{"id":"https://openalex.org/W4385761963","doi":"https://doi.org/10.1615/rad-23.390","title":"Enhancement of infrared emissivity of silicon nitride thin films by inducing metallic phases via titanium thermal diffusion","display_name":"Enhancement of infrared emissivity of silicon nitride thin films by inducing metallic phases via titanium thermal diffusion","publication_year":2023,"publication_date":"2023-01-01","ids":{"openalex":"https://openalex.org/W4385761963","doi":"https://doi.org/10.1615/rad-23.390"},"language":"en","primary_location":{"id":"doi:10.1615/rad-23.390","doi":"https://doi.org/10.1615/rad-23.390","is_oa":true,"landing_page_url":"http://dx.doi.org/10.1615/rad-23.390","pdf_url":"https://www.dl.begellhouse.com/download/article/055ccbdb43cf9aee/RAD-23_P11_N.pdf","source":{"id":"https://openalex.org/S7407087847","display_name":"International Symposium on Radiative Transfer (RAD)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceeding of Proceedings of the 10th International Symposium on Radiative Transfer, RAD-23 Thessaloniki, Greece, 12\u201316 June 2023","raw_type":"proceedings-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"bronze","oa_url":"https://www.dl.begellhouse.com/download/article/055ccbdb43cf9aee/RAD-23_P11_N.pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5026805151","display_name":"Reethu Sebastian","orcid":"https://orcid.org/0009-0008-3461-316X","observed_orcids":["https://orcid.org/0009-0008-3461-316X"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]},{"id":"https://openalex.org/I4387155352","display_name":"Laboratoire Nanotechnologies et Nanosyst\u00e8mes","ror":"https://ror.org/026m44z54","country_code":"CA","type":"facility","lineage":["https://openalex.org/I112936343","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I4387155352","https://openalex.org/I48430043","https://openalex.org/I59692284","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4405265088","display_name":"Institut interdisciplinaire d'innovation technologique","ror":"https://ror.org/03vkzdt31","country_code":"CA","type":"facility","lineage":["https://openalex.org/I135117807","https://openalex.org/I4405265088"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"Reethu Sebastian","raw_affiliation_strings":["Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada; Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada","Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada; Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I135117807","https://openalex.org/I4387155352","https://openalex.org/I4405265088"]},{"raw_affiliation_string":"Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada","institution_ids":["https://openalex.org/I135117807","https://openalex.org/I4405265088"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I135117807","https://openalex.org/I4387155352"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034844988","display_name":"Amrid Amnache","orcid":"https://orcid.org/0000-0003-4568-6977","observed_orcids":["https://orcid.org/0000-0003-4568-6977"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]},{"id":"https://openalex.org/I4387155352","display_name":"Laboratoire Nanotechnologies et Nanosyst\u00e8mes","ror":"https://ror.org/026m44z54","country_code":"CA","type":"facility","lineage":["https://openalex.org/I112936343","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I4387155352","https://openalex.org/I48430043","https://openalex.org/I59692284","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4405265088","display_name":"Institut interdisciplinaire d'innovation technologique","ror":"https://ror.org/03vkzdt31","country_code":"CA","type":"facility","lineage":["https://openalex.org/I135117807","https://openalex.org/I4405265088"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"Amrid Amnache","raw_affiliation_strings":["Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada; Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada","Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada; Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I135117807","https://openalex.org/I4387155352","https://openalex.org/I4405265088"]},{"raw_affiliation_string":"Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada","institution_ids":["https://openalex.org/I135117807","https://openalex.org/I4405265088"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I135117807","https://openalex.org/I4387155352"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084025992","display_name":"Maxime Biron","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2799763582","display_name":"Dalsa Corporation","ror":"https://ror.org/01djnr762","country_code":"CA","type":"company","lineage":["https://openalex.org/I2799763582","https://openalex.org/I4210127702","https://openalex.org/I880619579"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Maxime Biron","raw_affiliation_strings":["Teledyne DALSA Semiconducteur, Bromont, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Teledyne DALSA Semiconducteur, Bromont, QC, Canada","institution_ids":["https://openalex.org/I2799763582"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067082557","display_name":"Simon Loquai","orcid":"https://orcid.org/0000-0003-0162-0343","observed_orcids":["https://orcid.org/0000-0003-0162-0343"]},"institutions":[{"id":"https://openalex.org/I2799763582","display_name":"Dalsa Corporation","ror":"https://ror.org/01djnr762","country_code":"CA","type":"company","lineage":["https://openalex.org/I2799763582","https://openalex.org/I4210127702","https://openalex.org/I880619579"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Simon Loquai","raw_affiliation_strings":["Teledyne DALSA Semiconducteur, Bromont, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Teledyne DALSA Semiconducteur, Bromont, QC, Canada","institution_ids":["https://openalex.org/I2799763582"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039705316","display_name":"Andre Dompierre","orcid":"https://orcid.org/0000-0002-0044-5048","observed_orcids":["https://orcid.org/0000-0002-0044-5048"]},"institutions":[{"id":"https://openalex.org/I2799763582","display_name":"Dalsa Corporation","ror":"https://ror.org/01djnr762","country_code":"CA","type":"company","lineage":["https://openalex.org/I2799763582","https://openalex.org/I4210127702","https://openalex.org/I880619579"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Andre Dompierre","raw_affiliation_strings":["Teledyne DALSA Semiconducteur, Bromont, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Teledyne DALSA Semiconducteur, Bromont, QC, Canada","institution_ids":["https://openalex.org/I2799763582"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112978869","display_name":"Anne Sophie Rollier","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2799763582","display_name":"Dalsa Corporation","ror":"https://ror.org/01djnr762","country_code":"CA","type":"company","lineage":["https://openalex.org/I2799763582","https://openalex.org/I4210127702","https://openalex.org/I880619579"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Anne Sophie Rollier","raw_affiliation_strings":["Teledyne DALSA Semiconducteur, Bromont, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Teledyne DALSA Semiconducteur, Bromont, QC, Canada","institution_ids":["https://openalex.org/I2799763582"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5086074403","display_name":"Luc G. Fr\u00e9chette","orcid":"https://orcid.org/0000-0001-7138-0811","observed_orcids":["https://orcid.org/0000-0001-7138-0811"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I135117807","display_name":"Universit\u00e9 de Sherbrooke","ror":"https://ror.org/00kybxq39","country_code":"CA","type":"education","lineage":["https://openalex.org/I135117807"]},{"id":"https://openalex.org/I4387155352","display_name":"Laboratoire Nanotechnologies et Nanosyst\u00e8mes","ror":"https://ror.org/026m44z54","country_code":"CA","type":"facility","lineage":["https://openalex.org/I112936343","https://openalex.org/I1294671590","https://openalex.org/I203339264","https://openalex.org/I4387155352","https://openalex.org/I48430043","https://openalex.org/I59692284","https://openalex.org/I899635006"]},{"id":"https://openalex.org/I4405265088","display_name":"Institut interdisciplinaire d'innovation technologique","ror":"https://ror.org/03vkzdt31","country_code":"CA","type":"facility","lineage":["https://openalex.org/I135117807","https://openalex.org/I4405265088"]}],"countries":["CA","FR"],"is_corresponding":false,"raw_author_name":"Luc G. Frechette","raw_affiliation_strings":["Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada; Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada","Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada; Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I135117807","https://openalex.org/I4387155352","https://openalex.org/I4405265088"]},{"raw_affiliation_string":"Institut interdisciplinaire d'innovation technologique (3IT), Universite de Sherbrooke,\nSherbrooke, QC, Canada","institution_ids":["https://openalex.org/I135117807","https://openalex.org/I4405265088"]},{"raw_affiliation_string":"Laboratoire Nanotechnologies et Nanosystemes (LN2), CNRS UMI-3463, Universite de Sherbrooke, Sherbrooke, QC, Canada","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I135117807","https://openalex.org/I4387155352"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.0,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"273","last_page":"273"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12442","display_name":"Thermal Radiation and Cooling Technologies","score":0.8187999725341797,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12442","display_name":"Thermal Radiation and Cooling Technologies","score":0.8187999725341797,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.12150000035762787,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.010999999940395355,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/tisin","display_name":"TiSiN","score":0.7739999890327454},{"id":"https://openalex.org/keywords/silicon-nitride-films","display_name":"silicon nitride thin films","score":0.9309999942779541},{"id":"https://openalex.org/keywords/infrared-emissivity","display_name":"infrared emissivity","score":0.9819999933242798},{"id":"https://openalex.org/keywords/metallic-phase","display_name":"metallic phase","score":0.5920000076293945},{"id":"https://openalex.org/keywords/ternary-alloys","display_name":"ternary alloys","score":0.5910000205039978},{"id":"https://openalex.org/keywords/free-carrier-absorption","display_name":"free carrier absorption","score":0.7670000195503235},{"id":"https://openalex.org/keywords/phonon-absorption","display_name":"phonon absorption","score":0.984000027179718}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8792175054550171},{"id":"https://openalex.org/C133386390","wikidata":"https://www.wikidata.org/wiki/Q184996","display_name":"Dielectric","level":2,"score":0.646605372428894},{"id":"https://openalex.org/C2777431650","wikidata":"https://www.wikidata.org/wiki/Q413828","display_name":"Silicon nitride","level":3,"score":0.5761018395423889},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.5757673978805542},{"id":"https://openalex.org/C123537908","wikidata":"https://www.wikidata.org/wiki/Q17102737","display_name":"Low emissivity","level":3,"score":0.555461585521698},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.5505087375640869},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5286253690719604},{"id":"https://openalex.org/C163651212","wikidata":"https://www.wikidata.org/wiki/Q899670","display_name":"Emissivity","level":2,"score":0.5282803177833557},{"id":"https://openalex.org/C506065880","wikidata":"https://www.wikidata.org/wiki/Q716","display_name":"Titanium","level":2,"score":0.4793204069137573},{"id":"https://openalex.org/C2778489163","wikidata":"https://www.wikidata.org/wiki/Q415638","display_name":"Titanium nitride","level":4,"score":0.47622472047805786},{"id":"https://openalex.org/C158355884","wikidata":"https://www.wikidata.org/wiki/Q11388","display_name":"Infrared","level":2,"score":0.469833105802536},{"id":"https://openalex.org/C125287762","wikidata":"https://www.wikidata.org/wiki/Q1758948","display_name":"Absorption (acoustics)","level":2,"score":0.44617608189582825},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.4459359645843506},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.43473124504089355},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.4163472354412079},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.28927093744277954},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.19452616572380066},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.1742112636566162},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.1658496856689453},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.12383857369422913},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1615/rad-23.390","doi":"https://doi.org/10.1615/rad-23.390","is_oa":true,"landing_page_url":"http://dx.doi.org/10.1615/rad-23.390","pdf_url":"https://www.dl.begellhouse.com/download/article/055ccbdb43cf9aee/RAD-23_P11_N.pdf","source":{"id":"https://openalex.org/S7407087847","display_name":"International Symposium on Radiative Transfer (RAD)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceeding of Proceedings of the 10th International Symposium on Radiative Transfer, RAD-23 Thessaloniki, Greece, 12\u201316 June 2023","raw_type":"proceedings-article"}],"best_oa_location":{"id":"doi:10.1615/rad-23.390","doi":"https://doi.org/10.1615/rad-23.390","is_oa":true,"landing_page_url":"http://dx.doi.org/10.1615/rad-23.390","pdf_url":"https://www.dl.begellhouse.com/download/article/055ccbdb43cf9aee/RAD-23_P11_N.pdf","source":{"id":"https://openalex.org/S7407087847","display_name":"International Symposium on Radiative Transfer (RAD)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Proceeding of Proceedings of the 10th International Symposium on Radiative Transfer, RAD-23 Thessaloniki, Greece, 12\u201316 June 2023","raw_type":"proceedings-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4385761963.pdf","grobid_xml":"https://content.openalex.org/works/W4385761963.grobid-xml"},"referenced_works_count":1,"referenced_works":["https://openalex.org/W1967079710"],"related_works":["https://openalex.org/W2926706775","https://openalex.org/W4280611344","https://openalex.org/W2122493095","https://openalex.org/W4304196083","https://openalex.org/W2884580934","https://openalex.org/W1990588799","https://openalex.org/W7052724496","https://openalex.org/W3177074684","https://openalex.org/W3098531793","https://openalex.org/W1968914474"],"abstract_inverted_index":{"Transition":[0],"metal":[1],"nitrides":[2],"are":[3,16,85],"drawing":[4],"attention":[5],"due":[6,49,109],"to":[7,50,110],"their":[8,96],"promising":[9],"mechanical,":[10],"electrical":[11,59],"and":[12,21,39,55,58,64,80],"chemical":[13],"properties":[14,91],"which":[15],"frequently":[17],"leveraged":[18],"for":[19,75],"industrial":[20],"scientific":[22],"applications":[23],"such":[24,106],"as":[25],"wear-resistant":[26],"tool":[27],"coatings,":[28,30],"decorative":[29],"thin":[31],"film":[32],"resistors,":[33],"semiconductor":[34],"gate":[35],"dielectrics,":[36],"energy":[37],"conversion":[38],"storage.Among":[40],"them,":[41],"Titanium":[42],"Silicon":[43],"Nitride":[44],"(TiSiN)":[45],"is":[46,73],"used":[47],"extensively":[48],"its":[51],"excellent":[52],"hardness,":[53],"wear":[54],"corrosion":[56],"resistance,":[57],"properties.It":[60],"comprises":[61],"of":[62,92,105],"metallic":[63],"dielectric":[65],"phases":[66],"coexisting.From":[67],"the":[68,70,89,103],"literature,":[69],"infrared":[71,97],"mechanism":[72],"different":[74],"metals":[76],"(free":[77],"carrier":[78],"absorption)":[79,83],"dielectrics":[81],"(phonon":[82],"(1).There":[84],"limited":[86],"reports":[87],"on":[88],"thermal":[90],"ternary":[93],"alloys":[94],"especially":[95],"mechanism.Thermal":[98],"studies":[99],"become":[100],"significant":[101],"when":[102],"temperature":[104],"films":[107],"rises":[108],"friction,":[111],"light":[112],"absorption":[113],"etc.":[114]},"counts_by_year":[],"updated_date":"2026-11-01T11:40:01.658920","created_date":"2023-08-12T00:00:00"}