{"id":"https://openalex.org/W4377980717","doi":"https://doi.org/10.1299/jsmefed.2022.os06-16","title":"Gas-liquid phase-detection and liquid film thickness measurement on a sprayed surface with a two-fluid jet using a fiber-optic probe and laser displacement sensor","display_name":"Gas-liquid phase-detection and liquid film thickness measurement on a sprayed surface with a two-fluid jet using a fiber-optic probe and laser displacement sensor","publication_year":2022,"publication_date":"2022-01-01","ids":{"openalex":"https://openalex.org/W4377980717","doi":"https://doi.org/10.1299/jsmefed.2022.os06-16"},"language":"en","primary_location":{"id":"doi:10.1299/jsmefed.2022.os06-16","doi":"https://doi.org/10.1299/jsmefed.2022.os06-16","is_oa":true,"landing_page_url":"https://doi.org/10.1299/jsmefed.2022.os06-16","pdf_url":null,"source":{"id":"https://openalex.org/S4210226191","display_name":"Ryuutai Kougaku Bumon Kouenkai kouen rombunshuu/Ryutai Kogaku Bumon Koenkai koen ronbunshu","issn_l":"1348-0251","issn":["1348-0251","2424-2896"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4322614513","host_organization_name":"The Japan Society of Mechanical Engineers","host_organization_lineage":["https://openalex.org/P4322614513"],"host_organization_lineage_names":["The Japan Society of Mechanical Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Proceedings of the Fluids engineering conference","raw_type":"journal-article"},"volume":null,"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://doi.org/10.1299/jsmefed.2022.os06-16","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Kensho YAMAKAWA","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Kensho YAMAKAWA","raw_affiliation_strings":["Shizuoka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shizuoka University","institution_ids":["https://openalex.org/I1298590031"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069255108","display_name":"Yuki Mizushima","orcid":"https://orcid.org/0000-0002-6875-332X","observed_orcids":["https://orcid.org/0000-0002-6875-332X"]},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuki MIZUSHIMA","raw_affiliation_strings":["Shizuoka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shizuoka University","institution_ids":["https://openalex.org/I1298590031"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110124105","display_name":"Masayoshi IMAI","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masayoshi IMAI","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101931146","display_name":"Satomi Hamada","orcid":"https://orcid.org/0000-0002-6419-9587","observed_orcids":["https://orcid.org/0000-0002-6419-9587"]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Satomi HAMADA","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101959146","display_name":"Hiroki Takahashi","orcid":"https://orcid.org/0000-0002-7658-0246","observed_orcids":["https://orcid.org/0000-0002-7658-0246"]},"institutions":[{"id":"https://openalex.org/I74894318","display_name":"Ebara (Japan)","ror":"https://ror.org/02yemx219","country_code":"JP","type":"company","lineage":["https://openalex.org/I74894318"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroki TAKAHASHI","raw_affiliation_strings":["Ebara Corporation"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ebara Corporation","institution_ids":["https://openalex.org/I74894318"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024916126","display_name":"Toshiyuki Sanada","orcid":"https://orcid.org/0000-0003-4636-8364","observed_orcids":["https://orcid.org/0000-0003-4636-8364"]},"institutions":[{"id":"https://openalex.org/I1298590031","display_name":"Shizuoka University","ror":"https://ror.org/01w6wtk13","country_code":"JP","type":"education","lineage":["https://openalex.org/I1298590031"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshiyuki SANADA","raw_affiliation_strings":["Shizuoka University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Shizuoka University","institution_ids":["https://openalex.org/I1298590031"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.40189086,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":"2022","issue":"0","first_page":"OS06","last_page":"16"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11382","display_name":"Fluid Dynamics and Heat Transfer","score":0.9067000150680542,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11382","display_name":"Fluid Dynamics and Heat Transfer","score":0.9067000150680542,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12141","display_name":"Fluid Dynamics and Thin Films","score":0.04969999939203262,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12092","display_name":"Erosion and Abrasive Machining","score":0.006000000052154064,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/liquid-film-thickness","display_name":"liquid film thickness","score":0.777999997138977},{"id":"https://openalex.org/keywords/semiconductor-wafer-cleaning","display_name":"semiconductor wafer cleaning","score":0.781000018119812},{"id":"https://openalex.org/keywords/droplet-impingement","display_name":"droplet impingement","score":0.8450000286102295},{"id":"https://openalex.org/keywords/fiberoptic-probe","display_name":"optical fiber probe","score":0.8389999866485596},{"id":"https://openalex.org/keywords/laser-displacement-sensor","display_name":"laser displacement sensor","score":0.9269999861717224}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7728433609008789},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6238373517990112},{"id":"https://openalex.org/C194232370","wikidata":"https://www.wikidata.org/wiki/Q162","display_name":"Optical fiber","level":2,"score":0.6223907470703125},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6036110520362854},{"id":"https://openalex.org/C119947313","wikidata":"https://www.wikidata.org/wiki/Q5596635","display_name":"Jet (fluid)","level":2,"score":0.5955708622932434},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5216196775436401},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.519927442073822},{"id":"https://openalex.org/C166689943","wikidata":"https://www.wikidata.org/wiki/Q850283","display_name":"Interferometry","level":2,"score":0.4445951581001282},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4270699918270111},{"id":"https://openalex.org/C116067010","wikidata":"https://www.wikidata.org/wiki/Q4698686","display_name":"Airflow","level":2,"score":0.42068466544151306},{"id":"https://openalex.org/C44280652","wikidata":"https://www.wikidata.org/wiki/Q104837","display_name":"Phase (matter)","level":2,"score":0.41583260893821716},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3795277178287506},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.3475031852722168},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.16844165325164795},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10906419157981873},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.10550573468208313},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1299/jsmefed.2022.os06-16","doi":"https://doi.org/10.1299/jsmefed.2022.os06-16","is_oa":true,"landing_page_url":"https://doi.org/10.1299/jsmefed.2022.os06-16","pdf_url":null,"source":{"id":"https://openalex.org/S4210226191","display_name":"Ryuutai Kougaku Bumon Kouenkai kouen rombunshuu/Ryutai Kogaku Bumon Koenkai koen ronbunshu","issn_l":"1348-0251","issn":["1348-0251","2424-2896"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4322614513","host_organization_name":"The Japan Society of Mechanical Engineers","host_organization_lineage":["https://openalex.org/P4322614513"],"host_organization_lineage_names":["The Japan Society of Mechanical Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Proceedings of the Fluids engineering conference","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1299/jsmefed.2022.os06-16","doi":"https://doi.org/10.1299/jsmefed.2022.os06-16","is_oa":true,"landing_page_url":"https://doi.org/10.1299/jsmefed.2022.os06-16","pdf_url":null,"source":{"id":"https://openalex.org/S4210226191","display_name":"Ryuutai Kougaku Bumon Kouenkai kouen rombunshuu/Ryutai Kogaku Bumon Koenkai koen ronbunshu","issn_l":"1348-0251","issn":["1348-0251","2424-2896"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/P4322614513","host_organization_name":"The Japan Society of Mechanical Engineers","host_organization_lineage":["https://openalex.org/P4322614513"],"host_organization_lineage_names":["The Japan Society of Mechanical Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"The Proceedings of the Fluids engineering conference","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W4394949995","https://openalex.org/W2177953872","https://openalex.org/W1836655702","https://openalex.org/W1965589055","https://openalex.org/W4220773054","https://openalex.org/W3049395716","https://openalex.org/W2898055573","https://openalex.org/W2603826213","https://openalex.org/W3159310285","https://openalex.org/W1911623252"],"abstract_inverted_index":{"The":[0],"two-fluid":[1,107],"jet":[2],"method,":[3],"which":[4],"impacted":[5],"droplets":[6,54],"accelerated":[7],"by":[8,49],"a":[9,29,57,86],"high-speed":[10,51],"air":[11],"stream,":[12],"is":[13],"widely":[14],"used":[15],"in":[16],"cleaning":[17,34],"the":[18,33,44,50,62,76,92,97,103,106],"semiconductor":[19],"manufacturing":[20],"process.":[21],"A":[22],"wafer":[23],"must":[24],"always":[25],"be":[26],"covered":[27],"with":[28],"liquid":[30,45,58,77],"film":[31,46,59,78],"during":[32],"process":[35],"because":[36],"local":[37],"drying":[38],"may":[39],"cause":[40],"some":[41],"defects.":[42],"However,":[43],"thickness":[47,79],"formed":[48],"airflow":[52],"and":[53,55,85],"whether":[56],"exists":[60],"on":[61,102],"impingement":[63],"surface":[64,104],"have":[65],"not":[66],"been":[67],"investigated.":[68],"In":[69],"this":[70],"study,":[71],"we":[72],"tried":[73],"to":[74],"measure":[75],"using":[80],"an":[81],"optical":[82,98],"fiber":[83,99],"probe":[84,100],"laser":[87],"displacement":[88],"meter.":[89],"We":[90],"discuss":[91],"return":[93],"light":[94],"signal":[95],"from":[96],"installed":[101],"irradiating":[105],"jet.":[108]},"counts_by_year":[],"updated_date":"2026-09-26T08:19:03.415552","created_date":"2023-05-25T00:00:00"}