{"id":"https://openalex.org/W4309554169","doi":"https://doi.org/10.1007/978-3-031-20353-4_8","title":"Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer","display_name":"Different Beam Configurations for Compliant Mechanism-Based MEMS Accelerometer","publication_year":2022,"publication_date":"2022-11-20","ids":{"openalex":"https://openalex.org/W4309554169","doi":"https://doi.org/10.1007/978-3-031-20353-4_8"},"language":"en","primary_location":{"id":"doi:10.1007/978-3-031-20353-4_8","doi":"https://doi.org/10.1007/978-3-031-20353-4_8","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-031-20353-4_8","pdf_url":null,"source":{"id":"https://openalex.org/S4210194614","display_name":"Mechanisms and machine science","issn_l":"2211-0984","issn":["2211-0984","2211-0992"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310320108","host_organization_name":"Springer Nature (Netherlands)","host_organization_lineage":["https://openalex.org/P4310320108","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature (Netherlands)","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Mechanisms and Machine Science","raw_type":"book-chapter"},"volume":{"id":"https://openalex.org/W4309554170","display_name":"Microactuators, Microsensors and Micromechanisms"},"type":"conference-paper","is_traditional":true,"indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5059232536","display_name":"Nikul Jani","orcid":"https://orcid.org/0000-0003-4191-2746","observed_orcids":["https://orcid.org/0000-0003-4191-2746"]},"institutions":[{"id":"https://openalex.org/I65181880","display_name":"Indian Institute of Technology Hyderabad","ror":"https://ror.org/01j4v3x97","country_code":"IN","type":"education","lineage":["https://openalex.org/I65181880"]}],"countries":["IN"],"is_corresponding":true,"raw_author_name":"Nikul Jani","raw_affiliation_strings":["Department of Mechanical and Aerospace Engineering, Indian Institute of Technology, Hyderabad, Telangana, 502284, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Aerospace Engineering, Indian Institute of Technology, Hyderabad, Telangana, 502284, India","institution_ids":["https://openalex.org/I65181880"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5058201908","display_name":"Mithlesh Kumar","orcid":"https://orcid.org/0000-0002-1625-6911","observed_orcids":["https://orcid.org/0000-0002-1625-6911"]},"institutions":[{"id":"https://openalex.org/I65181880","display_name":"Indian Institute of Technology Hyderabad","ror":"https://ror.org/01j4v3x97","country_code":"IN","type":"education","lineage":["https://openalex.org/I65181880"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Mithlesh Kumar","raw_affiliation_strings":["Department of Mechanical and Aerospace Engineering, Indian Institute of Technology, Hyderabad, Telangana, 502284, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Aerospace Engineering, Indian Institute of Technology, Hyderabad, Telangana, 502284, India","institution_ids":["https://openalex.org/I65181880"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5086787525","display_name":"P. Krishna Menon","orcid":"https://orcid.org/0000-0003-4573-5396","observed_orcids":["https://orcid.org/0000-0003-4573-5396"]},"institutions":[{"id":"https://openalex.org/I4210138561","display_name":"Research Centre Imarat","ror":"https://ror.org/03mw5zj47","country_code":"IN","type":"facility","lineage":["https://openalex.org/I1340206300","https://openalex.org/I2799351866","https://openalex.org/I4210138561","https://openalex.org/I4210150591"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"P. Krishna Menon","raw_affiliation_strings":["Research Centre Imarat, Hyderabad, 500069, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Centre Imarat, Hyderabad, 500069, India","institution_ids":["https://openalex.org/I4210138561"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5072777429","display_name":"Ashok Kumar Pandey","orcid":"https://orcid.org/0000-0002-5878-6451","observed_orcids":["https://orcid.org/0000-0002-5878-6451"]},"institutions":[{"id":"https://openalex.org/I65181880","display_name":"Indian Institute of Technology Hyderabad","ror":"https://ror.org/01j4v3x97","country_code":"IN","type":"education","lineage":["https://openalex.org/I65181880"]}],"countries":["IN"],"is_corresponding":false,"raw_author_name":"Ashok Kumar Pandey","raw_affiliation_strings":["Department of Mechanical and Aerospace Engineering, Indian Institute of Technology Hyderabad, Sangareddy, Telangana, India"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Aerospace Engineering, Indian Institute of Technology Hyderabad, Sangareddy, Telangana, India","institution_ids":["https://openalex.org/I65181880"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5059232536"],"corresponding_institution_ids":["https://openalex.org/I65181880"],"apc_list":null,"apc_paid":null,"fwci":1.5542,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.78013391,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":96,"max":97},"biblio":{"volume":null,"issue":null,"first_page":"119","last_page":"135"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10571","display_name":"Robotic Mechanisms and Dynamics","score":0.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/mems-accelerometer","display_name":"MEMS accelerometer","score":0.9269999861717224},{"id":"https://openalex.org/keywords/compliant-mechanisms","display_name":"compliant mechanisms","score":0.8709999918937683},{"id":"https://openalex.org/keywords/displacement-amplifier","display_name":"displacement amplifier","score":0.9210000038146973},{"id":"https://openalex.org/keywords/beam-configuration","display_name":"beam arrangement","score":0.9210000038146973},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"capacitive sensing","score":0.9440000057220459},{"id":"https://openalex.org/keywords/sensitivity","display_name":"sensitivity","score":0.44200000166893005},{"id":"https://openalex.org/keywords/natural-frequencies","display_name":"natural frequencies","score":0.906000018119812},{"id":"https://openalex.org/keywords/proof-mass","display_name":"proof mass","score":0.7170000076293945},{"id":"https://openalex.org/keywords/output-displacement","display_name":"output displacement","score":0.44999998807907104}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.9189043641090393},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.852777898311615},{"id":"https://openalex.org/C194257627","wikidata":"https://www.wikidata.org/wiki/Q211554","display_name":"Amplifier","level":3,"score":0.7147018909454346},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6978808641433716},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.5996039509773254},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5767980813980103},{"id":"https://openalex.org/C89611455","wikidata":"https://www.wikidata.org/wiki/Q6804646","display_name":"Mechanism (biology)","level":2,"score":0.5727006196975708},{"id":"https://openalex.org/C79772673","wikidata":"https://www.wikidata.org/wiki/Q5156643","display_name":"Compliant mechanism","level":3,"score":0.5721011757850647},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.5245559215545654},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.48851191997528076},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.41394326090812683},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.41208183765411377},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4086853265762329},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3796288073062897},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3235214054584503},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.24962157011032104},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.23071524500846863},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2166849970817566},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21241417527198792},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.11485081911087036},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.10601377487182617},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.08467233180999756},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.07792383432388306},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1007/978-3-031-20353-4_8","doi":"https://doi.org/10.1007/978-3-031-20353-4_8","is_oa":false,"landing_page_url":"https://doi.org/10.1007/978-3-031-20353-4_8","pdf_url":null,"source":{"id":"https://openalex.org/S4210194614","display_name":"Mechanisms and machine science","issn_l":"2211-0984","issn":["2211-0984","2211-0992"],"is_oa":false,"is_in_doaj":false,"is_core":true,"listed_in":["cwts-core","jufo-1","norway-1"],"host_organization":"https://openalex.org/P4310320108","host_organization_name":"Springer Nature (Netherlands)","host_organization_lineage":["https://openalex.org/P4310320108","https://openalex.org/P4310319965"],"host_organization_lineage_names":["Springer Nature (Netherlands)","Springer Nature"],"type":"book series"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Mechanisms and Machine Science","raw_type":"book-chapter"}],"best_oa_location":null,"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W2041924745","https://openalex.org/W2070178053","https://openalex.org/W2101864732","https://openalex.org/W2151460618","https://openalex.org/W2335728571","https://openalex.org/W2808427308","https://openalex.org/W2979604095","https://openalex.org/W2997030285","https://openalex.org/W3004244305","https://openalex.org/W3094407298","https://openalex.org/W3207471536","https://openalex.org/W3215803263","https://openalex.org/W4221107535","https://openalex.org/W4246904535"],"related_works":["https://openalex.org/W4402517127","https://openalex.org/W4408216352","https://openalex.org/W4309554185","https://openalex.org/W7039899217","https://openalex.org/W4411298489","https://openalex.org/W3004244305","https://openalex.org/W1970272198","https://openalex.org/W4245472411","https://openalex.org/W3091195958","https://openalex.org/W2618890350"],"abstract_inverted_index":null,"counts_by_year":[{"year":2024,"cited_by_count":4}],"updated_date":"2026-10-10T09:11:00.788812","created_date":"2022-11-28T00:00:00"}