{"id":"https://openalex.org/W4386823653","doi":"https://doi.org/10.31438/trf.hh2022.87","title":"AN OUT-OF-PLANE WIDE BANDWIDTH MICRO-G FM ACCELEROMETER WITH DIFFERENTIAL OUTPUT","display_name":"AN OUT-OF-PLANE WIDE BANDWIDTH MICRO-G FM ACCELEROMETER WITH DIFFERENTIAL OUTPUT","publication_year":2022,"publication_date":"2022-06-05","ids":{"openalex":"https://openalex.org/W4386823653","doi":"https://doi.org/10.31438/trf.hh2022.87"},"language":"en","primary_location":{"id":"doi:10.31438/trf.hh2022.87","doi":"https://doi.org/10.31438/trf.hh2022.87","is_oa":true,"landing_page_url":"http://doi.org/10.31438/trf.hh2022.87","pdf_url":"http://dx.doi.org/10.31438/trf.hh2022.87","source":{"id":"https://openalex.org/S4306497755","display_name":"Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"http://dx.doi.org/10.31438/trf.hh2022.87","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5038965164","display_name":"Seungyong Shin","orcid":"https://orcid.org/0000-0002-5996-3157","observed_orcids":["https://orcid.org/0000-0002-5996-3157"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Seungyong Shin","raw_affiliation_strings":["Georgia Institute of Technology, USA and"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, USA and","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5092893609","display_name":"Tanya Chauhan","orcid":"https://orcid.org/0009-0004-1396-7832","observed_orcids":["https://orcid.org/0009-0004-1396-7832"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Tanya Chauhan","raw_affiliation_strings":["Georgia Institute of Technology, USA and"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, USA and","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Justin Matthews","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Justin Matthews","raw_affiliation_strings":["Georgia Institute of Technology, USA and"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, USA and","institution_ids":["https://openalex.org/I130701444"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019388756","display_name":"Haoran Wen","orcid":"https://orcid.org/0000-0003-4691-701X","observed_orcids":["https://orcid.org/0000-0003-4691-701X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Haoran Wen","raw_affiliation_strings":["StethX Microsystems, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"StethX Microsystems, USA","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5081523432","display_name":"Farrokh Ayazi","orcid":"https://orcid.org/0000-0002-4539-7393","observed_orcids":["https://orcid.org/0000-0002-4539-7393"]},"institutions":[{"id":"https://openalex.org/I130701444","display_name":"Georgia Institute of Technology","ror":"https://ror.org/01zkghx44","country_code":"US","type":"education","lineage":["https://openalex.org/I130701444"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Farrokh Ayazi","raw_affiliation_strings":["Georgia Institute of Technology, USA and","StethX Microsystems, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Georgia Institute of Technology, USA and","institution_ids":["https://openalex.org/I130701444"]},{"raw_affiliation_string":"StethX Microsystems, USA","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.31413174,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"348","last_page":"351"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11325","display_name":"Inertial Sensor and Navigation","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wide-bandwidth","display_name":"wide bandwidth","score":0.652999997138977},{"id":"https://openalex.org/keywords/differential-output","display_name":"differential output","score":0.7580000162124634},{"id":"https://openalex.org/keywords/torsion-springs","display_name":"torsion springs","score":0.7630000114440918},{"id":"https://openalex.org/keywords/vacuum-encapsulation","display_name":"vacuum encapsulation","score":0.8270000219345093},{"id":"https://openalex.org/keywords/soi-wafer","display_name":"SOI wafer","score":0.8009999990463257},{"id":"https://openalex.org/keywords/bias-instability","display_name":"bias instability","score":0.8399999737739563},{"id":"https://openalex.org/keywords/mems-resonators","display_name":"MEMS resonators","score":0.6840000152587891}],"concepts":[{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.8365278244018555},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.7704440355300903},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7431589365005493},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7192918062210083},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.6044427156448364},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5769519209861755},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.46614328026771545},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4650617241859436},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4178687334060669},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3867510259151459},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3471750020980835},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.27342355251312256},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.26644283533096313},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.23237156867980957},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2191605567932129},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.19305270910263062},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.12057766318321228},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.31438/trf.hh2022.87","doi":"https://doi.org/10.31438/trf.hh2022.87","is_oa":true,"landing_page_url":"http://doi.org/10.31438/trf.hh2022.87","pdf_url":"http://dx.doi.org/10.31438/trf.hh2022.87","source":{"id":"https://openalex.org/S4306497755","display_name":"Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest","raw_type":"proceedings-article"}],"best_oa_location":{"id":"doi:10.31438/trf.hh2022.87","doi":"https://doi.org/10.31438/trf.hh2022.87","is_oa":true,"landing_page_url":"http://doi.org/10.31438/trf.hh2022.87","pdf_url":"http://dx.doi.org/10.31438/trf.hh2022.87","source":{"id":"https://openalex.org/S4306497755","display_name":"Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head Workshop)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core"],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest","raw_type":"proceedings-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4386823653.pdf","grobid_xml":"https://content.openalex.org/works/W4386823653.grobid-xml"},"referenced_works_count":6,"referenced_works":["https://openalex.org/W1975967429","https://openalex.org/W2070699690","https://openalex.org/W2805453266","https://openalex.org/W3006457576","https://openalex.org/W3044018538","https://openalex.org/W3168655071"],"related_works":["https://openalex.org/W2742193707","https://openalex.org/W2999879216","https://openalex.org/W1975967429","https://openalex.org/W2969912479","https://openalex.org/W3192454168","https://openalex.org/W3164954433","https://openalex.org/W2900431071","https://openalex.org/W2969277964","https://openalex.org/W2888339933","https://openalex.org/W3016652287"],"abstract_inverted_index":{"This":[0],"paper":[1],"reports":[2],"on":[3],"the":[4,56,61,134],"design,":[5],"fabrication,":[6],"and":[7,43,49,58,82,111],"characterization":[8],"of":[9,27,36,64,74,80,86,109,115],"a":[10,28,71,77,83,95,103,112],"vacuum":[11],"encapsulated":[12],"wide":[13,96],"bandwidth":[14],"micro-g":[15],"out-of-plane":[16],"accelerometer":[17,25,98],"with":[18,76,102],"differential":[19,34],"output":[20],"utilizing":[21],"electrostatic":[22],"frequency":[23],"modulation.The":[24],"consists":[26],"proof-mass":[29,59,84],"suspended":[30],"by":[31,128],"torsional":[32],"springs,":[33],"pair":[35],"freefree":[37],"beam":[38],"(FFB)":[39],"resonators":[40,57],"as":[41],"transducers,":[42],"top-layer":[44],"polysilicon":[45],"capacitive":[46],"electrodes":[47],"deposited":[48],"bridged":[50],"over":[51],"TEOS-filled":[52],"trenches":[53],"which":[54,90],"define":[55],"in":[60,94],"device":[62,69],"layer":[63],"an":[65],"SOI":[66],"wafer.The":[67],"fabricated":[68],"measures":[70],"scale":[72],"factor":[73],"41.2Hz/g":[75],"resonator":[78],"Q":[79,85],"1800":[81],"6.7":[87],"at":[88],"19kHz,":[89],"enable":[91],"low-noise":[92],"operation":[93],"bandwidth.The":[97],"demonstrates":[99],"high":[100],"performance":[101],"VRW":[104],"corresponding":[105],"to":[106,133],"noise":[107],"density":[108],"5.8\u03bcg/\u221aHz":[110],"bias":[113],"instability":[114],"23\u03bcg,":[116],"without":[117],"temperature":[118,130],"compensation.The":[119],"demonstrated":[120],"performance,":[121],"while":[122],"promising,":[123],"can":[124],"be":[125],"further":[126],"improved":[127],"applying":[129],"compensation":[131],"techniques":[132],"electronics":[135],"interface.":[136]},"counts_by_year":[],"updated_date":"2026-10-30T12:39:25.321706","created_date":"2023-09-19T00:00:00"}