{"id":"https://openalex.org/W4383100806","doi":"https://doi.org/10.1088/2053-1591/ace41c","title":"Low energy ion-solid interactions: a quantitative experimental verification of binary collision approximation simulations","display_name":"Low energy ion-solid interactions: a quantitative experimental verification of binary collision approximation simulations","publication_year":2023,"publication_date":"2023-07-01","ids":{"openalex":"https://openalex.org/W4383100806","doi":"https://doi.org/10.1088/2053-1591/ace41c"},"language":"en","primary_location":{"id":"doi:10.1088/2053-1591/ace41c","doi":"https://doi.org/10.1088/2053-1591/ace41c","is_oa":true,"landing_page_url":"https://doi.org/10.1088/2053-1591/ace41c","pdf_url":"https://iopscience.iop.org/article/10.1088/2053-1591/ace41c/pdf","source":{"id":"https://openalex.org/S4210216311","display_name":"Materials Research Express","issn_l":"2053-1591","issn":["2053-1591"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-d","jufo-1","ki-jl-1","norway-1","oarl","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Research Express","raw_type":"journal-article"},"volume":null,"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://iopscience.iop.org/article/10.1088/2053-1591/ace41c/pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5000320384","display_name":"Hans Christian Hofs\u00e4ss","orcid":"https://orcid.org/0000-0002-5061-804X","observed_orcids":["https://orcid.org/0000-0002-5061-804X"]},"institutions":[{"id":"https://openalex.org/I74656192","display_name":"University of G\u00f6ttingen","ror":"https://ror.org/01y9bpm73","country_code":"DE","type":"education","lineage":["https://openalex.org/I74656192"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Hans Hofs\u00e4ss","raw_affiliation_strings":["2nd Institute of Physics , Faculty of Physics , University G\u00f6ttingen , Friedrich-Hund-Platz 1 , 37077 G\u00f6ttingen , Germany","Faculty of Physics, II. Institute of Physics, University of G\u00f6ttingen, Friedrich-Hund-Platz 1, Gottingen, 37077, GERMANY"],"raw_orcid":"https://orcid.org/0000-0002-5061-804X","affiliations":[{"raw_affiliation_string":"2nd Institute of Physics , Faculty of Physics , University G\u00f6ttingen , Friedrich-Hund-Platz 1 , 37077 G\u00f6ttingen , Germany","institution_ids":["https://openalex.org/I74656192"]},{"raw_affiliation_string":"Faculty of Physics, II. Institute of Physics, University of G\u00f6ttingen, Friedrich-Hund-Platz 1, Gottingen, 37077, GERMANY","institution_ids":["https://openalex.org/I74656192"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063700556","display_name":"Felix Junge","orcid":"https://orcid.org/0000-0003-0620-8008","observed_orcids":["https://orcid.org/0000-0003-0620-8008"]},"institutions":[{"id":"https://openalex.org/I74656192","display_name":"University of G\u00f6ttingen","ror":"https://ror.org/01y9bpm73","country_code":"DE","type":"education","lineage":["https://openalex.org/I74656192"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Felix Junge","raw_affiliation_strings":["II. Institute of Physics, University of G\u00f6ttingen Faculty of Physics, Friedrich-Hund-Platz 1, Gottingen, Niedersachsen, 37077, GERMANY"],"raw_orcid":"https://orcid.org/0000-0003-0620-8008","affiliations":[{"raw_affiliation_string":"II. Institute of Physics, University of G\u00f6ttingen Faculty of Physics, Friedrich-Hund-Platz 1, Gottingen, Niedersachsen, 37077, GERMANY","institution_ids":["https://openalex.org/I74656192"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055868039","display_name":"Patrick Kirscht","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74656192","display_name":"University of G\u00f6ttingen","ror":"https://ror.org/01y9bpm73","country_code":"DE","type":"education","lineage":["https://openalex.org/I74656192"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Patrick Kirscht","raw_affiliation_strings":["II. Institute of Physics, University of G\u00f6ttingen Faculty of Physics, Friedrich-Hund-Platz 1, Gottingen, Niedersachsen, 37077, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"II. Institute of Physics, University of G\u00f6ttingen Faculty of Physics, Friedrich-Hund-Platz 1, Gottingen, Niedersachsen, 37077, GERMANY","institution_ids":["https://openalex.org/I74656192"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5028859914","display_name":"Koen van Stiphout","orcid":"https://orcid.org/0000-0002-4959-671X","observed_orcids":["https://orcid.org/0000-0002-4959-671X"]},"institutions":[{"id":"https://openalex.org/I74656192","display_name":"University of G\u00f6ttingen","ror":"https://ror.org/01y9bpm73","country_code":"DE","type":"education","lineage":["https://openalex.org/I74656192"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Koen van Stiphout","raw_affiliation_strings":["II. Institute of Physics, University of G\u00f6ttingen Faculty of Physics, Friedrich-Hund-Platz 1, Gottingen, Niedersachsen, 37077, GERMANY"],"raw_orcid":"https://orcid.org/0000-0002-4959-671X","affiliations":[{"raw_affiliation_string":"II. Institute of Physics, University of G\u00f6ttingen Faculty of Physics, Friedrich-Hund-Platz 1, Gottingen, Niedersachsen, 37077, GERMANY","institution_ids":["https://openalex.org/I74656192"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5000320384"],"corresponding_institution_ids":["https://openalex.org/I74656192"],"apc_list":{"value":1790,"currency":"USD","value_usd":1790},"apc_paid":{"value":1790,"currency":"USD","value_usd":1790},"fwci":1.1182,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.7173838,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":93,"max":98},"biblio":{"volume":"10","issue":"7","first_page":"075003","last_page":"075003"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12166","display_name":"Ion-surface interactions and analysis","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10592","display_name":"Fusion materials and technologies","score":9.999999747378752e-05,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10478","display_name":"Diamond and Carbon-based Materials Research","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/ultra-low-energy-ion-implantation","display_name":"ultra-low energy ion implantation","score":0.906000018119812},{"id":"https://openalex.org/keywords/binary-collision-approximation","display_name":"binary collision approximation","score":0.9459999799728394},{"id":"https://openalex.org/keywords/ion-solid-interaction","display_name":"ion-solid interaction","score":0.7239999771118164},{"id":"https://openalex.org/keywords/tetrahedral-amorphous-carbon","display_name":"tetrahedral amorphous carbon","score":0.9760000109672546},{"id":"https://openalex.org/keywords/implantation-profiles","display_name":"implantation profiles","score":0.925000011920929},{"id":"https://openalex.org/keywords/ultrathin-films","display_name":"ultrathin films","score":0.7039999961853027}],"concepts":[{"id":"https://openalex.org/C114221277","wikidata":"https://www.wikidata.org/wiki/Q899743","display_name":"Vacancy defect","level":2,"score":0.6430066823959351},{"id":"https://openalex.org/C145148216","wikidata":"https://www.wikidata.org/wiki/Q36496","display_name":"Ion","level":2,"score":0.6180956363677979},{"id":"https://openalex.org/C41823505","wikidata":"https://www.wikidata.org/wiki/Q1436752","display_name":"Ion implantation","level":3,"score":0.5991731882095337},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5584447979927063},{"id":"https://openalex.org/C121704057","wikidata":"https://www.wikidata.org/wiki/Q352070","display_name":"Collision","level":2,"score":0.5485707521438599},{"id":"https://openalex.org/C19499675","wikidata":"https://www.wikidata.org/wiki/Q232207","display_name":"Monte Carlo method","level":2,"score":0.5390474200248718},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.5067854523658752},{"id":"https://openalex.org/C49304495","wikidata":"https://www.wikidata.org/wiki/Q49393","display_name":"Projectile","level":2,"score":0.49733641743659973},{"id":"https://openalex.org/C191486275","wikidata":"https://www.wikidata.org/wiki/Q210028","display_name":"Scattering","level":2,"score":0.48615118861198425},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.4432713985443115},{"id":"https://openalex.org/C4839761","wikidata":"https://www.wikidata.org/wiki/Q212111","display_name":"Spectral line","level":2,"score":0.43136242032051086},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.29130858182907104},{"id":"https://openalex.org/C26873012","wikidata":"https://www.wikidata.org/wiki/Q214781","display_name":"Condensed matter physics","level":1,"score":0.1274433434009552},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.11677330732345581},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.06028684973716736},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C1276947","wikidata":"https://www.wikidata.org/wiki/Q333","display_name":"Astronomy","level":1,"score":0.0},{"id":"https://openalex.org/C38652104","wikidata":"https://www.wikidata.org/wiki/Q3510521","display_name":"Computer security","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.1088/2053-1591/ace41c","doi":"https://doi.org/10.1088/2053-1591/ace41c","is_oa":true,"landing_page_url":"https://doi.org/10.1088/2053-1591/ace41c","pdf_url":"https://iopscience.iop.org/article/10.1088/2053-1591/ace41c/pdf","source":{"id":"https://openalex.org/S4210216311","display_name":"Materials Research Express","issn_l":"2053-1591","issn":["2053-1591"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-d","jufo-1","ki-jl-1","norway-1","oarl","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Research Express","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:10405fc73c574964b6f58fc7096091bb","doi":null,"is_oa":true,"landing_page_url":"https://doaj.org/article/10405fc73c574964b6f58fc7096091bb","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Materials Research Express, Vol 10, Iss 7, p 075003 (2023)","raw_type":"article"},{"id":"pmh:oai:publications.goettingen-research-online.de:2/130598","doi":null,"is_oa":true,"landing_page_url":"https://resolver.sub.uni-goettingen.de/purl?gro-2/130598","pdf_url":null,"source":{"id":"https://openalex.org/S4306401634","display_name":"GoeScholar  The Publication Server of the Georg-August-Universit\u00e4t G\u00f6ttingen (Georg-August-Universit\u00e4t G\u00f6ttingen)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4210122495","host_organization_name":"Asklepios Klinik St. Georg","host_organization_lineage":["https://openalex.org/I4210122495"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"journal_article"}],"best_oa_location":{"id":"doi:10.1088/2053-1591/ace41c","doi":"https://doi.org/10.1088/2053-1591/ace41c","is_oa":true,"landing_page_url":"https://doi.org/10.1088/2053-1591/ace41c","pdf_url":"https://iopscience.iop.org/article/10.1088/2053-1591/ace41c/pdf","source":{"id":"https://openalex.org/S4210216311","display_name":"Materials Research Express","issn_l":"2053-1591","issn":["2053-1591"],"is_oa":true,"is_in_doaj":true,"is_core":true,"listed_in":["cwts-core","doaj","dongbi-d","jufo-1","ki-jl-1","norway-1","oarl","poland-70","russia-white-list-2","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Materials Research Express","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4383100806.pdf","grobid_xml":"https://content.openalex.org/works/W4383100806.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W785159242","https://openalex.org/W1967192699","https://openalex.org/W1972749229","https://openalex.org/W1978361229","https://openalex.org/W1983365479","https://openalex.org/W1988902807","https://openalex.org/W1991208019","https://openalex.org/W2008215391","https://openalex.org/W2012138164","https://openalex.org/W2012227318","https://openalex.org/W2014504491","https://openalex.org/W2017809842","https://openalex.org/W2024172140","https://openalex.org/W2047491557","https://openalex.org/W2048000343","https://openalex.org/W2048339533","https://openalex.org/W2053667303","https://openalex.org/W2059621171","https://openalex.org/W2061267700","https://openalex.org/W2078996267","https://openalex.org/W2090414113","https://openalex.org/W2093154572","https://openalex.org/W2148267357","https://openalex.org/W2160150475","https://openalex.org/W2429233881","https://openalex.org/W2530652446","https://openalex.org/W2942107615","https://openalex.org/W3043398242","https://openalex.org/W3121940640","https://openalex.org/W3156762530","https://openalex.org/W3200361149","https://openalex.org/W3213100267","https://openalex.org/W4205959297","https://openalex.org/W4214864528","https://openalex.org/W4224060665","https://openalex.org/W4283221190","https://openalex.org/W4293238277","https://openalex.org/W4319596618"],"related_works":["https://openalex.org/W1987876509","https://openalex.org/W1997675433","https://openalex.org/W1982206052","https://openalex.org/W1666748380","https://openalex.org/W2003551943","https://openalex.org/W2130462479","https://openalex.org/W4387230571","https://openalex.org/W1974284853","https://openalex.org/W3037203701","https://openalex.org/W2069477461"],"abstract_inverted_index":{"Abstract":[0],"Ultra-low":[1],"energy":[2,37,51],"ion":[3,53,87],"implantation":[4,38,93,131,159],"has":[5],"become":[6],"an":[7],"attractive":[8],"method":[9],"for":[10,130],"doping":[11],"of":[12,35,49,59,110,113,115,138,177],"two-dimensional":[13],"materials":[14],"and":[15,40,62,83,89,148,167],"ultra-thin":[16],"films.":[17],"The":[18],"new":[19,120],"dynamic":[20,145],"Monte":[21],"Carlo":[22],"program":[23],"IMINTDYN":[24,121],"based":[25],"on":[26],"the":[27,57,91,116,119,136,139,157,174,182],"binary":[28,183],"collision":[29,184],"approximation":[30,185],"allows":[31],"a":[32,66,107],"reliable":[33],"prediction":[34],"low":[36,80,187],"profiles":[39,94],"target":[41,142],"compositional":[42],"changes,":[43],"as":[44,46,141],"well":[45],"efficient":[47],"simulation":[48,109,126],"high":[50,96],"light":[52],"scattering.":[54],"To":[55],"demonstrate":[56,173],"quality":[58],"these":[60],"predictions":[61],"simulations,":[63],"we":[64,71,161],"present":[65],"model":[67],"case":[68],"experiment":[69,103,117],"where":[70],"implanted":[72],"W":[73,92],"ions":[74],"into":[75,132],"tetrahedral":[76],"amorphous":[77],"carbon":[78],"with":[79,95,106,144],"(10":[81],"keV)":[82],"ultra-low":[84],"(20":[85],"eV)":[86],"energies":[88],"analyzed":[90],"resolution":[97],"Rutherford":[98],"backscattering":[99],"spectrometry":[100],"(HR-RBS).":[101],"This":[102],"is":[104,135],"compared":[105],"complete":[108],"all":[111],"aspects":[112],"ion-solid-interactions":[114],"using":[118],"program.":[122],"A":[123],"unique":[124],"novel":[125],"option,":[127],"also":[128,172],"relevant":[129],"2D":[133],"materials,":[134],"inclusion":[137],"vacancy":[140,146,153],"species":[143],"generation":[147],"annihilation.":[149],"Whereas":[150],"simulations":[151],"neglecting":[152],"formation":[154],"cannot":[155],"reproduce":[156],"measured":[158,168],"profiles,":[160],"find":[162],"excellent":[163],"agreement":[164],"between":[165],"simulated":[166],"HR-RBS":[169],"spectra.":[170],"We":[171],"important":[175],"role":[176],"simultaneous":[178],"weak":[179],"collisions":[180],"in":[181],"at":[186],"projectile":[188],"energies.":[189]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":3},{"year":2023,"cited_by_count":2}],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2023-07-05T00:00:00"}