{"id":"https://openalex.org/W4386714925","doi":"https://doi.org/10.3390/app131810243","title":"System-Level Fault Diagnosis for an Industrial Wafer Transfer Robot with Multi-Component Failure Modes","display_name":"System-Level Fault Diagnosis for an Industrial Wafer Transfer Robot with Multi-Component Failure Modes","publication_year":2023,"publication_date":"2023-09-12","ids":{"openalex":"https://openalex.org/W4386714925","doi":"https://doi.org/10.3390/app131810243"},"language":"en","primary_location":{"id":"doi:10.3390/app131810243","doi":"https://doi.org/10.3390/app131810243","is_oa":true,"landing_page_url":"https://doi.org/10.3390/app131810243","pdf_url":"https://www.mdpi.com/2076-3417/13/18/10243/pdf?version=1694587716","source":{"id":"https://openalex.org/S4210205812","display_name":"Applied Sciences","issn_l":"2076-3417","issn":["2076-3417"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","doaj","norway-1","oarl","poland-100","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Sciences","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2076-3417/13/18/10243/pdf?version=1694587716","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5013897089","display_name":"I.S. Lee","orcid":"https://orcid.org/0000-0003-0698-0006","observed_orcids":["https://orcid.org/0000-0003-0698-0006"]},"institutions":[{"id":"https://openalex.org/I24456540","display_name":"Korea Aerospace University","ror":"https://ror.org/05jmm0651","country_code":"KR","type":"education","lineage":["https://openalex.org/I24456540"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Inu Lee","raw_affiliation_strings":["Department of Aerospace and Mechanical Engineering, Korea Aerospace University, Goyang-si 10540, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-0698-0006","affiliations":[{"raw_affiliation_string":"Department of Aerospace and Mechanical Engineering, Korea Aerospace University, Goyang-si 10540, Republic of Korea","institution_ids":["https://openalex.org/I24456540"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100677722","display_name":"Hyung Jun Park","orcid":"https://orcid.org/0000-0003-3174-2392","observed_orcids":["https://orcid.org/0000-0003-3174-2392"]},"institutions":[{"id":"https://openalex.org/I24456540","display_name":"Korea Aerospace University","ror":"https://ror.org/05jmm0651","country_code":"KR","type":"education","lineage":["https://openalex.org/I24456540"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyung Jun Park","raw_affiliation_strings":["Department of Aerospace and Mechanical Engineering, Korea Aerospace University, Goyang-si 10540, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-3174-2392","affiliations":[{"raw_affiliation_string":"Department of Aerospace and Mechanical Engineering, Korea Aerospace University, Goyang-si 10540, Republic of Korea","institution_ids":["https://openalex.org/I24456540"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109242968","display_name":"Jae\u2010Won Jang","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I24456540","display_name":"Korea Aerospace University","ror":"https://ror.org/05jmm0651","country_code":"KR","type":"education","lineage":["https://openalex.org/I24456540"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jae-Won Jang","raw_affiliation_strings":["Department of Smart Air Mobility, Korea Aerospace University, Goyang-si 10540, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Smart Air Mobility, Korea Aerospace University, Goyang-si 10540, Republic of Korea","institution_ids":["https://openalex.org/I24456540"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101494385","display_name":"Chang-Woo Kim","orcid":"https://orcid.org/0000-0002-3553-8383","observed_orcids":["https://orcid.org/0000-0002-3553-8383"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Chang-Woo Kim","raw_affiliation_strings":["Cymechs, Hwaseong-si 18487, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Cymechs, Hwaseong-si 18487, Republic of Korea","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5001505783","display_name":"Joo-Ho Choi","orcid":"https://orcid.org/0000-0002-1709-4491","observed_orcids":["https://orcid.org/0000-0002-1709-4491"]},"institutions":[{"id":"https://openalex.org/I24456540","display_name":"Korea Aerospace University","ror":"https://ror.org/05jmm0651","country_code":"KR","type":"education","lineage":["https://openalex.org/I24456540"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Joo-Ho Choi","raw_affiliation_strings":["School of Aerospace & Mechanical Engineering, Korea Aerospace University, Goyang-si 10540, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-1709-4491","affiliations":[{"raw_affiliation_string":"School of Aerospace & Mechanical Engineering, Korea Aerospace University, Goyang-si 10540, Republic of Korea","institution_ids":["https://openalex.org/I24456540"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5001505783"],"corresponding_institution_ids":["https://openalex.org/I24456540"],"apc_list":{"value":2300,"currency":"CHF","value_usd":2558},"apc_paid":{"value":2300,"currency":"CHF","value_usd":2558},"fwci":0.8722,"has_fulltext":true,"cited_by_count":10,"citation_normalized_percentile":{"value":0.67103852,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":91,"max":98},"biblio":{"volume":"13","issue":"18","first_page":"10243","last_page":"10243"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10220","display_name":"Machine Fault Diagnosis Techniques","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10220","display_name":"Machine Fault Diagnosis Techniques","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10876","display_name":"Fault Detection and Control Systems","score":0.0019000000320374966,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10780","display_name":"Reliability and Maintenance Optimization","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2213","display_name":"Safety, Risk, Reliability and Quality"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/system-level-fault-diagnosis","display_name":"system-level fault diagnosis","score":0.9350000023841858},{"id":"https://openalex.org/keywords/wavelet-packet-decomposition","display_name":"wavelet packet decomposition","score":0.8069999814033508},{"id":"https://openalex.org/keywords/feature-selection","display_name":"feature selection","score":0.9229999780654907},{"id":"https://openalex.org/keywords/harmonic-drive","display_name":"harmonic drive","score":0.7269999980926514},{"id":"https://openalex.org/keywords/timing-belt","display_name":"timing belt","score":0.9980000257492065},{"id":"https://openalex.org/keywords/maintenance-strategy","display_name":"maintenance strategy","score":0.8700000047683716},{"id":"https://openalex.org/keywords/semiconductor-manufacturing","display_name":"semiconductor manufacturing","score":0.5180000066757202},{"id":"https://openalex.org/keywords/neural-network","display_name":"artificial neural networks","score":0.7929999828338623},{"id":"https://openalex.org/keywords/gaussian-process-regression","display_name":"Gaussian process regression","score":1.0}],"concepts":[{"id":"https://openalex.org/C168167062","wikidata":"https://www.wikidata.org/wiki/Q1117970","display_name":"Component (thermodynamics)","level":2,"score":0.5921088457107544},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.5889406204223633},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4687505066394806},{"id":"https://openalex.org/C175551986","wikidata":"https://www.wikidata.org/wiki/Q47089","display_name":"Fault (geology)","level":2,"score":0.44910287857055664},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.44718775153160095},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4131004512310028},{"id":"https://openalex.org/C200601418","wikidata":"https://www.wikidata.org/wiki/Q2193887","display_name":"Reliability engineering","level":1,"score":0.3873913288116455},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.37094035744667053},{"id":"https://openalex.org/C165205528","wikidata":"https://www.wikidata.org/wiki/Q83371","display_name":"Seismology","level":1,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.3390/app131810243","doi":"https://doi.org/10.3390/app131810243","is_oa":true,"landing_page_url":"https://doi.org/10.3390/app131810243","pdf_url":"https://www.mdpi.com/2076-3417/13/18/10243/pdf?version=1694587716","source":{"id":"https://openalex.org/S4210205812","display_name":"Applied Sciences","issn_l":"2076-3417","issn":["2076-3417"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","doaj","norway-1","oarl","poland-100","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Sciences","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:fe49b8ecc3dd41159a906b1ef14e420d","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/fe49b8ecc3dd41159a906b1ef14e420d","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Applied Sciences, Vol 13, Iss 18, p 10243 (2023)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/app131810243","doi":"https://doi.org/10.3390/app131810243","is_oa":true,"landing_page_url":"https://doi.org/10.3390/app131810243","pdf_url":"https://www.mdpi.com/2076-3417/13/18/10243/pdf?version=1694587716","source":{"id":"https://openalex.org/S4210205812","display_name":"Applied Sciences","issn_l":"2076-3417","issn":["2076-3417"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","doaj","norway-1","oarl","poland-100","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Sciences","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.4943999946117401,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"study_designs":[],"awards":[{"id":"https://openalex.org/G1804729803","display_name":null,"funder_award_id":"R22XO02-01","funder_id":"https://openalex.org/F4320326258","funder_display_name":"Korea Electric Power Corporation"}],"funders":[{"id":"https://openalex.org/F4320326258","display_name":"Korea Electric Power Corporation","ror":"https://ror.org/04fperw70"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4386714925.pdf","grobid_xml":"https://content.openalex.org/works/W4386714925.grobid-xml"},"referenced_works_count":30,"referenced_works":["https://openalex.org/W2035069782","https://openalex.org/W2088924893","https://openalex.org/W2092765045","https://openalex.org/W2111575564","https://openalex.org/W2187089797","https://openalex.org/W2235261946","https://openalex.org/W2277328489","https://openalex.org/W2775866397","https://openalex.org/W2794605228","https://openalex.org/W2809350318","https://openalex.org/W2888400328","https://openalex.org/W2920219184","https://openalex.org/W2970697763","https://openalex.org/W2994862925","https://openalex.org/W3010542492","https://openalex.org/W3037229473","https://openalex.org/W3049192719","https://openalex.org/W3083796308","https://openalex.org/W3101729775","https://openalex.org/W3106637658","https://openalex.org/W3130982640","https://openalex.org/W3132045509","https://openalex.org/W3164799597","https://openalex.org/W3166944301","https://openalex.org/W3189070974","https://openalex.org/W3213192587","https://openalex.org/W4213076825","https://openalex.org/W4213456104","https://openalex.org/W4214864730","https://openalex.org/W4315782573"],"related_works":["https://openalex.org/W4405355008","https://openalex.org/W3138058104","https://openalex.org/W4404345516","https://openalex.org/W3137544269","https://openalex.org/W2034480970","https://openalex.org/W4405522449","https://openalex.org/W7130319583","https://openalex.org/W2096711639","https://openalex.org/W3132045509","https://openalex.org/W2235261946"],"abstract_inverted_index":{"In":[0],"the":[1,16,43,49,52,59,63,67,81,87,97,105,110,123,127,134,147,152,167,170,174],"manufacturing":[2],"industry,":[3,107],"robots":[4],"are":[5,131,164],"constantly":[6],"operated":[7,113],"at":[8],"high":[9],"speed,":[10],"which":[11,36,109],"degrades":[12],"their":[13],"performance":[14,83],"by":[15,77,86,142,145],"degradation":[17,65],"of":[18,38,55,89,99,151,169],"internal":[19],"components,":[20],"eventually":[21],"reaching":[22],"failure.":[23],"To":[24],"address":[25],"this":[26],"issue,":[27],"a":[28,72,100],"framework":[29,93],"for":[30,119,133,166],"system-level":[31],"fault":[32,153],"diagnosis":[33,168],"is":[34,75,84,94,112],"proposed,":[35],"consists":[37],"extracting":[39],"useful":[40],"features":[41],"from":[42],"motor":[44,135],"control":[45],"signal":[46,136],"acquired":[47],"during":[48],"operation,":[50],"diagnosing":[51],"current":[53],"health":[54,172],"each":[56,90],"component":[57],"using":[58,96,137],"features,":[60],"and":[61,126,149,160,173],"estimating":[62],"associated":[64],"in":[66,104,108],"robot":[68,103,111],"system\u2019s":[69,175],"performance.":[70],"Finally,":[71],"maintenance":[73],"strategy":[74],"determined":[76],"evaluating":[78],"how":[79],"well":[80],"system":[82],"restored":[85],"replacement":[88],"component.":[91],"The":[92],"demonstrated":[95],"example":[98],"wafer":[101],"transfer":[102],"semiconductor":[106],"under":[114],"faults":[115],"with":[116],"various":[117],"severities":[118],"two":[120],"critical":[121],"components:":[122],"harmonic":[124],"drive":[125],"timing":[128],"belt.":[129],"Features":[130],"extracted":[132],"wavelet":[138],"packet":[139],"decomposition,":[140],"followed":[141],"feature":[143],"selection":[144],"considering":[146],"trendability":[148],"separability":[150],"severity.":[154],"An":[155],"artificial":[156],"neural":[157],"network":[158],"model":[159],"Gaussian":[161],"process":[162],"regression":[163],"employed":[165],"components\u2019":[171],"performance,":[176],"respectively.":[177]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":2}],"updated_date":"2026-11-07T11:25:07.637180","created_date":"2023-09-14T00:00:00"}