{"id":"https://openalex.org/W4324319948","doi":"https://doi.org/10.1088/1361-6595/acc47f","title":"Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code","display_name":"Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code","publication_year":2023,"publication_date":"2023-03-15","ids":{"openalex":"https://openalex.org/W4324319948","doi":"https://doi.org/10.1088/1361-6595/acc47f"},"language":"en","primary_location":{"id":"doi:10.1088/1361-6595/acc47f","doi":"https://doi.org/10.1088/1361-6595/acc47f","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1361-6595/acc47f","pdf_url":"https://iopscience.iop.org/article/10.1088/1361-6595/acc47f/pdf","source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":["arxiv","crossref","datacite"],"open_access":{"is_oa":true,"oa_status":"hybrid","oa_url":"https://iopscience.iop.org/article/10.1088/1361-6595/acc47f/pdf","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023087779","display_name":"Denis Eremin","orcid":"https://orcid.org/0000-0001-5160-6385","observed_orcids":["https://orcid.org/0000-0001-5160-6385"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"D Eremin","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstrasse 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":"https://orcid.org/0000-0001-5160-6385","affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstrasse 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049687673","display_name":"Birk Berger","orcid":"https://orcid.org/0000-0001-7053-2545","observed_orcids":["https://orcid.org/0000-0001-7053-2545"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"B Berger","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006839963","display_name":"Dennis Engel","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D Engel","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5017289078","display_name":"J Kall\u00e4hn","orcid":"https://orcid.org/0009-0005-3904-534X","observed_orcids":["https://orcid.org/0009-0005-3904-534X"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J Kall\u00e4hn","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":null,"display_name":"K K\u00f6hn","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"K K\u00f6hn","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5002811279","display_name":"Dennis Kr\u00fcger","orcid":"https://orcid.org/0000-0003-2532-0193","observed_orcids":["https://orcid.org/0000-0003-2532-0193"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"D Kr\u00fcger","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":"https://orcid.org/0000-0003-2532-0193","affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072684460","display_name":"Liang Xu","orcid":"https://orcid.org/0000-0002-8729-1984","observed_orcids":["https://orcid.org/0000-0002-8729-1984"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"L Xu","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":"https://orcid.org/0000-0002-8729-1984","affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041907206","display_name":"Moritz Oberberg","orcid":"https://orcid.org/0000-0002-8170-0628","observed_orcids":["https://orcid.org/0000-0002-8170-0628"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"M Oberberg","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5021723488","display_name":"Christian Woelfel","orcid":"https://orcid.org/0000-0003-0937-1927","observed_orcids":["https://orcid.org/0000-0003-0937-1927"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"C W\u00f6lfel","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5029988698","display_name":"Jan Lunze","orcid":"https://orcid.org/0000-0002-8108-1628","observed_orcids":["https://orcid.org/0000-0002-8108-1628"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J Lunze","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5112539886","display_name":"Peter Awakowicz","orcid":"https://orcid.org/0000-0002-8630-9900","observed_orcids":["https://orcid.org/0000-0002-8630-9900"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"P Awakowicz","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010518216","display_name":"Julian Schulze","orcid":"https://orcid.org/0000-0001-7929-5734","observed_orcids":["https://orcid.org/0000-0001-7929-5734"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"J Schulze","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstrasse 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":"https://orcid.org/0000-0001-7929-5734","affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstrasse 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061030325","display_name":"Ralf Peter Brinkmann","orcid":"https://orcid.org/0000-0002-2581-9894","observed_orcids":["https://orcid.org/0000-0002-2581-9894"]},"institutions":[{"id":"https://openalex.org/I904495901","display_name":"Ruhr University Bochum","ror":"https://ror.org/04tsk2644","country_code":"DE","type":"education","lineage":["https://openalex.org/I904495901"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"R P Brinkmann","raw_affiliation_strings":["Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Ruhr University Bochum Faculty of Electrical Engineering and Information Technology, Universit\u00e4tsstra\u00dfe 150, Bochum, Nordrhein-Westfalen, 44801, GERMANY","institution_ids":["https://openalex.org/I904495901"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5023087779"],"corresponding_institution_ids":["https://openalex.org/I904495901"],"apc_list":{"value":3075,"currency":"USD","value_usd":3075},"apc_paid":{"value":3075,"currency":"USD","value_usd":3075},"fwci":1.6391,"has_fulltext":true,"cited_by_count":23,"citation_normalized_percentile":{"value":0.82717983,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":93,"max":99},"biblio":{"volume":"32","issue":"4","first_page":"045008","last_page":"045008"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9839000105857849,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.9839000105857849,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10346","display_name":"Magnetic confinement fusion research","score":0.0071000000461936,"subfield":{"id":"https://openalex.org/subfields/3106","display_name":"Nuclear and High Energy Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12077","display_name":"Vacuum and Plasma Arcs","score":0.004900000058114529,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electron-transport","display_name":"electron transport","score":0.5479999780654907},{"id":"https://openalex.org/keywords/electron-heating","display_name":"electron heating","score":0.8529999852180481},{"id":"https://openalex.org/keywords/magnetron-discharge","display_name":"magnetron discharge","score":0.7239999771118164},{"id":"https://openalex.org/keywords/electron-energization","display_name":"electron energization","score":0.652999997138977},{"id":"https://openalex.org/keywords/ambipolar-field","display_name":"ambipolar field","score":0.8309999704360962},{"id":"https://openalex.org/keywords/electron-confinement","display_name":"electron confinement","score":0.39800000190734863},{"id":"https://openalex.org/keywords/magnetic-field-topology","display_name":"magnetic field topology","score":0.5989999771118164},{"id":"https://openalex.org/keywords/sputtering","display_name":"sputtering","score":0.902999997138977},{"id":"https://openalex.org/keywords/particle-in-cell-monte-carlo-simulation","display_name":"particle-in-cell/Monte Carlo simulation","score":0.75}],"concepts":[{"id":"https://openalex.org/C147120987","wikidata":"https://www.wikidata.org/wiki/Q2225","display_name":"Electron","level":2,"score":0.758072555065155},{"id":"https://openalex.org/C8426674","wikidata":"https://www.wikidata.org/wiki/Q2054543","display_name":"Particle-in-cell","level":3,"score":0.5799852609634399},{"id":"https://openalex.org/C60799052","wikidata":"https://www.wikidata.org/wiki/Q46221","display_name":"Electric field","level":2,"score":0.5685774683952332},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.5649794936180115},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.5387147068977356},{"id":"https://openalex.org/C184779094","wikidata":"https://www.wikidata.org/wiki/Q26383","display_name":"Atomic physics","level":1,"score":0.5257105231285095},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.4742131233215332},{"id":"https://openalex.org/C2778053152","wikidata":"https://www.wikidata.org/wiki/Q1884366","display_name":"Magnetic mirror","level":3,"score":0.44840386509895325},{"id":"https://openalex.org/C30475298","wikidata":"https://www.wikidata.org/wiki/Q909554","display_name":"Computational physics","level":1,"score":0.4238434135913849},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.1088/1361-6595/acc47f","doi":"https://doi.org/10.1088/1361-6595/acc47f","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1361-6595/acc47f","pdf_url":"https://iopscience.iop.org/article/10.1088/1361-6595/acc47f/pdf","source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"},{"id":"pmh:oai:arXiv.org:2211.03459","doi":null,"is_oa":true,"landing_page_url":"http://arxiv.org/abs/2211.03459","pdf_url":"https://arxiv.org/pdf/2211.03459","source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"text"},{"id":"pmh:oai:hss-opus.ub.ruhr-uni-bochum.de:12177","doi":null,"is_oa":true,"landing_page_url":"https://hss-opus.ub.ruhr-uni-bochum.de/opus4/frontdoor/index/index/docId/12177","pdf_url":"https://hss-opus.ub.ruhr-uni-bochum.de/opus4/files/12177/EreminDenisTrans2.pdf","source":{"id":"https://openalex.org/S4306400167","display_name":"Dokumentenrepositorium der RUB (Ruhr University Bochum)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I904495901","host_organization_name":"Ruhr University Bochum","host_organization_lineage":["https://openalex.org/I904495901"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article"},{"id":"doi:10.48550/arxiv.2211.03459","doi":"https://doi.org/10.48550/arxiv.2211.03459","is_oa":true,"landing_page_url":"https://doi.org/10.48550/arxiv.2211.03459","pdf_url":null,"source":{"id":"https://openalex.org/S4306400194","display_name":"arXiv (Cornell University)","issn_l":"2331-8422","issn":["2331-8422"],"is_oa":true,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I205783295","host_organization_name":"Cornell University","host_organization_lineage":["https://openalex.org/I205783295"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"article-journal"}],"best_oa_location":{"id":"doi:10.1088/1361-6595/acc47f","doi":"https://doi.org/10.1088/1361-6595/acc47f","is_oa":true,"landing_page_url":"https://doi.org/10.1088/1361-6595/acc47f","pdf_url":"https://iopscience.iop.org/article/10.1088/1361-6595/acc47f/pdf","source":{"id":"https://openalex.org/S57082650","display_name":"Plasma Sources Science and Technology","issn_l":"0963-0252","issn":["0963-0252","1361-6595"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["anvur-scientific","cwts-core","dongbi-a","jufo-1","norway-1","poland-140","russia-white-list-1","vabb-shw"],"host_organization":"https://openalex.org/P4310320083","host_organization_name":"IOP Publishing","host_organization_lineage":["https://openalex.org/P4310320083","https://openalex.org/P4310311669"],"host_organization_lineage_names":["IOP Publishing","Institute of Physics"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Plasma Sources Science and Technology","raw_type":"journal-article"},"sustainable_development_goals":[],"study_designs":[],"awards":[{"id":"https://openalex.org/G1192820838","display_name":null,"funder_award_id":"SFB-TR 87","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"},{"id":"https://openalex.org/G2341628891","display_name":"Plasmabasierte Prozessf\u00fchrung von reaktiven Sputterprozessen","funder_award_id":"417888799","funder_id":"https://openalex.org/F4320320879","funder_display_name":"Deutsche Forschungsgemeinschaft"}],"funders":[{"id":"https://openalex.org/F4320320879","display_name":"Deutsche Forschungsgemeinschaft","ror":"https://ror.org/018mejw64"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4324319948.pdf","grobid_xml":"https://content.openalex.org/works/W4324319948.grobid-xml"},"referenced_works_count":83,"referenced_works":["https://openalex.org/W1623768750","https://openalex.org/W1934738609","https://openalex.org/W1969707723","https://openalex.org/W1972961126","https://openalex.org/W1977610920","https://openalex.org/W1977622622","https://openalex.org/W1978850382","https://openalex.org/W1984602551","https://openalex.org/W1985208670","https://openalex.org/W1986473708","https://openalex.org/W1990299123","https://openalex.org/W1991936615","https://openalex.org/W1992542341","https://openalex.org/W2001493827","https://openalex.org/W2004691564","https://openalex.org/W2009661921","https://openalex.org/W2011523870","https://openalex.org/W2014182649","https://openalex.org/W2017537439","https://openalex.org/W2017981825","https://openalex.org/W2018124014","https://openalex.org/W2022016552","https://openalex.org/W2022650975","https://openalex.org/W2025377466","https://openalex.org/W2027416864","https://openalex.org/W2028801156","https://openalex.org/W2030356106","https://openalex.org/W2033636850","https://openalex.org/W2035126971","https://openalex.org/W2038162632","https://openalex.org/W2040285553","https://openalex.org/W2043027256","https://openalex.org/W2043631509","https://openalex.org/W2050668733","https://openalex.org/W2061139552","https://openalex.org/W2062498750","https://openalex.org/W2065573120","https://openalex.org/W2065642155","https://openalex.org/W2069193972","https://openalex.org/W2073253007","https://openalex.org/W2077673183","https://openalex.org/W2078309854","https://openalex.org/W2079467040","https://openalex.org/W2082711963","https://openalex.org/W2083418353","https://openalex.org/W2084060796","https://openalex.org/W2087796921","https://openalex.org/W2088086476","https://openalex.org/W2088506064","https://openalex.org/W2095440262","https://openalex.org/W2101294528","https://openalex.org/W2106582005","https://openalex.org/W2120554093","https://openalex.org/W2126762956","https://openalex.org/W2142063750","https://openalex.org/W2149168935","https://openalex.org/W2533823862","https://openalex.org/W2755551903","https://openalex.org/W2800185897","https://openalex.org/W2890496431","https://openalex.org/W2947898051","https://openalex.org/W2965343094","https://openalex.org/W2971615762","https://openalex.org/W2976591829","https://openalex.org/W2989536725","https://openalex.org/W3034648647","https://openalex.org/W3048994162","https://openalex.org/W3081267252","https://openalex.org/W3081779717","https://openalex.org/W3085849249","https://openalex.org/W3106438149","https://openalex.org/W3133886249","https://openalex.org/W3134650872","https://openalex.org/W3163764519","https://openalex.org/W3170648056","https://openalex.org/W3200629349","https://openalex.org/W3211037028","https://openalex.org/W4205404343","https://openalex.org/W4210451654","https://openalex.org/W4214593309","https://openalex.org/W4224114838","https://openalex.org/W4324329454","https://openalex.org/W4385431356"],"related_works":["https://openalex.org/W6990761006","https://openalex.org/W7028296928","https://openalex.org/W4324319757","https://openalex.org/W4214664976","https://openalex.org/W3134650872","https://openalex.org/W3205908330","https://openalex.org/W1991936615","https://openalex.org/W2062544574","https://openalex.org/W2024147670","https://openalex.org/W4411356154"],"abstract_inverted_index":{"Abstract":[0],"The":[1,137,164,177,237,268],"present":[2],"work":[3],"investigates":[4],"electron":[5,52,73,146,218,238,275,293],"transport":[6,53],"and":[7,33,55,101,153,166,208],"heating":[8,143,151,155,239,252],"mechanisms":[9,171],"using":[10],"an":[11,217,273],"(r,":[12,81],"z)":[13,82],"particle-in-cell":[14],"simulation":[15],"of":[16,50,202],"a":[17,24,29,34,40,84,182,194,214,260,305],"typical":[18],"rf-driven":[19],"axisymmetric":[20],"magnetron":[21],"discharge":[22,38,303],"with":[23],"conducting":[25],"target.":[26],"Due":[27],"to":[28,45,57,187,198,204,213,219,284,310],"strong":[30,261],"geometric":[31],"asymmetry":[32],"blocking":[35],"capacitor,":[36],"the":[37,51,58,67,72,80,92,99,111,119,154,157,161,174,189,205,209,224,228,233,241,248,254,257,281,287,291,302,311],"features":[39],"large":[41],"negative":[42],"self-bias":[43],"conducive":[44],"sputtering":[46],"applications.":[47],"Employing":[48],"decomposition":[49],"parallel":[54],"perpendicular":[56],"magnetic":[59,69,94,112,196,235],"field":[60,70,113,121,159,185,197,283],"lines,":[61],"it":[62],"is":[63,179,211,244,314],"shown":[64],"that":[65],"for":[66,216,304],"considered":[68],"topology":[71],"current":[74,89],"flows":[75],"through":[76,91],"different":[77],"channels":[78,124,230],"in":[79,193,227,240,253,272,286],"plane:":[83],"\u2018transverse\u2019":[85],"one,":[86],"which":[87,128],"involves":[88,141],"flow":[90],"electrons\u2019":[93,106],"confinement":[95],"region":[96],"(EMCR)":[97],"above":[98,256],"racetrack,":[100,258],"two":[102,169],"\u2018longitudinal\u2019":[103],"ones,":[104],"where":[105],"guiding":[107],"centers":[108],"move":[109],"along":[110,122],"lines.":[114],"Electrons":[115],"gain":[116],"energy":[117,278],"from":[118,132,173,223,280],"electric":[120,184,282],"these":[123],"following":[125],"various":[126],"mechanisms,":[127],"are":[129],"rather":[130],"distinct":[131],"those":[133],"sustaining":[134],"dc-powered":[135],"magnetrons.":[136],"longitudinal":[138,229],"power":[139],"absorption":[140],"mirror-effect":[142],"(MEH),":[144],"nonlinear":[145],"resonance":[147],"heating,":[148],"magnetized":[149],"bounce":[150],"(MBH),":[152],"by":[156,181,232,247,296],"ambipolar":[158],"at":[160],"sheath-presheath":[162],"interface.":[163],"MEH":[165,178],"MBH":[167,210],"represent":[168],"new":[170],"missing":[172],"previous":[175],"literature.":[176],"caused":[180,245],"reversed":[183],"needed":[186],"overcome":[188],"mirror":[190],"force":[191],"generated":[192],"nonuniform":[195],"ensure":[199],"sufficient":[200],"flux":[201],"electrons":[203,285],"powered":[206],"electrode,":[207],"related":[212],"possibility":[215],"undergo":[220],"multiple":[221],"reflections":[222],"expanding":[225],"sheath":[226],"connected":[231],"arc-like":[234],"field.":[236],"transverse":[242],"channel":[243],"mostly":[246],"essentially":[249],"collisionless":[250],"Hall":[251],"EMCR":[255],"generating":[259],"E":[262],"\u00d7":[263],"B":[264],"azimuthal":[265],"drift":[266],"velocity.":[267],"latter":[269],"mechanism":[270,298],"results":[271],"efficient":[274],"energization,":[276],"i.e.":[277],"transfer":[279],"inelastic":[288],"range.":[289],"Since":[290],"main":[292],"population":[294],"energized":[295],"this":[297],"remains":[299],"confined":[300],"within":[301],"long":[306],"time,":[307],"its":[308],"contribution":[309],"ionization":[312],"processes":[313],"dominant.":[315]},"counts_by_year":[{"year":2026,"cited_by_count":7},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":7}],"updated_date":"2026-11-10T11:39:43.021295","created_date":"2023-03-16T00:00:00"}