{"id":"https://openalex.org/W4367624909","doi":"https://doi.org/10.1016/j.surfcoat.2023.129540","title":"Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS","display_name":"Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS","publication_year":2023,"publication_date":"2023-05-01","ids":{"openalex":"https://openalex.org/W4367624909","doi":"https://doi.org/10.1016/j.surfcoat.2023.129540"},"language":"en","primary_location":{"id":"doi:10.1016/j.surfcoat.2023.129540","doi":"https://doi.org/10.1016/j.surfcoat.2023.129540","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.surfcoat.2023.129540","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://doi.org/10.1016/j.surfcoat.2023.129540","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063494346","display_name":"L\u00e9o Lapeyre","orcid":"https://orcid.org/0000-0002-6982-3131","observed_orcids":["https://orcid.org/0000-0002-6982-3131"]},"institutions":[{"id":"https://openalex.org/I130692619","display_name":"Bern University of Applied Sciences","ror":"https://ror.org/02bnkt322","country_code":"CH","type":"education","lineage":["https://openalex.org/I130692619"]},{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":true,"raw_author_name":"L. Lapeyre","raw_affiliation_strings":["Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies ALPS, Quellgasse 21, 2502 Biel/Bienne, Switzerland","Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies ALPS, Quellgasse 21, 2502 Biel/Bienne, Switzerland","institution_ids":["https://openalex.org/I130692619"]},{"raw_affiliation_string":"Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5060114356","display_name":"Caroline Hain","orcid":"https://orcid.org/0000-0002-5897-6335","observed_orcids":["https://orcid.org/0000-0002-5897-6335","https://orcid.org/0009-0007-1649-3208"]},"institutions":[{"id":"https://openalex.org/I130692619","display_name":"Bern University of Applied Sciences","ror":"https://ror.org/02bnkt322","country_code":"CH","type":"education","lineage":["https://openalex.org/I130692619"]},{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"C. Hain","raw_affiliation_strings":["Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies ALPS, Quellgasse 21, 2502 Biel/Bienne, Switzerland","Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies ALPS, Quellgasse 21, 2502 Biel/Bienne, Switzerland","institution_ids":["https://openalex.org/I130692619"]},{"raw_affiliation_string":"Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057293072","display_name":"Patrick Sturm","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210107453","display_name":"Tofwerk (Switzerland)","ror":"https://ror.org/01wpzjj95","country_code":"CH","type":"company","lineage":["https://openalex.org/I4210107453"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"P. Sturm","raw_affiliation_strings":["TOFWERK, Schorenstrasse 39, 3645 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TOFWERK, Schorenstrasse 39, 3645 Thun, Switzerland","institution_ids":["https://openalex.org/I4210107453"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044158100","display_name":"J. Metzger","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210107453","display_name":"Tofwerk (Switzerland)","ror":"https://ror.org/01wpzjj95","country_code":"CH","type":"company","lineage":["https://openalex.org/I4210107453"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"J. Metzger","raw_affiliation_strings":["TOFWERK, Schorenstrasse 39, 3645 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"TOFWERK, Schorenstrasse 39, 3645 Thun, Switzerland","institution_ids":["https://openalex.org/I4210107453"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013235083","display_name":"Aurelio Borz\u00ec","orcid":"https://orcid.org/0000-0002-6151-7850","observed_orcids":["https://orcid.org/0000-0002-6151-7850"]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"A. Borz\u00ec","raw_affiliation_strings":["Center for X-ray Analytics, Swiss Federal Laboratories for Materials Science and Technology, Empa, \u00dcberlandstrasse 129, 8600 D\u00fcbendorf, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Center for X-ray Analytics, Swiss Federal Laboratories for Materials Science and Technology, Empa, \u00dcberlandstrasse 129, 8600 D\u00fcbendorf, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030915268","display_name":"Krzysztof Wieczerzak","orcid":"https://orcid.org/0000-0001-9976-7591","observed_orcids":["https://orcid.org/0000-0001-9976-7591"]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"K. Wieczerzak","raw_affiliation_strings":["Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002361738","display_name":"Patrice Raynaud","orcid":"https://orcid.org/0000-0001-6381-3875","observed_orcids":["https://orcid.org/0000-0001-6381-3875"]},"institutions":[{"id":"https://openalex.org/I1294671590","display_name":"Centre National de la Recherche Scientifique","ror":"https://ror.org/02feahw73","country_code":"FR","type":"government","lineage":["https://openalex.org/I1294671590"]},{"id":"https://openalex.org/I134560555","display_name":"Universit\u00e9 Toulouse III - Paul Sabatier","ror":"https://ror.org/02v6kpv12","country_code":"FR","type":"education","lineage":["https://openalex.org/I134560555","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I4210120905","display_name":"Laboratoire Plasma et Conversion d'Energie","ror":"https://ror.org/02w5mvk98","country_code":"FR","type":"facility","lineage":["https://openalex.org/I1294671590","https://openalex.org/I205747304","https://openalex.org/I4210095849","https://openalex.org/I4210120905","https://openalex.org/I4405258862"]},{"id":"https://openalex.org/I4405258862","display_name":"Universit\u00e9 de Toulouse","ror":"https://ror.org/01ahyrz84","country_code":"FR","type":"education","lineage":["https://openalex.org/I4405258862"]}],"countries":["FR"],"is_corresponding":false,"raw_author_name":"P. Raynaud","raw_affiliation_strings":["Laboratoire Plasma et Conversion d'Energie (LAPLACE), Universit\u00e9 de Toulouse, CNRS, INPT, UPS, 31062 Toulouse, France"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Laboratoire Plasma et Conversion d'Energie (LAPLACE), Universit\u00e9 de Toulouse, CNRS, INPT, UPS, 31062 Toulouse, France","institution_ids":["https://openalex.org/I1294671590","https://openalex.org/I134560555","https://openalex.org/I4210120905","https://openalex.org/I4405258862"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081623412","display_name":"Johann Michler","orcid":"https://orcid.org/0000-0001-8860-4068","observed_orcids":["https://orcid.org/0000-0001-8860-4068"]},"institutions":[{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"J. Michler","raw_affiliation_strings":["Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112517987","display_name":"Th. Nelis","orcid":"https://orcid.org/0000-0002-0061-8850","observed_orcids":["https://orcid.org/0000-0002-0061-8850"]},"institutions":[{"id":"https://openalex.org/I130692619","display_name":"Bern University of Applied Sciences","ror":"https://ror.org/02bnkt322","country_code":"CH","type":"education","lineage":["https://openalex.org/I130692619"]},{"id":"https://openalex.org/I71824836","display_name":"Empa","ror":"https://ror.org/02x681a42","country_code":"CH","type":"facility","lineage":["https://openalex.org/I2799323385","https://openalex.org/I71824836"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"T. Nelis","raw_affiliation_strings":["Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies ALPS, Quellgasse 21, 2502 Biel/Bienne, Switzerland","Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Bern University of Applied Sciences, Institute for Applied Laser, Photonics and Surface Technologies ALPS, Quellgasse 21, 2502 Biel/Bienne, Switzerland","institution_ids":["https://openalex.org/I130692619"]},{"raw_affiliation_string":"Empa, Swiss Federal Laboratories for Materials Science and Technology, Laboratory for Mechanics of Materials and Nanostructures, Feuerwerkerstrasse 39, 3602 Thun, Switzerland","institution_ids":["https://openalex.org/I71824836"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5063494346"],"corresponding_institution_ids":["https://openalex.org/I130692619","https://openalex.org/I71824836"],"apc_list":{"value":3440,"currency":"USD","value_usd":3440},"apc_paid":{"value":3440,"currency":"USD","value_usd":3440},"fwci":0.937,"has_fulltext":true,"cited_by_count":13,"citation_normalized_percentile":{"value":0.70025878,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":97},"biblio":{"volume":"464","issue":null,"first_page":"129540","last_page":"129540"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.7343999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.7343999743461609,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.21570000052452087,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10099","display_name":"GaN-based semiconductor devices and materials","score":0.009100000374019146,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/alscn-thin-films","display_name":"AlScN thin films","score":0.9539999961853027},{"id":"https://openalex.org/keywords/c-axis-orientation","display_name":"c-axis orientation","score":0.8960000276565552},{"id":"https://openalex.org/keywords/microwave-plasma","display_name":"microwave plasma","score":0.5669999718666077},{"id":"https://openalex.org/keywords/reactive-hipims","display_name":"reactive HiPIMS","score":0.8149999976158142},{"id":"https://openalex.org/keywords/piezoelectric-thin-films","display_name":"piezoelectric thin films","score":0.8009999990463257},{"id":"https://openalex.org/keywords/scandium-doping","display_name":"scandium doping","score":0.7549999952316284},{"id":"https://openalex.org/keywords/fiber-texture","display_name":"fiber texture","score":0.6880000233650208},{"id":"https://openalex.org/keywords/oxygen-content-reduction","display_name":"oxygen content reduction","score":0.7590000033378601},{"id":"https://openalex.org/keywords/nitrogen-stoichiometry","display_name":"nitrogen stoichiometry","score":0.8299999833106995},{"id":"https://openalex.org/keywords/in-situ-plasma-diagnostics","display_name":"in situ plasma diagnostics","score":0.753000020980835},{"id":"https://openalex.org/keywords/time-of-flight-mass-spectrometry","display_name":"time-of-flight mass spectrometry","score":0.8460000157356262},{"id":"https://openalex.org/keywords/magnetometry","display_name":"magnetic field measurement","score":0.5529999732971191}],"concepts":[{"id":"https://openalex.org/C97892325","wikidata":"https://www.wikidata.org/wiki/Q1621956","display_name":"High-power impulse magnetron sputtering","level":5,"score":0.7889248132705688},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7469242811203003},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6948913335800171},{"id":"https://openalex.org/C113196181","wikidata":"https://www.wikidata.org/wiki/Q485223","display_name":"Analytical Chemistry (journal)","level":2,"score":0.6120293140411377},{"id":"https://openalex.org/C61427134","wikidata":"https://www.wikidata.org/wiki/Q847609","display_name":"Sputter deposition","level":4,"score":0.5048299431800842},{"id":"https://openalex.org/C3045981","wikidata":"https://www.wikidata.org/wiki/Q8039317","display_name":"Wurtzite crystal structure","level":3,"score":0.44825100898742676},{"id":"https://openalex.org/C2776523803","wikidata":"https://www.wikidata.org/wiki/Q1324945","display_name":"Elastic recoil detection","level":3,"score":0.42769595980644226},{"id":"https://openalex.org/C22423302","wikidata":"https://www.wikidata.org/wiki/Q898444","display_name":"Sputtering","level":3,"score":0.3666909635066986},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.20255887508392334},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.17327481508255005},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.060070693492889404},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.0},{"id":"https://openalex.org/C535196362","wikidata":"https://www.wikidata.org/wiki/Q758","display_name":"Zinc","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.1016/j.surfcoat.2023.129540","doi":"https://doi.org/10.1016/j.surfcoat.2023.129540","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.surfcoat.2023.129540","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},{"id":"doi:10.2139/ssrn.4300055","doi":"https://doi.org/10.2139/ssrn.4300055","is_oa":true,"landing_page_url":"https://doi.org/10.2139/ssrn.4300055","pdf_url":null,"source":{"id":"https://openalex.org/S4210172589","display_name":"SSRN Electronic Journal","issn_l":"1556-5068","issn":["1556-5068"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I1318003438","host_organization_name":"RELX Group (Netherlands)","host_organization_lineage":["https://openalex.org/I1318003438"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"posted-content"},{"id":"pmh:oai:HAL:hal-04230935v1","doi":null,"is_oa":true,"landing_page_url":"https://hal.science/hal-04230935","pdf_url":"https://hal.science/hal-04230935v1/file/Article%20Leo%20PDF%20%281%29.pdf","source":{"id":"https://openalex.org/S4306402512","display_name":"HAL","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I4405252976","host_organization_name":"Centre pour la Communication Scientifique Directe","host_organization_lineage":["https://openalex.org/I4405252976"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Surface and Coatings Technology, 2023, 464, pp.129540. ⟨10.1016/j.surfcoat.2023.129540⟩","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:dora:empa_34856","doi":null,"is_oa":true,"landing_page_url":"https://www.dora.lib4ri.ch/empa/item/empa:34856","pdf_url":"https://www.dora.lib4ri.ch/empa/dload/empa:34856/PDF/view","source":{"id":"https://openalex.org/S4306401298","display_name":"DORA Empa (Swiss Federal Laboratories for Materials Science and Technology (Empa))","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I71824836","host_organization_name":"Empa","host_organization_lineage":["https://openalex.org/I71824836"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Surface and Coatings Technology","raw_type":"info:eu-repo/semantics/article"},{"id":"pmh:oai:arbor.bfh.ch:19205","doi":null,"is_oa":true,"landing_page_url":"https://arbor.bfh.ch/19205/","pdf_url":null,"source":{"id":"https://openalex.org/S4406922806","display_name":"ARBOR - Bern University of Applied Sciences Repository","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Lapeyre, L\u00e9o; Hain, Caroline; Sturm, Patrick; Metzger, Janos; Borzi, Aurelio; Wieczerzak, Krzysztof; Raynaud, Patrice; Michler, Johann; Nelis, Thomas (2023). Deposition and characterisation of c-axis oriented AlScN thin films via microwave plasma-assisted reactive HiPIMS Surface and Coatings Technology, 464, p. 129540. Elsevier 10.1016/j.surfcoat.2023.129540 <http://dx.doi.org/10.1016/j.surfcoat.2023.129540>","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"doi:10.1016/j.surfcoat.2023.129540","doi":"https://doi.org/10.1016/j.surfcoat.2023.129540","is_oa":true,"landing_page_url":"https://doi.org/10.1016/j.surfcoat.2023.129540","pdf_url":null,"source":{"id":"https://openalex.org/S76010543","display_name":"Surface and Coatings Technology","issn_l":"0257-8972","issn":["0257-8972","1879-3347"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-b","jufo-2","ki-jl-1","norway-1","poland-100","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320990","host_organization_name":"Elsevier BV","host_organization_lineage":["https://openalex.org/P4310320990"],"host_organization_lineage_names":["Elsevier BV"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Surface and Coatings Technology","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G3102748100","display_name":null,"funder_award_id":"E!114277","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G434337789","display_name":null,"funder_award_id":"HORIZON2020","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G5537864911","display_name":null,"funder_award_id":"50631.1 INNO-ENG","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G6145747124","display_name":null,"funder_award_id":"E!114277","funder_id":"https://openalex.org/F4320327931","funder_display_name":"Innosuisse - Schweizerische Agentur f\u00fcr Innovationsf\u00f6rderung"},{"id":"https://openalex.org/G6502896639","display_name":"EMPAPOSTDOCS-II MSCA COFUND International, interdisciplinary, inter-sectoral PostDoc Fellowship Programme at Empa","funder_award_id":"754364","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"},{"id":"https://openalex.org/G7913947457","display_name":null,"funder_award_id":"754364","funder_id":"https://openalex.org/F4320334322","funder_display_name":"HORIZON EUROPE Framework Programme"},{"id":"https://openalex.org/G8965884540","display_name":null,"funder_award_id":"114277","funder_id":"https://openalex.org/F4320320300","funder_display_name":"European Commission"}],"funders":[{"id":"https://openalex.org/F4320320300","display_name":"European Commission","ror":"https://ror.org/00k4n6c32"},{"id":"https://openalex.org/F4320327931","display_name":"Innosuisse - Schweizerische Agentur f\u00fcr Innovationsf\u00f6rderung","ror":"https://ror.org/05a2bhn71"},{"id":"https://openalex.org/F4320334322","display_name":"HORIZON EUROPE Framework Programme","ror":null},{"id":"https://openalex.org/F4320335254","display_name":"Horizon 2020","ror":null},{"id":"https://openalex.org/F4320338337","display_name":"H2020 Marie Sk\u0142odowska-Curie Actions","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4367624909.pdf","grobid_xml":"https://content.openalex.org/works/W4367624909.grobid-xml"},"referenced_works_count":39,"referenced_works":["https://openalex.org/W1976705208","https://openalex.org/W1979620545","https://openalex.org/W1980949606","https://openalex.org/W1982030714","https://openalex.org/W2002970230","https://openalex.org/W2026160227","https://openalex.org/W2037938846","https://openalex.org/W2064179579","https://openalex.org/W2065138335","https://openalex.org/W2070822807","https://openalex.org/W2072945956","https://openalex.org/W2091500962","https://openalex.org/W2093312403","https://openalex.org/W2094893736","https://openalex.org/W2228487941","https://openalex.org/W2230109438","https://openalex.org/W2337994771","https://openalex.org/W2552441801","https://openalex.org/W2740094999","https://openalex.org/W2767065020","https://openalex.org/W2767278763","https://openalex.org/W2769324814","https://openalex.org/W2804881886","https://openalex.org/W2808826098","https://openalex.org/W2897801477","https://openalex.org/W2913399271","https://openalex.org/W2944806526","https://openalex.org/W3016674947","https://openalex.org/W3085849249","https://openalex.org/W3087452423","https://openalex.org/W3149881053","https://openalex.org/W3165282605","https://openalex.org/W3203765907","https://openalex.org/W4254591896","https://openalex.org/W4285039834","https://openalex.org/W4296126630","https://openalex.org/W4313252600","https://openalex.org/W4317806723","https://openalex.org/W6745739446"],"related_works":["https://openalex.org/W4402515068","https://openalex.org/W4391612353","https://openalex.org/W4280639529","https://openalex.org/W2569931015","https://openalex.org/W2084287589","https://openalex.org/W7169562969","https://openalex.org/W6948075080","https://openalex.org/W4417399695","https://openalex.org/W4296849530","https://openalex.org/W2767278763"],"abstract_inverted_index":{"In":[0],"this":[1,86],"work,":[2],"we":[3],"demonstrate":[4],"that":[5,196],"highly":[6,117],"oriented":[7],"c-axis":[8],"aluminium":[9],"scandium":[10,98],"nitride":[11],"(AlScN)":[12],"piezoelectric":[13,208],"thin":[14,82,199],"films":[15,83,119,138,156,178,200],"can":[16],"be":[17],"deposited":[18,89],"via":[19,202],"microwave":[20,127,159,166],"plasma-assisted":[21],"reactive":[22],"high":[23],"power":[24],"impulse":[25],"magnetron":[26],"sputtering":[27],"(MAR-HiPIMS),":[28],"without":[29,158],"the":[30,59,65,72,124,130,135,151,162,177,189,197],"necessity":[31],"of":[32,37,97,126,164],"substrate":[33,73],"heating.":[34],"A":[35],"combination":[36],"in":[38,62,85,150,173,176,181],"situ":[39],"plasma":[40,128,167],"diagnostics,":[41],"i.e.":[42],"time-of-flight":[43],"mass":[44],"spectrometry":[45],"(ToF-MS),":[46],"modified":[47],"quartz":[48],"crystal":[49],"microbalance":[50],"(m-QCM),":[51],"and":[52,68,100,112,179],"magnetic":[53],"field":[54],"measurements":[55],"allowed":[56],"to":[57,129,141,155,169],"optimise":[58],"deposition":[60],"conditions,":[61],"turn":[63],"maximising":[64],"nitrogen":[66,182],"supply":[67],"ionic":[69],"flux":[70],"at":[71],"region,":[74],"while":[75],"maintaining":[76],"stable":[77],"discharge":[78],"conditions.":[79],"The":[80],"AlScN":[81,137,198],"synthesised":[84],"study":[87],"were":[88,101],"as":[90],"chemically":[91],"gradient":[92],"coatings":[93],"with":[94,123],"varying":[95],"levels":[96],"doping,":[99],"characterised":[102],"using":[103],"scanning":[104],"electron":[105],"microscopy":[106],"(SEM),":[107],"energy-dispersive":[108],"X-ray":[109,113],"spectroscopy":[110],"(EDX),":[111],"diffraction":[114],"(XRD).":[115],"Obtaining":[116],"textured":[118],"was":[120],"made":[121],"possible":[122],"addition":[125],"optimised":[131],"HiPIMS":[132],"discharge,":[133],"where":[134],"wurtzite":[136],"(with":[139],"up":[140],"20":[142],"at.":[143],"%":[144],"Sc)":[145],"exhibited":[146],"a":[147,165,170,206],"stronger":[148],"texture":[149],"(0002)":[152],"orientation":[153],"compared":[154],"prepared":[157],"plasma.":[160],"Additionally,":[161],"use":[163],"led":[168],"significant":[171],"decrease":[172],"oxygen":[174],"content":[175],"increase":[180],"content,":[183],"ensuring":[184],"stoichiometric":[185],"compositions.":[186],"Based":[187],"on":[188],"results":[190],"mentioned":[191],"above,":[192],"it":[193],"is":[194],"expected":[195],"fabricated":[201],"MAR-HiPIMS":[203],"would":[204],"exhibit":[205],"strong":[207],"response.":[209]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":4},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":3}],"updated_date":"2026-11-09T13:22:03.289127","created_date":"2023-05-02T00:00:00"}