{"id":"https://openalex.org/W4300095605","doi":null,"title":"MEMS Gate Structures for Electric Propulsion Applications","display_name":"MEMS Gate Structures for Electric Propulsion Applications","publication_year":2006,"publication_date":"2006-01-01","ids":{"openalex":"https://openalex.org/W4300095605"},"language":"en","primary_location":{"id":"pmh:oai:deepblue.lib.umich.edu:2027.42/76598","doi":null,"is_oa":true,"landing_page_url":"https://hdl.handle.net/2027.42/76598","pdf_url":"https://hdl.handle.net/2027.42/76598","source":{"id":"https://openalex.org/S4306400393","display_name":"Deep Blue (University of Michigan)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I27837315","host_organization_name":"University of Michigan","host_organization_lineage":["https://openalex.org/I27837315"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"},"volume":null,"type":"article","is_traditional":true,"indexed_in":[],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://hdl.handle.net/2027.42/76598","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5058450052","display_name":"Thomas Mu-Chang Liu","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Liu, Thomas Mu-Chang","raw_affiliation_strings":["Graduate Student , Aerospace Engineering ,","University of Michigan , Ann Arbor , MI , 48109"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate Student , Aerospace Engineering ,","institution_ids":[]},{"raw_affiliation_string":"University of Michigan , Ann Arbor , MI , 48109","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5146408344","display_name":"David Morris","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I4210133990","display_name":"ElectroDynamic Applications (United States)","ror":"https://ror.org/03v5g8n66","country_code":"US","type":"company","lineage":["https://openalex.org/I4210133990"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Morris, David","raw_affiliation_strings":["ElectroDynamic Applications, Inc. , Ann Arbor , MI , 48105","Professor , Applied Physics ,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"ElectroDynamic Applications, Inc. , Ann Arbor , MI , 48105","institution_ids":["https://openalex.org/I4210133990"]},{"raw_affiliation_string":"Professor , Applied Physics ,","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009561031","display_name":"Codrin Cionca","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I2799795989","display_name":"American Society of Mechanical Engineers","ror":"https://ror.org/04e5j7m81","country_code":"US","type":"nonprofit","lineage":["https://openalex.org/I2799795989"]},{"id":"https://openalex.org/I46020346","display_name":"American Institute of Aeronautics and Astronautics","ror":"https://ror.org/00a1rzv11","country_code":"US","type":"other","lineage":["https://openalex.org/I46020346"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Cionca, Codrin","raw_affiliation_strings":["42nd AIAA/ASME","Assistant Research Scientist , Applied Physics ,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"42nd AIAA/ASME","institution_ids":["https://openalex.org/I2799795989","https://openalex.org/I46020346"]},{"raw_affiliation_string":"Assistant Research Scientist , Applied Physics ,","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5011071685","display_name":"Alec D. Gallimore","orcid":"https://orcid.org/0000-0002-8358-1626","observed_orcids":["https://orcid.org/0000-0002-8358-1626"]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gallimore, Alec D.","raw_affiliation_strings":["University of Michigan , Ann Arbor , MI , 48109"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan , Ann Arbor , MI , 48109","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081738154","display_name":"Brian E. Gilchrist","orcid":null,"observed_orcids":[]},"institutions":[{"id":"https://openalex.org/I27837315","display_name":"University of Michigan","ror":"https://ror.org/00jmfr291","country_code":"US","type":"education","lineage":["https://openalex.org/I27837315"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Gilchrist, Brian E.","raw_affiliation_strings":["University of Michigan , Ann Arbor , MI , 48109"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Michigan , Ann Arbor , MI , 48109","institution_ids":["https://openalex.org/I27837315"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038733600","display_name":"Roy Clarke","orcid":"https://orcid.org/0000-0002-2426-062X","observed_orcids":["https://orcid.org/0000-0002-2426-062X"]},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Clarke, Roy","raw_affiliation_strings":["Professor , Applied Physics ,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Professor , Applied Physics ,","institution_ids":[]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":true,"cited_by_count":0,"citation_normalized_percentile":{"value":0.53619762,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.42260000109672546,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10781","display_name":"Low-Pressure Plasma Processing and Diagnostics","score":0.42260000109672546,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11175","display_name":"Gyrotron and Vacuum Electronics Research","score":0.3434999883174896,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13418","display_name":"Photocathodes and Microchannel Plates","score":0.0544000007212162,"subfield":{"id":"https://openalex.org/subfields/3105","display_name":"Instrumentation"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/electric-propulsion","display_name":"electric propulsion","score":0.8500000238418579},{"id":"https://openalex.org/keywords/field-emission-cathodes","display_name":"field emission cathodes","score":0.9150000214576721},{"id":"https://openalex.org/keywords/cubic-boron-nitride-films","display_name":"cubic boron nitride films","score":0.8460000157356262},{"id":"https://openalex.org/keywords/carbon-nanotubes","display_name":"carbon nanotubes","score":0.9520000219345093},{"id":"https://openalex.org/keywords/electric-field-uniformity","display_name":"electric field uniformity","score":0.7599999904632568},{"id":"https://openalex.org/keywords/emission-threshold","display_name":"emission threshold","score":0.5640000104904175},{"id":"https://openalex.org/keywords/sheath-voltage","display_name":"sheath voltage","score":0.6800000071525574},{"id":"https://openalex.org/keywords/aspect-ratio","display_name":"aspect ratio","score":0.5540000200271606}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.75767982006073},{"id":"https://openalex.org/C148008966","wikidata":"https://www.wikidata.org/wiki/Q648588","display_name":"Electrically powered spacecraft propulsion","level":3,"score":0.6573259830474854},{"id":"https://openalex.org/C1034443","wikidata":"https://www.wikidata.org/wiki/Q2583685","display_name":"Propulsion","level":2,"score":0.5647619962692261},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.43921148777008057},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39586198329925537},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3671705722808838},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.26784127950668335},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2109730839729309}],"mesh":[],"locations_count":2,"locations":[{"id":"pmh:oai:deepblue.lib.umich.edu:2027.42/76598","doi":null,"is_oa":true,"landing_page_url":"https://hdl.handle.net/2027.42/76598","pdf_url":"https://hdl.handle.net/2027.42/76598","source":{"id":"https://openalex.org/S4306400393","display_name":"Deep Blue (University of Michigan)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I27837315","host_organization_name":"University of Michigan","host_organization_lineage":["https://openalex.org/I27837315"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.822.9378","doi":null,"is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.822.9378","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://deepblue.lib.umich.edu/bitstream/handle/2027.42/76598/AIAA-2006-5011-327.pdf%3Bjsessionid%3D734706C0B02C48E184996BBD6609C500?sequence%3D1","raw_type":"text"}],"best_oa_location":{"id":"pmh:oai:deepblue.lib.umich.edu:2027.42/76598","doi":null,"is_oa":true,"landing_page_url":"https://hdl.handle.net/2027.42/76598","pdf_url":"https://hdl.handle.net/2027.42/76598","source":{"id":"https://openalex.org/S4306400393","display_name":"Deep Blue (University of Michigan)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"listed_in":[],"host_organization":"https://openalex.org/I27837315","host_organization_name":"University of Michigan","host_organization_lineage":["https://openalex.org/I27837315"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Article"},"sustainable_development_goals":[],"study_designs":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306101","display_name":"National Aeronautics and Space Administration","ror":"https://ror.org/027ka1x80"},{"id":"https://openalex.org/F4320332375","display_name":"Jet Propulsion Laboratory","ror":"https://ror.org/027k65916"},{"id":"https://openalex.org/F4320333566","display_name":"National Defense Science and Engineering Graduate","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W4300095605.pdf","grobid_xml":"https://content.openalex.org/works/W4300095605.grobid-xml"},"referenced_works_count":0,"referenced_works":[],"related_works":["https://openalex.org/W1565911017","https://openalex.org/W4298222243","https://openalex.org/W2429045957","https://openalex.org/W1501689663","https://openalex.org/W2001699973","https://openalex.org/W2183546468","https://openalex.org/W2085176724","https://openalex.org/W7095233039","https://openalex.org/W2157624113","https://openalex.org/W2101984120"],"abstract_inverted_index":{"A":[0,74],"MEMS":[1],"gate":[2,116,146],"prototype":[3],"is":[4,70],"under":[5],"development":[6],"to":[7,45],"extract":[8],"and":[9,19,60],"accelerate":[10],"charged":[11],"particles":[12],"for":[13],"use":[14],"with":[15,63,67],"field":[16,22,48,133,143],"emission":[17,42,51,140,150],"cathodes":[18],"the":[20,26,33,41],"nanoparticle":[21],"extraction":[23],"thruster":[24],"at":[25],"University":[27],"of":[28,35,114],"Michigan.":[29],"Preliminary":[30],"simulations":[31],"suggest":[32],"desirability":[34],"a":[36],"unity":[37],"aspect":[38,76],"ratio":[39,77],"in":[40,71],"channel":[43],"design":[44],"achieve":[46],"electric":[47,132,142],"uniformity.":[49],"Low":[50],"threshold":[52],"cubic":[53],"boron":[54],"nitride":[55],"films":[56,65],"have":[57],"been":[58],"grown,":[59],"gated":[61],"testing":[62],"these":[64],"along":[66],"carbon":[68],"nanotubes":[69],"progress.":[72],"Nomenclature":[73],"=":[75,79,84,88,92,96,101,106,110,119,123,127,131,135,139,145,149,153],"J":[78],"current":[80,151],"density":[81],"AFN,":[82],"BFN":[83],"Fowler-Nordheim":[85],"coefficients":[86],"R":[87],"emitter":[89,136],"radius":[90,99],"D":[91],"gap":[93,103],"distance":[94,104,111],"Rc":[95],"grid":[97,107,120],"opening":[98],"Dgate-tip":[100],"gate-tip":[102],"tc":[105],"thickness":[108,125],"Dgate-gate2":[109],"between":[112],"gates":[113],"dual":[115],"system":[117],"V":[118],"voltage":[121,129,137,147,155],"Dsheath":[122],"sheath":[124,154],"Va":[126],"anode":[128],"E":[130],"Vemitter":[134],"Es":[138],"surface":[141],"Vgate":[144],"I":[148],"Vsheath":[152]},"counts_by_year":[],"updated_date":"2026-09-26T08:19:03.415552","created_date":"2022-10-03T00:00:00"}