{"id":"https://openalex.org/W4387972656","doi":"https://doi.org/10.1116/6.0003030","title":"Nanoscale strain gauges on flexible polymer substrates","display_name":"Nanoscale strain gauges on flexible polymer substrates","publication_year":2023,"publication_date":"2023-10-27","ids":{"openalex":"https://openalex.org/W4387972656","doi":"https://doi.org/10.1116/6.0003030"},"language":"en","primary_location":{"id":"doi:10.1116/6.0003030","doi":"https://doi.org/10.1116/6.0003030","is_oa":false,"landing_page_url":"https://doi.org/10.1116/6.0003030","pdf_url":null,"source":{"id":"https://openalex.org/S4210235835","display_name":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","issn_l":"2166-2746","issn":["2166-2746","2166-2754"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5051654397","display_name":"Devin K. Brown","orcid":"https://orcid.org/0000-0001-6646-7517","observed_orcids":["https://orcid.org/0000-0001-6646-7517"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Devin K. Brown","raw_affiliation_strings":["Institute for Electronics and Nanotechnology, Georgia Institute of Technology 2 , Atlanta, Georgia 30332","School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332"],"raw_orcid":"https://orcid.org/0000-0001-6646-7517","affiliations":[{"raw_affiliation_string":"Institute for Electronics and Nanotechnology, Georgia Institute of Technology 2 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092893545","display_name":"Isha Lodhi","orcid":"https://orcid.org/0009-0009-6090-913X","observed_orcids":["https://orcid.org/0009-0009-6090-913X"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Isha Lodhi","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332"],"raw_orcid":"https://orcid.org/0009-0009-6090-913X","affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5003748480","display_name":"Biya Haile","orcid":"https://orcid.org/0009-0001-4996-8771","observed_orcids":["https://orcid.org/0009-0001-4996-8771"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Biya Haile","raw_affiliation_strings":["School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332"],"raw_orcid":"https://orcid.org/0009-0001-4996-8771","affiliations":[{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5033332146","display_name":"David Richard Myers","orcid":"https://orcid.org/0000-0001-9659-3274","observed_orcids":["https://orcid.org/0000-0001-9659-3274"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]},{"id":"https://openalex.org/I150468666","display_name":"Emory University","ror":"https://ror.org/03czfpz43","country_code":"US","type":"education","lineage":["https://openalex.org/I150468666"]},{"id":"https://openalex.org/I2802612298","display_name":"The Wallace H. Coulter Department of Biomedical Engineering","ror":"https://ror.org/02j15s898","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444","https://openalex.org/I150468666","https://openalex.org/I2802612298"]},{"id":"https://openalex.org/I4210146983","display_name":"Children's Healthcare of Atlanta","ror":"https://ror.org/050fhx250","country_code":"US","type":"healthcare","lineage":["https://openalex.org/I4210146983"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"David R. Myers","raw_affiliation_strings":["Aflac Cancer and Blood Disorders Center, Children\u2019s Healthcare of Atlanta 5 , Atlanta, Georgia 30322","Department of Pediatrics, Emory University 4 , Atlanta, Georgia 30322","Wallace H. Coulter Department of Biomedical Engineering, Emory University and Georgia Institute of Technology 3 , Atlanta, Georgia 30332"],"raw_orcid":"https://orcid.org/0000-0001-9659-3274","affiliations":[{"raw_affiliation_string":"Aflac Cancer and Blood Disorders Center, Children\u2019s Healthcare of Atlanta 5 , Atlanta, Georgia 30322","institution_ids":["https://openalex.org/I4210146983"]},{"raw_affiliation_string":"Department of Pediatrics, Emory University 4 , Atlanta, Georgia 30322","institution_ids":["https://openalex.org/I150468666"]},{"raw_affiliation_string":"Wallace H. Coulter Department of Biomedical Engineering, Emory University and Georgia Institute of Technology 3 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444","https://openalex.org/I150468666","https://openalex.org/I2802612298"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065031384","display_name":"Wilbur Aaron Lam","orcid":"https://orcid.org/0000-0002-0325-7990","observed_orcids":["https://orcid.org/0000-0002-0325-7990"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]},{"id":"https://openalex.org/I150468666","display_name":"Emory University","ror":"https://ror.org/03czfpz43","country_code":"US","type":"education","lineage":["https://openalex.org/I150468666"]},{"id":"https://openalex.org/I2802612298","display_name":"The Wallace H. Coulter Department of Biomedical Engineering","ror":"https://ror.org/02j15s898","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444","https://openalex.org/I150468666","https://openalex.org/I2802612298"]},{"id":"https://openalex.org/I4210146983","display_name":"Children's Healthcare of Atlanta","ror":"https://ror.org/050fhx250","country_code":"US","type":"healthcare","lineage":["https://openalex.org/I4210146983"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Wilbur A. Lam","raw_affiliation_strings":["Aflac Cancer and Blood Disorders Center, Children\u2019s Healthcare of Atlanta 5 , Atlanta, Georgia 30322","Department of Pediatrics, Emory University 4 , Atlanta, Georgia 30322","Institute for Electronics and Nanotechnology, Georgia Institute of Technology 2 , Atlanta, Georgia 30332","Wallace H. Coulter Department of Biomedical Engineering, Emory University and Georgia Institute of Technology 3 , Atlanta, Georgia 30332"],"raw_orcid":"https://orcid.org/0000-0002-0325-7990","affiliations":[{"raw_affiliation_string":"Aflac Cancer and Blood Disorders Center, Children\u2019s Healthcare of Atlanta 5 , Atlanta, Georgia 30322","institution_ids":["https://openalex.org/I4210146983"]},{"raw_affiliation_string":"Department of Pediatrics, Emory University 4 , Atlanta, Georgia 30322","institution_ids":["https://openalex.org/I150468666"]},{"raw_affiliation_string":"Institute for Electronics and Nanotechnology, Georgia Institute of Technology 2 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"Wallace H. Coulter Department of Biomedical Engineering, Emory University and Georgia Institute of Technology 3 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444","https://openalex.org/I150468666","https://openalex.org/I2802612298"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5067362832","display_name":"Oliver Brand","orcid":"https://orcid.org/0000-0001-7438-1094","observed_orcids":["https://orcid.org/0000-0001-7438-1094"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Oliver Brand","raw_affiliation_strings":["Institute for Electronics and Nanotechnology, Georgia Institute of Technology 2 , Atlanta, Georgia 30332","School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332"],"raw_orcid":"https://orcid.org/0000-0001-7438-1094","affiliations":[{"raw_affiliation_string":"Institute for Electronics and Nanotechnology, Georgia Institute of Technology 2 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"School of Electrical and Computer Engineering, Georgia Institute of Technology 1 , Atlanta, Georgia 30332","institution_ids":["https://openalex.org/I130701444"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.2374,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.40531681,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":93,"max":96},"biblio":{"volume":"41","issue":"6","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.46700000762939453,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10338","display_name":"Advanced Sensor and Energy Harvesting Materials","score":0.46700000762939453,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10379","display_name":"Cellular Mechanics and Interactions","score":0.3345000147819519,"subfield":{"id":"https://openalex.org/subfields/1307","display_name":"Cell Biology"},"field":{"id":"https://openalex.org/fields/13","display_name":"Biochemistry, Genetics and Molecular Biology"},"domain":{"id":"https://openalex.org/domains/1","display_name":"Life Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.16089999675750732,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polydimethylsiloxane","display_name":"polydimethylsiloxane","score":0.9279999732971191}],"concepts":[{"id":"https://openalex.org/C2779849746","wikidata":"https://www.wikidata.org/wiki/Q411955","display_name":"Polydimethylsiloxane","level":2,"score":0.8332160711288452},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7953417301177979},{"id":"https://openalex.org/C60584519","wikidata":"https://www.wikidata.org/wiki/Q610723","display_name":"Strain gauge","level":2,"score":0.7665871381759644},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5535062551498413},{"id":"https://openalex.org/C45206210","wikidata":"https://www.wikidata.org/wiki/Q2415817","display_name":"Nanoscopic scale","level":2,"score":0.5469985604286194},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5053858757019043},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.4982144832611084},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4138849675655365},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4027719497680664},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1116/6.0003030","doi":"https://doi.org/10.1116/6.0003030","is_oa":false,"landing_page_url":"https://doi.org/10.1116/6.0003030","pdf_url":null,"source":{"id":"https://openalex.org/S4210235835","display_name":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","issn_l":"2166-2746","issn":["2166-2746","2166-2754"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-1","norway-1","poland-70","russia-white-list-2"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Vacuum Science & Technology B","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G3824688650","display_name":null,"funder_award_id":"1542174","funder_id":"https://openalex.org/F4320337392","funder_display_name":"Division of Electrical, Communications and Cyber Systems"},{"id":"https://openalex.org/G4645224615","display_name":"Piezoresistive Sensing Platform for High-Throughput Single Platelet Nanomechanics","funder_award_id":"1711259","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G5852687768","display_name":"NNCI: Southeastern Nanotechnology Infrastructure Corridor (SENIC)","funder_award_id":"1542174","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G8745981827","display_name":null,"funder_award_id":"1711259","funder_id":"https://openalex.org/F4320337392","funder_display_name":"Division of Electrical, Communications and Cyber Systems"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320337392","display_name":"Division of Electrical, Communications and Cyber Systems","ror":"https://ror.org/01krpsy48"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W28980735","https://openalex.org/W2006432872","https://openalex.org/W2041559702","https://openalex.org/W2050547995","https://openalex.org/W2079450938","https://openalex.org/W2085866197","https://openalex.org/W2116209993","https://openalex.org/W2167287337","https://openalex.org/W2345307871","https://openalex.org/W2461639554","https://openalex.org/W2467529093","https://openalex.org/W2524015583","https://openalex.org/W2529646902"],"related_works":["https://openalex.org/W2172248011","https://openalex.org/W824239105","https://openalex.org/W2752132821","https://openalex.org/W2789488175","https://openalex.org/W2090644728","https://openalex.org/W2243559625","https://openalex.org/W4394708620","https://openalex.org/W1516841338","https://openalex.org/W2090915280","https://openalex.org/W7220757279"],"abstract_inverted_index":{"Biological":[0],"cell":[1,7,20,31,50,76,224],"force":[2,21,32,225],"is":[3,141,217],"important":[4],"for":[5,222],"proper":[6],"and":[8,11,27,37,48,113,157,216],"tissue":[9],"function":[10],"can":[12,74],"be":[13,91,211],"an":[14,79,137],"indicator":[15],"of":[16,44,69,96,98,116,183,195,200],"disease.":[17],"Therefore,":[18],"measuring":[19],"has":[22],"potential":[23],"in":[24,82,123,153,176],"disease":[25],"diagnosis":[26],"treatment.":[28],"However,":[29],"biological":[30,223],"measurement":[33],"approaches":[34],"are":[35,204],"limited":[36],"typically":[38],"slow":[39],"due":[40],"to":[41,62,90,93,161,165,174,181,186,210],"the":[42,67,104,166,177,198,205],"analysis":[43],"optical":[45],"images":[46],"before":[47],"after":[49],"application":[51],"or":[52],"other":[53],"methods":[54],"that":[55],"have":[56,158,189],"low":[57],"throughput.":[58],"This":[59,101],"work":[60],"seeks":[61],"overcome":[63],"this":[64],"bottleneck":[65],"by":[66],"use":[68],"nanoscale":[70],"strain":[71,120,147,163,208],"gauges":[72,121,148,209],"which":[73,143],"measure":[75,94,162],"forces":[77,182],"as":[78,85,87,109,111],"electrical":[80,112],"signal":[81],"real":[83],"time,":[84],"well":[86,110],"being":[88],"able":[89],"scaled":[92],"tens":[95],"thousands":[97],"cells,":[99],"simultaneously.":[100],"paper":[102],"presents":[103],"design,":[105],"COMSOL":[106],"simulation,":[107],"fabrication,":[108],"mechanical":[114],"testing":[115],"gold":[117,146],"nanometer":[118],"scale":[119],"embedded":[122],"soft":[124,154,214],"polydimethylsiloxane":[125],"(PDMS)":[126],"using":[127,136],"a":[128,218],"sacrificial":[129,139],"aluminum":[130,138],"layer":[131,140],"method.":[132],"A":[133],"process":[134],"flow":[135],"presented,":[142],"successfully":[144],"fabricated":[145],"with":[149,192],"100":[150],"nm":[151],"dimensions":[152],"PDMS":[155,167,178],"polymer":[156],"been":[159,190],"used":[160],"applied":[164],"surface.":[168],"Compressive":[169],"strains":[170],"ranging":[171],"from":[172],"0.4%":[173],"1.7%":[175],"surface,":[179],"corresponding":[180],"718":[184],"nN":[185],"2.0":[187],"\u03bcN":[188],"detected":[191],"resistance":[193],"changes":[194],"1%\u20138%.":[196],"To":[197],"best":[199],"our":[201],"knowledge,":[202],"these":[203],"smallest":[206],"metal":[207],"made":[212],"on":[213],"polymers":[215],"promising":[219],"new":[220],"approach":[221],"measurement.":[226]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2024,"cited_by_count":2}],"updated_date":"2026-09-22T06:50:58.402377","created_date":"2023-10-28T00:00:00"}