{"id":"https://openalex.org/W4385986526","doi":"https://doi.org/10.1063/5.0153881","title":"Nitrogen buffer gas pressure tuning in a micro-machined vapor cell","display_name":"Nitrogen buffer gas pressure tuning in a micro-machined vapor cell","publication_year":2023,"publication_date":"2023-08-14","ids":{"openalex":"https://openalex.org/W4385986526","doi":"https://doi.org/10.1063/5.0153881"},"language":"en","primary_location":{"id":"doi:10.1063/5.0153881","doi":"https://doi.org/10.1063/5.0153881","is_oa":true,"landing_page_url":"https://doi.org/10.1063/5.0153881","pdf_url":"https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0153881/18090271/074001_1_5.0153881.pdf","source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0153881/18090271/074001_1_5.0153881.pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5103069405","display_name":"S. Dyer","orcid":"https://orcid.org/0000-0001-9419-4915","observed_orcids":["https://orcid.org/0000-0001-9419-4915"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"S. Dyer","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0000-0001-9419-4915","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072849249","display_name":"A. McWilliam","orcid":"https://orcid.org/0009-0002-9004-8368","observed_orcids":["https://orcid.org/0009-0002-9004-8368"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"A. McWilliam","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0009-0002-9004-8368","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002146568","display_name":"Dominic Hunter","orcid":"https://orcid.org/0000-0003-4177-6027","observed_orcids":["https://orcid.org/0000-0003-4177-6027"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"D. Hunter","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0000-0003-4177-6027","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5026788756","display_name":"Stuart J. Ingleby","orcid":"https://orcid.org/0000-0001-7473-9949","observed_orcids":["https://orcid.org/0000-0001-7473-9949"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"S. Ingleby","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0000-0001-7473-9949","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020496401","display_name":"David P. Burt","orcid":"https://orcid.org/0009-0009-9172-4744","observed_orcids":["https://orcid.org/0009-0009-9172-4744"]},"institutions":[{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"D. P. Burt","raw_affiliation_strings":["Kelvin Nanotechnology, University of Glasgow 2 , Glasgow G12 8LS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kelvin Nanotechnology, University of Glasgow 2 , Glasgow G12 8LS, United Kingdom","institution_ids":["https://openalex.org/I7882870"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069647669","display_name":"O. Sharp","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"O. Sharp","raw_affiliation_strings":["Kelvin Nanotechnology, University of Glasgow 2 , Glasgow G12 8LS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kelvin Nanotechnology, University of Glasgow 2 , Glasgow G12 8LS, United Kingdom","institution_ids":["https://openalex.org/I7882870"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5036072071","display_name":"Francesco Mirando","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I7882870","display_name":"University of Glasgow","ror":"https://ror.org/00vtgdb53","country_code":"GB","type":"education","lineage":["https://openalex.org/I7882870"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"F. Mirando","raw_affiliation_strings":["Kelvin Nanotechnology, University of Glasgow 2 , Glasgow G12 8LS, United Kingdom"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Kelvin Nanotechnology, University of Glasgow 2 , Glasgow G12 8LS, United Kingdom","institution_ids":["https://openalex.org/I7882870"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057740012","display_name":"Paul F. Griffin","orcid":"https://orcid.org/0000-0002-0134-7554","observed_orcids":["https://orcid.org/0000-0002-0134-7554"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"P. F. Griffin","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0000-0002-0134-7554","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5000291067","display_name":"Erling Riis","orcid":"https://orcid.org/0000-0002-3225-5302","observed_orcids":["https://orcid.org/0000-0002-3225-5302"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"E. Riis","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0000-0002-3225-5302","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5075470784","display_name":"J. P. McGilligan","orcid":"https://orcid.org/0000-0002-6514-9696","observed_orcids":["https://orcid.org/0000-0002-6514-9696"]},"institutions":[{"id":"https://openalex.org/I181647926","display_name":"University of Strathclyde","ror":"https://ror.org/00n3w3b69","country_code":"GB","type":"education","lineage":["https://openalex.org/I181647926"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"J. P. McGilligan","raw_affiliation_strings":["Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom"],"raw_orcid":"https://orcid.org/0000-0002-6514-9696","affiliations":[{"raw_affiliation_string":"Department of Physics, SUPA, University of Strathclyde 1 , Glasgow G4 0NG, United Kingdom","institution_ids":["https://openalex.org/I181647926"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.9604,"has_fulltext":true,"cited_by_count":17,"citation_normalized_percentile":{"value":0.87314694,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":97,"max":99},"biblio":{"volume":"123","issue":"7","first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11993","display_name":"Atomic and Subatomic Physics Research","score":0.8095999956130981,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11993","display_name":"Atomic and Subatomic Physics Research","score":0.8095999956130981,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12004","display_name":"Advanced Frequency and Time Standards","score":0.14669999480247498,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11111","display_name":"Spectroscopy and Laser Applications","score":0.00570000009611249,"subfield":{"id":"https://openalex.org/subfields/1607","display_name":"Spectroscopy"},"field":{"id":"https://openalex.org/fields/16","display_name":"Chemistry"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/cesium-vapor-cell","display_name":"cesium vapor cell","score":0.9639999866485596},{"id":"https://openalex.org/keywords/laser-activation","display_name":"laser activation","score":0.5139999985694885},{"id":"https://openalex.org/keywords/pressure-tuning","display_name":"pressure tuning","score":0.5899999737739563},{"id":"https://openalex.org/keywords/atomic-sensors","display_name":"atomic sensors","score":0.4580000042915344}],"concepts":[{"id":"https://openalex.org/C48597763","wikidata":"https://www.wikidata.org/wiki/Q4985952","display_name":"Buffer gas","level":3,"score":0.8698042631149292},{"id":"https://openalex.org/C198091228","wikidata":"https://www.wikidata.org/wiki/Q19557","display_name":"Alkali metal","level":2,"score":0.7022103071212769},{"id":"https://openalex.org/C30646810","wikidata":"https://www.wikidata.org/wiki/Q185648","display_name":"Torr","level":2,"score":0.6952946186065674},{"id":"https://openalex.org/C125099081","wikidata":"https://www.wikidata.org/wiki/Q935396","display_name":"Getter","level":2,"score":0.6016735434532166},{"id":"https://openalex.org/C537208039","wikidata":"https://www.wikidata.org/wiki/Q627","display_name":"Nitrogen","level":2,"score":0.5613420605659485},{"id":"https://openalex.org/C145018004","wikidata":"https://www.wikidata.org/wiki/Q4985944","display_name":"Buffer (optical fiber)","level":2,"score":0.5441476106643677},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4969020187854767},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.4708908200263977},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.4708753824234009},{"id":"https://openalex.org/C19184958","wikidata":"https://www.wikidata.org/wiki/Q2661322","display_name":"Vapor pressure","level":2,"score":0.45898541808128357},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.45025599002838135},{"id":"https://openalex.org/C2987918405","wikidata":"https://www.wikidata.org/wiki/Q27165","display_name":"Gas pressure","level":2,"score":0.4319611191749573},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.23198577761650085},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.14534595608711243},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1404915153980255},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.08093082904815674},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C78762247","wikidata":"https://www.wikidata.org/wiki/Q1273174","display_name":"Petroleum engineering","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1063/5.0153881","doi":"https://doi.org/10.1063/5.0153881","is_oa":true,"landing_page_url":"https://doi.org/10.1063/5.0153881","pdf_url":"https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0153881/18090271/074001_1_5.0153881.pdf","source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},{"id":"pmh:oai:strathprints.strath.ac.uk:86965","doi":null,"is_oa":true,"landing_page_url":"https://strathprints.strath.ac.uk/view/author/1531291.html>","pdf_url":"https://strathprints.strath.ac.uk/86965/1/Dyer_etal_APL_2023_Nitrogen_buffer_gas_pressure_tuning_in_a_micro_machined_vapor_cell.pdf","source":{"id":"https://openalex.org/S4306402226","display_name":"Strathprints: The University of Strathclyde institutional repository (University of Strathclyde)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I181647926","host_organization_name":"University of Strathclyde","host_organization_lineage":["https://openalex.org/I181647926"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"}],"best_oa_location":{"id":"doi:10.1063/5.0153881","doi":"https://doi.org/10.1063/5.0153881","is_oa":true,"landing_page_url":"https://doi.org/10.1063/5.0153881","pdf_url":"https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0153881/18090271/074001_1_5.0153881.pdf","source":{"id":"https://openalex.org/S105243760","display_name":"Applied Physics Letters","issn_l":"0003-6951","issn":["0003-6951","1077-3118","1520-8842"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-3","ki-jl-1","norway-2","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320257","host_organization_name":"American Institute of Physics","host_organization_lineage":["https://openalex.org/P4310320257"],"host_organization_lineage_names":["American Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Applied Physics Letters","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G6349641905","display_name":"International Network for Microfabrication of Atomic Quantum Sensors","funder_award_id":"EP/W026929/1","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"}],"funders":[{"id":"https://openalex.org/F4320320005","display_name":"Royal Academy of Engineering","ror":"https://ror.org/0526snb40"},{"id":"https://openalex.org/F4320334627","display_name":"Engineering and Physical Sciences Research Council","ror":"https://ror.org/0439y7842"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4385986526.pdf","grobid_xml":"https://content.openalex.org/works/W4385986526.grobid-xml"},"referenced_works_count":44,"referenced_works":["https://openalex.org/W1474114151","https://openalex.org/W1554617611","https://openalex.org/W1626206720","https://openalex.org/W1974807704","https://openalex.org/W1987254424","https://openalex.org/W2009672827","https://openalex.org/W2023709623","https://openalex.org/W2031364271","https://openalex.org/W2042067503","https://openalex.org/W2048135055","https://openalex.org/W2056329548","https://openalex.org/W2078794460","https://openalex.org/W2080016883","https://openalex.org/W2091805701","https://openalex.org/W2092846882","https://openalex.org/W2167136240","https://openalex.org/W2411113257","https://openalex.org/W2624720316","https://openalex.org/W2766839228","https://openalex.org/W2796629913","https://openalex.org/W2803184827","https://openalex.org/W2964872098","https://openalex.org/W2987395532","https://openalex.org/W2996869067","https://openalex.org/W3004690261","https://openalex.org/W3025053766","https://openalex.org/W3046285141","https://openalex.org/W3104004002","https://openalex.org/W3112894278","https://openalex.org/W3119342553","https://openalex.org/W3159084122","https://openalex.org/W3197466712","https://openalex.org/W3197862866","https://openalex.org/W4206977813","https://openalex.org/W4283805903","https://openalex.org/W4288441228","https://openalex.org/W4297319186","https://openalex.org/W4300969944","https://openalex.org/W4308995085","https://openalex.org/W4309701244","https://openalex.org/W4311301704","https://openalex.org/W4319986467","https://openalex.org/W4320724777","https://openalex.org/W4362608005"],"related_works":["https://openalex.org/W4365600697","https://openalex.org/W7133574254","https://openalex.org/W7117141417","https://openalex.org/W7215077826","https://openalex.org/W4415644355","https://openalex.org/W4410996556","https://openalex.org/W2068338665","https://openalex.org/W1554482209","https://openalex.org/W1474114151","https://openalex.org/W4293864616"],"abstract_inverted_index":{"We":[0],"demonstrate":[1],"a":[2,12,61,112,120,124],"controllable":[3],"depletion":[4],"of":[5,22,52,85,92],"the":[6,19,28,34,38,43,48,53,74,83,93,98],"nitrogen":[7,44],"buffer":[8,56,75,127],"gas":[9,57,76,94,128],"pressure":[10,58,63,77,95],"in":[11,97],"micro-machined":[13],"cesium":[14],"(Cs)":[15],"vapor":[16,49,99],"cell":[17,100],"from":[18,47],"dynamic":[20],"heating":[21],"an":[23],"alkali":[24,29,39,54],"dispenser":[25,41],"pill.":[26],"When":[27],"source":[30],"is":[31],"laser":[32],"activated,":[33],"gettering":[35],"compounds":[36],"within":[37],"pill":[40],"reduce":[42],"(N2)":[45],"content":[46],"for":[50,105],"fine-tuning":[51],"to":[55,81,114],"ratio,":[59],"with":[60,123],"demonstrated":[62],"step":[64],"size":[65],"as":[66,68],"low":[67],"1":[69],"Torr.":[70],"Additionally,":[71],"we":[72],"decrease":[73],"below":[78],"100":[79],"mTorr":[80],"evaluate":[82],"presence":[84],"other":[86],"potential":[87],"broadening":[88],"mechanisms.":[89],"Real-time":[90],"control":[91],"ratio":[96],"will":[101],"have":[102],"notable":[103],"benefits":[104],"refining":[106],"atomic":[107],"sensor":[108],"performance":[109],"and":[110],"provide":[111],"routine":[113],"achieve":[115],"various":[116],"target":[117],"pressures":[118],"across":[119],"wafer":[121],"bonded":[122],"uniform":[125],"back-filled":[126],"pressure.":[129]},"counts_by_year":[{"year":2026,"cited_by_count":7},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":5}],"updated_date":"2026-11-03T10:50:19.383937","created_date":"2023-08-19T00:00:00"}