{"id":"https://openalex.org/W4381856830","doi":"https://doi.org/10.1088/1742-6596/2478/6/062038","title":"The Simulation of the Terahertz Modulator by CMOS Process","display_name":"The Simulation of the Terahertz Modulator by CMOS Process","publication_year":2023,"publication_date":"2023-06-01","ids":{"openalex":"https://openalex.org/W4381856830","doi":"https://doi.org/10.1088/1742-6596/2478/6/062038"},"language":"en","primary_location":{"id":"doi:10.1088/1742-6596/2478/6/062038","doi":"https://doi.org/10.1088/1742-6596/2478/6/062038","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1742-6596/2478/6/062038","pdf_url":"https://iopscience.iop.org/article/10.1088/1742-6596/2478/6/062038/pdf","source":{"id":"https://openalex.org/S4210187594","display_name":"Journal of Physics Conference Series","issn_l":"1742-6588","issn":["1742-6588","1742-6596"],"is_oa":true,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-1","norway-1","poland-40","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Physics: Conference Series","raw_type":"journal-article"},"volume":null,"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://iopscience.iop.org/article/10.1088/1742-6596/2478/6/062038/pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100377472","display_name":"Chenyu Zhang","orcid":"https://orcid.org/0009-0009-2174-2197","observed_orcids":["https://orcid.org/0009-0009-2174-2197","https://orcid.org/0000-0001-5262-0875"]},"institutions":[{"id":"https://openalex.org/I125904092","display_name":"Shenyang Aerospace University","ror":"https://ror.org/02423gm04","country_code":"CN","type":"education","lineage":["https://openalex.org/I125904092"]},{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chenyu Zhang","raw_affiliation_strings":["Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China","Key Laboratory of Liaoning Province in Terahertz Imaging and Sensing, Shenyang 110169, China","Key Laboratory of Opto-Electronic Information Processing, Chinese Academy of Sciences, Shenyang 110169, China","School of Electronic Information Engineering, Shenyang Aerospace University, Liaoning Province, Shenyang, 110136, China","Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110169, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"Key Laboratory of Liaoning Province in Terahertz Imaging and Sensing, Shenyang 110169, China","institution_ids":[]},{"raw_affiliation_string":"Key Laboratory of Opto-Electronic Information Processing, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic Information Engineering, Shenyang Aerospace University, Liaoning Province, Shenyang, 110136, China","institution_ids":["https://openalex.org/I125904092"]},{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009441699","display_name":"Nairui Hu","orcid":"https://orcid.org/0009-0008-8808-403X","observed_orcids":["https://orcid.org/0009-0008-8808-403X"]},"institutions":[{"id":"https://openalex.org/I125904092","display_name":"Shenyang Aerospace University","ror":"https://ror.org/02423gm04","country_code":"CN","type":"education","lineage":["https://openalex.org/I125904092"]},{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Nairui Hu","raw_affiliation_strings":["Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China","Key Laboratory of Liaoning Province in Terahertz Imaging and Sensing, Shenyang 110169, China","Key Laboratory of Opto-Electronic Information Processing, Chinese Academy of Sciences, Shenyang 110169, China","School of Electronic Information Engineering, Shenyang Aerospace University, Liaoning Province, Shenyang, 110136, China","Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110169, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"Key Laboratory of Liaoning Province in Terahertz Imaging and Sensing, Shenyang 110169, China","institution_ids":[]},{"raw_affiliation_string":"Key Laboratory of Opto-Electronic Information Processing, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"School of Electronic Information Engineering, Shenyang Aerospace University, Liaoning Province, Shenyang, 110136, China","institution_ids":["https://openalex.org/I125904092"]},{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100603519","display_name":"Zhaoyang Liu","orcid":"https://orcid.org/0000-0002-1830-8957","observed_orcids":["https://orcid.org/0000-0002-1830-8957"]},"institutions":[{"id":"https://openalex.org/I142078773","display_name":"Shenyang Institute of Automation","ror":"https://ror.org/00ft6nj33","country_code":"CN","type":"facility","lineage":["https://openalex.org/I142078773","https://openalex.org/I19820366"]},{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Zhaoyang Liu","raw_affiliation_strings":["Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China","Key Laboratory of Liaoning Province in Terahertz Imaging and Sensing, Shenyang 110169, China","Key Laboratory of Opto-Electronic Information Processing, Chinese Academy of Sciences, Shenyang 110169, China","Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110169, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institutes for Robotics and Intelligent Manufacturing, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"Key Laboratory of Liaoning Province in Terahertz Imaging and Sensing, Shenyang 110169, China","institution_ids":[]},{"raw_affiliation_string":"Key Laboratory of Opto-Electronic Information Processing, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I19820366"]},{"raw_affiliation_string":"Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110169, China","institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5100603519"],"corresponding_institution_ids":["https://openalex.org/I142078773","https://openalex.org/I19820366"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.09513455,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2478","issue":"6","first_page":"062038","last_page":"062038"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10245","display_name":"Metamaterials and Metasurfaces Applications","score":0.4943999946117401,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10245","display_name":"Metamaterials and Metasurfaces Applications","score":0.4943999946117401,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10752","display_name":"Terahertz technology and applications","score":0.47119998931884766,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11803","display_name":"Superconducting and THz Device Technology","score":0.018200000748038292,"subfield":{"id":"https://openalex.org/subfields/3103","display_name":"Astronomy and Astrophysics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/terahertz-modulators","display_name":"terahertz modulators","score":0.9850000143051147},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5460000038146973},{"id":"https://openalex.org/keywords/amplitude-modulation","display_name":"amplitude modulation","score":0.625},{"id":"https://openalex.org/keywords/modulation-depth","display_name":"modulation depth","score":0.7720000147819519},{"id":"https://openalex.org/keywords/transmission-coefficient","display_name":"transmission coefficient","score":0.7710000276565552},{"id":"https://openalex.org/keywords/metamaterial-resonators","display_name":"metamaterial resonators","score":0.5559999942779541},{"id":"https://openalex.org/keywords/silicon-substrate","display_name":"silicon substrate","score":0.6079999804496765}],"concepts":[{"id":"https://openalex.org/C107816215","wikidata":"https://www.wikidata.org/wiki/Q647887","display_name":"Terahertz radiation","level":2,"score":0.8011603355407715},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6035119891166687},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.51161128282547},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.5059413313865662},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5011205673217773},{"id":"https://openalex.org/C123079801","wikidata":"https://www.wikidata.org/wiki/Q750240","display_name":"Modulation (music)","level":2,"score":0.4778299331665039},{"id":"https://openalex.org/C201905106","wikidata":"https://www.wikidata.org/wiki/Q183755","display_name":"Amplitude modulation","level":4,"score":0.44295534491539},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3489479720592499},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3372804820537567},{"id":"https://openalex.org/C11930861","wikidata":"https://www.wikidata.org/wiki/Q181417","display_name":"Frequency modulation","level":3,"score":0.2887144088745117},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.22561368346214294},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1873163878917694},{"id":"https://openalex.org/C74064498","wikidata":"https://www.wikidata.org/wiki/Q3396184","display_name":"Radio frequency","level":2,"score":0.08978566527366638},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.062369972467422485}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1088/1742-6596/2478/6/062038","doi":"https://doi.org/10.1088/1742-6596/2478/6/062038","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1742-6596/2478/6/062038","pdf_url":"https://iopscience.iop.org/article/10.1088/1742-6596/2478/6/062038/pdf","source":{"id":"https://openalex.org/S4210187594","display_name":"Journal of Physics Conference Series","issn_l":"1742-6588","issn":["1742-6588","1742-6596"],"is_oa":true,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-1","norway-1","poland-40","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Physics: Conference Series","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1088/1742-6596/2478/6/062038","doi":"https://doi.org/10.1088/1742-6596/2478/6/062038","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1742-6596/2478/6/062038","pdf_url":"https://iopscience.iop.org/article/10.1088/1742-6596/2478/6/062038/pdf","source":{"id":"https://openalex.org/S4210187594","display_name":"Journal of Physics Conference Series","issn_l":"1742-6588","issn":["1742-6588","1742-6596"],"is_oa":true,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-class-a","anvur-scientific","cwts-core","jufo-1","norway-1","poland-40","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Physics: Conference Series","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4381856830.pdf"},"referenced_works_count":14,"referenced_works":["https://openalex.org/W1815849135","https://openalex.org/W1969087378","https://openalex.org/W2070161878","https://openalex.org/W2090412940","https://openalex.org/W2266205780","https://openalex.org/W2474407897","https://openalex.org/W2519567346","https://openalex.org/W2624306206","https://openalex.org/W2735616896","https://openalex.org/W2968821233","https://openalex.org/W3007493443","https://openalex.org/W3046195037","https://openalex.org/W4229940949","https://openalex.org/W4246105043"],"related_works":["https://openalex.org/W4406617193","https://openalex.org/W2011861706","https://openalex.org/W2883467729","https://openalex.org/W3096337098","https://openalex.org/W4402834395","https://openalex.org/W7164182004","https://openalex.org/W3210524622","https://openalex.org/W2076446490","https://openalex.org/W7154281969","https://openalex.org/W3201990787"],"abstract_inverted_index":{"Abstract":[0],"The":[1,15,32],"paper":[2],"introduced":[3],"the":[4,7,40,45,49,53,56,66,70,75,80,85,88,94,101,107,111,115,126,133],"simulation":[5,71,86],"of":[6,19,52,79,125,132],"terahertz":[8,42,134],"modulator":[9,16,33,81,89],"in":[10,55,65,91,114],"complementary":[11],"metal-oxide-semiconductor":[12],"(CMOS)":[13],"process.":[14],"is":[17],"composed":[18],"a":[20],"metal":[21],"split-ring":[22],"resonator":[23],"(SRR),":[24],"CMOS,":[25],"semiconductor":[26],"dielectric":[27],"layer":[28],"and":[29,48,128],"silicon":[30],"substrate.":[31],"can":[34,109,118],"make":[35,119],"different":[36],"electromagnetic":[37],"response":[38],"to":[39],"transmitted":[41],"wave":[43],"between":[44],"connection":[46],"state":[47,51],"disconnection":[50],"gap":[54],"SRR,":[57],"which":[58],"could":[59],"be":[60],"achieved":[61],"by":[62],"connecting":[63],"CMOS":[64],"gap.":[67],"At":[68],"0.31THz,":[69],"results":[72],"show":[73],"that":[74],"amplitude":[76,135],"modulation":[77,130],"depth":[78,131],"reached":[82,104],"28.8%.":[83],"When":[84],"keeped":[87],"system":[90],"resonating":[92],"state,":[93],"transmission":[95],"coefficient":[96],"was":[97],"about":[98],"0.0018,":[99],"while":[100],"conductive":[102],"had":[103],"0.2895.":[105],"If":[106],"design":[108],"pass":[110],"experimental":[112],"verification":[113],"future,":[116],"it":[117],"some":[120],"references":[121],"for":[122],"further":[123],"exploration":[124],"high-speed":[127],"high":[129],"modulator.":[136]},"counts_by_year":[],"updated_date":"2026-10-16T09:59:22.235173","created_date":"2023-06-25T00:00:00"}
