{"id":"https://openalex.org/W4386532280","doi":"https://doi.org/10.35848/1347-4065/acf823","title":"Fabrication of polarity inverted LiNbO 3 /GaN channel waveguide by surface activated bonding for high-efficiency transverse quasi-phase-matched wavelength conversion","display_name":"Fabrication of polarity inverted LiNbO 3 /GaN channel waveguide by surface activated bonding for high-efficiency transverse quasi-phase-matched wavelength conversion","publication_year":2023,"publication_date":"2023-09-08","ids":{"openalex":"https://openalex.org/W4386532280","doi":"https://doi.org/10.35848/1347-4065/acf823"},"language":"en","primary_location":{"id":"doi:10.35848/1347-4065/acf823","doi":"https://doi.org/10.35848/1347-4065/acf823","is_oa":false,"landing_page_url":"https://doi.org/10.35848/1347-4065/acf823","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5080918229","display_name":"Ryosuke Noro","orcid":"https://orcid.org/0009-0007-2988-0637","observed_orcids":["https://orcid.org/0009-0007-2988-0637"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Ryosuke Noro","raw_affiliation_strings":["Electrical, Electronic and Infocommunications Engineering, Osaka University School of Engineering Graduate School of Engineering, Suita, Osaka, JAPAN","Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical, Electronic and Infocommunications Engineering, Osaka University School of Engineering Graduate School of Engineering, Suita, Osaka, JAPAN","institution_ids":["https://openalex.org/I98285908"]},{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039245582","display_name":"Mariko Adachi","orcid":"https://orcid.org/0009-0000-5537-1819","observed_orcids":["https://orcid.org/0009-0000-5537-1819"]},"institutions":[{"id":"https://openalex.org/I4405264272","display_name":"Nanophoton Corporation (Japan)","ror":"https://ror.org/01f3xy372","country_code":"JP","type":"company","lineage":["https://openalex.org/I4405264272"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Mariko Adachi","raw_affiliation_strings":["Nanophoton Corporation, Mino, Osaka 562-0036, Japan","Nanophoton Corporation, Minoo, Osaka, JAPAN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Nanophoton Corporation, Mino, Osaka 562-0036, Japan","institution_ids":["https://openalex.org/I4405264272"]},{"raw_affiliation_string":"Nanophoton Corporation, Minoo, Osaka, JAPAN","institution_ids":["https://openalex.org/I4405264272"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102430715","display_name":"Yasufumi Fujiwara","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yasufumi Fujiwara","raw_affiliation_strings":["Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","Graduate School of Engineering, Osaka University, Suita, Osaka, JAPAN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","institution_ids":["https://openalex.org/I98285908"]},{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Suita, Osaka, JAPAN","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058658492","display_name":"Masahiro Uemukai","orcid":"https://orcid.org/0009-0005-3143-1086","observed_orcids":["https://orcid.org/0009-0005-3143-1086"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Uemukai","raw_affiliation_strings":["Electrical, Electronic and Infocommunications Engineering, Osaka University School of Engineering Graduate School of Engineering, Suita, Osaka, JAPAN","Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical, Electronic and Infocommunications Engineering, Osaka University School of Engineering Graduate School of Engineering, Suita, Osaka, JAPAN","institution_ids":["https://openalex.org/I98285908"]},{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031411116","display_name":"Tomoyuki Tanikawa","orcid":"https://orcid.org/0000-0003-0148-9701","observed_orcids":["https://orcid.org/0000-0003-0148-9701"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Tomoyuki Tanikawa","raw_affiliation_strings":["Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","Graduate School of Engineering, Osaka University, Yamadaoka 2-1, Suita, 565-0871, JAPAN"],"raw_orcid":"https://orcid.org/0000-0003-0148-9701","affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","institution_ids":["https://openalex.org/I98285908"]},{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Yamadaoka 2-1, Suita, 565-0871, JAPAN","institution_ids":["https://openalex.org/I98285908"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5053953937","display_name":"Ryuji Katayama","orcid":"https://orcid.org/0000-0002-7897-3393","observed_orcids":["https://orcid.org/0000-0002-7897-3393","https://orcid.org/0009-0002-5685-7153"]},"institutions":[{"id":"https://openalex.org/I98285908","display_name":"The University of Osaka","ror":"https://ror.org/035t8zc32","country_code":"JP","type":"education","lineage":["https://openalex.org/I98285908"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Ryuji Katayama","raw_affiliation_strings":["Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","Osaka University School of Engineering Graduate School of Engineering, Suita, 565-0871, JAPAN"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Engineering, Osaka University, Suita, Osaka 565-0871, Japan","institution_ids":["https://openalex.org/I98285908"]},{"raw_affiliation_string":"Osaka University School of Engineering Graduate School of Engineering, Suita, 565-0871, JAPAN","institution_ids":["https://openalex.org/I98285908"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5080918229"],"corresponding_institution_ids":["https://openalex.org/I98285908"],"apc_list":{"value":1500,"currency":"USD","value_usd":1500},"apc_paid":null,"fwci":0.3105,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.38490487,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":88,"max":95},"biblio":{"volume":"62","issue":"10","first_page":"102001","last_page":"102001"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.8500999808311462,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11050","display_name":"Photorefractive and Nonlinear Optics","score":0.8500999808311462,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.08820000290870667,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.019200000911951065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/surface-activated-bonding","display_name":"surface activated bonding","score":0.8169999718666077},{"id":"https://openalex.org/keywords/channel-waveguides","display_name":"channel waveguides","score":0.6620000004768372},{"id":"https://openalex.org/keywords/wavelength-conversion","display_name":"wavelength conversion","score":0.9739999771118164},{"id":"https://openalex.org/keywords/thin-film-transfer","display_name":"thin film transfer","score":0.8130000233650208},{"id":"https://openalex.org/keywords/nonlinear-optical-properties","display_name":"nonlinear optical properties","score":0.7059999704360962},{"id":"https://openalex.org/keywords/quantum-light-sources","display_name":"quantum light sources","score":0.7870000004768372},{"id":"https://openalex.org/keywords/chemical-mechanical-polishing","display_name":"chemical mechanical polishing","score":0.6679999828338623},{"id":"https://openalex.org/keywords/surface-roughness","display_name":"surface roughness","score":0.6370000243186951}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8463442325592041},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.637631893157959},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6329382061958313},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6232794523239136},{"id":"https://openalex.org/C138113353","wikidata":"https://www.wikidata.org/wiki/Q611639","display_name":"Polishing","level":2,"score":0.45773744583129883},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.45358943939208984},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.4428856670856476},{"id":"https://openalex.org/C71039073","wikidata":"https://www.wikidata.org/wiki/Q3439090","display_name":"Surface finish","level":2,"score":0.4263463318347931},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.41208532452583313},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2049679458141327},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1801646649837494},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.35848/1347-4065/acf823","doi":"https://doi.org/10.35848/1347-4065/acf823","is_oa":false,"landing_page_url":"https://doi.org/10.35848/1347-4065/acf823","pdf_url":null,"source":{"id":"https://openalex.org/S143744711","display_name":"Japanese Journal of Applied Physics","issn_l":"0021-4922","issn":["0021-4922","1347-4065"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-d","jufo-1","ki-jl-1","norway-1","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310311669","host_organization_name":"Institute of Physics","host_organization_lineage":["https://openalex.org/P4310311669"],"host_organization_lineage_names":["Institute of Physics"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Japanese Journal of Applied Physics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G8695212476","display_name":"Development of Quantum Computing System Based on Ferroelectric/Paraelectric Stacked Waveguides","funder_award_id":"17H01063","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":45,"referenced_works":["https://openalex.org/W1544998162","https://openalex.org/W1972250775","https://openalex.org/W1974525443","https://openalex.org/W1977747200","https://openalex.org/W1978094262","https://openalex.org/W1982117792","https://openalex.org/W1983087852","https://openalex.org/W1992160498","https://openalex.org/W1994655361","https://openalex.org/W2003987751","https://openalex.org/W2019905881","https://openalex.org/W2022067247","https://openalex.org/W2029121789","https://openalex.org/W2029827647","https://openalex.org/W2034433276","https://openalex.org/W2036184364","https://openalex.org/W2038008965","https://openalex.org/W2041668937","https://openalex.org/W2042916342","https://openalex.org/W2052380206","https://openalex.org/W2056891974","https://openalex.org/W2057592630","https://openalex.org/W2058075733","https://openalex.org/W2058385222","https://openalex.org/W2069099261","https://openalex.org/W2083196910","https://openalex.org/W2119441821","https://openalex.org/W2162467568","https://openalex.org/W2170913904","https://openalex.org/W2231860190","https://openalex.org/W2567206267","https://openalex.org/W2772492590","https://openalex.org/W2790588624","https://openalex.org/W2884055695","https://openalex.org/W2890643398","https://openalex.org/W2921338361","https://openalex.org/W2964723385","https://openalex.org/W3014202808","https://openalex.org/W3018010915","https://openalex.org/W3170031263","https://openalex.org/W3213764234","https://openalex.org/W4213317011","https://openalex.org/W4281399915","https://openalex.org/W4282837403","https://openalex.org/W4297100257"],"related_works":["https://openalex.org/W2611490692","https://openalex.org/W1902067110","https://openalex.org/W2964306219","https://openalex.org/W1538980573","https://openalex.org/W3010259963","https://openalex.org/W2623936181","https://openalex.org/W4396915104","https://openalex.org/W2111214074","https://openalex.org/W4402355709","https://openalex.org/W2059364669"],"abstract_inverted_index":{"Abstract":[0],"GaN":[1,24,91],"is":[2,54,132],"an":[3,57],"attractive":[4],"material":[5],"for":[6],"integrating":[7],"optical":[8,14,142],"quantum":[9,30],"devices.":[10],"Adding":[11],"a":[12,72,98],"large":[13],"nonlinearity":[15],"of":[16,29,47,76,89],"MgO":[17],"doped":[18],"congruent":[19],"LiNbO":[20],"3":[21],"(MgO:CLN)":[22],"to":[23,93,134,137,147],"will":[25],"improve":[26],"the":[27,81,86,90],"efficiency":[28],"light":[31],"sources.":[32],"In":[33],"this":[34],"work,":[35],"we":[36],"proposed":[37],"transverse":[38],"quasi-phase-matched":[39],"wavelength":[40],"conversion":[41],"devices":[42,143],"with":[43,71],"waveguide":[44,52,112],"core":[45,53],"materials":[46],"MgO:CLN":[48,118],"and":[49,84,123,144],"GaN.":[50],"The":[51,110],"formed":[55],"by":[56,79,117],"adhesion-free":[58,129],"surface":[59,87],"activated":[60],"bonding":[61,74,82],"(SAB).":[62],"A":[63],"high":[64,73],"thin":[65,119],"film":[66,92,120],"transfer":[67],"yield":[68],"was":[69,114],"achieved":[70],"strength":[75],"4":[77],"MPa":[78],"optimizing":[80],"conditions":[83],"reducing":[85],"roughness":[88],"be":[94,135],"0.5":[95],"nm":[96],"in":[97],"100":[99,101],"\u00d7":[100],"\u03bc":[102],"m":[103],"2":[104],"area":[105],"using":[106],"chemical":[107],"mechanical":[108],"polishing.":[109],"MgO:CLN/GaN":[111,128],"structure":[113],"successfully":[115],"fabricated":[116],"transfer,":[121],"lift-off":[122],"dry":[124],"etching":[125],"processes.":[126],"This":[127],"SAB":[130],"technique":[131],"expected":[133],"applied":[136],"various":[138],"devices,":[139,146],"such":[140],"as":[141],"electronic":[145],"enhance":[148],"their":[149],"functionality.":[150]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2023-09-09T00:00:00"}