/00z5vb879","country_code":"JP","type":"company","lineage":["https://openalex.org/I4405274054"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hajime Karasawa","raw_affiliation_strings":[", Kokusai Electric Corporation, Toyama-city, JAPAN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":", Kokusai Electric Corporation, Toyama-city, JAPAN","institution_ids":["https://openalex.org/I4405274054"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065209631","display_name":"Ryota Horiike","orcid":"https://orcid.org/0009-0008-3592-3928","observed_orcids":["https://orcid.org/0009-0008-3592-3928"]},"institutions":[{"id":"https://openalex.org/I4405274054","display_name":"KOKUSAI ELECTRIC Corporation (Japan)","ror":"https://ror.org/00z5vb879","country_code":"JP","type":"company","lineage":["https://openalex.org/I4405274054"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ryota Horiike","raw_affiliation_strings":[", Kokusai Electric Corporation, Toyama-city, JAPAN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":", Kokusai Electric Corporation, Toyama-city, JAPAN","institution_ids":["https://openalex.org/I4405274054"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5029062859","display_name":"Kenji Shiraishi","orcid":"https://orcid.org/0000-0001-5641-6986","observed_orcids":["https://orcid.org/0000-0001-5641-6986"]},"institutions":[{"id":"https://openalex.org/I4405286711","display_name":"Institute of Materials and Systems for Sustainability, Nagoya University","ror":"https://ror.org/02wb1d827","country_code":"JP","type":"facility","lineage":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]},{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kenji Shiraishi","raw_affiliation_strings":["Institue of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi, 464-8601, JAPAN"],"raw_orcid":"https://orcid.org/0000-0001-5641-6986","affiliations":[{"raw_affiliation_string":"Institue of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Aichi, 464-8601, JAPAN","institution_ids":["https://openalex.org/I4405286711","https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5022902671"],"corresponding_institution_ids":["https://openalex.org/I60134161"],"apc_list":{"value":1500,"currency":"USD","value_usd":1500},"apc_paid":{"value":1500,"currency":"USD","value_usd":1500},"fwci":0.2022,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":{"value":0.28863392,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"63","issue":"2","first_page":"02SP33","last_page":"02SP33"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12358","display_name":"Thermal and Kinetic Analysis","score":0.6718999743461609,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12358","display_name":"Thermal and Kinetic Analysis","score":0.6718999743461609,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.14920000731945038,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12852","display_name":"Chemical Thermodynamics and Molecular Structure","score":0.03200000151991844,"subfield":{"id":"https://openalex.org/subfields/1605","display_name":"Organic Chemistry"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/hexachlorodisilane","display_name":"hexachlorodisilane","score":1.0},{"id":"https://openalex.org/keywords/gas-phase-decomposition","display_name":"gas-phase decomposition","score":0.7229999899864197},{"id":"https://openalex.org/keywords/silicon-tetrachloride","display_name":"silicon tetrachloride","score":0.8220000267028809},{"id":"https://openalex.org/keywords/silicon-dichloride","display_name":"SiCl2","score":0.7900000214576721},{"id":"https://openalex.org/keywords/reaction-kinetics","display_name":"reaction kinetics","score":0.5770000219345093},{"id":"https://openalex.org/keywords/thermodynamic-equilibrium","display_name":"thermodynamic equilibrium","score":0.7960000038146973},{"id":"https://openalex.org/keywords/pyrolysis","display_name":"pyrolysis","score":0.8100000023841858},{"id":"https://openalex.org/keywords/partial-pressure","display_name":"partial pressure","score":0.5799999833106995},{"id":"https://openalex.org/keywords/total-pressure-effects","display_name":"total pressure effects","score":0.593999981880188}],"concepts":[{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.7251153588294983},{"id":"https://openalex.org/C148898269","wikidata":"https://www.wikidata.org/wiki/Q1108792","display_name":"Kinetics","level":2,"score":0.6989980340003967},{"id":"https://openalex.org/C3020013744","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Gas phase","level":2,"score":0.667908787727356},{"id":"https://openalex.org/C68463220","wikidata":"https://www.wikidata.org/wiki/Q27165","display_name":"Partial pressure","level":3,"score":0.6362910866737366},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.5342406630516052},{"id":"https://openalex.org/C131157278","wikidata":"https://www.wikidata.org/wiki/Q51363","display_name":"Thermodynamic equilibrium","level":2,"score":0.4893755316734314},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.4636358618736267},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.4475449323654175},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4421297609806061},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.4154525101184845},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.3951934576034546},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.3818208575248718},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.10999509692192078},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.35848/1347-4065/ad0fa0","doi":"https://doi.org/10.35848/1347-4065/ad0fa0","is_oa":true,"landing_page_url":"https://doi.org/10.35848/1347-4065/ad0fa0","pdf_url":"https://iopscience.iop.org/article/10.35848/1347-4065/ad0fa0/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.35848/1347-4065/ad0fa0","doi":"https://doi.org/10.35848/1347-4065/ad0fa0","is_oa":true,"landing_page_url":"https://doi.org/10.35848/1347-4065/ad0fa0","pdf_url":"https://iopscience.iop.org/article/10.35848/1347-4065/ad0fa0/pdf","source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":"cc-by-nc-nd","license_id":"https://openalex.org/licenses/cc-by-nc-nd","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4388978769.pdf","grobid_xml":"https://content.openalex.org/works/W4388978769.grobid-xml"},"referenced_works_count":32,"referenced_works":["https://openalex.org/W285749399","https://openalex.org/W1975755749","https://openalex.org/W1981562366","https://openalex.org/W1985465845","https://openalex.org/W1989825210","https://openalex.org/W1992173555","https://openalex.org/W1998162823","https://openalex.org/W2003914554","https://openalex.org/W2005387076","https://openalex.org/W2023271753","https://openalex.org/W2031430816","https://openalex.org/W2040832787","https://openalex.org/W2057980421","https://openalex.org/W2074504616","https://openalex.org/W2079950093","https://openalex.org/W2083695772","https://openalex.org/W2086957099","https://openalex.org/W2090180764","https://openalex.org/W2091796607","https://openalex.org/W2093665064","https://openalex.org/W2131413854","https://openalex.org/W2139916893","https://openalex.org/W2143981217","https://openalex.org/W2230728100","https://openalex.org/W2501269565","https://openalex.org/W2588214022","https://openalex.org/W2793321020","https://openalex.org/W2903453818","https://openalex.org/W3039504961","https://openalex.org/W3185955004","https://openalex.org/W4306693573","https://openalex.org/W4324026277"],"related_works":["https://openalex.org/W4324026277","https://openalex.org/W4235635788","https://openalex.org/W2155871674","https://openalex.org/W2022637520","https://openalex.org/W2030200844","https://openalex.org/W2098701827","https://openalex.org/W2087011697","https://openalex.org/W4230721900","https://openalex.org/W2593047441","https://openalex.org/W1985583337"],"abstract_inverted_index":{"Abstract":[0],"We":[1],"conducted":[2],"thermodynamic":[3],"analysis":[4,29,85],"and":[5,41,131],"kinetics":[6],"calculations":[7,116],"for":[8,21],"hexachlorodisilane":[9],"(Si":[10],"2":[11,32,43,65,74,82,91,103,119,147,187],"Cl":[12,33,66,75,92,107,120,148,188],"6":[13,34,67,76,93,121,149,189],"),":[14],"which":[15],"is":[16,56,68,166],"used":[17],"as":[18,152],"source":[19],"gas":[20],"the":[22,45,59,71,89,153,161,164,168],"CVD":[23,182],"of":[24,47,63,101,145,171],"silicon":[25],"nitride":[26],"films.":[27],"Thermodynamic":[28,84],"clarified":[30],"Si":[31,64,73,90,118,146,186],"decomposes":[35,122],"almost":[36,167],"completely":[37],"to":[38],"SiCl":[39,42,78,81,102],"4":[40,79],"in":[44,125],"range":[46],"600":[48,129,158],"\u00b0C\u20131100":[49],"\u00b0C":[50],"under":[51],"equilibrium":[52,98],"condition.":[53],"Therefore,":[54],"it":[55],"estimated":[57],"that":[58,88],"main":[60],"gas-phase":[61],"reaction":[62,72],"represented":[69],"by":[70,123],"\u2192":[77],"+":[80],".":[83,190],"also":[86],"shows":[87],"system":[94],"has":[95],"a":[96],"larger":[97,151],"partial":[99],"pressure":[100,155,173],"than":[104],"SiH":[105],"x":[106],"4-x":[108],"(x":[109],"=":[110],"1":[111],"~":[112],"3)":[113],"systems.":[114],"Kinetics":[115],"revealed":[117],"90%":[124],"0.11":[126],"s":[127,136],"at":[128,137,157,174],"\u00b0C,":[130,139],"0.55":[132],"\u00d7":[133],"10":[134],"\u22123":[135],"800":[138,175],"respectively.":[140],"The":[141],"time-dependent":[142],"pyrolysis":[143],"ratio":[144,165],"becomes":[150],"total":[154,172],"decreases":[156],"\u00b0C.":[159,176],"On":[160],"other":[162],"hand,":[163],"same":[169],"regardless":[170],"These":[177],"results":[178],"will":[179],"help":[180],"optimize":[181],"process":[183],"conditions":[184],"using":[185]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2023-11-25T00:00:00"}