{"id":"https://openalex.org/W4367669351","doi":"https://doi.org/10.1002/smll.202301774","title":"Direct\u2010Patterning ZnO Deposition by Atomic\u2010Layer Additive Manufacturing Using a Safe and Economical Precursor","display_name":"Direct\u2010Patterning ZnO Deposition by Atomic\u2010Layer Additive Manufacturing Using a Safe and Economical Precursor","publication_year":2023,"publication_date":"2023-05-01","ids":{"openalex":"https://openalex.org/W4367669351","doi":"https://doi.org/10.1002/smll.202301774","pmid":"https://pubmed.ncbi.nlm.nih.gov/37127863"},"language":"en","primary_location":{"id":"doi:10.1002/smll.202301774","doi":"https://doi.org/10.1002/smll.202301774","is_oa":true,"landing_page_url":"https://doi.org/10.1002/smll.202301774","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/smll.202301774","source":{"id":"https://openalex.org/S94619837","display_name":"Small","issn_l":"1613-6810","issn":["1613-6810","1613-6829"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-3","ki-jl-2","medline","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Small","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref","pubmed"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/smll.202301774","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017390426","display_name":"Sonja Stefanovic","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]},{"id":"https://openalex.org/I4405268894","display_name":"Interdisziplin\u00e4res Zentrum f\u00fcr Nanostrukturierte Filme","ror":"https://ror.org/02dby2462","country_code":"DE","type":"education","lineage":["https://openalex.org/I4405268894"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Sonja Stefanovic","raw_affiliation_strings":["Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017446999","display_name":"Negar Gheshlaghi","orcid":"https://orcid.org/0000-0003-1036-3377","observed_orcids":["https://orcid.org/0000-0003-1036-3377"]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]},{"id":"https://openalex.org/I4405268894","display_name":"Interdisziplin\u00e4res Zentrum f\u00fcr Nanostrukturierte Filme","ror":"https://ror.org/02dby2462","country_code":"DE","type":"education","lineage":["https://openalex.org/I4405268894"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Negar Gheshlaghi","raw_affiliation_strings":["Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078742947","display_name":"David Zanders","orcid":"https://orcid.org/0000-0001-5516-7738","observed_orcids":["https://orcid.org/0000-0001-5516-7738"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"David Zanders","raw_affiliation_strings":["Inorganic Materials Chemistry Ruhr\u2010Universit\u00e4t Bochum  Universit\u00e4tsstra\u00dfe 150 44801 Bochum Germany"],"raw_orcid":"https://orcid.org/0000-0001-5516-7738","affiliations":[{"raw_affiliation_string":"Inorganic Materials Chemistry Ruhr\u2010Universit\u00e4t Bochum  Universit\u00e4tsstra\u00dfe 150 44801 Bochum Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008131798","display_name":"Ivan Kundrata","orcid":null,"observed_orcids":[]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Ivan Kundrata","raw_affiliation_strings":["ATLANT 3D Nanosystems ApS M\u00e5rk\u00e6rvej 2  DK\u20102630 Taastrup, M\u00e5rk\u00e6rvej 2 Taastrup DK\u20102630 Denmark"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ATLANT 3D Nanosystems ApS M\u00e5rk\u00e6rvej 2  DK\u20102630 Taastrup, M\u00e5rk\u00e6rvej 2 Taastrup DK\u20102630 Denmark","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5027802434","display_name":"Baolin Zhao","orcid":"https://orcid.org/0000-0003-3448-0754","observed_orcids":["https://orcid.org/0000-0003-3448-0754"]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]},{"id":"https://openalex.org/I4405268894","display_name":"Interdisziplin\u00e4res Zentrum f\u00fcr Nanostrukturierte Filme","ror":"https://ror.org/02dby2462","country_code":"DE","type":"education","lineage":["https://openalex.org/I4405268894"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Baolin Zhao","raw_affiliation_strings":["Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Organic Materials and Devices IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]},{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Organic Materials and Devices IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078451753","display_name":"Ma\u00efssa K. S. Barr","orcid":"https://orcid.org/0000-0003-1587-2269","observed_orcids":["https://orcid.org/0000-0003-1587-2269"]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]},{"id":"https://openalex.org/I4405268894","display_name":"Interdisziplin\u00e4res Zentrum f\u00fcr Nanostrukturierte Filme","ror":"https://ror.org/02dby2462","country_code":"DE","type":"education","lineage":["https://openalex.org/I4405268894"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Ma\u00efssa K. S. Barr","raw_affiliation_strings":["Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5012606751","display_name":"Marcus Halik","orcid":"https://orcid.org/0000-0001-5976-0862","observed_orcids":["https://orcid.org/0000-0001-5976-0862"]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]},{"id":"https://openalex.org/I4405268894","display_name":"Interdisziplin\u00e4res Zentrum f\u00fcr Nanostrukturierte Filme","ror":"https://ror.org/02dby2462","country_code":"DE","type":"education","lineage":["https://openalex.org/I4405268894"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Marcus Halik","raw_affiliation_strings":["Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Organic Materials and Devices IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany"],"raw_orcid":"https://orcid.org/0000-0001-5976-0862","affiliations":[{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Organic Materials and Devices IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112297953","display_name":"Anjana Devi","orcid":"https://orcid.org/0000-0003-2142-8105","observed_orcids":["https://orcid.org/0000-0003-2142-8105"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Anjana Devi","raw_affiliation_strings":["Inorganic Materials Chemistry Ruhr\u2010Universit\u00e4t Bochum  Universit\u00e4tsstra\u00dfe 150 44801 Bochum Germany"],"raw_orcid":"https://orcid.org/0000-0003-2142-8105","affiliations":[{"raw_affiliation_string":"Inorganic Materials Chemistry Ruhr\u2010Universit\u00e4t Bochum  Universit\u00e4tsstra\u00dfe 150 44801 Bochum Germany","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5002887494","display_name":"Julien Bachmann","orcid":"https://orcid.org/0000-0001-6480-6212","observed_orcids":["https://orcid.org/0000-0001-6480-6212"]},"institutions":[{"id":"https://openalex.org/I181369854","display_name":"Friedrich-Alexander-Universit\u00e4t Erlangen-N\u00fcrnberg","ror":"https://ror.org/00f7hpc57","country_code":"DE","type":"education","lineage":["https://openalex.org/I181369854"]},{"id":"https://openalex.org/I4405268894","display_name":"Interdisziplin\u00e4res Zentrum f\u00fcr Nanostrukturierte Filme","ror":"https://ror.org/02dby2462","country_code":"DE","type":"education","lineage":["https://openalex.org/I4405268894"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Julien Bachmann","raw_affiliation_strings":["ATLANT 3D Nanosystems ApS M\u00e5rk\u00e6rvej 2  DK\u20102630 Taastrup, M\u00e5rk\u00e6rvej 2 Taastrup DK\u20102630 Denmark","Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany"],"raw_orcid":"https://orcid.org/0000-0001-6480-6212","affiliations":[{"raw_affiliation_string":"ATLANT 3D Nanosystems ApS M\u00e5rk\u00e6rvej 2  DK\u20102630 Taastrup, M\u00e5rk\u00e6rvej 2 Taastrup DK\u20102630 Denmark","institution_ids":[]},{"raw_affiliation_string":"Friedrich\u2010Alexander\u2010Universit\u00e4t Erlangen\u2010N\u00fcrnberg Chemistry of Thin Film Materials IZNF  Cauerstra\u00dfe 3 91058 Erlangen Germany","institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5002887494"],"corresponding_institution_ids":["https://openalex.org/I181369854","https://openalex.org/I4405268894"],"apc_list":{"value":5250,"currency":"USD","value_usd":5250},"apc_paid":{"value":5250,"currency":"USD","value_usd":5250},"fwci":1.8397,"has_fulltext":true,"cited_by_count":26,"citation_normalized_percentile":{"value":0.8505703,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":99},"biblio":{"volume":"19","issue":"36","first_page":"e2301774","last_page":"e2301774"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.7939000129699707,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.7939000129699707,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10090","display_name":"ZnO doping and properties","score":0.14480000734329224,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":0.03319999948143959,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/area-selective-atomic-layer-deposition","display_name":"area-selective atomic layer deposition","score":0.7940000295639038},{"id":"https://openalex.org/keywords/zno-thin-films","display_name":"ZnO thin films","score":0.8769999742507935},{"id":"https://openalex.org/keywords/direct-patterning","display_name":"direct patterning","score":0.8230000138282776},{"id":"https://openalex.org/keywords/growth-rate-crystal-and-thin-film-growth","display_name":"growth rate (crystal and thin-film growth)","score":0.609000027179718},{"id":"https://openalex.org/keywords/crystal-orientation","display_name":"crystal orientation","score":0.8230000138282776},{"id":"https://openalex.org/keywords/stoichiometry","display_name":"stoichiometry","score":0.8769999742507935},{"id":"https://openalex.org/keywords/thin-film-transistors","display_name":"thin-film transistors","score":0.8640000224113464}],"concepts":[{"id":"https://openalex.org/C69544855","wikidata":"https://www.wikidata.org/wiki/Q757625","display_name":"Atomic layer deposition","level":3,"score":0.8194338083267212},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.7334915399551392},{"id":"https://openalex.org/C64297162","wikidata":"https://www.wikidata.org/wiki/Q1987070","display_name":"Deposition (geology)","level":3,"score":0.6923564076423645},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6753231287002563},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.6186056137084961},{"id":"https://openalex.org/C62960913","wikidata":"https://www.wikidata.org/wiki/Q1809389","display_name":"Layer by layer","level":3,"score":0.5087588429450989},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3751329183578491},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07110258936882019},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0},{"id":"https://openalex.org/C2816523","wikidata":"https://www.wikidata.org/wiki/Q180184","display_name":"Sediment","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.1002/smll.202301774","doi":"https://doi.org/10.1002/smll.202301774","is_oa":true,"landing_page_url":"https://doi.org/10.1002/smll.202301774","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/smll.202301774","source":{"id":"https://openalex.org/S94619837","display_name":"Small","issn_l":"1613-6810","issn":["1613-6810","1613-6829"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-3","ki-jl-2","medline","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Small","raw_type":"journal-article"},{"id":"pmid:37127863","doi":null,"is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/37127863","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Small (Weinheim an der Bergstrasse, Germany)","raw_type":"Journal Article"}],"best_oa_location":{"id":"doi:10.1002/smll.202301774","doi":"https://doi.org/10.1002/smll.202301774","is_oa":true,"landing_page_url":"https://doi.org/10.1002/smll.202301774","pdf_url":"https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/smll.202301774","source":{"id":"https://openalex.org/S94619837","display_name":"Small","issn_l":"1613-6810","issn":["1613-6810","1613-6829"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","dongbi-c","jufo-3","ki-jl-2","medline","norway-2","poland-200","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320595","host_organization_name":"Wiley","host_organization_lineage":["https://openalex.org/P4310320595"],"host_organization_lineage_names":["Wiley"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Small","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G1104217116","display_name":"all-in-one machine for hybrid technologies enabling high value added multi-scale integrated micro.optoelectronics","funder_award_id":"958417","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G1192820838","display_name":null,"funder_award_id":"SFB-TR 87","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"},{"id":"https://openalex.org/G2136412041","display_name":"The atomic-layer 3D plotter","funder_award_id":"950785","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G3929605283","display_name":null,"funder_award_id":"DFG SFB-TR87","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"},{"id":"https://openalex.org/G4308846523","display_name":null,"funder_award_id":"201706060215","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"},{"id":"https://openalex.org/G4937468798","display_name":null,"funder_award_id":"H2020","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G7836929942","display_name":null,"funder_award_id":"201706060215","funder_id":"https://openalex.org/F4320322725","funder_display_name":"China Scholarship Council"},{"id":"https://openalex.org/G848858685","display_name":null,"funder_award_id":"101069310","funder_id":"https://openalex.org/F4320334678","funder_display_name":"European Research Council"}],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"},{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"},{"id":"https://openalex.org/F4320322725","display_name":"China Scholarship Council","ror":"https://ror.org/04atp4p48"},{"id":"https://openalex.org/F4320332999","display_name":"Horizon 2020 Framework Programme","ror":"https://ror.org/00k4n6c32"},{"id":"https://openalex.org/F4320334678","display_name":"European Research Council","ror":"https://ror.org/0472cxd90"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4367669351.pdf","grobid_xml":"https://content.openalex.org/works/W4367669351.grobid-xml"},"referenced_works_count":18,"referenced_works":["https://openalex.org/W1557681670","https://openalex.org/W1973124629","https://openalex.org/W1980627786","https://openalex.org/W1998590690","https://openalex.org/W2042194535","https://openalex.org/W2480627941","https://openalex.org/W2535277413","https://openalex.org/W2735790118","https://openalex.org/W2772327546","https://openalex.org/W3014456062","https://openalex.org/W3020371264","https://openalex.org/W3025789691","https://openalex.org/W3109035547","https://openalex.org/W3137797808","https://openalex.org/W4200539677","https://openalex.org/W4220960308","https://openalex.org/W6604563918","https://openalex.org/W6606298547"],"related_works":["https://openalex.org/W4309813189","https://openalex.org/W2016096739","https://openalex.org/W7128509050","https://openalex.org/W2904436223","https://openalex.org/W7163394549","https://openalex.org/W2300296980","https://openalex.org/W2047053633","https://openalex.org/W2018145774","https://openalex.org/W2009626498","https://openalex.org/W1993679372"],"abstract_inverted_index":{"Abstract":[0],"Area\u2010selective":[1],"atomic":[2],"layer":[3],"deposition":[4],"(AS\u2010ALD)":[5],"is":[6,39,143,194],"a":[7,15,62,71],"bottom\u2010up":[8],"nanofabrication":[9],"method":[10],"delivering":[11],"single":[12],"atoms":[13],"from":[14,196],"molecular":[16],"precursor.":[17],"AS\u2010ALD":[18],"enables":[19,75],"self\u2010aligned":[20],"fabrication":[21],"and":[22,30,38,44,130,160,180,201],"outperforms":[23],"lithography":[24],"in":[25,87,106,125,154,165],"terms":[26,126],"of":[27,47,64,79,97,113,121,127,139],"cost,":[28],"resistance,":[29],"equipment":[31],"prerequisites,":[32],"but":[33],"it":[34],"requires":[35],"pre\u2010patterned":[36],"substrates":[37],"limited":[40],"by":[41,53,101,157],"insufficient":[42],"selectivity":[43],"finite":[45],"choice":[46],"substrates.":[48],"These":[49],"challenges":[50],"are":[51,149],"circumvented":[52],"direct":[54,76],"patterning":[55,77],"with":[56,91,108,174],"atomic\u2010layer":[57,68],"additive":[58],"manufacturing":[59,69],"(ALAM)":[60],"\u2014":[61],"transfer":[63],"3D\u2010printing":[65],"principles":[66],"to":[67],"where":[70],"precursor":[72,84],"supply":[73],"nozzle":[74],"instead":[78],"blanket":[80],"coating.":[81],"The":[82,111,133,146,169],"reduced":[83],"vapor":[85],"consumption":[86],"ALAM":[88,117,166],"as":[89],"compared":[90],"ALD":[92,107,124,155],"calls":[93],"for":[94,136],"the":[95,122],"use":[96],"less":[98],"volatile":[99],"precursors":[100],"replacing":[102],"diethylzinc":[103],"used":[104],"traditionally":[105],"bis(dimethylaminopropyl)zinc,":[109],"Zn(DMP)2.":[110],"behavior":[112],"this":[114],"novel":[115],"ZnO":[116,199],"process":[118],"follows":[119],"that":[120,183],"corresponding":[123],"deposit":[128],"quality":[129],"growth":[131,138,147],"characteristics.":[132],"temperature":[134],"window":[135],"self\u2010limiting":[137],"stoichiometric,":[140],"crystalline":[141],"material":[142],"200\u2013250":[144],"\u00b0C.":[145],"rates":[148],"0.9":[150],"\u00c5":[151,162],"per":[152,163],"cycle":[153],"(determined":[156],"spectroscopic":[158,179],"ellipsometry)":[159],"1.1":[161],"pass":[164],"(imaging":[167],"ellipsometry).":[168],"preferential":[170],"crystal":[171],"orientation":[172],"increases":[173],"temperature,":[175],"while":[176],"energy\u2010dispersive":[177],"X\u2010ray":[178],"XPS":[181],"show":[182],"only":[184],"intermediate":[185],"temperatures":[186],"deliver":[187],"stoichiometric":[188],"ZnO.":[189],"A":[190],"functional":[191],"thin\u2010film":[192],"transistor":[193],"created":[195],"an":[197],"ALAM\u2010deposited":[198],"line":[200],"characterized.":[202]},"counts_by_year":[{"year":2026,"cited_by_count":10},{"year":2025,"cited_by_count":9},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":3}],"updated_date":"2026-11-11T12:16:26.678958","created_date":"2023-05-03T00:00:00"}